Temperature performance of AlGaN/GaN MOS-HEMTs on Si substrates using Gd2O3 as gate dielectric

GaN based high electron mobility transistors have draw great attention due to its potential in high temperature, high power and high frequency applications [1, 2]. However, significant gate leakage current is still one of the issues which need to be solved to improve the performance and reliability of the devices [3]. Several research groups have contributed to solve this problem by using metal–oxide–semiconductor HEMTs (MOSHEMTs), with a thin dielectric layer, such as SiO2 [4], Al2O3 [5], HfO2 [6] and Gd2O3 [7] between the gate and the barrier layer on AlGaN/GaN heterostructures. Gd2O3 has shown low interfacial density of states(Dit) with GaN and a high dielectric constant and low electrical leakage currents [8], thus is considered as a promising candidate for the gate dielectrics on GaN. MOS-HEMTs using Gd2O3 grown by electron-beam heating [7] or molecular beam epitaxy (MBE) [8] on GaN or AlGan/GaN structure have been investigated, but further research is still needed in Gd2O3 based AlGaN/GaN MOSHEMTs.

Diseño de un módulo de IFMIF para irradiación de envolturas regeneradoras basadas en metales líquidos para reactores de fusión

La fusión nuclear es, hoy en día, una alternativa energética a la que la comunidad internacional dedica mucho esfuerzo. El objetivo es el de generar entre diez y cincuenta veces más energía que la que consume mediante reacciones de fusión que se producirán en una mezcla de deuterio (D) y tritio (T) en forma de plasma a doscientos millones de grados centígrados. En los futuros reactores nucleares de fusión será necesario producir el tritio utilizado como combustible en el propio reactor termonuclear. Este hecho supone dar un paso más que las actuales máquinas experimentales dedicadas fundamentalmente al estudio de la física del plasma. Así pues, el tritio, en un reactor de fusión, se produce en sus envolturas regeneradoras cuya misión fundamental es la de blindaje neutrónico, producir y recuperar tritio (fuel para la reacción DT del plasma) y por último convertir la energía de los neutrones en calor. Existen diferentes conceptos de envolturas que pueden ser sólidas o líquidas. Las primeras se basan en cerámicas de litio (Li2O, Li4SiO4, Li2TiO3, Li2ZrO3) y multiplicadores neutrónicos de Be, necesarios para conseguir la cantidad adecuada de tritio. Los segundos se basan en el uso de metales líquidos o sales fundidas (Li, LiPb, FLIBE, FLINABE) con multiplicadores neutrónicos de Be o el propio Pb en el caso de LiPb. Los materiales estructurales pasan por aceros ferrítico-martensíticos de baja activación, aleaciones de vanadio o incluso SiCf/SiC. Cada uno de los diferentes conceptos de envoltura tendrá una problemática asociada que se estudiará en el reactor experimental ITER (del inglés, “International Thermonuclear Experimental Reactor”). Sin embargo, ITER no puede responder las cuestiones asociadas al daño de materiales y el efecto de la radiación neutrónica en las diferentes funciones de las envolturas regeneradoras. Como referencia, la primera pared de un reactor de fusión de 4000MW recibiría 30 dpa/año (valores para Fe-56) mientras que en ITER se conseguirían <10 dpa en toda su vida útil. Esta tesis se encuadra en el acuerdo bilateral entre Europa y Japón denominado “Broader Approach Agreement “(BA) (2007-2017) en el cual España juega un papel destacable. Estos proyectos, complementarios con ITER, son el acelerador para pruebas de materiales IFMIF (del inglés, “International Fusion Materials Irradiation Facility”) y el dispositivo de fusión JT-60SA. Así, los efectos de la irradiación de materiales en materiales candidatos para reactores de fusión se estudiarán en IFMIF. El objetivo de esta tesis es el diseño de un módulo de IFMIF para irradiación de envolturas regeneradoras basadas en metales líquidos para reactores de fusión. El módulo se llamará LBVM (del inglés, “Liquid Breeder Validation Module”). La propuesta surge de la necesidad de irradiar materiales funcionales para envolturas regeneradoras líquidas para reactores de fusión debido a que el diseño conceptual de IFMIF no contaba con esta utilidad. Con objeto de analizar la viabilidad de la presente propuesta, se han realizado cálculos neutrónicos para evaluar la idoneidad de llevar a cabo experimentos relacionados con envolturas líquidas en IFMIF. Así, se han considerado diferentes candidatos a materiales funcionales de envolturas regeneradoras: Fe (base de los materiales estructurales), SiC (material candidato para los FCI´s (del inglés, “Flow Channel Inserts”) en una envoltura regeneradora líquida, SiO2 (candidato para recubrimientos antipermeación), CaO (candidato para recubrimientos aislantes), Al2O3 (candidato para recubrimientos antipermeación y aislantes) y AlN (material candidato para recubrimientos aislantes). En cada uno de estos materiales se han calculado los parámetros de irradiación más significativos (dpa, H/dpa y He/dpa) en diferentes posiciones de IFMIF. Estos valores se han comparado con los esperados en la primera pared y en la zona regeneradora de tritio de un reactor de fusión. Para ello se ha elegido un reactor tipo HCLL (del inglés, “Helium Cooled Lithium Lead”) por tratarse de uno de los más prometedores. Además, los valores también se han comparado con los que se obtendrían en un reactor rápido de fisión puesto que la mayoría de las irradiaciones actuales se hacen en reactores de este tipo. Como conclusión al análisis de viabilidad, se puede decir que los materiales funcionales para mantos regeneradores líquidos podrían probarse en la zona de medio flujo de IFMIF donde se obtendrían ratios de H/dpa y He/dpa muy parecidos a los esperados en las zonas más irradiadas de un reactor de fusión. Además, con el objetivo de ajustar todavía más los valores, se propone el uso de un moderador de W (a considerar en algunas campañas de irradiación solamente debido a que su uso hace que los valores de dpa totales disminuyan). Los valores obtenidos para un reactor de fisión refuerzan la idea de la necesidad del LBVM, ya que los valores obtenidos de H/dpa y He/dpa son muy inferiores a los esperados en fusión