Parallel Coupled Micro-Macro Actuators

This thesis presents a new actuator system consisting of a micro-actuator and a macro-actuator coupled in parallel via a compliant transmission. The system is called the Parallel Coupled Micro-Macro Actuator, or PaCMMA. In this system, the micro-actuator is capable of high bandwidth force control due to its low mass and direct-drive connection to the output shaft. The compliant transmission of the macro-actuator reduces the impedance (stiffness) at the output shaft and increases the dynamic range of force. Performance improvement over single actuator systems was expected in force control, impedance control, force distortion and reduction of transient impact forces. A set of quantitative measures is proposed and the actuator system is evaluated against them: Force Control Bandwidth, Position Bandwidth, Dynamic Range, Impact Force, Impedance ("Backdriveability'"), Force Distortion and Force Performance Space. Several theoretical performance limits are derived from the saturation limits of the system. A control law is proposed and control system performance is compared to the theoretical limits. A prototype testbed was built using permanenent magnet motors and an experimental comparison was performed between this actuator concept and two single actuator systems. The following performance was observed: Force bandwidth of 56Hz, Torque Dynamic Range of 800:1, Peak Torque of 1040mNm, Minimum Torque of 1.3mNm. Peak Impact Force was reduced by an order of magnitude. Distortion at small amplitudes was reduced substantially. Backdriven impedance was reduced by 2-3 orders of magnitude. This actuator system shows promise for manipulator design as well as psychophysical tests of human performance.

Effects of Platinum on NiPtSiGe/n-SiGe and NiPtSi/n-Si Schottky Contacts

Solid phase reaction of NiPt/Si and NiPt/SiGe is one of the key issues for silicide (germanosilicide) technology. Especially, the NiPtSiGe, in which four elements are involved, is a very complex system. As a result, a detailed study is necessary for the interfacial reaction between NiPt alloy film and SiGe substrate. Besides using traditional material characterization techniques, characterization of Schottky diode is a good measure to detect the interface imperfections or defects, which are not easy to be found on large area blanket samples. The I-V characteristics of 10nm Ni(Pt=0, 5, 10 at.%) germanosilicides/n-Si₀/₇Ge₀.₃ and silicides/n-Si contact annealed at 400 and 500°C were studied. For Schottky contact on n-Si, with the addition of Pt in the Ni(Pt) alloy, the Schottky barrier height (SBH) increases greatly. With the inclusion of a 10% Pt, SBH increases ~0.13 eV. However, for the Schottky contacts on SiGe, with the addition of 10% Pt, the increase of SBH is only ~0.04eV. This is explained by pinning of the Fermi level. The forward I-V characteristics of 10nm Ni(Pt=0, 5, 10 at.%)SiGe/SiGe contacts annealed at 400°C were investigated in the temperature range from 93 to 300K. At higher temperature (>253K) and larger bias at low temperature (<253K), the I-V curves can be well explained by a thermionic emission model. At lower temperature, excess currents at lower forward bias region occur, which can be explained by recombination/generation or patches due to inhomogenity of SBH with pinch-off model or a combination of the above mechanisms.

Design and Development of 3-DOF Modular Micro Parallel Kinematic Manipulator

This paper presents the research and development of a 3-legged micro Parallel Kinematic Manipulator (PKM) for positioning in micro-machining and assembly operations. The structural characteristics associated with parallel manipulators are evaluated and the PKMs with translational and rotational movements are identified. Based on these identifications, a hybrid 3-UPU (Universal Joint-Prismatic Joint-Universal Joint) parallel manipulator is designed and fabricated. The principles of the operation and modeling of this micro PKM is largely similar to a normal size Stewart Platform (SP). A modular design methodology is introduced for the construction of this micro PKM. Calibration results of this hybrid 3-UPU PKM are discussed in this paper.

