Optical intrinsically fuzzy mathematical morphology for gray-scale image processing

Intrinsically fuzzy morphological erosion and dilation are extended to a total of eight operations that have been formulated in terms of a single morphological operation--biased dilation. Based on the spatial coding of a fuzzy variable, a bidirectional projection concept is proposed. Thus, fuzzy logic operations, arithmetic operations, gray-scale dilation, and erosion for the extended intrinsically fuzzy morphological operations can be included in a unified algorithm with only biased dilation and fuzzy logic operations. To execute this image algebra approach we present a cellular two-layer processing architecture that consists of a biased dilation processor and a fuzzy logic processor. (C) 1996 Optical Society of America

Morphological ordered gray-scale erosion for optical image processing

An ordered gray-scale erosion is suggested according to the definition of hit-miss transform. Instead of using three operations, two images, and two structuring elements, the developed operation requires only one operation and one structuring element, but with three gray-scale levels. Therefore, a union of the ordered gray-scale erosions with different structuring elements can constitute a simple image algebra to program any combined image processing function. An optical parallel ordered gray-scale erosion processor is developed based on the incoherent correlation in a single channel. Experimental results are also given for an edge detection and a pattern recognition. (C) 1998 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(98)00306-7].

Coma measurement using a PSM and transmission image sensor

As feature size decreases, especially with the use of resolution enhancement technique, requirements for the coma aberrations in the projection lenses of the lithographic tools have become extremely severe. So, fast and accurate in situ measurement of coma is necessary. In the present paper, we present a new method for characterizing the coma aberrations in the projection lens using a phase-shifting mask and a transmission image sensor. By measuring the image positions at multiple NA and partial coherence settings, we are able to extract the coma aberration. The simulation results show that the accuracy of coma measurement increases approximately 20% compared to the previous straightforward measurement technique. (c) 2005 Elsevier GmbH. All rights reserved.

Mechanics of deformable glacier beds

My focus in this thesis is to contribute to a more thorough understanding of the mechanics of ice and deformable glacier beds. Glaciers flow under their own weight through a combination of deformation within the ice column and basal slip, which involves both sliding along and deformation within the bed. Deformable beds, which are made up of unfrozen sediment, are prevalent in nature and are often the primary contributors to ice flow wherever they are found. Their granular nature imbues them with unique mechanical properties that depend on the granular structure and hydrological properties of the bed. Despite their importance for understanding glacier flow and the response of glaciers to changing climate, the mechanics of deformable glacier beds are not well understood.

Our general approach to understanding the mechanics of bed deformation and their effect on glacier flow is to acquire synoptic observations of ice surface velocities and their changes over time and to use those observations to infer the mechanical properties of the bed. We focus on areas where changes in ice flow over time are due to known environmental forcings and where the processes of interest are largely isolated from other effects. To make this approach viable, we further develop observational methods that involve the use of mapping radar systems. Chapters 2 and 5 focus largely on the development of these methods and analysis of results from ice caps in central Iceland and an ice stream in West Antarctica. In Chapter 3, we use these observations to constrain numerical ice flow models in order to study the mechanics of the bed and the ice itself. We show that the bed in an Iceland ice cap deforms plastically and we derive an original mechanistic model of ice flow over plastically deforming beds that incorporates changes in bed strength caused by meltwater flux from the surface. Expanding on this work in Chapter 4, we develop a more detailed mechanistic model for till-covered beds that helps explain the mechanisms that cause some glaciers to surge quasi-periodically. In Antarctica, we observe and analyze the mechanisms that allow ocean tidal variations to modulate ice stream flow tens of kilometers inland. We find that the ice stream margins are significantly weakened immediately upstream of the area where ice begins to float and that this weakening likely allows changes in stress over the floating ice to propagate through the ice column.

Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings

In this paper, we propose a novel method for measuring the coma aberrations of lithographic projection optics based on relative image displacements at multiple illumination settings. The measurement accuracy of coma can be improved because the phase-shifting gratings are more sensitive to the aberrations than the binary gratings used in the TAMIS technique, and the impact of distortion on displacements of aerial image can be eliminated when the relative image displacements are measured. The PROLITH simulation results show that, the measurement accuracy of coma increases by more than 25% under conventional illumination, and the measurement accuracy of primary coma increases by more than 20% under annular illumination, compared with the TAMIS technique. (c) 2007 Optical Society of America.