Heavily doped polycrystalline 3C-SiC growth on SiO2/Si(100) substrates for resonator applications

3C-SiC is a promising material for the development of microelectromechanical systems (MEMS) applications in harsh environments. This paper presents the LPCVD growth of heavily nitrogen doped polycrystalline 3C-SiC films on Si wafers with 2.0 mu m-thick silicon dioxide (SiO2) films for resonator applications. The growth has been performed via chemical vapor deposition using SiH4 and C2H4 precursor gases with carrier gas of H-2 in a newly developed vertical CVD chamber. NH3 was used as n-type dopant. 3C-SiC films were characterized by scanning electron microscopy (SEM), x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), secondary ion mass spectroscopy (SIMS), and room temperature Hall Effect measurements. It was shown that there is no voids at the interface between 3C-SiC and SiO2. Undoped 3C-SiC films show n-type conduction with resisitivity, Hall mobility, and carrier concentration at room temperature of about 0.56 Omega center dot cm, 54 cm(2)/Vs, and 2.0x 10(17) cm(-3), respectively. The heavily nitrogen doped polycrystalline 3C-SiC with the resisitivity of less than 10(-3) Omega center dot cm was obtained by in-situ doping. Polycrystalline SiC resonators have been fabricated preliminarily on these heavily doped SiC films with thickness of about 2 mu m. Resonant frequency of 49.1 KHz was obtained under atmospheric pressure.

Liquid nitrogen flowrate alarm system for MBE

Liquid nitrogen is very important for MBE system. Most MBE systems use the liquid nitrogen to absorb the impurity molecules. If MBE cryoshroud is lack of liquid nitrogen, the pressure of the growth chamber will grow. This will affect the film quality. But too much liquid nitrogen is a waste. We have developed a liquid nitrogen flowrate alarm system to monitor the liquid nitrogen status in MBE cryoshroud. In this method, a temperature sensor is placed at the end of the cryoshroud. The temperature varies with changing of the liquid nitrogen status in cryoshroud. If the liquid nitrogen level in the cryoshroud is too low or too high, the LNFA will send out an alarm to warn the user to adjust the liquid nitrogen flowrate. In our experiments, we found this method works well, and the temperature responds sensitively. With the help of this system, people can view the liquid nitrogen status of the entire growth process. Compare with other method. it is very cheap.

Magnetic Properties of FePt Nanoparticles Prepared by a Micellar Method

FePt nanoparticles with average size of 9 nm were synthesized using a diblock polymer micellar method combined with plasma treatment. To prevent from oxidation under ambient conditions, immediately after plasma treatment, the FePt nanoparticle arrays were in situ transferred into the film-growth chamber where they were covered by an SiO2 overlayer. A nearly complete transformation of L1(0) FePt was achieved for samples annealed at temperatures above 700 A degrees C. The well control on the FePt stoichiometry and avoidance from surface oxidation largely enhanced the coercivity, and a value as high as 10 kOe was obtained in this study. An evaluation of magnetic interactions was made using the so-called isothermal remanence (IRM) and dc-demagnetization (DCD) remanence curves and Kelly-Henkel plots (Delta M measurement). The Delta M measurement reveals that the resultant FePt nanoparticles exhibit a rather weak interparticle dipolar coupling, and the absence of interparticle exchange interaction suggests no significant particle agglomeration occurred during the post-annealing. Additionally, a slight parallel magnetic anisotropy was also observed. The results indicate the micellar method has a high potential in preparing FePt nanoparticle arrays used for ultrahigh density recording media.

Development of a self-thermal insulation miniature combustor

A novel miniature cylindrical combustor, whose chamber wall is made of porous material, has been designed and experimented for reducing heat loss and enhancing flame stability. The combustor has the function of reducing wall heat loss, extending residence time and avoiding radical chemical quenching with a self-thermal insulation concept in which heat loss reduction is obtained by the opposite flow directions between thermal energy transfer and mass flow. The methane/air mixture flames formed in the chamber are blue and tubular in shape. Between the flames and the porous wall, there is a thin unburned film that plays a significant role in reducing the flames' heat loss and keeping the flames stable. The porous wall temperature was 150-400 degrees C when the temperatures of the flames and exhaust gas were more than 1200 degrees C. When the equivalence ratio phi < 1.0, the methane conversion ratio was above 95%; the combustion efficiency was near 90%; and the overall sidewall heat loss was less than 15% in the 1.53 cm(3) chamber. Moreover, its combustion efficiency is stable in a wider combustion load (input power) range.

