TRANSIENT SCANNING ELECTRON BEAM ANNEALING METHODS USED TO STUDY DIFFUSION AND DEFECTS IN IMPLANTED SILICON.

Rapid thermal annealing of arsenic and boron difluoride implants, such as those used for source/drain regions in CMOS, has been carried out using a scanning electron beam annealer, as part of a study of transient diffusion effects. Three types of e-beam anneal have been performed, with peak temperatures in the range 900 -1200 degree C; the normal isothermal e-beam anneals, together with sub-second fast anneals and 'dual-pulse' anneals, in which the sample undergoes an isothermal pre-anneal followed by rapid heating to the required anneal temperature is less than 0. 5s. The diffusion occuring during these anneal cycles has been modelled using SPS-1D, an implant and diffusion modelling program developed by one of the authors. This has been modified to incorporate simulated temperature vs. time cycles for the anneals. Results are presented applying the usual equilibrium clustering model, a transient point-defect enhancement to the diffusivity proposed recently by Fair and a new dynamic clustering model for arsenic. Good agreement with SIMS measurements is obtained using the dynamic clustering model, without recourse to a transient defect model.

The mechanical integrity of fuel pin cladding in a pulsed-beam accelerator driven subcritical reactor

The Accelerator Driven Subcritical Reactor (ADSR) is one of the reactor designs proposed for future nuclear energy production. Interest in the ADSR arises from its enhanced and intrinsic safety characteristics, as well as its potential ability to utilize the large global reserves of thorium and to burn legacy actinide waste from other reactors and decommissioned nuclear weapons. The ADSR concept is based on the coupling of a particle accelerator and a subcritical core by means of a neutron spallation target interface. One of the candidate accelerator technologies receiving increasing attention, the Fixed Field Alternating Gradient (FFAG) accelerator, generates a pulsed proton beam. This paper investigates the impact of pulsed proton beam operation on the mechanical integrity of the fuel pin cladding. A pulsed beam induces repetitive temperature changes in the reactor core which lead to cyclic thermal stresses in the cladding. To perform the thermal analysis aspects of this study a code that couples the neutron kinetics of a subcritical core to a cylindrical geometry heat transfer model was developed. This code, named PTS-ADS, enables temperature variations in the cladding to be calculated. These results are then used to perform thermal fatigue analysis and to predict the stress-life behaviour of the cladding. © 2011 Elsevier Ltd. All rights reserved.

Redundancy quantification in the safety assessment of existing concrete beam-and-slab bridges

In current practice the strength evaluation of a bridge system is typically based on firstly using elastic analysis to determine the distribution of load effects in the elements and then checking the ultimate section capacity of those elements. Ductility of the components in most bridge structures permits local yield and subsequent redistribution of the applied loads from the most heavily loaded elements. As a result a bridge can continue to carry additional loading even after one member has yielded, which has conventionally been adopted as the "failure criterion" in bridge strength evaluation. This means that a bridge with inherent redundancy has additional reserves of strength such that the failure of one element does not result in the failure of the complete system. For these bridges warning signs will show up and measures can be undertaken before the ultimate collapse is happening. This paper proposes a rational methodology for calculating the ultimate system strength and including in bridge evaluation the warning level due to redundancy. © 2004 Taylor & Francis Group, London.

The effect of beam interruptions on the integrity of ADSR fuel pin cladding: A thermo-mechanical analysis

During its lifetime in the core, the cladding of an Accelerator Driven Subcritical Reactor (ADSR) fuel pin is expected to experience variable stresses due to frequent interruptions in the accelerator proton beam. This paper investigates the thermal fatigue damage in the cladding due to repetitive and unplanned beam interruptions under certain operational conditions. Beam trip data was obtained for four operating high power proton accelerators, among which the Spallation Neutron Source (SNS) superconducting accelerator was selected for further analysis. 9Cr-1Mo-Nb-V (T91) steel was selected as the cladding material because of its proven compatibility with proposed ADSR design concepts. The neutronic, thermal and stress analyses were performed using the PTS-ADS, a code that has been specifically developed for studying the dynamic response to beam-induced transients in accelerator driven subcritical systems. The lifetime of the fuel cladding in the core was estimated for three levels of allowed pin power and specific operating conditions. © 2012 Elsevier Ltd. All rights reserved.

Acoustic radiation force of a Bessel beam on a porous sphere.

The possibility of using acoustic Bessel beams to produce an axial pulling force on porous particles is examined in an exact manner. The mathematical model utilizes the appropriate partial-wave expansion method in spherical coordinates, while Biot's model is used to describe the wave motion within the poroelastic medium. Of particular interest here is to examine the feasibility of using Bessel beams for (a) acoustic manipulation of fine porous particles and (b) suppression of particle resonances. To verify the viability of the technique, the radiation force and scattering form-function are calculated for aluminum and silica foams at various porosities. Inspection of the results has shown that acoustic manipulation of low porosity (<0.3) spheres is similar to that of solid elastic spheres, but this behavior significantly changes at higher porosities. Results have also shown a strong correlation between the backscattered form-function and the regions of negative radiation force. It has also been observed that the high-order resonances of the particle can be effectively suppressed by choosing the beam conical angle such that the acoustic contribution from that particular mode vanishes. This investigation may be helpful in the development of acoustic tweezers for manipulation of micro-porous drug delivery carrier and contrast agents.