y, por lo tanto, no representativos. Una vez demostrada la idoneidad de IFMIF para irradiar envolturas regeneradoras líquidas, y del estudio de la problemática asociada a las envolturas líquidas, también incluida en esta tesis, se proponen tres tipos de experimentos diferentes como base de diseño del LBVM. Éstos se orientan en las necesidades de un reactor tipo HCLL aunque a lo largo de la tesis se discute la aplicabilidad para otros reactores e incluso se proponen experimentos adicionales. Así, la capacidad experimental del módulo estaría centrada en el estudio del comportamiento de litio plomo, permeación de tritio, corrosión y compatibilidad de materiales. Para cada uno de los experimentos se propone un esquema experimental, se definen las condiciones necesarias en el módulo y la instrumentación requerida para controlar y diagnosticar las cápsulas experimentales. Para llevar a cabo los experimentos propuestos se propone el LBVM, ubicado en la zona de medio flujo de IFMIF, en su celda caliente, y con capacidad para 16 cápsulas experimentales. Cada cápsula (24-22 mm de diámetro y 80 mm de altura) contendrá la aleación eutéctica LiPb (hasta 50 mm de la altura de la cápsula) en contacto con diferentes muestras de materiales. Ésta irá soportada en el interior de tubos de acero por los que circulará un gas de purga (He), necesario para arrastrar el tritio generado en el eutéctico y permeado a través de las paredes de las cápsulas (continuamente, durante irradiación). Estos tubos, a su vez, se instalarán en una carcasa también de acero que proporcionará soporte y refrigeración tanto a los tubos como a sus cápsulas experimentales interiores. El módulo, en su conjunto, permitirá la extracción de las señales experimentales y el gas de purga. Así, a través de la estación de medida de tritio y el sistema de control, se obtendrán los datos experimentales para su análisis y extracción de conclusiones experimentales. Además del análisis de datos experimentales, algunas de estas señales tendrán una función de seguridad y por tanto jugarán un papel primordial en la operación del módulo. Para el correcto funcionamiento de las cápsulas y poder controlar su temperatura, cada cápsula se equipará con un calentador eléctrico y por tanto el módulo requerirá también ser conectado a la alimentación eléctrica. El diseño del módulo y su lógica de operación se describe en detalle en esta tesis. La justificación técnica de cada una de las partes que componen el módulo se ha realizado con soporte de cálculos de transporte de tritio, termohidráulicos y mecánicos. Una de las principales conclusiones de los cálculos de transporte de tritio es que es perfectamente viable medir el tritio permeado en las cápsulas mediante cámaras de ionización y contadores proporcionales comerciales, con sensibilidades en el orden de 10-9 Bq/m3. Los resultados son aplicables a todos los experimentos, incluso si son cápsulas a bajas temperaturas o si llevan recubrimientos antipermeación. Desde un punto de vista de seguridad, el conocimiento de la cantidad de tritio que está siendo transportada con el gas de purga puede ser usado para detectar de ciertos problemas que puedan estar sucediendo en el módulo como por ejemplo, la rotura de una cápsula. Además, es necesario conocer el balance de tritio de la instalación. Las pérdidas esperadas el refrigerante y la celda caliente de IFMIF se pueden considerar despreciables para condiciones normales de funcionamiento. Los cálculos termohidráulicos se han realizado con el objetivo de optimizar el diseño de las cápsulas experimentales y el LBVM de manera que se pueda cumplir el principal requisito del módulo que es llevar a cabo los experimentos a temperaturas comprendidas entre 300-550ºC. Para ello, se ha dimensionado la refrigeración necesaria del módulo y evaluado la geometría de las cápsulas, tubos experimentales y la zona experimental del contenedor. Como consecuencia de los análisis realizados, se han elegido cápsulas y tubos cilíndricos instalados en compartimentos cilíndricos debido a su buen comportamiento mecánico (las tensiones debidas a la presión de los fluidos se ven reducidas significativamente con una geometría cilíndrica en lugar de prismática) y térmico (uniformidad de temperatura en las paredes de los tubos y cápsulas). Se han obtenido campos de presión, temperatura y velocidad en diferentes zonas críticas del módulo concluyendo que la presente propuesta es factible. Cabe destacar que el uso de códigos fluidodinámicos (e.g. ANSYS-CFX, utilizado en esta tesis) para el diseño de cápsulas experimentales de IFMIF no es directo. La razón de ello es que los modelos de turbulencia tienden a subestimar la temperatura de pared en mini canales de helio sometidos a altos flujos de calor debido al cambio de las propiedades del fluido cerca de la pared. Los diferentes modelos de turbulencia presentes en dicho código han tenido que ser estudiados con detalle y validados con resultados experimentales. El modelo SST (del inglés, “Shear Stress Transport Model”) para turbulencia en transición ha sido identificado como adecuado para simular el comportamiento del helio de refrigeración y la temperatura en las paredes de las cápsulas experimentales. Con la geometría propuesta y los valores principales de refrigeración y purga definidos, se ha analizado el comportamiento mecánico de cada uno de los tubos experimentales que contendrá el módulo. Los resultados de tensiones obtenidos, han sido comparados con los valores máximos recomendados en códigos de diseño estructural como el SDC-IC (del inglés, “Structural Design Criteria for ITER Components”) para así evaluar el grado de protección contra el colapso plástico. La conclusión del estudio muestra que la propuesta es mecánicamente robusta. El LBVM implica el uso de metales líquidos y la generación de tritio además del riesgo asociado a la activación neutrónica. Por ello, se han estudiado los riesgos asociados al uso de metales líquidos y el tritio. Además, se ha incluido una evaluación preliminar de los riesgos radiológicos asociados a la activación de materiales y el calor residual en el módulo después de la irradiación así como un escenario de pérdida de