Tunable mechanical resonator with aluminum nitride piezoelectric

The electromechanical response of piezoelectrically-actuated AlN micromachined bridge resonators has been characterized using laser interferometry and electrical admittance measurements. We compare the response of microbridges with different dimensions and buckling (induced by the initial residual stress of the layers). The resonance frequencies are in good agreement with numerical simulations of the electromechanical behavior of the structures. We show that it is possible to perform a rough tuning of the resonance frequencies by allowing a determined amount of builtin stress in the microbridge during its fabrication. Once the resonator is made, a DC bias added to the AC excitation signal allows to fine-tune the frequency. Our microbridges yield a tuning factor of around 88 Hz/V for a 500 ?m-long microbridge.

Aluminum slurry coatings to replace cadmium for aeronautic applications

Cadmium has been widely used as a coating to provide protection against galvanic corrosion for steels and for its natural lubricity on threaded applications. However, it is a toxic metal and a known carcinogenic agent, which is plated from an aqueous bath containing cyanide salts. For these reasons, the use of cadmium has been banned in Europe for most industrial applications. However, the aerospace industry is still exempt due to the stringent technical and safety requirements associated with aeronautical applications, as an acceptable replacement is yet to be found. Al slurry coatings have been developed as an alternative to replace cadmium coatings. The coatings were deposited on AISI 4340 steel and have been characterized by optical and electron microscopy. Testing included salt fog corrosion exposure, fluid corrosion exposure (immersion), humidity resistance, coating-substrate and paint-coating adhesion, electric conductivity, galvanic corrosion, embrittlement and fatigue. The results indicated that Al slurry coatings are an excellent alternative for Cd replacement.

Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators

We investigate the sputter growth of very thin aluminum nitride (AlN) films on iridium electrodes for electroacoustic devices operating in the super high frequency range. Superior crystal quality and low stress films with thicknesses as low as 160 nm are achieved after a radio frequency plasma treatment of the iridium electrode followed by a two-step alternating current reactive magnetron sputtering of an aluminum target, which promotes better conditions for the nucleation of well textured AlN films in the very first stages of growth. Solidly mounted resonators tuned around 8 GHz with effective electromechanical coupling factors of 5.8% and quality factors Q up to 900 are achieved.