Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width

The correlation between the coma sensitivity of the alternating phase-shifting mask (Alt-PSM) mark and the mark's structure is studied based on the Hopkins theory of partially coherent imaging and positive resist optical lithography (PROLITH) simulation. It is found that an optimized Alt-PSM mark with its phase width being two-thirds its pitch has a higher sensitivity to coma than Alt-PSM marks with the same pitch and the different phase widths. The pitch of the Alt-PSM mark is also optimized by PROLITH simulation, and the structure of p - 1.92 lambda/NA and pw = 2p/3 proves to be with the highest sensitivity. The optimized Alt-PSM mark is used as a measurement mark to retrieve coma aberration from the projection optics in lithographic tools. In comparison with an ordinary Alt-PSM mark with its phase width being a half its pitch, the measurement accuracies of Z(7) and Z(14) apparently increase. (C) 2009 Optical Society of America

System error removal and structure optimization based on Fizeau interferometer

In the process of interferometric testing, the measurement result is influenced by the system structure, which reduces the measurement accuracy. To obtain an accurate test result, it is necessary to analyze the test system, and build the relationship between the measurement error and the system parameters. In this paper, the influences of the system elements which include the collimated lens and the standard surface on the interferometric testing are analyzed, the expressions of phase distribution and wavefront error on the detector are obtained, the method to remove some element errors is introduced, and the optimization structure relationships are given. (C) 2006 Elsevier GmbH. All rights reserved.

Phase unwrapping algorithms, respectively, based on path-following and discrete cosine transform

This paper describes a path-following phase unwrapping algorithm and a phase unwrapping algorithm based on discrete cosine transform (DCT) which accelerates the Computation and suppresses the propagation of noise. Through analysis of fringe pattern with serious noises simulated in mathematic model, we make a contrast between path-following algorithm and DCT algorithm. The advantages and disadvantages or analytical fringe pattern are also given through comparison of two algorithms. Three-dimensional experimental results have been given to prove the validity of these algorithms. Despite DCT phase unwrapping technique robustness and speed in some cases, it cannot be unwrapping inconsistencies phase. The path-following algorithm can be used in automation analysis of fringe patterns with little influence of noise. (c) 2007 Elsevier GmbH. All rights reserved.

Virtual Sensors for On-line Wheel Wear and Part Roughness Measurement in the Grinding Process

Grinding is an advanced machining process for the manufacturing of valuable complex and accurate parts for high added value sectors such as aerospace, wind generation, etc. Due to the extremely severe conditions inside grinding machines, critical process variables such as part surface finish or grinding wheel wear cannot be easily and cheaply measured on-line. In this paper a virtual sensor for on-line monitoring of those variables is presented. The sensor is based on the modelling ability of Artificial Neural Networks (ANNs) for stochastic and non-linear processes such as grinding; the selected architecture is the Layer-Recurrent neural network. The sensor makes use of the relation between the variables to be measured and power consumption in the wheel spindle, which can be easily measured. A sensor calibration methodology is presented, and the levels of error that can be expected are discussed. Validation of the new sensor is carried out by comparing the sensor's results with actual measurements carried out in an industrial grinding machine. Results show excellent estimation performance for both wheel wear and surface roughness. In the case of wheel wear, the absolute error is within the range of microns (average value 32 mu m). In the case of surface finish, the absolute error is well below R-a 1 mu m (average value 0.32 mu m). The present approach can be easily generalized to other grinding operations.

Estimates of growth and comparisons of growth rates determined from length- and age-based models for populations of purple wrasse (Notolabrus fucicola)

Growth of a temperate reefa-ssociated fish, the purple wrasse (Notolabrus fucicola), was examined from two sites on the east coast of Tasmania by using age- and length-based models. Models based on the von Bertalanffy growth function, in the standard and a reparameterized form, were constructed by using otolith-derived age estimates. Growth trajectories from tag-recaptures were used to construct length-based growth models derived from the GROTAG model, in turn a reparameterization of the Fabens model. Likelihood ratio tests (LRTs) determined the optimal parameterization of the GROTAG model, including estimators of individual growth variability, seasonal growth, measurement error, and outliers for each data set. Growth models and parameter estimates were compared by bootstrap confidence intervals, LRTs, and randomization tests and plots of bootstrap parameter estimates. The relative merit of these methods for comparing models and parameters was evaluated; LRTs combined with bootstrapping and randomization tests provided the most insight into the relationships between parameter estimates. Significant differences in growth of purple wrasse were found between sites in both length- and age-based models. A significant difference in the peak growth season was found between sites, and a large difference in growth rate between sexes was found at one site with the use of length-based models.