refrigerante. Los riesgos asociados al módulo de naturaleza convencional están asociados al manejo de metales líquidos cuyas reacciones con aire o agua se asocian con emisión de aerosoles y probabilidad de fuego. De entre los riesgos nucleares destacan la generación de gases radiactivos como el tritio u otros radioisótopos volátiles como el Po-210. No se espera que el módulo suponga un impacto medioambiental asociado a posibles escapes. Sin embargo, es necesario un manejo adecuado tanto de las cápsulas experimentales como del módulo contenedor así como de las líneas de purga durante operación. Después de un día de después de la parada, tras un año de irradiación, tendremos una dosis de contacto de 7000 Sv/h en la zona experimental del contenedor, 2300 Sv/h en la cápsula y 25 Sv/h en el LiPb. El uso por lo tanto de manipulación remota está previsto para el manejo del módulo irradiado. Por último, en esta tesis se ha estudiado también las posibilidades existentes para la fabricación del módulo. De entre las técnicas propuestas, destacan la electroerosión, soldaduras por haz de electrones o por soldadura láser. Las bases para el diseño final del LBVM han sido pues establecidas en el marco de este trabajo y han sido incluidas en el diseño intermedio de IFMIF, que será desarrollado en el futuro, como parte del diseño final de la instalación IFMIF. ABSTRACT Nuclear fusion is, today, an alternative energy source to which the international community devotes a great effort. The goal is to generate 10 to 50 times more energy than the input power by means of fusion reactions that occur in deuterium (D) and tritium (T) plasma at two hundred million degrees Celsius. In the future commercial reactors it will be necessary to breed the tritium used as fuel in situ, by the reactor itself. This constitutes a step further from current experimental machines dedicated mainly to the study of the plasma physics. Therefore, tritium, in fusion reactors, will be produced in the so-called breeder blankets whose primary mission is to provide neutron shielding, produce and recover tritium and convert the neutron energy into heat. There are different concepts of breeding blankets that can be separated into two main categories: solids or liquids. The former are based on ceramics containing lithium as Li2O , Li4SiO4 , Li2TiO3 , Li2ZrO3 and Be, used as a neutron multiplier, required to achieve the required amount of tritium. The liquid concepts are based on molten salts or liquid metals as pure Li, LiPb, FLIBE or FLINABE. These blankets use, as neutron multipliers, Be or Pb (in the case of the concepts based on LiPb). Proposed structural materials comprise various options, always with low activation characteristics, as low activation ferritic-martensitic steels, vanadium alloys or even SiCf/SiC. Each concept of breeding blanket has specific challenges that will be studied in the experimental reactor ITER (International Thermonuclear Experimental Reactor). However, ITER cannot answer questions associated to material damage and the effect of neutron radiation in the different breeding blankets functions and performance. As a reference, the first wall of a fusion reactor of 4000 MW will receive about 30 dpa / year (values for Fe-56) , while values expected in ITER would be <10 dpa in its entire lifetime. Consequently, the irradiation effects on candidate materials for fusion reactors will be studied in IFMIF (International Fusion Material Irradiation Facility). This thesis fits in the framework of the bilateral agreement among Europe and Japan which is called “Broader Approach Agreement “(BA) (2007-2017) where Spain plays a key role. These projects, complementary to ITER, are mainly IFMIF and the fusion facility JT-60SA. The purpose of this thesis is the design of an irradiation module to test candidate materials for breeding blankets in IFMIF, the so-called Liquid Breeder Validation Module (LBVM). This proposal is born from the fact that this option was not considered in the conceptual design of the facility. As a first step, in order to study the feasibility of this proposal, neutronic calculations have been performed to estimate irradiation parameters in different materials foreseen for liquid breeding blankets. Various functional materials were considered: Fe (base of structural materials), SiC (candidate material for flow channel inserts, SiO2 (candidate for antipermeation coatings), CaO (candidate for insulating coatings), Al2O3 (candidate for antipermeation and insulating coatings) and AlN (candidate for insulation coating material). For each material, the most significant irradiation parameters have been calculated (dpa, H/dpa and He/dpa) in different positions of IFMIF. These values were compared to those expected in the first wall and breeding zone of a fusion reactor. For this exercise, a HCLL (Helium Cooled Lithium Lead) type was selected as it is one of the most promising options. In addition, estimated values were also compared with those obtained in a fast fission reactor since most of existing irradiations have been made in these installations. The main conclusion of this study is that the medium flux area of IFMIF offers a good irradiation environment to irradiate functional materials for liquid breeding blankets. The obtained ratios of H/dpa and He/dpa are very similar to those expected in the most irradiated areas of a fusion reactor. Moreover, with the aim of bringing the values further close, the use of a W moderator is proposed to be used only in some experimental campaigns (as obviously, the total amount of dpa decreases). The values of ratios obtained for a fission reactor, much lower than in a fusion reactor, reinforce the need of LBVM for IFMIF. Having demonstrated the suitability of IFMIF to irradiate functional materials for liquid breeding blankets, and an analysis of the main problems associated to each type of liquid breeding blanket, also presented in this thesis, three different experiments are proposed as basis for the design of the LBVM. These experiments are dedicated to the needs of a blanket HCLL type although the applicability of the module for other blankets is also discussed. Therefore, the