Properties of a-C:H films deposited from a methane electron cyclotron wave resonant plasma

An electron cyclotron wave resonant methane plasma discharge was used for the high rate deposition of hydrogenated amorphous carbon (a-C:H). Deposition rates of up to ∼400 Å/min were obtained over substrates up to 2.5 in. in diameter with a film thickness uniformity of ∼±10%. The deposited films were characterised in terms of their mass density, sp3 and hydrogen contents, C-H bonding, intrinsic stress, scratch resistance and friction properties. The deposited films possessed an average sp3 content, mass density and refractive index of ∼58%, 1.76 g/cm3 and 2.035 respectively.Mechanical characterisation indicated that the films possessed very low steady-state coefficients of friction (ca. 0.06) and a moderate shear strength of ∼141 MPa. Nano-indentation measurements also indicated a hardness and elastic modulus of ∼16.1 and 160 GPa respectively. The critical loads required to induce coating failure were also observed to increase with ion energy as a consequence of the increase in degree of ion mixing at the interface. Furthermore, coating failure under scratch test conditions was observed to take place via fracture within the silicon substrate itself, rather than either in the coating or at the film/substrate interface. © 2003 Elsevier B.V. All rights reserved.

Methane chemistry involved in a low-pressure electron cyclotron wave resonant plasma discharg

A low-pressure methane plasma generated by electron cyclotron wave resonance was characterized in terms of electron temperature, plasma density and composition. Methane plasmas were commonly used in the deposition of hydrogenated amorphous carbon thin films. Little variation in the plasma chemistry was observed by mass spectrometry measurements of the gas phase with increasing electron temperature. The results show that direct electron-impact reactions exert greater influence on the plasma chemistry than secondary ion-neutral reactions.

ZnO film based surface acoustic wave micro-pump

In this study, a micro-pump unit based on surface acoustic wave (SAW) on piezoelectric ZnO film is designed and fabricated as a micro-fluidic device. It employs a mechanical wave, which is generated electrically using an aluminum interdigital transducer (IDT), and propagates on the surface of the ZnO film. The ZnO film was used in this study because it has a high electromechanical coefficient and an excellent bonding with various substrate materials, in particular silicon. The sputtering parameters for ZnO film deposition have been optimized, and the ZnO films with different thickness from 1 micron to 5.5 microns were prepared. The film properties have been characterized using different methods, such as scanning electron microscopy, X-ray diffraction and atomic force microscopy. Aluminum IDT with a finger width and spacing of 8 microns was patterned on the ZnO film using a lift-off process. The frequency generated was measured using a network analyzer, and it varies from 130 MHz to 180 MHz as a function of film thickness. A signal generator was used to generate the frequency with a power amplifier to amplify the signal, which was then applied to aluminum IDT to generate the surface acoustic wave. If a liquid droplet exists on the surface carrying the acoustic wave, the energy and the momentum of the SAW will be coupled into the fluid, causing the liquid to vibrate and move on film surface. The strength of this movement is determined by the applied voltage and frequency. The volume of the liquid drop loaded on the SAW device in this study is of several hundreds of nanoliters. The movement of the liquid inside the droplet and also on the ZnO film surface can be demonstrated. The performance of ZnO SAW device was characterized as a function of film thickness. © 2007 IOP Publishing Ltd.

ZnO films for surface acoustic wave microfluidic devices

SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied. Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness.

ZnO films for surface acoustic wave microfluidic devices

SAW devices were fabricated on c-axis oriented ZnO films grown on Si substrates. Effects of film thickness on the film microstructure and acoustic frequencies were studied. Both Rayleigh and Sezawa mode waves were detected on the devices, and their resonant frequencies were found to decrease with increase in film thickness.

A surface acoustic wave-based immunosensing device using a nanocrystalline ZnO film on Si

The novelty of this study resides in the fabrication of a bio-sensing device, based on the surface acoustic wave (SAW) on a nanocrystalline ZnO film. The ZnO film was deposited using an rf magnetron sputtering at room temperature on silicon. The deposited films showed the c-axisoriented crystallite with grain size of ∼40 nm. The immunosensing device was fabricated using photolithographic protocols on the film. As a model biomolecular recognition and immunosensing, biospecific interaction between a 6-(2,4-dinitrophenyl) aminohexanoic acid (DNP) antigen and its antibody was employed, demonstrating the shifts of resonant frequencies on SAW immunosensing device. The device exhibited a linearity as a function of the antibody concentration in the range of 20∼20,000 ng/ml. © 2009 American Scientific Publishers. All rights reserved.

Two-Dimensional Kinematic Wave Model of Overland-Flow

A two-dimensional kinematic wave model was developed for simulating runoff generation and flow concentration on an experimental infiltrating hillslope receiving artificial rainfall. Experimental observations on runoff generation and flow concentration on irregular hillslopes showed that the topography of the slope surface controlled the direction and flow lines of overland flow. The model-simulated results satisfactorily compared with experimental observations. The erosive ability of the concentrated flow was found to mainly depend on the ratio of the width and depth of confluent grooves.

A generalized wave action conservative equation for the dissipative dynamical system in the nearshore region

To describe the various complex mechanisms of the dissipative dynamical system between waves, currents, and bottoms in the nearshore region that induce typically the wave motion on large-scale variation of ambient currents, a generalized wave action equation for the dissipative dynamical system in the nearshore region is developed by using the mean-flow equations based on the Navier-Stokes equations of viscous fluid, thus raising two new concepts: the vertical velocity wave action and the dissipative wave action, extending the classical concept, wave action, from the ideal averaged flow conservative system into the real averaged flow dissipative system (that is, the generalized conservative system). It will have more applications.

The Hydrothermal Wave Of Large-Prandtl-Number Fluid In A Shallow Cavity

The hydrothermal wave was investigated numerically for large-Prandtl-number fluid (Pr = 105.6) in a shallow cavity with different heated sidewalls. The traveling wave appears and propagates in the direction opposite to the surface flow (upstream) in the case of zero gravity when the applied temperature difference grows and over the critical value. The phase relationships of the disturbed velocity, temperature and pressure demonstrate that the traveling wave is driven by the disturbed temperature, which is named hydrothermal wave. The hydrothermal wave is so weak that the oscillatory flow field and temperature distribution can hardly be observed in the liquid layer. The exciting mechanism of hydrothermal wave is analyzed and discussed in the present paper.

Thermocapillary Flows In Liquid Bridges Of Molten Tin With Small Aspect Ratios

Numerical simulations were conducted to study thermocapillary flows in short half-zone liquid bridges of molten tin with Prandtl number Pr = 0.009, under ramped temperature difference. The spatio-temporal structures in the thermocapillary flows in short half-zone liquid bridges with aspect ratios As = 0.6, 0.8, and 1.0 were investigated. The first critical Marangoni numbers were compared with those predicted by linear stability analyses (LSA). The second critical Marangoni numbers for As = 0.6 and 0.8 were found to be larger than that for As = 1.0. The time evolutions of the thermocapillary flows exhibited unusual features such as a change in the azimuthal wave number during the three-dimensional stationary (non-oscillating) flow regime, a change in the oscillation mode during the three-dimensional oscillatory flow regime, and the decreasing and then increasing of amplitudes in a single oscillation mode. The effects of the ramping rate of the temperature difference on the flow modes and critical conditions were studied as well. In this paper, the experimental observability of the critical conditions was also discussed. (C) 2008 Elsevier Inc. All rights reserved.