Spectral measurement of diode lasers with a single-mode birefringent fibre

A new, and very simple spectrometer based on birefringent fiber is described. A resolution of 0.02 angstrom has been achieved, and the system has been used to measure diode laser chirp. A length of 10km of fiber would be sufficient to resolve single mode line widths.

Model-based control of a Rijke tube combustion instability

A Rijke tube is used to demonstrate model-based control of a combustion instability, where controller design is based on measurement of the unstable system. The Rijke tube used was of length 0.75m and had a grid-stabilised laminar flame in its lower half. A microphone was used as a sensor and a loudspeaker as an actuator for active control. The open loop transfer function (OLTF) required for controller design was that from the actuator to the sensor. This was measured experimentally by sending a signal with two components to the actuator. The first was a control component from an empirically designed controller, which was used to stabilise the system, thus eliminating the non-linear limit cycle. The second was a high bandwidth signal for identification of the OLTF. This approach to measuring the OLTF is generic and can be applied to large-scale combustors. The measured OLTF showed that only the fundamental mode of the tube was unstable; this was consistent with the OLTF predicted by a mathematical model of the tube, involving 1-D linear acoustic waves and a time delay heat release model. Based on the measured OLTF, a controller to stabilise the instability was designed using Nyquist techniques. This was implemented and was seen to result in an 80dB reduction in the microphone pressure spectrum. A robustness study was performed by adding an additional length to the top of the Rijke tobe. The controller was found to achieve control up to an increase in tube length of 19%. This compared favourably with the empirical controller, which lost control for an increase in tube length of less than 3%.

Time-resolved volumetric measurement of fine-scale coherent structures in turbulence.

We present full volumetric (three-dimensional) time-resolved (+one-dimensional) measurements of the velocity field in a large water mixing tank, allowing us to assess spatial and temporal rotational energy (enstrophy) and turbulent energy dissipation intermittency. In agreement with previous studies, highly intermittent behavior is observed, with intense coherent flow structures clustering in the periphery of larger vortices. However, further to previous work the full volumetric measurements allow us to separate out the effects of advection from other effects, elucidating not only their topology but also the evolution of these intense events, through the local balance of stretching and diffusion. These findings contribute toward a better understanding of the intermittency phenomenon, which should pave the way for more accurate models of the small-scale motions based on an understanding of the underlying flow physics.

The measurement error in marine survey catches: the bottom trawl case

We have formulated a model for analyzing the measurement error in marine survey abundance estimates by using data from parallel surveys (trawl haul or acoustic measurement). The measurement error is defined as the component of the variability that cannot be explained by covariates such as temperature, depth, bottom type, etc. The method presented is general, but we concentrate on bottom trawl catches of cod (Gadus morhua). Catches of cod from 10 parallel trawling experiments in the Barents Sea with a total of 130 paired hauls were used to estimate the measurement error in trawl hauls. Based on the experimental data, the measurement error is fairly constant in size on the logarithmic scale and is independent of location, time, and fish density. Compared with the total variability of the winter and autumn surveys in the Barents Sea, the measurement error is small (approximately 2–5%, on the log scale, in terms of variance of catch per towed distance). Thus, the cod catch rate is a fairly precise measure of fish density at a given site at a given time.

Measurement of the Mechanical Properties of Filtercakes

In order to improve drilling mud design to cater for specific well situations, a more comprehensive knowledge and understanding of filter cake failure is needed. This paper describes experimental techniques aimed at directly probing the mechanical properties of filter cakes, without having to take into account artefacts due to fluid flow in the substrate. The use of rheometers allows us to determine shear yield stress and dynamic shear modulii of cakes grown on filter paper. A new scraping technique measures the strength and moisture profiles of typical filter cakes with a 0.1 mm resolution. This technique also allows us to probe the adhesion between the filter cake and its rock substrate. In addition, œdometer drained consolidation and unloading of a filter cake give us compression parameters useful for Cam Clay modelling. These independent measurements give similar results as to the elastic modulus of different filter cakes, showing an order of magnitude difference between water based and oil based cakes. We find that these standard cakes behave predominantly as purely elastic materials, with a sharp transition into plastic flow, allowing for the determination of a well-defined yield stress. The effect ofsolids loading on a given type of mud is also studied.

Transient thermal analysis of power devices based on Fourier-series thermal model

A new thermal model based on Fourier series expansion method has been presented for dynamic thermal analysis on power devices. The thermal model based on the Fourier series method has been programmed in MATLAB SIMULINK and integrated with a physics-based electrical model previously reported. The model was verified for accuracy using a two-dimensional Fourier model and a two-dimensional finite difference model for comparison. To validate this thermal model, experiments using a 600V 50A IGBT module switching an inductive load, has been completed under high frequency operation. The result of the thermal measurement shows an excellent match with the simulated temperature variations and temperature time-response within the power module. ©2008 IEEE.