experimental capability of the module is focused on the study of the behavior of the eutectic alloy LiPb, tritium permeation, corrosion and material compatibility. For each of the experiments proposed an experimental scheme is given explaining the different module conditions and defining the required instrumentation to control and monitor the experimental capsules. In order to carry out the proposed experiments, the LBVM is proposed, located in the medium flux area of the IFMIF hot cell, with capability of up to 16 experimental capsules. Each capsule (24-22 mm of diameter, 80 mm high) will contain the eutectic allow LiPb (up to 50 mm of capsule high) in contact with different material specimens. They will be supported inside rigs or steel pipes. Helium will be used as purge gas, to sweep the tritium generated in the eutectic and permeated through the capsule walls (continuously, during irradiation). These tubes, will be installed in a steel container providing support and cooling for the tubes and hence the inner experimental capsules. The experimental data will consist of on line monitoring signals and the analysis of purge gas by the tritium measurement station. In addition to the experimental signals, the module will produce signals having a safety function and therefore playing a major role in the operation of the module. For an adequate operation of the capsules and to control its temperature, each capsule will be equipped with an electrical heater so the module will to be connected to an electrical power supply. The technical justification behind the dimensioning of each of these parts forming the module is presented supported by tritium transport calculations, thermalhydraulic and structural analysis. One of the main conclusions of the tritium transport calculations is that the measure of the permeated tritium is perfectly achievable by commercial ionization chambers and proportional counters with sensitivity of 10-9 Bq/m3. The results are applicable to all experiments, even to low temperature capsules or to the ones using antipermeation coatings. From a safety point of view, the knowledge of the amount of tritium being swept by the purge gas is a clear indicator of certain problems that may be occurring in the module such a capsule rupture. In addition, the tritium balance in the installation should be known. Losses of purge gas permeated into the refrigerant and the hot cell itself through the container have been assessed concluding that they are negligible for normal operation. Thermal hydraulic calculations were performed in order to optimize the design of experimental capsules and LBVM to fulfill one of the main requirements of the module: to perform experiments at uniform temperatures between 300-550ºC. The necessary cooling of the module and the geometry of the capsules, rigs and testing area of the container were dimensioned. As a result of the analyses, cylindrical capsules and rigs in cylindrical compartments were selected because of their good mechanical behavior (stresses due to fluid pressure are reduced significantly with a cylindrical shape rather than prismatic) and thermal (temperature uniformity in the walls of the tubes and capsules). Fields of pressure, temperature and velocity in different critical areas of the module were obtained concluding that the proposal is feasible. It is important to mention that the use of fluid dynamic codes as ANSYS-CFX (used in this thesis) for designing experimental capsules for IFMIF is not direct. The reason for this is that, under strongly heated helium mini channels, turbulence models tend to underestimate the wall temperature because of the change of helium properties near the wall. Therefore, the different code turbulence models had to be studied in detail and validated against experimental results. ANSYS-CFX SST (Shear Stress Transport Model) for transitional turbulence model has been identified among many others as the suitable one for modeling the cooling helium and the temperature on the walls of experimental capsules. Once the geometry and the main purge and cooling parameters have been defined, the mechanical behavior of each experimental tube or rig including capsules is analyzed. Resulting stresses are compared with the maximum values recommended by applicable structural design codes such as the SDC- IC (Structural Design Criteria for ITER Components) in order to assess the degree of protection against plastic collapse. The conclusion shows that the proposal is mechanically robust. The LBVM involves the use of liquid metals, tritium and the risk associated with neutron activation. The risks related with the handling of liquid metals and tritium are studied in this thesis. In addition, the radiological risks associated with the activation of materials in the module and the residual heat after irradiation are evaluated, including a scenario of loss of coolant. Among the identified conventional risks associated with the module highlights the handling of liquid metals which reactions with water or air are accompanied by the emission of aerosols and fire probability. Regarding the nuclear risks, the generation of radioactive gases such as tritium or volatile radioisotopes such as Po-210 is the main hazard to be considered. An environmental impact associated to possible releases is not expected. Nevertheless, an appropriate handling of capsules, experimental tubes, and container including purge lines is required. After one day after shutdown and one year of irradiation, the experimental area of the module will present a contact dose rate of about 7000 Sv/h, 2300 Sv/h in the experimental capsules and 25 Sv/h in the LiPb. Therefore, the use of remote handling is envisaged for the irradiated module. Finally, the different possibilities for the module manufacturing have been studied. Among the proposed techniques highlights the electro discharge machining, brazing, electron beam welding or laser welding. The bases for the final design of the LBVM have been included in the framework of the this work and included in the intermediate design report of IFMIF which will be developed in future, as part of the IFMIF facility final design.

