983 resultados para radioactive ion beam


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A new method to measure the sulfur isotopic composition of individual aerosol particles by NanoSIMS has been developed and tested on several standards such as barite (BaSO4), anhydrite (CaSO4), gypsum (CaSO4·2H2O), mascagnite ((NH4)2SO4), epsomite (MgSO4·7H2O), magnesium sulfate (MgSO4·xH2O), thenardite (Na2SO4), boetite (K2SO4) and cysteine (an amino acid). This ion microprobe technique employs a Cs+ primary ion beam and measures negative secondary ions permitting the analysis of sulfur isotope ratios in individual aerosol particles down to 500 nm in size (0.001-0.5 ng of sample material). The grain-to-grain reproducibility of measurements is typically 5‰ (1σ) for micron-sized grains, <5‰ for submicron-sized grains, and <2‰ for polished thin sections and ultra microtome sections which were studied for comparison. The role of chemical omposition (matrix effect) and sample preparation techniques on the instrumental mass fractionation (IMF) of the 34S/32S ratio in the NanoSIMS has been investigated. The IMF varies by ~15‰ between the standards studied here. A good correlation between IMF and ionic radius of the cations in sulfates was observed. This permits to infer IMF corrections even for sulfates for which no isotope standards are available. The new technique allows to identify different types of primary and secondary sulfates based on their chemical composition and to measure their isotopic signature separately. It was applied to marine aerosol samples collected in Mace Head and urban aerosol samples collected in Mainz. It was shown that primary sulfate particles such as sulfate in NaCl or gypsum particles precipitated from ocean water retain the original isotopic signature of their source. The isotopic composition of secondary sulfate depends on the isotopic composition of precursor SO2 and the oxidation pathway. The 34S/32S fractionation with respect to the precursor SO2 is -9‰ for homogeneous oxidation and +16.5‰ for heterogeneous oxidation. This large difference between the isotopic fractionation of both pathways allows identifying the oxidation pathway from which the SO42- in a secondary sulfate particle is derived, by means of its sulfur isotope ratio, provided that the isotopic signature of the precursor SO2 is known. The isotopic composition of the precursor SO2 of secondary sulfates was calculated based on the isotopic composition of particles with known oxidation pathway such as fine mode ammonium sulfate.

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The subject of the presented thesis is the accurate measurement of time dilation, aiming at a quantitative test of special relativity. By means of laser spectroscopy, the relativistic Doppler shifts of a clock transition in the metastable triplet spectrum of ^7Li^+ are simultaneously measured with and against the direction of motion of the ions. By employing saturation or optical double resonance spectroscopy, the Doppler broadening as caused by the ions' velocity distribution is eliminated. From these shifts both time dilation as well as the ion velocity can be extracted with high accuracy allowing for a test of the predictions of special relativity. A diode laser and a frequency-doubled titanium sapphire laser were set up for antiparallel and parallel excitation of the ions, respectively. To achieve a robust control of the laser frequencies required for the beam times, a redundant system of frequency standards consisting of a rubidium spectrometer, an iodine spectrometer, and a frequency comb was developed. At the experimental section of the ESR, an automated laser beam guiding system for exact control of polarisation, beam profile, and overlap with the ion beam, as well as a fluorescence detection system were built up. During the first experiments, the production, acceleration and lifetime of the metastable ions at the GSI heavy ion facility were investigated for the first time. The characterisation of the ion beam allowed for the first time to measure its velocity directly via the Doppler effect, which resulted in a new improved calibration of the electron cooler. In the following step the first sub-Doppler spectroscopy signals from an ion beam at 33.8 %c could be recorded. The unprecedented accuracy in such experiments allowed to derive a new upper bound for possible higher-order deviations from special relativity. Moreover future measurements with the experimental setup developed in this thesis have the potential to improve the sensitivity to low-order deviations by at least one order of magnitude compared to previous experiments; and will thus lead to a further contribution to the test of the standard model.

