On the dynamic effects of fiscal policy

Dans le sillage de la récession mondiale de 2008-09, plusieurs questions ont été soulevées dans la littérature économique sur les effets à court et à long terme de la politique budgétaire sur l’activité économique par rapport à son signe, sa taille et sa durée. Ceux-ci ont des implications importantes pour mieux comprendre les canaux de transmission et l’efficacité des politiques budgétaires, avec la politique monétaire étant poursuivi, ainsi que pour leurs retombées économiques. Cette thèse fait partie de ce regain d’intérêt de la littérature d’examiner comment les changements dans la politique budgétaire affectent l’activité économique. Elle repose alors sur trois essais: les effets macroéconomiques des chocs de dépenses publiques et des recettes fiscales, les résultats macroéconomiques de l’interaction entre les politiques budgétaire et monétaire et le lien entre la politique budgétaire et la répartition des revenus. Le premier chapitre examine les effets des chocs de politique budgétaire (chocs de dépenses publiques et chocs de recettes fiscales) sur l’économie canadienne au cours de la période 1970-2010, en s’appuyant sur la méthode d’identification des restrictions de signe développée par Mountford et Uhlig [2009]. En réponse à la récession mondiale, les autorités fiscales dans les économies avancées, dont le Canada ont généralement mis en oeuvre une approche en deux phases pour la politique budgétaire. Tout d’abord, ils ont introduit des plans de relance sans précédent pour relancer leurs économies. Par exemple, les mesures de relance au Canada, introduites à travers le Plan d’action économique du Canada, ont été projetées à 3.2 pour cent du PIB dans le budget fédéral de 2009 tandis que l’ "American Recovery and Reinvestment Act"(ARRA) a été estimé à 7 pour cent du PIB. Par la suite, ils ont mis en place des plans d’ajustement en vue de réduire la dette publique et en assurer la soutenabilité à long terme. Dans ce contexte, évaluer les effets multiplicateurs de la politique budgétaire est important en vue d’informer sur l'efficacité de telles mesures dans la relance ou non de l'activité économique. Les résultats montrent que les multiplicateurs d'impôt varient entre 0.2 et 0.5, tandis que les multiplicateurs de dépenses varient entre 0.2 et 1.1. Les multiplicateurs des dépenses ont tendance à être plus grand que les multiplicateurs des recettes fiscales au cours des deux dernières décennies. Comme implications de politique économique, ces résultats tendent à suggérer que les ajustements budgétaires par le biais de grandes réductions de dépenses publiques pourraient être plus dommageable pour l'économie que des ajustements budgétaires par la hausse des impôts. Le deuxième chapitre, co-écrit avec Constant Lonkeng Ngouana, estime les effets multiplicateurs des dépenses publiques aux Etats-Unis en fonction du cycle de la politique monétaire. Les chocs de dépenses publiques sont identifiés comme étant des erreurs de prévision du taux de croissance des dépenses publiques à partir des données d'Enquêtes des prévisionnistes professionnels et des informations contenues dans le "Greenbook". L'état de la politique monétaire est déduite à partir de la déviation du taux des fonds fédéraux du taux cible de la Réserve Fédérale, en faisant recours à une fonction lisse de transition. L'application de la méthode des «projections locales» aux données trimestrielles américaines au cours de la période 1965-2012 suggère que les effets multiplicateurs des dépenses fédérales sont sensiblement plus élevées quand la politique monétaire est accommodante que lorsqu'elle ne l'est pas. Les résultats suggèrent aussi que les dépenses fédérales peuvent stimuler ou non la consommation privée, dépendamment du degré d’accommodation de la politique monétaire. Ce dernier résultat réconcilie ainsi, sur la base d’un cadre unifié des résultats autrement contradictoires à première vue dans la littérature. Ces résultats ont d'importantes implications de politique économique. Ils suggèrent globalement que la politique budgétaire est plus efficace lorsqu'on en a le plus besoin (par exemple, lorsque le taux de chômage est élevé), si elle est soutenue par la politique monétaire. Ils ont également des implications pour la normalisation des conditions monétaires dans les pays avancés: la sortie des politiques monétaires non-conventionnelles conduirait à des multiplicateurs de dépenses fédérales beaucoup plus faibles qu'autrement, même si le niveau de chômage restait élevé. Ceci renforce la nécessité d'une calibration prudente du calendrier de sortie des politiques monétaires non-conventionnelles. Le troisième chapitre examine l'impact des mesures d'expansion et de contraction budgétaire sur la distribution des revenus dans un panel de 18 pays d'Amérique latine au cours de la période 1990-2010, avec un accent sur les deniers 40 pour cent. Il explore alors comment ces mesures fiscales ainsi que leur composition affectent la croissance des revenus des dernier 40 pour cent, la croissance de leur part de revenu ainsi que la croissance économique. Les mesures d'expansion et de contraction budgétaire sont identifiées par des périodes au cours desquels il existe une variation significative du déficit primaire corrigé des variations conjoncturelles en pourcentage du PIB. Les résultats montrent qu'en moyenne l'expansion budgétaire par la hausse des dépenses publiques est plus favorable à la croissance des revenus des moins bien-nantis que celle par la baisse des impôts. Ce résultat est principalement soutenu par la hausse des dépenses gouvernementales de consommation courante, les transferts et subventions. En outre ces mesures d’expansion budgétaire sont favorables à la réduction des inégalités car elles permettent d'améliorer la part des revenus des moins bien-nantis tout en réduisant la part des revenus des mieux-nantis de la distribution des revenus. En outre ces mesures d’expansion budgétaire sont favorables à la réduction des inégalités car elles permettent d'améliorer la part des revenus des moins bien-nantis tout en réduisant la part des revenus des mieux-nantis de la distribution des revenus. Cependant, l'expansion budgétaire pourrait soit n'avoir aucun effet sur la croissance économique ou entraver cette dernière à travers la hausse des dépenses en capital. Les résultats relatifs à la contraction budgétaire sont quelque peu mitigés. Parfois, les mesures de contraction budgétaire sont associées à une baisse de la croissance des revenus des moins bien nantis et à une hausse des inégalités, parfois l'impact de ces mesures est non significatif. Par ailleurs, aucune des mesures n’affecte de manière significative la croissance du PIB. Comme implications de politique économique, les pays avec une certaine marge de manœuvre budgétaire pourraient entamer ou continuer à mettre en œuvre des programmes de "filets de sauvetage"--par exemple les programmes de transfert monétaire conditionnel--permettant aux segments vulnérables de la population de faire face à des chocs négatifs et aussi d'améliorer leur conditions de vie. Avec un potentiel de stimuler l'emploi peu qualifié, une relance budgétaire sage par les dépenses publique courantes pourrait également jouer un rôle important pour la réduction des inégalités. Aussi, pour éviter que les dépenses en capital freinent la croissance économique, les projets d'investissements publics efficients devraient être prioritaires dans le processus d'élaboration des politiques. Ce qui passe par la mise en œuvre des projets d'investissement avec une productivité plus élevée capable de générer la croissance économique nécessaire pour réduire les inégalités.