大气NH_3升高对不同供氮水平下小麦叶片光合生理特征的影响

以小麦品种‘小偃6号’(氮高效品种)和‘长旱58’(氮低效品种)为材料,采用开顶式气室和土培实验研究了大气NH3浓度升高对生长于高、低两种供氮介质下小麦植株不同生育期叶片净光合速率(Pn)、气孔导度(Gs)、叶绿素含量、叶绿素荧光参数(Fv/Fm、Fv/F0)和可溶性糖含量的影响。结果显示:两小麦品种高氨低氮处理植株的Pn、Fv/F0和可溶性糖含量均高于高氨高氮和低氨低氮处理,并在生育后期差异达显著水平(P<0.05),氮低效品种的Gs也符合上述规律且不同处理间差异显著(P<0.05);小麦各生育期高氨高氮处理下植株的Pn均显著低于低氨高氮处理,且两处理间灌浆期的叶绿素含量和灌浆期以前的可溶性糖含量的差异显著(P<0.05),而两处理灌浆期以前的叶绿素荧光参数Fv/Fm在各处理条件下均无显著差异;不同处理间及品种间各项光合特征指标差异缺乏规律性。可见,大气中NH3浓度升高有利于改善低供氮介质条件下小麦植株的氮营养状况,但不同氮效率品种间的响应存在差异。

聚乙二醇和低温胁迫对红豆草种子萌发影响的研究

在植物生长箱通过种子萌发试验,从种子发芽进程、发芽率和吸水量等方面研究了水分和低温胁迫对红豆草种子萌发的影响。用10%,15%,20%,25%,30%的聚乙二醇(PEG)溶液和5℃左右低温预处理红豆草种子,结果表明,不同浓度的聚乙二醇和5℃左右低温预处理可以缩短种子的平均发芽时间,提高发芽率;比较发现,聚乙二醇浓度30%和低温处理时间4 d时可促进红豆草种子的萌发。

黄土高原水蚀风蚀交错带不同土地利用类型土壤呼吸季节变化及其环境驱动

water wind erosion crisscross region; soil respiration rate; seasonal changes; land use pattern; soil temperature; soil moisture; 【摘要】 以黄土高原水蚀风蚀交错区神木县六道沟小流域为研究区,采用动态密闭气室法对植物生长季节(2007年5～10月)5种土地利用方式的土壤呼吸速率进行了测定,并结合水热因子,对不同土地利用方式间土壤呼吸速率的差异性以及其和温度、含水量之间的关系进行了分析。结果表明:5种土地利用类型土壤呼吸速率季节性变化均呈现单峰型曲线,与气温变化趋势一致,其7、8月份土壤呼吸速率均显著高于其它月份(P<0.05);生长季节土壤CO2平均释放速率顺序为:长芒草地>苜蓿地>柠条地>农地>沙柳地,草地在生长前期和旺盛期土壤呼吸强度均显著高于农地和灌木林地;除沙柳地和苜蓿地以外,在土壤呼吸与所有温度指标的关系中,与10cm深度的土壤温度相关性最好,且除沙柳地外,其它4种土地利用类型均与之达到显著相关;农地土壤呼吸对温度的响应最敏感(Q10值为2.20),除沙柳地(Q10值为1.48)外,其它4种土地利用类型Q10值均在2.0左右,接近于全球Q10的平均水平;通过Van’t Hoff模型估算,2007年植物整个生长季节(5～10月份),5种土地利用类型土壤呼吸量从高到低依次为:苜蓿地259gC·m-2,长芒草地236gC·m-2,柠条地226...

A DUAL ION-BEAM EPITAXY SYSTEM

The design and characteristics of a dual ion beam epitaxy system (DIBE) are discussed. This system is composed of two beam lines, each providing a mass-separated ion beam converging finally with the other into the target chamber. The ions are decelerated and deposited on a substrate which can be heated to a temperature of 800-degrees-C. Currents of a few hundred microamperes are available for both beams and the deposit energies are in the range from tens to 1000 eV. The pressure of the target chamber during processing is about 7 x 10(-6) Pa. Preliminary experiments have proved that compound semiconductor materials such as GaN can be synthesized using the DIBE system.