Ti/Pd/Ag Contacts to n-Type GaAs for High Current Density Devices

The metallization stack Ti/Pd/Ag on n-type Si has been readily used in solar cells due to its low metal/semiconductor specific contact resistance, very high sheet conductance, bondability, long-term durability, and cost-effectiveness. In this study, the use of Ti/Pd/Ag metallization on n-type GaAs is examined, targeting electronic devices that need to handle high current densities and with grid-like contacts with limited surface coverage (i.e., solar cells, lasers, or light emitting diodes). Ti/Pd/Ag (50 nm/50 nm/1000 nm) metal layers were deposited on n-type GaAs by electron beam evaporation and the contact quality was assessed for different doping levels (from 1.3 × 1018 cm−3 to 1.6 × 1019 cm−3) and annealing temperatures (from 300°C to 750°C). The metal/semiconductor specific contact resistance, metal resistivity, and the morphology of the contacts were studied. The results show that samples doped in the range of 1018 cm−3 had Schottky-like I–V characteristics and only samples doped 1.6 × 1019 cm−3 exhibited ohmic behavior even before annealing. For the ohmic contacts, increasing annealing temperature causes a decrease in the specific contact resistance (ρ c,Ti/Pd/Ag ~ 5 × 10−4 Ω cm2). In regard to the metal resistivity, Ti/Pd/Ag metallization presents a very good metal conductivity for samples treated below 500°C (ρ M,Ti/Pd/Ag ~ 2.3 × 10−6 Ω cm); however, for samples treated at 750°C, metal resistivity is strongly degraded due to morphological degradation and contamination in the silver overlayer. As compared to the classic AuGe/Ni/Au metal system, the Ti/Pd/Ag system shows higher metal/semiconductor specific contact resistance and one order of magnitude lower metal resistivity.

Desenvolvimento e caracterização do filtro óptico de interferência variável para detectores de alta resolução espectral e biossensores.

O presente trabalho está fundamentado no desenvolvimento de uma metodologia e/ou uma tecnologia de obtenção e caracterização de filtros ópticos de interferência de banda passante variável [C.M. da Silva, 2010] e de banda de corte variáveis, constituídos por refletores dielétricos multicamadas de filmes finos intercalados por cavidades de Fabry-Perot não planares com espessuras linearmente variáveis, que apresentam a propriedade do deslocamento linear da transmitância máxima espectral em função da posição, isto é, um Filtro de Interferência Variável (FIV). Este método apresenta novas e abrangentes possibilidades de confecção de filtros ópticos de interferência variável: lineares ou em outras formas desejadas, de comprimento de onda de corte variável (passa baixa ou alta) e filtros de densidade neutra variável, através da deposição de metais, além de aplicações em uma promissora e nova área de pesquisa na deposição de filmes finos não uniformes. A etapa inicial deste desenvolvimento foi o estudo da teoria dos filtros ópticos dielétricos de interferência para projetar e construir um filtro óptico banda passante convencional de um comprimento de onda central com camadas homogêneas. A etapa seguinte, com base na teoria óptica dos filmes finos já estabelecida, foi desenvolver a extensão destes conhecimentos para determinar que a variação da espessura em um perfil inclinado e linear da cavidade entre os refletores de Bragg é o principal parâmetro para produzir o deslocamento espacial da transmitância espectral, possibilitando o uso de técnicas especiais para se obter uma variação em faixas de bandas de grande amplitude, em um único filtro. Um trabalho de modelagem analítica e análise de tolerância de espessuras dos filmes depositados foram necessários para a seleção da estratégia do \"mascaramento\" seletivo do material evaporado formado na câmara e-Beam (elétron-Beam) com o objetivo da obtenção do filtro espectral linear variável de características desejadas. Para tanto, de acordo com os requisitos de projeto, foram necessárias adaptações em uma evaporadora por e-Beam para receber um obliterador mecânico especialmente projetado para compatibilizar os parâmetros das técnicas convencionais de deposição com o objetivo de se obter um perfil inclinado, perfil este previsto em processos de simulação para ajustar e calibrar a geometria do obliterador e se obter um filme depositado na espessura, conformação e disposição pretendidos. Ao final destas etapas de modelagem analítica, simulação e refinamento recorrente, foram determinados os parâmetros de projeto para obtenção de um determinado FIV (Filtro de Interferência Variável) especificado. Baseadas nos FIVs muitas aplicações são emergentes: dispositivos multi, hiper e ultra espectral para sensoriamento remoto e análise ambiental, sistemas Lab-on-Chip, biossensores, detectores chip-sized, espectrofotometria de fluorescência on-chip, detectores de deslocamento de comprimento de onda, sistemas de interrogação, sistemas de imageamento espectral, microespectrofotômetros e etc. No escopo deste trabalho se pretende abranger um estudo de uma referência básica do emprego do (FIV) filtro de interferência variável como detector de varredura de comprimento de ondas em sensores biológicos e químicos compatível com pós processamento CMOS. Um sistema básico que é constituído por um FIV montado sobre uma matriz de sensores ópticos conectada a um módulo eletrônico dedicado a medir a intensidade da radiação incidente e as bandas de absorção das moléculas presentes em uma câmara de detecção de um sistema próprio de canais de microfluidos, configurando-se em um sistema de aquisição e armazenamento de dados (DAS), é proposto para demonstrar as possibilidades do FIV e para servir de base para estudos exploratórios das suas diversas potencialidades que, entre tantas, algumas são mencionadas ao longo deste trabalho. O protótipo obtido é capaz de analisar fluidos químicos ou biológicos e pode ser confrontado com os resultados obtidos por equipamentos homologados de uso corrente.

