Selective epitaxial growth in silicon on insulator: Planarity and mass flow

Seeded zone-melt recrystallization using a dual electron beam system has been performed on silicon-on-insulator material, which was prepared with single-crystal silicon filling of the seed windows by selective epitaxial growth. The crystal quality has been assessed by a variety of microscopic techniques, and it is shown that single-crystal films 0.5-1.0 μm thick over 1.0 μm of isolating oxide may be prepared by this method. These films have considerably less lateral variation in thickness than standard material, in which the windows are not so filled. The filling method is suitable for both single- and multiple-layer silicon-on-insulator, and gives the advantages of excellent layer uniformity after recrystallization and improved planarity of the whole chip structure. Experiments using various amounts of seed window filling have shown that the lateral variations of silicon film thickness seen in unplanarized material are due to stress relief in the cap oxide when the silicon film is molten, rather than the effect previously postulated in which they were assumed to be due to the contraction of silicon on melting.

Changes in mass balance of South Cascade Glacier, North Cascades, 1959 to 1994

EXTRACT (SEE PDF FOR FULL ABSTRACT): Annual, winter, and summer mass balance measurements at South Cascade Glacier in the North Cascade Mountains of Washington State constitute a continuous time series 36 years long, from 1959 to 1994. ... The long-term trends at South Cascade Glacier are decreased winter accumulation and increased summer ablation, neither of which is conducive to glacier growth, so the trend in the Pacific Northwest is clearly away from an ice-age type of climate at the current time. The data also demonstrate that a glaciologically significant long-term change in snow precipitation can occur rapidly, in as short an interval as 1 year, much more rapidly than changes in temperature.

Interannual to decadal time-scale variations in glacier mass balance [abstract]

EXTRACT (SEE PDF FOR FULL ABSTRACT): The mass balance of glaciers depends on the seasonal variation in precipitation, temperature, and insolation. For glaciers in western North America, these meteorological variables are influenced by the large-scale atmospheric circulation over the northern Pacific Ocean. The purpose of this study is to gain a better understanding of the relationship between mass balance at glaciers in western North America and the large-scale atmospheric effects at interannual and decadal time scales.