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In der vorliegenden Arbeit werden Entwicklungen zur Optimierung von Selektivität und Effizienz von Resonanzionisations-Laserionenquellen vorgestellt. Mit der Perspektive auf die Anwendungen radioaktiver Ionenstrahlen in der Grundlagenforschung sowie auf Fragestellungen in der Ultraspurenanalytik wurden verschiedene Methoden entwickelt und erprobt: Auf Seiten der Grundlagenforschung wurden zwei komplementäre Ansätze, die Konstruktion von Ionenquellen aus Materialien niedriger Austrittsarbeit und die Weiterentwicklung der Laserionenquelle und -falle LIST umgesetzt. Hierdurch konnte die Selektivität der Resonanzionisation in on-line Tests um einige Gröÿenordnungen verbessert werden. Für die Ultraspurenanalytik wurden speziell angepasste, hocheffiziente Ionenquellen entwickelt. Mit diesen Ionenquellen wurde für die Resonanzionisation von Gallium eine Ionisationseffizienz von 67 % demonstriert, für den Ultraspurennachweis des im Zusammenhang der nuklearen Endlagerung wichtigen Radioisotops 99g-Technetium wurde auf dieser Grundlage eine Nachweisgrenze von weniger als 10^6 Atomen gezeigt.

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In the field of organic optoelectronics, the nanoscale structure of the materials has huge im-pact on the device performance. Here, scanning force microscopy (SFM) techniques become increasingly important. In addition to topographic information, various surface properties can be recorded on a nanometer length scale, such as electrical conductivity (conductive scanning force microscopy, C-SFM) and surface potential (Kelvin probe force microscopy, KPFM).rnrnIn the context of this work, the electrical SFM modes were applied to study the interplay be-tween morphology and electrical properties in hybrid optoelectronic structures, developed in the group of Prof. J. Gutmann (MPI-P Mainz). In particular, I investigated the working prin-ciple of a novel integrated electron blocking layer system. A structure of electrically conduct-ing pathways along crystalline TiO2 particles in an insulating matrix of a polymer derived ceramic was found and insulating defect structures could be identified. In order to get insights into the internal structure of a device I investigated a working hybrid solar cell by preparing a cross cut with focused ion beam polishing. With C-SFM, the functional layers could be identified and the charge transport properties of the novel active layer composite material could be studied. rnrnIn C-SFM, soft surfaces can be permanently damaged by (i) tip induced forces, (ii) high elec-tric fields and (iii) high current densities close to the SFM-tip. Thus, an alternative operation based on torsion mode topography imaging in combination with current mapping was intro-duced. In torsion mode, the SFM-tip vibrates laterally and in close proximity to the sample surface. Thus, an electrical contact between tip and sample can be established. In a series of reference experiments on standard surfaces, the working mechanism of scanning conductive torsion mode microscopy (SCTMM) was investigated. Moreover, I studied samples covered with free standing semiconducting polymer nano-pillars that were developed in the group of Dr. P. Theato (University Mainz). The application of SCTMM allowed non-destructive imag-ing of the flexible surface at high resolution while measuring the conductance on individual pillarsrnrnIn order to study light induced electrical effects on the level of single nanostructures, a new SFM setup was built. It is equipped with a laser sample illumination and placed in inert at-mosphere. With this photoelectric SFM, I investigated the light induced response in function-alized nanorods that were developed in the group of Prof. R. Zentel (University Mainz). A block-copolymer containing an anchor block and dye moiety and a semiconducting conju-gated polymer moiety was synthesized and covalently bound to ZnO nanorods. This system forms an electron donor/acceptor interface and can thus be seen as a model system of a solar cell on the nanoscale. With a KPFM study on the illuminated samples, the light induced charge separation between the nanorod and the polymeric corona could not only be visualized, but also quantified.rnrnThe results demonstrate that electrical scanning force microscopy can study fundamental processes in nanostructures and give invaluable feedback to the synthetic chemists for the optimization of functional nanomaterials.rn