Aircraft down-range profiles formed from simulated and compact-range radar backscatter

Compact-range radar backscatter measurements are taken of aircraft scale models. In addition, computer software is used to predict the RCS of the aircraft. Synthetic down-range profiles formed from the two sources of backscatter data are compared and visualized in an innovative manner. Similar discrimination rates between the two aircraft are obtained on data from both source

Effect of ambient gas on the expansion dynamics of plasma plume formed by laser blow off of thin film

A study has been carried out to understand the influence of ambient gases on the dynamics of laser-blow-off plumes of multi-layered LiF–C thin film. Plume images at various time intervals ranging from 100 to 3000 ns have been recorded using an intensified CCD camera. Enhancement in the plume intensity and change in size and shape occurs on introducing ambient gases and these changes are highly dependent on the nature and composition of the ambient gas used. Velocity of the plume was found to be higher in helium ambient whereas intensity enhancement is greater in argon environment. The plume shapes have maximum size at 10−2 and 10−1 Torr of Ar and He pressures, respectively. As the background pressure increases further (>10−2 Torr: depending on the nature of gas), the plume gets compressed/focused in the lateral direction. Internal structure formation and turbulences are observed at higher pressures (>10−1 Torr) in both ambient gases.

Semiclassical theory of shot noise in ballistic n+in+ semiconductor structures: relevance of Pauli and long range Coulomb interactions

We work out a semiclassical theory of shot noise in ballistic n+-i-n+ semiconductor structures aiming at studying two fundamental physical correlations coming from Pauli exclusion principle and long-range Coulomb interaction. The theory provides a unifying scheme which, in addition to the current-voltage characteristics, describes the suppression of shot noise due to Pauli and Coulomb correlations in the whole range of system parameters and applied bias. The whole scenario is summarized by a phase diagram in the plane of two dimensionless variables related to the sample length and contact chemical potential. Here different regions of physical interest can be identified where only Coulomb or only Pauli correlations are active, or where both are present with different relevance. The predictions of the theory are proven to be fully corroborated by Monte Carlo simulations.

