Mikromechanisch durchstimmbare, dielektrische Fabry-Pérot-Filter im nahen Infrarot-Bereich: Konzept, Herstellung und Charakterisierung

Das Ziel der vorliegenden Arbeit war die Herstellung und Charakterisierung mikromechanisch durchstimmbarer, dielektrischer Fabry-Pérot-Filter im nahen Infrarot-Bereich bei einer Zentralwellenlänge von λc = 950 nm. Diese Bauelemente wurden auf Basis kostengünstiger Technologien realisiert, dank deren Entwicklung extreme Miniaturisierung und gleichzeitig hohe spektrale Anforderungen möglich sind. Der Vorteil solcher Filter liegt darin, dass sie direkt in einen Photodetektor integriert werden können und mit ganz wenigen Komponenten zu einem kompakten Spektrometermodul zusammengesetzt werden können. Die Baugröße ist nur durch die Größe des Photodetektors limitiert und die gesamte Intensität des einfallenden Lichts kann vorteilhaft auf eine einzelne Filtermembran des Fabry-Pérot-Filters fokussiert werden. Für den Filteraufbau werden zwei hochreflektierende, dielektrische DBR-Spiegel, ein organisches Opferschichtmaterial, welches zur Erzeugung einer Luftkavität im Filter dient, und zwei unterschiedliche Elektroden aus ITO und Aluminium verwendet. Die mikromechanische Auslenkung der freigelegten Filtermembran geschieht mittels elektrostatischer Aktuation, wobei auf diese Weise die Kavitätshöhe des Fabry-Pérot-Filters geändert wird und somit dieser im erforderlichen Spektralbereich optisch durchgestimmt wird. Das in dieser Arbeit gewählte Filterkonzept stellt eine Weiterentwicklung eines bereits bestehenden Filterkonzepts für den sichtbaren Spektralbereich dar. Zum Einen wurden in dieser Arbeit das vertikale und das laterale Design der Filterstrukturen geändert. Eine entscheidende Änderung lag im mikromechanisch beweglichen Teil des Fabry-Pérot-Filters. Dieser schließt den oberen DBR-Spiegel und ein aus dielektrischen Schichten und der oberen Aluminium-Elektrode bestehendes Membranhaltesystem ein, welches später durch Entfernung der Opferschicht freigelegt wird. Die Fläche des DBR-Spiegels wurde auf die Fläche der Filtermembran reduziert und auf dem Membranhaltesystem positioniert. Zum Anderen wurde im Rahmen dieser Arbeit der vertikale Schichtaufbau des Membranhaltesystems variiert und der Einfluss der gewählten Materialien auf die Krümmung der freistehenden Filterstrukturen, auf das Aktuationsverhalten und auf die spektralen Eigenschaften des gesamten Filters untersucht. Der Einfluss der mechanischen Eigenschaften dieser Materialien spielt nämlich eine bedeutende Rolle bei der Erhaltung der erforderlichen optischen Eigenschaften des gesamten Filters. Bevor Fabry-Pérot-Filter ausgeführt wurden, wurde die mechanische Spannung in den einzelnen Materialien des Membranhaltesystems bestimmt. Für die Messung wurde Substratkrümmungsmethode angewendet. Es wurde gezeigt, dass die Plasmaanregungsfrequenzen der plasmaunterstützten chemischen Gasphasenabscheidung bei einer Prozesstemperatur von 120 °C die mechanische Spannung von Si3N4 enorm beeinflussen. Diese Ergebnisse wurden im Membranhaltesystem umgesetzt, wobei verschiedene Filter mit unterschiedlichen mechanischen Eigenschaften des Membranhaltesystems gezeigt wurden. Darüber hinaus wurden optische Eigenschaften der Filter unter dem Einfluss des lateralen Designs der Filterstrukturen untersucht. Bei den realisierten Filtern wurden ein optischer Durchstimmbereich von ca. 70 nm und eine spektrale Auflösung von 5 nm erreicht. Die erreichte Intensität der Transmissionslinie liegt bei 45-60%. Diese Parameter haben für den späteren spektroskopischen Einsatz der realisierten Fabry-Pérot-Filter eine hohe Bedeutung. Die Anwendung soll erstmalig in einem „Proof of Concept“ stattfinden, wobei damit die Oberflächentemperatur eines GaAs-Wafers über die Messung der spektralen Lage seiner Bandlücke bestimmt werden kann.