Investigation of aspect ratio of hole drilling from micro to nanoscale via focused ion beam fine milling

Holes with different sizes from microscale to nanoscale were directly fabricated by focused ion beam (FIB) milling in this paper. Maximum aspect ratio of the fabricated holes can be 5:1 for the hole with large size with pure FIB milling, 10:1 for gas assistant etching, and 1:1 for the hole with size below 100 nm. A phenomenon of volume swell at the boundary of the hole was observed. The reason maybe due to the dose dependence of the effective sputter yield in low intensity Gaussian beam tail regions and redeposition. Different materials were used to investigate variation of the aspect ratio. The results show that for some special material, such as Ni-Be, the corresponding aspect ratio can reach 13.8:1 with Cl₂ assistant etching, but only 0.09:1 for Si(100) with single scan of the FIB.

Micro-layered-photolithography for Micro-Fabrication and Micro-Molding

A novel process based on the principle of layered photolithography has been proposed and tested for making real three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dimensional (2D) patterns sliced from a three dimensional (3D) micro-part was employed for the photolithography process. The experiments were conducted on the solidification of liquid photopolymer from single layer to multiple layers. The single-layer photolithography experiments showed that certain photopolymers could be applied for the 3D micro-fabrication, and solid layers with sharp shapes could be formed from the liquid polymer identified. By using a unique alignment technique, multiple layers of photolithography was successfully realized for a micro-gear with features at 60 microns. Electroforming was also conducted for converting the photopolymer master to a metal cavity of the micro-gear, which proved that the process is feasible for micro-molding.

Process Variability in Micro-Embossing

A promising technique for the large-scale manufacture of micro-fluidic devices and photonic devices is hot embossing of polymers such as PMMA. Micro-embossing is a deformation process where the workpiece material is heated to permit easier material flow and then forced over a planar patterned tool. While there has been considerable, attention paid to process feasibility very little effort has been put into production issues such as process capability and eventual process control. In this paper, we present initial studies aimed at identifying the origins and magnitude of variability for embossing features at the micron scale in PMMA. Test parts with features ranging from 3.5- 630 µm wide and 0.9 µm deep were formed. Measurements at this scale proved very difficult, and only atomic force microscopy was able to provide resolution sufficient to identify process variations. It was found that standard deviations of widths at the 3-4 µm scale were on the order of 0.5 µm leading to a coefficient of variation as high as 13%. Clearly, the transition from test to manufacturing for this process will require understanding the causes of this variation and devising control methods to minimize its magnitude over all types of parts.

The Inertio-Elastic Planar Entry Flow of Low-Viscosity Elastic Fluids in Micro-fabricated Geometries

The non-Newtonian flow of dilute aqueous polyethylene oxide (PEO) solutions through microfabricated planar abrupt contraction-expansions is investigated. The contraction geometries are fabricated from a high-resolution chrome mask and cross-linked PDMS gels using the tools of soft-lithography. The small length scales and high deformation rates in the contraction throat lead to significant extensional flow effects even with dilute polymer solutions having time constants on the order of milliseconds. The dimensionless extra pressure drop across the contraction increases by more than 200% and is accompanied by significant upstream vortex growth. Streak photography and videomicroscopy using epifluorescent particles shows that the flow ultimately becomes unstable and three-dimensional. The moderate Reynolds numbers (0.03 ≤ Re ≤ 44) associated with these high Deborah number (0 ≤ De ≤ 600) microfluidic flows results in the exploration of new regions of the Re-De parameter space in which the effects of both elasticity and inertia can be observed. Understanding such interactions will be increasingly important in microfluidic applications involving complex fluids and can best be interpreted in terms of the elasticity number, El = De/Re, which is independent of the flow kinematics and depends only on the fluid rheology and the characteristic size of the device.

Major-elements trends in cenozoic volcanites of Hungary

Hungary lies entirely within the Carpatho-Pannonian Region (CPR), a dominant tectonic unit of eastern Central Europe. The CPR consists of the Pannonian Basin system, and the arc of the Carpathian Mountains surrounding the lowlands in the north, east, and southeast. In the west, the CPR is bounded by the Eastern Alps, whereas in the south, by the Dinaridic belt. (...)

