Biblioteca Digital

968 resultados para electron-beam lithography

SCANNING-ELECTRON-BEAM ANNEALING OF ION-IMPLANTED P-N-JUNCTION DIODES

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RAPID ELECTRON-BEAM INDUCED TANTALUM SILICON REACTIONS

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RAPID ELECTRON-BEAM ISOTHERMAL PROCESSING OF ARSENIC-IMPLANTED NMOS DEVICES

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IMPROVEMENT IN THE THICKNESS UNIFORMITY OF SILICON-ON-INSULATOR LAYERS FORMED BY DUAL ELECTRON-BEAM RECRYSTALLIZATION

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TIME-RESOLVED REFLECTIVITY TECHNIQUES FOR DYNAMIC STUDIES OF ELECTRON-BEAM RECRYSTALLIZATION OF SILICON-ON-INSULATOR FILMS

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PERFORMANCE OF CMOS DEVICES IN SILICON-ON-SAPPHIRE FILMS AFTER SOLID-PHASE EPITAXIAL-GROWTH WITH RAPID ELECTRON-BEAM HEATING

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ELECTRON-BEAM ANNEALING OF ION-IMPLANTED SILICON

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RAPID ELECTRON-BEAM ANNEALING OF TANTALUM FILMS ON SILICON

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Mechanisms of elastodynamic erosion of electron-beam thermal barrier coatings

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ELECTRON-BEAM PROCESSING FOR MOS DEVICES WITH SHALLOW JUNCTIONS

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HIGHLY CONTROLLED DIFFUSION OF ION-IMPLANTED ARSENIC BY MULTIPLE SCAN ELECTRON-BEAM HEATING

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TECHNIQUES FOR PRODUCING DEFECT-FREE SOI BY DUAL ELECTRON-BEAM HEATING OF DEPOSITED POLYSILICON

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ELECTRON-BEAM ANNEALING OF B-IMPLANTED, P-IMPLANTED, AS-IMPLANTED, SB-IMPLANTED, AND GA-IMPLANTED SILICON BY MULTIPLE-SCAN METHOD

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RECRYSTALLIZATION OF CVD POLY-SI ON INSULATOR BY DUAL ELECTRON-BEAM PROCESSING

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CHARACTERIZATION OF MULTIPLE-SCAN ELECTRON-BEAM ANNEALING METHOD

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