Micro-fabrication of bio-MEMS based force sensor to measure the force response of living cells

Understanding how a living cell behaves has become a very important topic in today’s research field. Hence, different sensors and testing devices have been designed to test the mechanical properties of these living cells. This thesis presents a method of micro-fabricating a bio-MEMS based force sensor which is used to measure the force response of living cells. Initially, the basic concepts of MEMS have been discussed and the different micro-fabrication techniques used to manufacture various MEMS devices have been described. There have been many MEMS based devices manufactured and employed for testing many nano-materials and bio-materials. Each of the MEMS based devices described in this thesis use a novel concept of testing the specimens. The different specimens tested are nano-tubes, nano-wires, thin film membranes and biological living cells. Hence, these different devices used for material testing and cell mechanics have been explained. The micro-fabrication techniques used to fabricate this force sensor has been described and the experiments preformed to successfully characterize each step in the fabrication have been explained. The fabrication of this force sensor is based on the facilities available at Michigan Technological University. There are some interesting and uncommon concepts in MEMS which have been observed during this fabrication. These concepts in MEMS which have been observed are shown in multiple SEM images.

A Preliminary Study of the Micro-Fauna of Certain Paleozoic Formations of Montana

The study of the micro-fauna of Montana formations has been almost entirely neglected. Because the petroleum industry of this state has not felt the necessity for using micro-paleontology in its sub-surface correlations, the science has been but little used. The Montana Power Company has had an examination made of some of its well cuttings by a competent micro-paleontologist who found some foraminifera in Mesozoic sediments. However, no investiga­tions have been made to determine the presence and character of the micro-fauna of the Paleozoic formations of Montana.