Fragile-glass behavior of a short-range p-spin model

We propose a short-range generalization of the p-spin interaction spin-glass model. The model is well suited to test the idea that an entropy collapse is at the bottom line of the dynamical singularity encountered in structural glasses. The model is studied in three dimensions through Monte Carlo simulations, which put in evidence fragile glass behavior with stretched exponential relaxation and super-Arrhenius behavior of the relaxation time. Our data are in favor of a Vogel-Fulcher behavior of the relaxation time, related to an entropy collapse at the Kauzmann temperature. We, however, encounter difficulties analogous to those found in experimental systems when extrapolating thermodynamical data at low temperatures. We study the spin-glass susceptibility, investigating the behavior of the correlation length in the system. We find that the increase of the relaxation time is accompanied by a very slow growth of the correlation length. We discuss the scaling properties of off-equilibrium dynamics in the glassy regime, finding qualitative agreement with the mean-field theory.

Effect of long-range Coulomb interaction on shot-noise suppression in ballistic transport

We present a microscopic analysis of shot-noise suppression due to long-range Coulomb interaction in semiconductor devices under ballistic transport conditions. An ensemble Monte Carlo simulator self-consistently coupled with a Poisson solver is used for the calculations. A wide range of injection-rate densities leading to different degrees of suppression is investigated. A sharp tendency of noise suppression at increasing injection densities is found to scale with a dimensionless Debye length related to the importance of space-charge effects in the structure.

Sum rules and short-range correlations in nuclear matter at finite temperature

The nucleon spectral function in nuclear matter fulfills an energy weighted sum rule. Comparing two different realistic potentials, these sum rules are studied for Greens functions that are derived self-consistently within the T matrix approximation at finite temperature.

Lithography-free micro- and nanostructuring based on conventional plasma etching

In now-a-days semiconductor and MEMS technologies the photolithography is the working horse for fabrication of functional devices. The conventional way (so called Top-Down approach) of microstructuring starts with photolithography, followed by patterning the structures using etching, especially dry etching. The requirements for smaller and hence faster devices lead to decrease of the feature size to the range of several nanometers. However, the production of devices in this scale range needs photolithography equipment, which must overcome the diffraction limit. Therefore, new photolithography techniques have been recently developed, but they are rather expensive and restricted to plane surfaces. Recently a new route has been presented - so-called Bottom-Up approach - where from a single atom or a molecule it is possible to obtain functional devices. This creates new field - Nanotechnology - where one speaks about structures with dimensions 1 - 100 nm, and which has the possibility to replace the conventional photolithography concerning its integral part - the self-assembly. However, this technique requires additional and special equipment and therefore is not yet widely applicable. This work presents a general scheme for the fabrication of silicon and silicon dioxide structures with lateral dimensions of less than 100 nm that avoids high-resolution photolithography processes. For the self-aligned formation of extremely small openings in silicon dioxide layers at in depth sharpened surface structures, the angle dependent etching rate distribution of silicon dioxide against plasma etching with a fluorocarbon gas (CHF3) was exploited. Subsequent anisotropic plasma etching of the silicon substrate material through the perforated silicon dioxide masking layer results in high aspect ratio trenches of approximately the same lateral dimensions. The latter can be reduced and precisely adjusted between 0 and 200 nm by thermal oxidation of the silicon structures owing to the volume expansion of silicon during the oxidation. On the basis of this a technology for the fabrication of SNOM calibration standards is presented. Additionally so-formed trenches were used as a template for CVD deposition of diamond resulting in high aspect ratio diamond knife. A lithography-free method for production of periodic and nonperiodic surface structures using the angular dependence of the etching rate is also presented. It combines the self-assembly of masking particles with the conventional plasma etching techniques known from microelectromechanical system technology. The method is generally applicable to bulk as well as layered materials. In this work, layers of glass spheres of different diameters were assembled on the sample surface forming a mask against plasma etching. Silicon surface structures with periodicity of 500 nm and feature dimensions of 20 nm were produced in this way. Thermal oxidation of the so structured silicon substrate offers the capability to vary the fill factor of the periodic structure owing to the volume expansion during oxidation but also to define silicon dioxide surface structures by selective plasma etching. Similar structures can be simply obtained by structuring silicon dioxide layers on silicon. The method offers a simple route for bridging the Nano- and Microtechnology and moreover, an uncomplicated way for photonic crystal fabrication.

