Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material

We have fabricated an ultra-compact 4×4 optical matrix on InP/InGaAsP material. 1×4 MMI couplers and TIR mirrors are employed to produce a compact 1×2 mm2 device. A CH4/H2/O2 RIE dry etch process has been used to realize two-level dry etching: deep-etch for both the MMI couplers and the mirrors and shallow-etch for the rest of the routing waveguides. It was found that a metal/dielectric bilayer mask is essential for multi-dry-etch processes and high profile verticality. We have found a Ti intermediate mask for the deep-etch process which is removable by SF6 dry-etch before the following shallow process. Dry-etch removal of the intermediate mask is necessary to protect the deep-etched mirror sidewall.

Comments on "micro-scale abrasive wear testing of PVD coatings on curved substrates"

Previously published expressions for the wear volume in the micro-scale abrasion test for curved specimen surfaces (K.L. Rutherford and I.M. Hutchings, Tribology Letters 2 (1996) 1-11) were based upon erroneous assumptions about the wear-scar geometry. Accurate volumes have now been computed, and the errors in the use of the original analytical equations are shown to be negligibly small (<0.5% error) for all practical cases. © J.C. Baltzer AG, Science Publishers.

Centrifuge tests investigating inclined grout micro-piles as a method of liquefaction remediation for existing buildings

This paper presents a series of centrifuge tests carried out to investigate the performance of non-structural inclined micro-piles as a potential liquefaction remediation method for existing buildings. Both a single-degree-of-freedom frame structure and a two-storey, two-degree-of-freedom frame structure were used as model buildings in these tests. Centrifuge tests were carried out with and without micro-piles in the foundation soil for each structure. Results primarily from the tests with the SDOF structure are presented in this paper. It is found that the micro-piles have some beneficial effect by increasing shear strains in the soil in their vicinity and hence causing dilation in these zones. However, they also increase structural accelerations by transmitting accelerations from deep in the soil and the beneficial effects from increased dilation are outweighed by the detrimental migration of pore pressures.

Friction and material transfer in micro-scale sliding contact between aluminium alloy and steel

A ball-on-flat reciprocating micro-tribometer has been used to measure the friction coefficient between aluminium alloy strip and a steel ball. A relatively small ball and correspondingly low contact load is used to give a contact width of the order of 100μm, closer to asperity contact widths than generally found for this type of test. The effects of load, initial strip surface roughness, lubricants and boundary additives are investigated. It is found that the friction coefficient is significantly reduced by the addition of a lubricant. Observations of the wear tracks and ball surface show that the material transfer from aluminium to the ball is reduced in the presence of the lubricant. The initial friction coefficient is further reduced by the addition of a boundary additive, but the friction coefficient after 8 cycles is unchanged. Copyright © 2004 by Springer Science+Business Media, Inc.

Superconducting micro-bearings

This paper presents research into superconducting Micro-Bearings for MEMS systems. Advanced silicon processing techniques developed for the Very Large Scale Integration (VLSI) industry have been exploited in recent years to enable the production of micro-engineered moving mechanical systems. These devices commonly known as Micro-ElectroMechanical Systems (MEMS) have many potential advantages. In many respects the effect of scaling a machine from macro-sized to micro-sized are either neutral or beneficial. However in one important respect the scaling produces a severely detrimental effect. That respect is in the tribology and the subsequent wear on the high speed rotating machines. This leads to very short device lifetimes. This paper presents results obtained from a MEMS motor supported on superconducting bearings. The bearings are self-positioning, relying on, the Meissner effect to provide a levitation force which moves the rotor into position and flux pinning to provide stability thereafter. The rotor is driven by a simple electrostatic type motor in which photo resist is used to pattern the motor poles directly onto the rotor. © 2005 IEEE.