Disseny d’un banc d’assaig d’efectes diferits en elements de formigó armat amb barres FRP

L'objectiu d'aquest projecte és el disseny dels bancs d'assaig necessaris per poder realitzar tres assajos de fisuració i deformació diferida al laboratori de resistència de materials de la UdG sobre provetes i bigues de formigó armat amb FRP i estudiar- ne el comportament. El primer assaig és el de fluència del formigó, on es sotmet una proveta a una compressió mantinguda en el temps. El segon assaig és un de tracció directa, on s'aplica una càrrega a tracció mantinguda en el temps en una proveta de formigó armat amb una barra FRP de reforç intern. El tercer és un assaig a flexió, on es carregarà una biga a flexió durant un període llarg de temps

Estudi hidrodinàmic per elements finits de diferents pales simètriques per a la impulsió a rem en banc fix

Actualment l’esport del rem només s’entén com a activitat de lleure o esport de competició. Dins del rem, hi ha una gran varietat de disciplines esportives; totes coincideixen en l’impuls d’una embarcació mitjançant un sistema de palanques simple. Es diferencien en dos grans grups: el banc mòbil i el banc fix. El banc mòbil disposa d’un seient sobre rodes que permet aprofitar la força de les cames per la impulsió, en canvi, en el banc fix, no hi ha desplaçament del seient, el que implica el treball del tors i braços. Un dels punts que tenen en comú tot el banc fix, és el disseny del seu rem; a diferència del banc mòbil on la pala pot tenir el disseny que es vulgui. En banc fix la pala del rem ha de ser simètrica i alineada amb la canya del rem. L’objectiu d’aquest projecte és l’anàlisi hidrodinàmic de diferents models de pales simètriques per tal de determinar el model més eficient, des del punt de vista hidrodinàmic, per a la impulsió de l’embarcació de banc fix. Així, es simularan virtualment diferents models de pales simètriques disponibles en el mercat com models prototipus amb un programa de dinàmica de fluids computacional. L’anàlisi dels resultats determinarà el model més eficient. En la realització del projecte, l’estudi hidrodinàmic es realitzarà de manera virtual a partir de la utilització de programes comercials de dinàmica de fluids. Així com també programes de disseny 3D i programes de mallat que siguin compatibles amb el programa de simulació a utilitzar. En el disseny s’utilitzaran programes com Autocad i Rhinoceros, després, en funció del disseny, utilitzarem un programa d’elements finits anomenat ICEM ANSYS que mallarà la geometria emprada. Finalment, la simulació s’efectuarà amb el programa ANSYS CFX. L’estudi no preveu el càlcul de resistència mecànica dels models ni la seva construcció

Modelització numèrica d’un sistema de descàrrega d’una columna de la catedral d Girona mitjançant el mètode dels elements finits (anàlisi no lineal)

Aquest projecte consisteix en aplicar el càlcul no lineal en la modelització volumètrica numèrica de l’estructura del sistema de descàrrega d’una columna del claustre de la catedral de Girona mitjançant el mètode dels elements finits. A la Universitat de Girona s’ha fet diferents estudis del claustre de la catedral de Girona però sempre simulant un comportament lineal de les característiques dels materials. El programa utilitzat és la versió docent del programa ANSYS disponible al Dept. d’EMCI i l’element emprat ha sigut el SOLID65. Aquest element permet introduir característiques de no linealitat en els models i és adequat per a anàlisi no lineal d’elements com la pedra de Girona

Periodic Table of Elements

An essential tool for chemistry students. Presentation of the table in which elements are assigned a symbol and shows the atomic number of each element.

Elements de reflexió per a l'anàlisi del sistema educatiu de les Illes Balears. 'Elementos de reflexión para el análisis del sistema educativo de las Islas Baleares'.

Resumen tomado de la publicación

El fracàs escolar a les Illes Balears : elements per a l'anàlisi i la comprensió. 'El fracaso escolar en las Islas Baleares : elementos para el análisis y la comprensión'.

Resumen tomado de la publicación

Elements per a un nou model territorial d'organització del sistema escolar de les Illes Balears. 'Elementos para un nuevo modelo territorial de organización del sistema escolar de las Islas Baleares'.

Resumen tomado de la analítica