Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers

摘要: In order to improve the total-dose radiation hardness of the buried oxide of separation by implanted oxygen silicon-on-insulator wafers, nitrogen ions were implanted into the buried oxide with a dose of 10(16)cm(-2), and subsequent annealing was performed at 1100 degrees C. The effect of annealing time on the radiation hardness of the nitrogen implanted wafers has been studied by the high frequency capacitance-voltage technique. The results suggest that the improvement of the radiation hardness of the wafers can be achieved through a shorter time annealing after nitrogen implantation. The nitrogen-implanted sample with the shortest annealing time 0.5 h shows the highest tolerance to total-dose radiation. In particular, for the 1.0 and 1.5 h annealing samples, both total dose responses were unusual. After 300-krad(Si) irradiation, both the shifts of capacitance-voltage curve reached a maximum, respectively, and then decreased with increasing total dose. In addition, the wafers were analysed by the Fourier transform infrared spectroscopy technique, and some useful results have been obtained.

半干旱地区固沙林土壤氮素转化及其有效性研究

土壤氮素（N）转化是生态系统关键的生态学过程之一；而土壤N有效性是沙地生态系统生产力和稳定性的关键限制性因子。以科尔沁沙地东南缘樟子松（pinus sylvestris var．mongolica）、赤松（P.densiflora）和小叶杨（populus simonii）固沙林以及草地为研究对象，采用野外试验和室内实验相结合的方法，全面系统地开展了凋落物分解、土壤N矿化、淋溶等过程及土壤N有效性的研究，旨在揭示半干旱区固沙林土壤N转化及其有效性的特征和机制，为沙地植被恢复、重建、管理和评价提供科学依据。主要结论如下：（1）采用网袋法进行凋落物的分解试验，结果表明不同类型凋落物乘量衰减、元索释放、质员变化均存在明显差异，分解第1年供N能力表现为小叶杨＞草＞樟子松＞赤松；（2）采用PVC顶盖理管法和离子交换树脂袋法分别研究了林地和草地土壤N矿化过程，结果表明土壤N矿化速率表现为小叶杨川章子松七赤松＞草地，N相对有效性表现为赤松＞樟子松＞草地全小叶杨；（3）草地和小叶杨林地土壤N潜在性淋济较高，而樟子松林地较轻；（4）土壤容重、pH值、养分、温度、水分、土壤微生物、土壤动物、林下植被等环境和生物因子反映区域土壤N转化及共有效性的一般特征，而强烈的人类干扰是引起生态系统问差异的关键因索：造林有利于提高沙地土壤N积累和有效性，但樟子松造林30年后才有明显效果：放牧地土壤N硝化速率及其有效性明显高于禁牧地，但质量下降，即NH4+-N/NO3--N失衡，不利于植物吸收、微生物调控和环境保护；（5）赤松、樟子松和小叶杨均为研究区固沙造林的可选树种，合理和科学管理有利于维护生态系统N平衡，实现．可持续经营。