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The understanding of the coupling between superconducting YBa2Cu3O7 (YBCO) layers decoupled by non superconducting PrBa2Cu3O7 (PBCO) layers in c-axis oriented superlattices was the aim of this thesis. For this purpose two conceptually different kind of transport experiments have been performed. rnrnIn the first type of transport experiments the current is flowing parallel to the layers. Here the coupling is probed indirectly using magnetic vortex lines, which are penetrating the superlattice. Movement of the vortex segments in neighbouring YBCO layers is more or less coherent depending on the thickness of both the superconducting and non superconducting layers. This in-plane transport was measured either by sending an external current through bridges patterned in the superlattice or by an induced internal current. rnThe vortex-creep activation energy U was determined by analysis of the in-plane resistive transition in an external magnetic field B oriented along the c-axis. The activation energies for two series of superlattices were investigated. In one series the thickness of the YBCO layers was constant (nY=4 unit cells) and the number of the PBCO unit cells was varied, while in the other the number of PBCO layers was constant (nP=4) and nY varied. The correlation length of the vortex system was determined to be 80 nm along the c-axis direction. It was found that even a single PBCO unit cell in a superlattice effectively cuts the flux lines into shorter weakly coupled segments, and the coupling of the vortex systems in neighbouring layers is negligible already for a thickness of four unit cells of the PBCO layers. A characteristic variation of the activation energy for the two series of superlattices was found, where U0 is proportional to the YBCO thickness. A change in the variation of U0 with the current I in the specimen was observed, which can be explained in terms of a crossover in the vortex creep process, generated by the transport current. At low I values the dislocations mediated (plastic) vortex creep leads to thermally assisted flux-flow behaviour, whereas at high current the dc transport measurements are dominated by elastic (collective) creep.rnThe analysis of standard dc magnetization relaxation data obtained for a series superlattices revealed the occurrence of a crossover from elastic (collective) vortex creep at low temperature to plastic vortex creep at high T. The crossover is generated by the T dependent macroscopic currents induced in the sample. The existence of this creep crossover suggests that, compared with the well known Maley technique, the use of the normalized vortex creep activation energy is a better solution for the determination of vortex creep parameters.rnrnThe second type of transport experiments was to measure directly a possible Josephson coupling between superconducting CuO2 double planes in the superlattices by investigation of the transport properties perpendicular to the superconducting planes. Here three different experiments have been performed. The first one was to pattern mesa structures photolithographically as in previous works. The second used three-dimensional nanostructures cut by a focused ion beam. For the these two experiments insufficient patterning capabilities prevented an observation of the Josephson effect in the current voltage curves. rnA third experiment used a-axis and (110) oriented YBCO films, where in-plane patterning can in principle be sufficient to measure transport perpendicular to the superconducting planes. Therefore the deposition of films with this unusual growth orientation was optimized and investigated. The structural and microstructural evolution of c-axis to a-axis orientation was monitored using x-ray diffraction, scanning electron microscopy and magnetization measurements. Films with full a-axis alignment parallel to the substrate normal could be achieved on (100)SrTiO3. Due to the symmetry of the substrate the c-axis direction in-plane is twofold. Transferring the deposition conditions to films grown on (110)SrTiO3 allowed the growth of (110) oriented YBCO films with a unique in-plane c-axis orientation. While these films were of high quality by crystallographic and macroscopic visual inspection, electron microscopy revealed a coherent crack pattern on a nanoscale. Therefore the actual current path in the sample was not determined by the macroscopic patterning which prohibited investigations of the in-plane anisotropy in this case.rn