Development of a servo-hydraulic earthquake actuator for the Cambridge Turner beam centrifuge

Dynamic centrifuge modelling has been carried out at Cambridge since the late 1970s. Over this period, three different mechanical earthquake actuators were developed. In this paper the development of a new servo-hydraulic earthquake actuator is described. The basic design principles are explained along with the need to carry out these designs to match the existing services and systems of the 35 year old Turner beam centrifuge at Cambridge. In addition, some of the features of the Turner beam centrifuge are exploited in the design of this new earthquake actuator. The paper also explains the mechanical fabrication of the actuator and the control systems that were developed in order to generate real earthquake motions. Finally, the performance of this new servo-hydraulic earthquake actuator is presented and assessed based on a wide range of earthquake input motions.

Rapid Electron Beam Reacted Tantalum/Titanium Bilayers on Silicon : Semiconductors and Semiconductor Devices

The electrical and structural characteristics of tantalum-titanium bilayers on silicon reacted by electron beam heating have been investigated over a wide range of temperature and time conditions. The reacted layers exhibit low sheet resistance and stable electrical characteristics up to at least 1100℃. Titanium starts reacting from 750℃ onwards for 100 milliseconds reaction times whereas tantalum starts reacting only above 900℃ for such short reaction times. RBS results confirm that silicon is the major diffusing species and there is no evidence for the formation of ternary silicides. Reactions have also been explored on millisecond time scales by non-isothermal heating.

Comparison of manual and user guided methodologies for the classification and retrieval of construction site images

The amount of original imaging information produced yearly during the last decade has experienced a tremendous growth in all industries due to the technological breakthroughs in digital imaging and electronic storage capabilities. This trend is affecting the construction industry as well, where digital cameras and image databases are gradually replacing traditional photography. Owners demand complete site photograph logs and engineers store thousands of images for each project to use in a number of construction management tasks like monitoring an activity's progress and keeping evidence of the "as built" in case any disputes arise. So far, retrieval methodologies are done manually with the user being responsible for imaging classification according to specific rules that serve a limited number of construction management tasks. New methods that, with the guidance of the user, can automatically classify and retrieve construction site images are being developed and promise to remove the heavy burden of manually indexing images. In this paper, both the existing methods and a novel image retrieval method developed by the authors for the classification and retrieval of construction site images are described and compared. Specifically a number of examples are deployed in order to present their advantages and limitations. The results from this comparison demonstrates that the content based image retrieval method developed by the authors can reduce the overall time spent for the classification and retrieval of construction images while providing the user with the flexibility to retrieve images according different classification schemes.

Effects of multi-scattering on the performance of a single-beam acoustic manipulation device.

The effects of multiple scattering on acoustic manipulation of spherical particles using helicoidal Bessel-beams are discussed. A closed-form analytical solution is developed to calculate the acoustic radiation force resulting from a Bessel-beam on an acoustically reflective sphere, in the presence of an adjacent spherical particle, immersed in an unbounded fluid medium. The solution is based on the standard Fourier decomposition method and the effect of multi-scattering is taken into account using the addition theorem for spherical coordinates. Of particular interest here is the investigation of the effects of multiple scattering on the emergence of negative axial forces. To investigate the effects, the radiation force applied on the target particle resulting from a helicoidal Bessel-beam of different azimuthal indexes (m = 1 to 4), at different conical angles, is computed. Results are presented for soft and rigid spheres of various sizes, separated by a finite distance. Results have shown that the emergence of negative force regions is very sensitive to the level of cross-scattering between the particles. It has also been shown that in multiple scattering media, the negative axial force may occur at much smaller conical angles than previously reported for single particles, and that acoustic manipulation of soft spheres in such media may also become possible.

Occurrence of particle debris field during focused Ga ion beam milling of glassy carbon

To explore the machining characteristics of glassy carbon by focused ion beam (FIB), particles induced by FIB milling on glassy carbon have been studied in the current work. Nano-sized particles in the range of tens of nanometers up to 400 nm can often be found around the area subject to FIB milling. Two ion beam scanning modes - slow single scan and fast repetitive scan - have been tested. Fewer particles are found in single patterns milled in fast repetitive scan mode. For a group of test patterns milled in a sequence, it was found that a greater number of particles were deposited around sites machined early in the sequence. In situ EDX analysis of the particles showed that they were composed of C and Ga. The formation of particles is related to the debris generated at the surrounding areas, the low melting point of gallium used as FIB ion source and the high contact angle of gallium on glassy carbon induces de-wetting of Ga and the subsequent formation of Ga particles. Ultrasonic cleaning can remove over 98% of visible particles. The surface roughness (Ra) of FIB milled areas after cleaning is less than 2 nm. © 2010.

Ion beam, focused ion beam, and plasma discharge machining

Non-conventional methods of machining are used for many engineering applications where the traditional processes fail to be cost-effective. Such processes include Ion Beam Machining (IBM), focused ion beam (FIB) machining and plasma discharge machining. The mechanisms of material removal and associated hardware and software developed for industrial applications of these fascinating electro-physical and chemical machining processes are reviewed together with the latest research findings. © 2009 CIRP.

In process laser beam diagnostics (403)

Laser beam diagnosis is usually carried out off-line in order to minimise the disruption to the process being carried out. This paper presents the results of a fractional sampling device for a high power beam diagnosis system capable of measuring in process beam properties such as beam diameter, intensity and beam position. The paper discusses the application of this sampling technique for monitoring beam properties during the laser materials processing operation.