FT-Raman studies of a range of polyimides subjected to high-energy Radiations at room and elevated temperatures

A range of polyimides have been subjected to electron beam radiolysis at different temperatures. These polyimides were chemically designed to suit space applications, being either transparent or having groups which provide oxidation resistance. The structural changes that occur in the polyimides, when subjected to electron beam irradiation doses up to 18.5 MGy and up to temperatures close to their glass transition temperatures, were studied using FT-Raman spectroscopy. The range of polyimides studied included a series of perfluoropolyimides, a silicon-modified polyimide, and Ultem. The changes in the Raman peak intensities of the different groups indicated scission reactions involving the imide rings and ether linkages. (c) 2006 Wiley Periodicals, Inc.

A detailed study of the mechanical and electrical aspects of microparticle impact phenomena

An experimental and theoretical study of the impact behaviour of charged microparticles in a high voltage vacuum gap has been carried out to investigate under controlled conditions the role of low velocity microparticles (ζ 500 ms-1) in initiating electrical breakdown in such gaps. This has involved developing a unique (UHV) low-velocity source of micron-sized charged particles to study the underlying mechanical and electrical aspects of micro-particle impact on a range of target materials e.g. Pb, Ti, C, stainless-steel and mica etc., having atomically clean or oxidised surfaces. Argon-ion etching and electron-beam heating has been used for in-situ surface treatment and ellipsometry for characterising the target surfaces. An associated sphere/plane theoretical model has been developed for detailed analysis of the many complex electrical (in-flight in-field emission, M.I.M. tunnelling and ohmic conduction) and mechanical (impact dynamics, deformation and heating) phenomena that are involved when a microparticle closely approaches and impacts on a plane target. In each instance the influence of parameters such as particle radius, particle/target impact velocity, surface field, surface condition and material has been determined.

Ion plating

Under ideal conditions ion plating produces finely grained dense coatings with excellent adhesion. The ion bombardment induced damage initiates a large number of small nuclei. Simultaneous coating and sputtering stimulates high rates of diffusion and forms an interfacial region of graded composition responsible for good adhesion. To obtain such coatings on components far industrial applications, the design and construction Of an ion plater with a 24" (O.6rn) diameter chamber were investigated and modifications of the electron beam gun were proposed. A 12" (O.3m) diameter ion plater was designed and constructed. The equipment was used to develop surfaces for solar energy applications. The conditions to give extended surfaces by sputter etching were studied. Austenitic stainless steel was sputter etched at 20 and 30 mTorr working pressure and at 3, 4 and 5 kV. Uniform etching was achieved by redesigning the specimen holder to give a uniform electrostatic field over the surfaces of the specimens. Surface protrusions were observed after sputter etching. They were caused by the sputter process and were independent of grain boundaries, surface contaminants and inclusions. The sputtering rate of stainless steel was highly dependent on the background pressure which should be kept below 10-5 Torr. Sputter etching improved the performance of stainless steel used as a solar selective surface. A twofold improvement was achieved on sputter etching bright annealed stainless steel. However, there was only slight improvement after sputter etching stainless steel which had been mechanically polished to a mirror finish. Cooling curves Were used to measure the thermal emittance of specimens.The deposition rate of copper was measured at different levels of power input and was found to be a maximum at 9.5 kW. The diameter of the copper feed rod was found to be critical for the maintenance of a uniform evaporation rate.

Why is it possible to detect doped regions of semiconductors in low voltage SEM:a review and update

There is an urgent need for fast, non-destructive and quantitative two-dimensional dopant profiling of modern and future ultra large-scale semiconductor devices. The low voltage scanning electron microscope (LVSEM) has emerged to satisfy this need, in part, whereby it is possible to detect different secondary electron yield values (brightness in the SEM signal) from the p-type to the n-type doped regions as well as different brightness levels from the same dopant type. The mechanism that gives rise to such a secondary electron (SE) contrast effect is not fully understood, however. A review of the different models that have been proposed to explain this SE contrast is given. We report on new experiments that support the proposal that this contrast is due to the establishment of metal-to-semiconductor surface contacts. Further experiments showing the effect of instrument parameters including the electron dose, the scan speeds and the electron beam energy on the SE contrast are also reported. Preliminary results on the dependence of the SE contrast on the existence of a surface structure featuring metal-oxide semiconductor (MOS) are also reported. Copyright © 2005 John Wiley & Sons, Ltd.