Optimization of the Mechanical and Optical Properties of Tunable Optical Sensor Arrays (TOSA) for a Nanospectrometer in the Visible and Near Infrared Spectral Range

Tunable Optical Sensor Arrays (TOSA) based on Fabry-Pérot (FP) filters, for high quality spectroscopic applications in the visible and near infrared spectral range are investigated within this work. The optical performance of the FP filters is improved by using ion beam sputtered niobium pentoxide (Nb2O5) and silicon dioxide (SiO2) Distributed Bragg Reflectors (DBRs) as mirrors. Due to their high refractive index contrast, only a few alternating pairs of Nb2O5 and SiO2 films can achieve DBRs with high reflectivity in a wide spectral range, while ion beam sputter deposition (IBSD) is utilized due to its ability to produce films with high optical purity. However, IBSD films are highly stressed; resulting in stress induced mirror curvature and suspension bending in the free standing filter suspensions of the MEMS (Micro-Electro-Mechanical Systems) FP filters. Stress induced mirror curvature results in filter transmission line degradation, while suspension bending results in high required filter tuning voltages. Moreover, stress induced suspension bending results in higher order mode filter operation which in turn degrades the optical resolution of the filter. Therefore, the deposition process is optimized to achieve both near zero absorption and low residual stress. High energy ion bombardment during film deposition is utilized to reduce the film density, and hence the film compressive stress. Utilizing this technique, the compressive stress of Nb2O5 is reduced by ~43%, while that for SiO2 is reduced by ~40%. Filters fabricated with stress reduced films show curvatures as low as 100 nm for 70 μm mirrors. To reduce the stress induced bending in the free standing filter suspensions, a stress optimized multi-layer suspension design is presented; with a tensile stressed metal sandwiched between two compressively stressed films. The stress in Physical Vapor Deposited (PVD) metals is therefore characterized for use as filter top-electrode and stress compensating layer. Surface micromachining is used to fabricate tunable FP filters in the visible spectral range using the above mentioned design. The upward bending of the suspensions is reduced from several micrometers to less than 100 nm and 250 nm for two different suspension layer combinations. Mechanical tuning of up to 188 nm is obtained by applying 40 V of actuation voltage. Alternatively, a filter line with transmission of 65.5%, Full Width at Half Maximum (FWHM) of 10.5 nm and a stopband of 170 nm (at an output wavelength of 594 nm) is achieved. Numerical model simulations are also performed to study the validity of the stress optimized suspension design for the near infrared spectral range, wherein membrane displacement and suspension deformation due to material residual stress is studied. Two bandpass filter designs based on quarter-wave and non-quarter-wave layers are presented as integral components of the TOSA. With a filter passband of 135 nm and a broad stopband of over 650 nm, high average filter transmission of 88% is achieved inside the passband, while maximum filter transmission of less than 1.6% outside the passband is achieved.

A Government-Binding Based Parser for Warlpiri, a Free-Word Order Language

Free-word order languages have long posed significant problems for standard parsing algorithms. This thesis presents an implemented parser, based on Government-Binding (GB) theory, for a particular free-word order language, Warlpiri, an aboriginal language of central Australia. The words in a sentence of a free-word order language may swap about relatively freely with little effect on meaning: the permutations of a sentence mean essentially the same thing. It is assumed that this similarity in meaning is directly reflected in the syntax. The parser presented here properly processes free word order because it assigns the same syntactic structure to the permutations of a single sentence. The parser also handles fixed word order, as well as other phenomena. On the view presented here, there is no such thing as a "configurational" or "non-configurational" language. Rather, there is a spectrum of languages that are more or less ordered. The operation of this parsing system is quite different in character from that of more traditional rule-based parsing systems, e.g., context-free parsers. In this system, parsing is carried out via the construction of two different structures, one encoding precedence information and one encoding hierarchical information. This bipartite representation is the key to handling both free- and fixed-order phenomena. This thesis first presents an overview of the portion of Warlpiri that can be parsed. Following this is a description of the linguistic theory on which the parser is based. The chapter after that describes the representations and algorithms of the parser. In conclusion, the parser is compared to related work. The appendix contains a substantial list of test cases ??th grammatical and ungrammatical ??at the parser has actually processed.

Corner Flows in Free Liquid Films

A lubrication-flow model for a free film in a corner is presented. The model, written in the hyperbolic coordinate system ξ = x² – y², η = 2xy, applies to films that are thin in the η direction. The lubrication approximation yields two coupled evolution equations for the film thickness and the velocity field which, to lowest order, describes plug flow in the hyperbolic coordinates. A free film in a corner evolving under surface tension and gravity is investigated. The rate of thinning of a free film is compared to that of a film evolving over a solid substrate. Viscous shear and normal stresses are both captured in the model and are computed for the entire flow domain. It is shown that normal stress dominates over shear stress in the far field, while shear stress dominates close to the corner.