Analytical techniques for indentation of viscoelastic materials

Indentation of linearly viscoelastic materials is explored using elastic-viscoelastic correspondence analysis for both conical-pyramidal and spherical indentation. Boltzmann hereditary integrals are used to generate displacement-time solutions for loading at constant rate and creep following ramp loading. Experimental data for triangle- and trapezoidal-loading are examined for commercially-available polymers and compared with analytical solutions. Emphasis is given to the use of multiple experiments to test the fidelity and predictive capability of the obtained material creep function. Plastic deformation occurs in sharp indentation of glassy polymers and is found to complicate the viscoelastic analysis. A new method is proposed for estimating a material time-constant from peak displacement or hardness data obtained in pyramidal indentation tests performed at different loading rates.

Design considerations for a micro aerial vehicle aerodynamic characterization facility at the University of Florida research and engineering education facility

This paper describes the design considerations for a proposed aerodynamic characterization facility (ACF) for micro aerial vehicles (MAVs). This is a collaborative effort between the Air Force Research Laboratory Munitions Directorate (AFRL/MN) and the University of Florida Research and Engineering Education Facility (UF/REEF). The ACF is expected to provide a capability for the characterization of the aerodynamic performance of future MAVs. This includes the ability to gather the data necessary to devise control strategies as well as the potential to investigate aerodynamic 'problem areas' or specific failings. Since it is likely that future MAVs will incorporate advanced control strategies, the facility must enable researchers to critically assess such novel methods. Furthermore, the aerodynamic issues should not be seen (and tested) in isolation, but rather the facility should be able to also provide information on structural responses (such as aeroelasticity) as well as integration issues (say, thrust integration or sensor integration). Therefore the mission for the proposed facility ranges form fairly basic investigations of individual technical issues encountered by MAVs (for example an evaluation of wing shapes or control effectiveness) all the way to testing a fully integrated vehicle in a flight configuration for performance evaluation throughout the mission envelope.

Micro-vortex generator flow control for supersonic engine inlets

To investigate the flow control potential of micro-vortex generators for supersonic mixed-compression inlets, a basic model experiment has been designed which combines a normal shock wave with a subsonic diffuser. The diffuser is formed by a simple expansion corner, with a divergence angle of 6 degrees. The diffuser entry Mach numbers were M=1.3 and M=1.5 and a number of shock locations relative to the corner position were tested. Flow control was applied in the form of counter-rotating micro-vanes with heights of approximately 20% of boundary layer thickness. Furthermore, corner fences where employed to reduce sidewall effects. It was found that micro-vortex generators were able to significantly reduce the extent of flow separation under all conditions, but could not eliminate it altogether. Corner fences also demonstrated potential for improving the flow in rectangular cross section channels and the combination of corner fences with micro-vortex generators was found to give the greatest benefits. At M=1.3 the combination of corner fences and micro-vanes placed close to the diffuser entry could prevent separation for a wide range of conditions. At the higher diffuser entry Mach number the benefits of flow control were less significant although a reduction of separation size and an improved pressure recovery was observed. It is thought that micro-vortex generators can have significant flow control potential if they are placed close to the expected separation onset and when the adverse pressure gradient is not too far above the incipient separation level. The significant beneficial effects of corner fences warrant a more comprehensive further investigation. It is thought that the control methods suggested here are capable of reducing the bleed requirement on an inlet, which could provide significant performance advantages.

Micro-ramp control for oblique shock wave / boundary layer interactions

Supersonic engine intakes operating supercritically feature shock wave / boundary layer interactions (SBLIs), which are conventionally controlled using boundary layer bleed. The momentum loss of bleed flow causes high drag, compromising intake performance. Micro-ramp sub-boundary layer vortex generators (SBVGs) have been proposed as an alternative form of flow control for oblique SBLIs in order to reduce the bleed requirement. Experiments have been conducted at Mach 2.5 to characterise the flow details on such devices and investigate their ability to control the interaction between an oblique shock wave and the naturally grown turbulent boundary layer on the tunnel floor. Micro-ramps of four sizes with heights ranging from 25% to 75% of the uncontrolled boundary layer thickness were tested. The flow over all sizes of microramp was found to be similar, featuring streamwise counter-rotating vortices which entrain high momentum fluid, locally reducing the boundary layer displacement thickness. When installed ahead of the shock interaction it was found that the positioning of the micro-ramps is of limited importance. Micro-ramps did not eliminate flow separation. However, the previously two-dimensional separation was broken up into periodic three-dimensional separation zones. The interaction length was reduced and the pressure gradient across the interaction was increased.