The Degree of Word-Expansion of Lexicalized RRWW-Automata

Restarting automata can be seen as analytical variants of classical automata as well as of regulated rewriting systems. We study a measure for the degree of nondeterminism of (context-free) languages in terms of deterministic restarting automata that are (strongly) lexicalized. This measure is based on the number of auxiliary symbols (categories) used for recognizing a language as the projection of its characteristic language onto its input alphabet. This type of recognition is typical for analysis by reduction, a method used in linguistics for the creation and verification of formal descriptions of natural languages. Our main results establish a hierarchy of classes of context-free languages and two hierarchies of classes of non-context-free languages that are based on the expansion factor of a language.

Uncover the Concealed Link: Gender & Ethnicity-Divided Local Knowledge on the Agro-Ecosystem of a Forest Margin

This research is a study about knowledge interface that aims to analyse knowledge discontinuities, the dynamic and emergent characters of struggles and interactions within gender system and ethnicity differences. The cacao boom phenomenon in Central Sulawesi is the main context for a changing of social relations of production, especially when the mode of production has shifted or is still underway from subsistence to petty commodity production. This agrarian change is not only about a change of relationship and practice, but, as my previous research has shown, also about the shift of knowledge domination, because knowledge construes social practice in a dialectical process. Agroecological knowledge is accumulated through interaction, practice and experience. At the same time the knowledge gained from new practices and experiences changes mode of interaction, so such processes provide the arena where an interface of knowledge is manifested. In the process of agro-ecological knowledge interface, gender and ethnic group interactions materialise in the decision-making of production and resource allocation at the household and community level. At this point, power/knowledge is interplayed to gain authority in decision-making. When authority dominates, power encounters resistance, whereas the dominant power and its resistance are aimed to ensure socio-economic security. Eventually, the process of struggle can be identified through the pattern of resource utilisation as a realisation of production decision-making. Such processes are varied from one community to another, and therefore, it shows uniqueness and commonalities, especially when it is placed in a context of shifting mode of production. The focus is placed on actors: men and women in their institutional and cultural setting, including the role of development agents. The inquiry is informed by 4 major questions: 1) How do women and men acquire, disseminate, and utilise their agro ecological knowledge, specifically in rice farming as a subsistence commodity, as well as in cacao farming as a petty commodity? How and why do such mechanisms construct different knowledge domains between two genders? How does the knowledge mechanism apply in different ethnics? What are the implications for gender and ethnicity based relation of production? ; 2) Using the concept of valued knowledge in a shifting mode of production context: is there any knowledge that dominates others? How does the process of domination occur and why? Is there any form of struggle, strategies, negotiation, and compromise over this domination? How do these processes take place at a household as well as community level? How does it relate to production decision-making? ; 3) Putting the previous questions in two communities with a different point of arrival on a path of agricultural commercialisation, how do the processes of struggle vary? What are the bases of the commonalities and peculiarities in both communities?; 4) How the decisions of production affect rice field - cacao plantation - forest utilisation in the two villages? How does that triangle of resource use reflect the constellation of local knowledge in those two communities? What is the implication of this knowledge constellation for the cacao-rice-forest agroecosystem in the forest margin area? Employing a qualitative approach as the main method of inquiry, indepth and dialogic interviews, participant observer role, and document review are used to gather information. A small survey and children’s writing competition are supplementary to this data collection method. The later two methods are aimed to give wider information on household decision making and perception toward the forest. It was found that local knowledge, particularly knowledge pertaining to rice-forest-cacao agroecology is divided according to gender and ethnicity. This constellation places a process of decision-making as ‘the arena of interface’ between feminine and masculine knowledge, as well as between dominant and less dominant ethnic groups. Transition from subsistence to a commercial mode of production is a context that frames a process where knowledge about cacao commodity is valued higher than rice. Market mechanism, as an external power, defines valued knowledge. Valued knowledge defines the dominant knowledge holder, and decision. Therefore, cacao cultivation becomes a dominant practice. Its existence sacrifices the presence of rice field and the forest. Knowledge about rice production and forest ecosystem exist, but is less valued. So it is unable to challenge the domination of cacao. Various forms of struggles - within gender an ethnicity context - to resist cacao domination are an expression of unequal knowledge possession. Knowledge inequality implies to unequal access to withdraw benefit from market valued crop. When unequal knowledge fails to construct a negotiated field or struggles fail to reveal ‘marginal’ decision, e.g. intensification instead of cacao expansion to the forest, interface only produces divergence. Gender and ethnicity divided knowledge is unabridged, since negotiation is unable to produce new knowledge that accommodates both interests. Rice is loaded by ecological interest to conserve the forest, while cacao is driven by economic interest to increase welfare status. The implication of this unmediated dominant knowledge of cacao production is the construction of access; access to the forest, mainly to withdraw its economic benefit by eliminating its ecological benefit. Then, access to cacao as the social relationship of production to acquire cacao knowledge; lastly, access to defend sustainable benefit from cacao by expansion. ‘Socio-economic Security’ is defined by Access. The convergence of rice and cacao knowledge, however, should be made possible across gender and ethnicity, not only for the sake of forest conservation as the insurance of ecological security, but also for community’s socio-economic security. The convergence might be found in a range of alternative ways to conduct cacao sustainable production, from agroforestry system to intensification.