CONSTRUCTION AND APPLICATIONS OF A DUAL MASS-SELECTED LOW-ENERGY ION-BEAM SYSTEM

A direct ion beam deposition system designed for heteroepitaxy at a low substrate temperature and for the growth of metastable compounds has been constructed and tested. The system consists of two mass-resolved low-energy ion beams which merge at the target with an incident energy range 50-25 000 eV. Each ion beam uses a Freeman ion source for ion production and a magnetic sector for mass filtering. While a magnetic quadrupole lens is used in one beam for ion optics, an electrostatic quadrupole lens focuses the other beam. Both focusing approaches provide a current density more than 100-mu-A/cm2, although the magnetic quadrupole gives a better performance for ion energies below 200 eV. The typical current of each beam reaches more than 0.3 mA at 100 eV, with a ribbon beam of about 0.3-0.5 x 2 cm2. The target is housed in an ultrahigh vacuum chamber with a base pressure of 1 x 10(-7) Pa and a typical pressure of 5 x 10(-6) Pa when a noncondensable beam like argon is brought into the chamber. During deposition, the target can be heated to 800-degrees-C and scanned mechanically with an electronic scanning control unit. The dual beam system has been used to grow GaN using a Ga+ and a N+ beam, and to study the oxygen and hydrogen ion beam bombardment effects during carbon ion beam deposition. The results showed that the simultaneous arrival of two beams at the target is particularly useful in compound formation and in elucidation of growth mechanisms.

Microcrystalline silicon films and tandem solar cells prepared by triode PECVD

This paper investigates the effects of the diphasic structure on the optoelectronic properties of hydrogenated microcrystalline silicon (mu c-Si:H) films prepared in a triode three-chamber plasma-enhanced chemical vapor deposition (PECVD) system. The influences of boron-compensation doping on the dark-and photo-conductivity of mu c-Si:H films are also described. A tandem solar cell with an entirely mu c-Si:H p-i-n bottom cell and an a-Si:H top cell has been prepared with an initial conversion efficiency of 8.91% (0.126 cm(2), AM1.5, 100 mW/cm(2)).

Growth of SiGe by D-UHV/CVD at Low Temperature

The temperature is a key factor for the quality of the SiGe alloy grown by D-UHV/CVD. In conventional conditions,the lowest temperature for SiGe growth is about 550℃. Generally, the pressure of the growth chamber is about 10~(-5) Pa when liquid nitrogen is introduced into the wall of the growth chamber with the flux of 6sccm of the disilane gas. We have succeeded in depositing SiGe films at much lower temperature using a novel method. It is about 10.2 Pa without liquid nitrogen, about 3 magnitudes higher than the traditional method,leading to much faster deposition rate. Without liquid nitrogen,the SiGe film and SiGe/Si superlattice are grown at 485℃. The DCXRD curves and TEM image show that the quality of the film is good. The experiments show that this method is efficient to deposit SiGe at low temperature.

CO2浓度升高对三个树种资源分配模式的影响

　　由大气CO2浓度升高导致的气候变化是全球变化的重要研究内容之一。大气 CO2浓度升高会对植物的生理活动产生深刻的影响。本论文以开顶箱（Open top chamber）法控制 CO2浓度，在长期野外实地模拟基础上，研究三个树种资源分配模式的变化，揭示了长白山地区三个主要树种—红松（Pinus koraiensis）、长白松（Pinus sylvestriformis）和蒙古栎（Quercus mongolica）叶含碳结构物质和次生代谢物（CBSSCs）含量的变化动态及植物各器官内碳-防卫物质分配模式对CO2浓度升高的响应，这对预测未来CO2浓度升高条件下树木的适应性提供了科学依据。研究结果如下： 1）红松和长白松针叶总非结构性碳水化合物含量在生长季呈现先升高后降低的变化趋势，生长季末期稍有升高，休眠季含量较稳定。脂肪和结构性物质如半纤维素、纤维素和木质素含量在生长季和休眠季中含量比较稳定。 2）CBSSCs在植物叶中的含量存在显著的种间差异性，CBSSCs含量在生长季变化较大，休眠季变化很小。 3）从三个树种叶CBSSCs浓度的年平均值来看，植物对高浓度CO2没有持续和明显的反应，叶内不会出现较高浓度的酚类物质和其它CBSSCs物质。 4）高浓度CO2对植株氮总量没有影响，但由于生长导致的稀释效应使得红松叶、茎全氮浓度显著降低。 5）长期高浓度CO2处理使得红松生长和光合能力都有提高，碳向酚类物质和结构物质的分配提高。由高浓度CO2诱导的植物的这种碳向防卫物质的分配格局符合生长分化平衡模型（GDBe）的预测结果。

