Topology Optimization of Micromachined Structures with the Manufacturing Constraints of KOH Etching of (110) Silicon

The focus of this paper is on designing useful compliant micro-mechanisms of high-aspect-ratio which can be microfabricated by the cost-effective wet etching of (110) orientation silicon (Si) wafers. Wet etching of (110) Si imposes constraints on the geometry of the realized mechanisms because it allows only etch-through in the form of slots parallel to the wafer's flat with a certain minimum length. In this paper, we incorporate this constraint in the topology optimization and obtain compliant designs that meet the specifications on the desired motion for given input forces. Using this design technique and wet etching, we show that we can realize high-aspect-ratio compliant micro-mechanisms. For a (110) Si wafer of 250 µm thickness, the minimum length of the etch opening to get a slot is found to be 866 µm. The minimum achievable width of the slot is limited by the resolution of the lithography process and this can be a very small value. This is studied by conducting trials with different mask layouts on a (110) Si wafer. These constraints are taken care of by using a suitable design parameterization rather than by imposing the constraints explicitly. Topology optimization, as is well known, gives designs using only the essential design specifications. In this work, we show that our technique also gives manufacturable mechanism designs along with lithography mask layouts. Some designs obtained are transferred to lithography masks and mechanisms are fabricated on (110) Si wafers.

REDEFINE: Architecture of a SoC Fabric for Runtime Composition of Computation Structures

In this paper we propose the architecture of a SoC fabric onto which applications described in a HLL are synthesized. The fabric is a homogeneous layout of computation, storage and communication resources on silicon. Through a process of composition of resources (as opposed to decomposition of applications), application specific computational structures are defined on the fabric at runtime to realize different modules of the applications in hardware. Applications synthesized on this fabric offers performance comparable to ASICs while retaining the programmability of processing cores. We outline the application synthesis methodology through examples, and compare our results with software implementations on traditional platforms with unbounded resources.

Recent Research in Structural Health Monitoring

Roctest Group believes in the importance of maintaining a close contact with the scientific community active in fields close to our activities domains, in particular smart structures, structural engineering, sensing and fiber optic sensors. These contacts allow Roctest SMARTEC Telemac to remain at the front of scientific progress and to contribute to the diffusion of the monitoring culture worldwide. Our research and development team actively contributes in the research community, attending conferences and regularly publishing in the scientific literature. we support academic research by participating in joint research projects and by regularly welcoming graduate and undergraduate students for stages and exchange programs.