Fluorescence studies on the 3d-ionization threshold range in krypton

Krypton atoms were excited by photons in the energy range from the threshold for photoionization of the 3d-electrons up to 120 eV. and the fluorescence radiation in the spectral range from 780 to 965 A was observed and analyzed. Cross sections for the population of excited states in KrIII with at least one 4s-hole resulting from an Auger transition as the first decay step and for KrII satellites were determined. The energy dependence of the 3d-ionization cross section in the 3d{_5/2}- and the 3d{_3/2}-threshold range was derived from the experimental data. The cross sections for production of KrII states were found to follow the energy dependence of the 3d-cross sections.

A Study of a Comprehensive Career Services System in Chinese Universities

Since 1999, with the adoption of expansion policy in higher education by the Chinese government, enrollment and graduate numbers have been increasing at an unprecedented speed. Accustomed to a system in which university graduates were placed, many students are not trained in “selling themselves”, which exacerbates the situation leading to a skyrocketing unemployment rate among new graduates. The idea of emphasizing career services comes with increasing employment pressure among university graduates in recent years. The 1998 “Higher Education Act” made it a legislative requirement. Thereafter, the Ministry of Education issued a series of documents in order to promote the development of career services. All higher education institutions are required to set up special career service centers and to set a ratio of 1:500 between career staff and the total number of students. Related career management courses, especially career planning classes, are required to be clearly included as specific modules into the teaching plan with a requirement of no less than 38 sessions in one semester at all universities. Developing career services in higher education has thus become a hot issue. One of the more notable trends in higher education in recent years has been the transformation of university career service centers from merely being the coordinators of on-campus placement into full service centers for international career development. The traditional core of career services in higher education had been built around guidance, information and placements (Watts, 1997). This core was still in place, but the role of higher education career services has changed considerably in recent years and the nature of each part is being transformed (Watts, 1997). Most services are undertaking a range of additional activities, and the career guidance issue is emphasized much more than before. Career management courses, especially career planning classes, are given special focus in developing career services in the Chinese case. This links career services clearly and directly with the course provision function. In China, most career service centers are engaging in the transformation period from a “management-oriented” organization to a “service-oriented” organization. Besides guidance services, information services and placement activities, there is a need to blend them together with the new additional teaching function, which follows the general trend as regulated by the government. The role of career services has been expanding and this has brought more challenges to its development in Chinese higher education. Chinese universities still remain in the period of exploration and establishment in developing their own career services. In the face of the new situation, it is very important and meaningful to explore and establish a comprehensive career services system to address student needs in the universities. A key part in developing this system is the introduction of career courses and delivering related career management skills to the students. So there is the need to restructure the career service sectors within the Chinese universities in general. The career service centers will operate as a hub and function as a spoke in the wheel of this model system, providing support and information to staff located in individual teaching departments who are responsible for the delivery of career education, information, advice and guidance. The career service centers will also provide training and career planning classes. The purpose of establishing a comprehensive career services system is to provide a strong base for student career development. The students can prepare themselves well in psychology, ideology and ability before employment with the assistance of effective career services. To conclude, according to the different characteristics and needs of students, there will be appropriate services and guidance in different stages and different ways. In other words, related career services and career guidance activities would be started for newly enrolled freshmen and continue throughout their whole university process. For the operation of a comprehensive services system, there is a need for strong support by the government in the form of macro-control and policy guarantee, but support by the government in the form of macro-control and policy guarantee, but also a need for close cooperation with the academic administration and faculties to be actively involved in career planning and employment programs. As an integral function within the universities, career services must develop and maintain productive relationships with relevant campus offices and key stakeholders both within the universities and externally.