CO2浓度升高对三种树木叶片化学和舞毒蛾幼虫取食及生长的影响

探讨全球气候变化的生物学和生态学效应是当今生态学中的热点，研究大气CO2浓度升高对植物-昆虫相互作用关系的影响具有重要的理论和实践意义。本文使用开顶式气室（Open-top chamber，OTC）在野外条件下研究了CO2浓度升高对三种树木（小青杨、白桦和蒙古栎）叶片化学成分含量的影响，以及树木叶片品质变化对一种广食性森林昆虫（舞毒蛾）幼虫取食、生长发育和取食偏嗜性的影响。得出如下结果：（1）CO2浓度升高对3个受试树种叶片中的营养成分及次生代谢物含量均有显著影响，总体表现为氮含量降低，而碳氮比、非结构性碳水化合物、总酚和缩合丹宁含量增加。叶片中的化学成分含量可随时间发生显著变化，不同树种、甚至同一树种不同冠层高度的叶片对CO2浓度升高的响应强度也是不同的。叶片的干物质含量和比叶重对CO2浓度升高的响应不显著。（2）室内非选择性取食实验、室内选择性取食实验以及上树取食饲养方式下的多龄期取食实验，均发现高浓度CO2处理组内舞毒蛾幼虫的生长发育受到显著抑制。但对四龄舞毒蛾幼虫所进行的短期生物测定并未发现不同CO2浓度处理下幼虫的生长发育速率、对食物的取食率和转化率等昆虫营养指标存在显著差异。（3）叶片品质的降低是导致舞毒蛾幼虫生长发育受抑制的主要原因。但是总体上，CO2浓度升高导致的叶片品质变化并未显著影响幼虫的取食率和取食量。（4）舞毒蛾幼虫对不同叶片种类表现出清晰的取食选择性，这种选择性在其幼龄期就可表现出来。幼虫对小青杨上层叶片有最显著的偏嗜性，对蒙古栎下层叶片有最明显的拒食性。但是CO2浓度升高导致的叶片品质变化对舞毒蛾幼虫的取食选择性和寄主偏嗜行为并未产生显著影响。（5）检测出高浓度CO2处理组内舞毒蛾幼虫虫粪中含有浓度更高的植物次生代谢物质（总酚和缩合单宁），这很可能是昆虫整体生长发育受抑制的重要原因之一。

CO2浓度升高对红松和长白松幼苗界面过程影响的研究

界面是不同物相之间物质交换和能量流动最活跃的区域，植物通过植物体与环境之间的界面进行生命活动，其中以植物基本代谢物质COZ为媒介的界面过程研究是界面生态学研究的核心部分。本论文以开顶箱（Open toP chamber）法控制CO2浓度，在长期野外实地模拟基础上，研究针叶／大气界面和土壤／大气界面过程，揭示了红松（Pinus koraiensis）和长白松（Pinussylveslriformis）在高浓度CO2下生理生态功能的动态变化，这对预测未来COZ浓度倍增条件下树木的适应性提供了科学依据。研究结果表明：①长期700和500μmolmol-1 CO2处理，红松和长白松发生光合适应现象，但净光合速率仍比空气条件下对照组植株的净光合速率高；②高浓度CO2没有改变两树种的气孔敏感性，Ci／Ca比值增加，气孔响应与光合适应不同步；③红松和长白松的净光合速率与RuBPcase活性、光响应参数、针叶淀粉和全氮含量、相对生长速率具有明显相关性；④红松和长白松的暗呼吸对高浓度CO2的响应是瞬间反应与长期适应性的结合；⑤高浓度CO2提高了两树种的光合水分利用效率；⑥红松和长白松地上、地下部分的生物量分配模式在高浓度CO2下改变；⑦高浓度CO2改变了两树种单位叶面积重量、根体积、主根长、分枝等形态结构方面的特征，叶重比和根重比随CO2处理时间而变化；⑧施放高浓度CO2开顶箱内的土壤温度、土壤有机碳和全氮含量升高，土壤／大气间的CO2交换受到抑制；⑨红松和长白松对高浓度CO2的响应有很多不同之处，开顶箱本身的环境对长白松的生长有一定影响，对红松的影响相对较小；⑩红松和长白松对700和500μmolmol-1 CO2的生理生态响应随植物体的生长和CO2处理时间是动态变化的。

Kinetic Studies of Gas Flows

Our recent studies on kinetic behaviors of gas flows are reviewed in this paper. These flows have a wide range of background, but share a common feature that the flow Knudsen number is larger than 0.01. Thus kinetic approaches such as the direct simulation Monte Carlo method are required for their description. In the past few years, we studied several micro/nano-scale flows by developing novel particle simulation approach, and investigated the flows in low-pressure chambers and at high altitude. In addition, the microscopic behaviors of a couple of classical flow problems were analyzed, which shows the potential for kinetic approaches to reveal the microscopic mechanism of gas flows.