Picnik - free online photo editing

Need to edit an image but don't have any software? No problem - you can do it all online for free at this website - and no annoying adverts either.

Ethics primer : A free download

Aimed at secondary school science classrooms, but a useful for a basic introduction

VADS: free art and design images for education

VADS is the online resource for visual arts. It has provided services to the academic community for 12 years and has built up a considerable portfolio of visual art collections comprising over 100,000 images that are freely available and copyright cleared for use in learning, teaching and research in the UK.

Copyright Free Images - Physical Chemistry

These images have been created for use in Physical Chemistry slides to overcome copyright issues when recording lectures. They are free to use without restrictions, although we do not accept responsibility for any errors in the images. Please let us know if you spot any errors, though! Please view the catalogue document for a description of the images. We intend to add to this collection on an ongoing basis. Check back for updates. Current content - 43 images. Last update: August 31st 2011

RTS-3 Task: Free writing inspirations

Warm up thinking exercise

determinismo; free will; psychology; science; profession

The discussion about the freewill and determinism con- troversy in human behavior is an old one in philosophy and psychology. Despite the fact that discussions on the topic are abundant, some of its implications seem to go unnoticed by psychologists, and especially by students of psychology. We argue that to the same extent that a psychologist is far from the determinism he imposes -a priori and unnecessary-constraints on the development of psychology as a science and profession. As a result, we suggest that the adoption of determinism as a wor- king hypothesis, is an important attitude for the transformation of psychology into a more effective science and profession.

The voters of Colombia are free?

A fundamental principle of democracy is citizenship freedom. We suggest that a fair electoral contest is possible if a relationship between free will, electoral preferences and respect to the public institutions (constitutionalism) (section 1) exists. We focus on three illiberal practices that perturb the voter's decision: political clientelism and political markets (sections 2 to 4), media influence (which feeds on the voter's limited rationality and limited information) (section 5), and the suppression of opposition options (section 6). Later (section 8), we provide a brief balance and, additionally, we show how in Colombia the political system has missed opportunities to expand the voters' freedom. Our interpretation of the electoral process in Colombia is an appeal, supported on theoretical arguments and empirical evidence, to doubt about the voters' freedom. Also we make a call for more etudies.

¿Tenemos libre albedrío? Objeciones empíricas y filosóficas a Benjamin Libet.

Benjamin Libet ha argumentado que cambios específicos en la actividad electroencefalográfica del córtex cerebral son registrados varios cientos de milisegundos antes que las personas tengan la intención consciente para actuar. Según Libet este hallazgo prueba que los movimientos voluntarios se inician de manera inconsciente. Siendo así, pone en duda nuestra percepción de libre albedrío según la cual nosotros somos iniciadores conscientes de nuestras acciones voluntarias. En este artículo haré objeciones empíricas a su modelo experimental argumentando que Libet no mide en realidad lo que él cree que está midiendo y, que el uso de electroencefalografía con electrodo de registro en cuero cabelludo no suministra datos fiables que permitan correlacionar cambios de la actividad cerebral y fenómenos psíquicos. También haré objeciones teóricas a las conclusiones filosóficas derivadas de sus experimentos, argumentado que la acción simple (mover el dedo) no puede ser una acción paradigmática para estudiar libre albedrío y que Libet al no estudiar la naturaleza de las intenciones distales ni su probable rol causal en la formación de intenciones proximales, no puede demostrar que el cerebro decide inconscientemente iniciar la acción. Concluyo que Libet nunca llega a probar que no actuamos por nuestro propio libre albedrío.

Sunlight disinfects? Free media in weak democracies

Free media may not favor political accountability when other democratic institutions are weak, and may even bring undesirable unintended consequences. We propose a simple model in which politicians running for office may engage in coercion to obtain votes. A media scandal that exposes these candidates increases their coercion effort to offset the negative popularity shock. This may result in the tainted politicians actually increasing their vote share. We provide empirical evidence from one recent episode in the political history of Colombia, the ‘parapolitics’ scandal featuring politicians colluding with illegal armed paramilitary groups to obtain votes. We show that colluding candidates not only get more votes than their clean competitors, but also concentrate them in areas where coercion is more likely (namely, areas with more paramilitary presence, less state presence, and more judicial inefficiency). Harder to reconcile with other explanations and as a direct test of the effects of media exposure, we compare tainted candidates exposed before elections to those exposed after. We find that those exposed before elections get as many votes as those exposed once elected, but their electoral support is more strongly concentrated in places where coercion is more likely. Our re