MEMS-based Tunable Optical Filter Arrays for Nano-Spectrometer in the Visible Spectral Range

Optische Spektrometer sind bekannte Instrumente für viele Anwendungen in Life Sciences, Produktion und Technik aufgrund ihrer guten Selektivität und Sensitivität zusammen mit ihren berührungslosen Messverfahren. MEMS (engl. Micro-electro-mechanical system)-basierten Spektrometer werden als disruptive Technologie betrachtet, in der miniaturisierte Fabry-Pérot Filter als sehr attraktiv für die optische Kommunikation und 'Smart Personal Environments', einschließlich des medizinischen Anwendungen, zu nennen sind. Das Ziel dieser Arbeit ist, durchstimmbare Filter-Arrays mit kostengünstigen Technologien herzustellen. Materialien und technologische Prozesse, die für die Herstellung der Filter-Arrays benötigt werden, wurden untersucht. Im Rahmen dieser Arbeit, wurden durchstimmbare Fabry Pérot Filter-Arrays für den sichtbaren Spektralbereich untersucht, die als Nano-Spektrometer eingesetzt werden. Darüber hinaus wurde ein Modell der numerischen Simulation vorgestellt, die zur Ermittlung eines optimales geometrisches Designs verwendet wurde, wobei sich das Hauptaugenmerk der Untersuchung auf die Durchbiegung der Filtermembranen aufgrund der mechanischen Verspannung der Schichten richtet. Die geometrische Form und Größe der Filtermembranen zusammen mit der Verbindungsbrücken sind von entscheidender Bedeutung, da sie die Durchbiegung beeinflussen. Lange und schmale Verbindungsbrücken führen zur stärkeren Durchbiegung der Filtermembranen. Dieser Effekt wurde auch bei der Vergrößerung der Durchmesser der Membran beobachtet. Die Filter mit spiralige (engl. curl-bent) Verbindungsbrücken führten zu geringerer Deformation als die mit geraden oder gebogenen Verbindungsbrücken. Durchstimmbare Si3N4/SiO2 DBR-basierende Filter-Arrays wurden erfolgreich hergestellt. Eine Untersuchung über die UV-NIL Polymere, die als Opferschicht und Haltepfosten-Material der Filter verwendet wurden, wurde durchgeführt. Die Polymere sind kompatibel zu dem PECVD-Verfahren, das für die Spiegel-Herstellung verwendet wird. Die laterale Strukturierung der DBR-Spiegel mittels des RIE (engl. Reactive Ion Etching)-Prozesses sowie der Unterätz-Prozess im Sauerstoffplasma zur Entfernung der Opferschicht und zum Erreichen der Luftspalt-Kavität, wurden durchgeführt. Durchstimmbare Filter-Arrays zeigten einen Abstimmbereich von 70 nm bei angelegten Spannungen von weniger als 20 V. Optimierungen bei der Strukturierung von TiO2/SiO2 DBR-basierenden Filtern konnte erzielt werden. Mit der CCP (engl. Capacitively Coupling Plasma)-RIE, wurde eine Ätzrate von 20 nm/min erreicht, wobei Fotolack als Ätzmaske diente. Mit der ICP (engl. Inductively Coupling Plasma)-RIE, wurden die Ätzrate von mehr als 60 nm/min mit einem Verhältniss der Ar/SF6 Gasflüssen von 10/10 sccm und Fotolack als Ätzmasken erzielt. Eine Ätzrate von 80 bis 90 nm/min wurde erreicht, hier diente ITO als Ätzmaske. Ausgezeichnete geätzte Profile wurden durch den Ätzprozess unter Verwendung von 500 W ICP/300 W RF-Leistung und Ar/SF6 Gasflüsse von 20/10 sccm erreicht. Die Ergebnisse dieser Arbeit ermöglichen die Realisierung eines breiten Spektralbereichs der Filter-Arrays im Nano-Spektrometer.