Multiresponse Robust Engineering: Case with Errors in Factor Levels

2000 Mathematics Subject Classification: 62J05, 62J10, 62F35, 62H12, 62P30.

Measurement of single spin asymmetry and fifth structure function for the p( e&ar; ,e'K +)Λ reaction with CEBAF Large Acceptance Spectrometer (CLAS)

The single spin asymmetry, ALT ′, and the polarized structure function, σ LT′, for the p( e&ar; , e′K +)Λ reaction in the resonance region have been measured and extracted using the CEBAF Large Acceptance Spectrometer (CLAS) at Jefferson Lab. Data were taken at an electron beam energy of 2.567 GeV. The large acceptance of CLAS allows for full azimuthal angle coverage over a large range of center-of-mass scattering angles. Results were obtained that span a range in Q 2 from 0.5 to 1.3 GeV2 and W from threshold up to 2.1 GeV and were compared to existing theoretical calculations. The polarized structure function is sensitive to the interferences between various resonant amplitudes, as well as to resonant and non-resonant amplitudes. This measurement is essential for understanding the structure of nucleons and searching for previously undetected nucleon excited states (resonances) predicted by quark models. The W dependence of the σ LT′ in the kinematic regions dominated by s and u channel exchange (cos qcmk = −0.50, −0.167, 0.167) indicated possible resonance structures not predicted by theoretical calculations. The σLT ′ behavior around W = 1.875 GeV could be the signature of a resonance predicted by the quark models and possibly seen in photoproduction. In the very forward angles where the reaction is dominated by the t-channel, the average σLT ′ was zero. There was no indication of the interference between resonances or resonant and non-resonant amplitudes. This might be indicating the dominance of a single t-channel exchange. Study of the sensitivity of the fifth structure function data to the resonance around 1900 MeV showed that these data were highly sensitive to the various assumptions of the models for the quantum number of this resonance. This project was part of a larger CLAS program to measure cross sections and polarization observables for kaon electroproduction in the nucleon resonance region. ^

Cross sections and Rosenbluth separations from kaon electroproduction on protons up to Q2 = 2.35 (GeV/c)2

The kaon electroproduction reaction H(e, e ′K+)Λ was studied as a function of the four momentum transfer, Q2, for different values of the virtual photon polarization parameter. Electrons and kaons were detected in coincidence in two High Resolution Spectrometers (HRS) at Jefferson Lab. Data were taken at electron beam energies ranging from 3.4006 to 5.7544 GeV. The kaons were identified using combined time of flight information and two Aerogel Čerenkov detectors used for particle identification. For different values of Q2 ranging from 1.90 to 2.35 GeV/c2 the center of mass cross sections for the Λ hyperon were determined for 20 kinematics and the longitudinal, σ L, and transverse, σT, terms were separated using the Rosenbluth separation technique. ^ Comparisons between available models and data have been studied. The comparison supports the t-channel dominance behavior for kaon electroproduction. All models seem to underpredict the transverse cross section. An estimate of the kaon form factor has been explored by determining the sensitivity of the separated cross sections to variations of the kaon EM form factor. From comparison between models and data we can conclude that interpreting the data using the Regge model is quite sensitive to a particular choice for the EM form factors. The data from the E98-108 experiment extends the range of the available kaon electroproduction cross section data to an unexplored region of Q2 where no separations have ever been performed. ^

Spectroscopy of Electroproduced Light to Medium Mass Lambda Hypernuclei

The E01-011 experiment at Jefferson Laboratory (JLab) studied light-to-medium mass Λ hypernuclei via the AZ + e → [special characters omitted] + e' + K+ electroproduction reaction. Precise measurement of hypernuclear ground state masses and excitation energies provides information about the nature of hyperon-nucleon interactions. Until recently, hypernuclei were studied at accelerator facilities with intense π+ and K- meson beams. The poor quality of these beams limited the resolution of the hypernuclear excitation energy spectra to about 1.5 MeV (FWHM). This resolution is not sufficient for resolving the rich structure observed in the excitation spectra. By using a high quality electron beam and employing a new high resolution spectrometer system, this study aims to improve the resolution to a few hundred keV with an absolute precision of about 100 keV for excitation energies. In this work the high-resolution excitation spectra of [special characters omitted], and [special characters omitted] hypernuclei are presented. In an attempt to emphasize the presence of the core-excited states we introduced a novel likelihood approach to particle identification (PID) to serve as an alternative to the commonly used standard hard-cut PID. The new method resulted in almost identical missing mass spectra as obtained by the standard approach. An energy resolution of approximately 400–500 keV (FWHM) has been achieved, an unprecedented value in hypernuclear reaction spectroscopy. For [special characters omitted] the core-excited configuration has been clearly observed with significant statistics. The embedded Λ hyperon increases the excitation energies of the 11B nuclear core by 0.5–1 MeV. The [special characters omitted] spectrum has been observed with significant statistics for the first time. The ground state is bound deeper by roughly 400 keV than currently predicted by theory. Indication for the core-excited doublet, which is unbound in the core itself, is observed. The measurement of [special characters omitted] provides the first study of a d-shell hypernucleus with sub-MeV resolution. Discrepancies of up to 2 MeV between measured and theoretically predicted binding energies are found. Similar disagreement exists when comparing to the [special characters omitted] mirror hypernucleus. Also the core-excited structure observed between the major s-, p- and d-shell Λ orbits is not consistent with the available theoretical calculations. In conclusion, the discrepancies found in this study will provide valuable input for the further development of theoretical models.