Poroelastic indentation analysis for hydrated biological tissues

Indentation techniques are employed for the measurement of mechanical properties of a wide range of materials. In particular, techniques focused at small length-scales, such as nanoindentation and AFM indentation, allow for local characterization of material properties in heterogeneous materials including natural tissues and biomimetic materials. Typical elastic analysis for spherical indentation is applicable in the absence of time-dependent deformation, but is inappropriate for materials with time-dependent responses. Recent analyses for the viscoelastic indentation problem, based on elastic-viscoelastic correspondence, have begun to address the issue of time-dependent deformation during an indentation test. The viscoelastic analysis has been shown to fit experimental indentation data well, and has been demonstrated as useful for characterization of viscoelasticity in polymeric materials and in hydrated mineralized tissues. However, a viscoelastic analysis is not necessarily sufficient for multi-phase materials with fluid flow. In the current work, a poroelastic analysis-based on fluid motion through a porous elastic network-is used to examine spherical indentation creep responses of hydrated biological materials. Both analytical and finite element approaches are considered for the poroelastic Hertzian indentation problem. Modeling results are compared with experimental data from nanoindentation of hydrated bone immersed in water and polar solvents (ethanol, methanol, acetone). Baseline (water-immersed) bone responses are characterized using the poroelastic model and numerical results are compared with altered hydration states due to polar solvents. © 2007 Materials Research Society.

Centrifuge modelling of inclined micro-piles for liquefaction remediation of existing buildings

This paper describes four centrifuge tests investigating the performance of non-structural inclined micro-piles as a liquefaction remediation method for existing buildings. Two soil profiles with the same superstructure founded on each were tested under earthquakes of different magnitudes and durations. The first profile consisted of a deep, homogeneous layer of loose, liquefiable sand. The second comprised a shallow layer of loose sand overlying dense sand. Centrifuge tests were carried out with and without inclined micro-piles in each soil profile. The superstructure was modelled as an idealised single degree of freedom (SDOF) system. It is found that the micro-piles have no detrimental effect on the performance of the structure during and after earthquakes. It is also possible that their presence may decrease structural settlements in earthquakes which cause liquefaction to a depth less than that of the improved zone. However, no conclusive evidence is obtained to show that the micro-piles significantly restrain lateral soil movement due to monotonic shearing from the structure or impede the migration of excess pore pressures from the free field to the foundation zone. Both these processes have critical effects on structural settlement. The use of inclined micro-piles for liquefaction remediation should therefore be considered with caution.

Laminar to turbulent flow transition measurements using an array of SOI-CMOS MEMS wall shear stress sensors

The successful utilization of an array of silicon on insulator complementary metal oxide semiconductor (SOICMOS) micro thermal shear stress sensors for flow measurements at macro-scale is demonstrated. The sensors use CMOS aluminum metallization as the sensing material and are embedded in low thermal conductivity silicon oxide membranes. They have been fabricated using a commercial 1 μm SOI-CMOS process and a post-CMOS DRIE back etch. The sensors with two different sizes were evaluated. The small sensors (18.5 ×18.5 μm2 sensing area on 266 × 266 μm2 oxide membrane) have an ultra low power (100 °C temperature rise at 6mW) and a small time constant of only 5.46 μs which corresponds to a cut-off frequency of 122 kHz. The large sensors (130 × 130 μm2 sensing area on 500 × 500 μm2 membrane) have a time constant of 9.82 μs (cut-off frequency of 67.9 kHz). The sensors' performance has proven to be robust under transonic and supersonic flow conditions. Also, they have successfully identified laminar, separated, transitional and turbulent boundary layers in a low speed flow. © 2008 IEEE.