Measurement of the induced polarization of Λ(1116) in kaon electroproduction with CLAS

The CLAS Collaboration is using the p(e, e&feet; K+ p)π- reaction to perform a measurement of the induced polarization of the electroproduced Λ(1116). The parity-violating weak decay of the Λ into pπ- (64%) allows extraction of the recoil polarization of the Λ. The present study uses the CEBAF Large Acceptance Spectrometer (CLAS) to detect the scattered electron, the kaon, and the decay proton. CLAS allows for a large kinematic acceptance in Q2 (0.8 ≤ Q2 ≤ 3.5 GeV2 ), W (1.6 ≤ W ≤ 3.0 GeV), as well as the kaon scattering angle. In this experiment a 5.499 GeV electron beam was incident upon an unpolarized liquid-hydrogen target. The goal is to map out the kinematic dependencies for this polarization observable to provide new constraints for theoretical models of the electromagnetic production of kaon-hyperon final states. Along with previously published photo- and electroproduction cross sections and polarization observables from CLAS, SAPHIR, and GRAAL, these data are needed in a coupled-channel analysis to identify previously unobserved s-channel resonances.^

A precise measurement of the two -photon exchange effect

The two-photon exchange phenomenon is believed to be responsible for the discrepancy observed between the ratio of proton electric and magnetic form factors, measured by the Rosenbluth and polarization transfer methods. This disagreement is about a factor of three at Q 2 of 5.6 GeV2. The precise knowledge of the proton form factors is of critical importance in understanding the structure of this nucleon. The theoretical models that estimate the size of the two-photon exchange (TPE) radiative correction are poorly constrained. This factor was found to be directly measurable by taking the ratio of the electron-proton and positron-proton elastic scattering cross sections, as the TPE effect changes sign with respect to the charge of the incident particle. A test run of a modified beamline has been conducted with the CEBAF Large Acceptance Spectrometer (CLAS) at Thomas Jefferson National Accelerator Facility. This test run demonstrated the feasibility of producing a mixed electron/positron beam of good quality. Extensive simulations performed prior to the run were used to reduce the background rate that limits the production luminosity. A 3.3 GeV primary electron beam was used that resulted in an average secondary lepton beam of 1 GeV. As a result, the elastic scattering data of both lepton types were obtained at scattering angles up to 40 degrees for Q2 up to 1.5 GeV2. The cross section ratio displayed an &epsis; dependence that was Q2 dependent at smaller Q2 limits. The magnitude of the average ratio as a function of &epsis; was consistent with the previous measurements, and the elastic (Blunden) model to within the experimental uncertainties. Ultimately, higher luminosity is needed to extend the data range to lower &epsis; where the TPE effect is predicted to be largest.

Proton Form Factor Puzzle and the CEBAF Large Acceptance Spectrometer (CLAS) two-photon exchange experiment

The electromagnetic form factors are the most fundamental observables that encode information about the internal structure of the nucleon. The electric (GE) and the magnetic ( GM) form factors contain information about the spatial distribution of the charge and magnetization inside the nucleon. A significant discrepancy exists between the Rosenbluth and the polarization transfer measurements of the electromagnetic form factors of the proton. One possible explanation for the discrepancy is the contributions of two-photon exchange (TPE) effects. Theoretical calculations estimating the magnitude of the TPE effect are highly model dependent, and limited experimental evidence for such effects exists. Experimentally, the TPE effect can be measured by comparing the ratio of positron-proton elastic scattering cross section to that of the electron-proton [R = σ(e +p)/σ(e+p)]. The ratio R was measured over a wide range of kinematics, utilizing a 5.6 GeV primary electron beam produced by the Continuous Electron Beam Accelerator Facility (CEBAF) at Jefferson Lab. This dissertation explored dependence of R on kinematic variables such as squared four-momentum transfer (Q2) and the virtual photon polarization parameter (&epsis;). A mixed electron-positron beam was produced from the primary electron beam in experimental Hall B. The mixed beam was scattered from a liquid hydrogen (LH2) target. Both the scattered lepton and the recoil proton were detected by the CEBAF Large Acceptance Spectrometer (CLAS). The elastic events were then identified by using elastic scattering kinematics. This work extracted the Q2 dependence of R at high &epsis;(&epsis; > 0.8) and the $&epsis; dependence of R at ⟨Q 2⟩ approx 0.85 GeV2. In these kinematics, our data confirm the validity of the hadronic calculations of the TPE effect by Blunden, Melnitchouk, and Tjon. This hadronic TPE effect, with additional corrections contributed by higher excitations of the intermediate state nucleon, largely reconciles the Rosenbluth and the polarization transfer measurements of the electromagnetic form factors.