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Um die in der Atmosphäre ablaufenden Prozesse besser verstehen zu können, ist es wichtig dort vorhandene Partikel gut charakterisieren zu können. Dazu gehört unter anderem die Bestimmung der chemischen Zusammensetzung der Partikel. Zur Analyse insbesondere organischer Partikel wurde dazu in einer früheren Promotion das Aerosol-Ionenfallen-Massenspektrometer (AIMS) entwickelt.Im Rahmen dieser Arbeit wurden Entwicklungsarbeiten durchgeführt, um die Charakteristiken des Prototypen zu verbessern sowie es für den Feldeinsatz tauglich zu machen. Die durchgeführten Veränderungen betreffen mechanische und elektrische Komponenten sowie das LabView Steuerungsprogramm. So wurde z.B. die Ionenquelle derart modifiziert, dass die Ionen nicht mehr permanent erzeugt werden, sondern nur innerhalb des Zeitraums wenn sie auch in der Ionenfalle gespeichert werden können. Durch diese Modifikation konnte das Signal-zu-Rausch Verhältnis deutlich verbessert werden. Nach Beendigung der Umbauten wurden in ausführlichen Laborstudien die einzelnen Instrumentenparameter detailliert charakterisiert. Neben den Spannungen die zur Fokussierung oder zur Speicherung der Ionen in der Ionenfalle dienen, wurden die unterschiedlichen Arten der resonanten Anregung, mittels der die Ionen in der Ionenfalle gezielt zu Schwingungen angeregt werden können, sehr genau untersucht. Durch eine gezielte Kombination der unterschiedlichen Arten der resonanten Anregung ist es möglich MSn-Studien durchzuführen. Nach erfolgreicher Charakterisierung konnte in weiteren Laborstudien die MSn-Fähigkeit des AIMS demonstriert werden. Für Tryptophan (C11H12N2O2) wurde anhand von MS4-Studien ausgehend von m/z 130 ein möglicher Fragmentierungsweg identifiziert. Für die einzelnen Stufen der MS4-Studien wurden die Nachweisgrenzen abgeschätzt. Im Rahmen der PARADE (PArticles and RAdicals: Diel observations of the impact of urban and biogenic Emissions) Messkampagne im August/September 2011 auf dem kleinen Feldberg in der Nähe von Frankfurt am Main wurde die Feldtauglichkeit des AIMS demonstriert. Die Nachweisgrenzen liegen für eine Mittelungszeit von 60 Minuten für Organik bei 1,4 µg m-3, für Nitrat bei 0,5 µg m-3 und für Sulfat bei 0,7 µg m-3, was ausreichend ist um atmosphärisches Aerosol messen zu können. Dies ist ein signifikanter Fortschritt im Vergleich zum Prototypen, der aufgrund schlechter Reproduzierbarkeit und Robustheit noch nicht feldtauglich war. Im Vergleich zum HR-ToF-AMS, einem Standard-Aerosolmassenspektrometer, zeigte sich, dass beide Instrumente vergleichbare Trends für die Spezies Nitrat, Sulfat und Organik messen.

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Die Funktionsweise der Laserionenquellenfalle LIST, sowie deren Implementierung bei der Forschungseinrichtung ISOLDE am CERN als neue Standard-Ionenquelle und die ermittelten Spezifikationen Effizienz und Selektivität werden vorgestellt.rnrnDurch die Implementierung der LIST bei ISOLDE konnte on-line mit Hilfe von Radionukliden ein Minimalwert zur Unterdrückung von Kontaminationen durch die LIST bestimmt werden. Die erfolgreiche Unterdrückung von Francium-Kontamination ermöglichte es, neue Messdaten für den mittleren Ladungsradius und die Hyperfeinstruktur für Po-217 zu erzeugen.rnrnUm die Funktionalität der LIST bei ISOLDE hinsichtlich der Ionisationseffizienz gegenüber anderen Ionenquellen einzuordnen, wurden in Mainz am RISIKO-Massenseparator mit der bereits existierenden Standard-Ionenquelle RILIS und der LIST die Effizienzen bestimmt und miteinander verglichen. Es konnte gezeigt werden, dass die LIST im Modus hoher Ionisationseffizienz eine vergleichbare Effizienz aufweist wie die RILIS. Im Modus zur Produktion eines hochreinen Ionenstrahls ist die Ionisationseffizienz gegenüber der RILIS reduziert.rnrnDa die Bestimmung der Selektivität im On-line-Betrieb aufwendig und zeitintensiv ist, wurde die Reinheit des Ionenstrahls am RISIKO-Massenseparator mittels Laufzeitmessungen der Ionen off-line bestimmt und analysiert. Die Zeitstrukturen der RILIS ermöglichen einerseits Rückschlüsse auf die Reinheit des Ionenstrahls zu ziehen, andererseits konnte auch die Ionisation außerhalb des Atomisators, in dem überwiegend die resonante Ionisation stattfindet, nachgewiesen werden. Durch diesen Nachweis kann der Effizienzverlust während der Produktion eines hochreinen Ionenstrahls erklärt werden. Zudem bietet er einen Ansatz für weitere Entwicklungsarbeiten der LIST zur Steigerung der Effizienz.rnrnEine Übertragung der Messergebnisse zur Zeitstruktur der RILIS auf die LIST eröffnet neue Möglichkeiten zur Steigerung deren Selektivität im massenselektiven Mode. Dieser wurde anhand von Simulationen überprüft und mit Messungen an Kalium experimentell quantifiziert.

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Electron transfer cross sections have been measured for reactions of Ar2+ ions with Ar, N2, O2, CO2, CH4 and C2H6. Time-of-flight techniques have been used to measure both fast neutral Ar0 and fast Ar+ products from single- and double-electron transfer processes involving Ar2+ ions with 4.0 to 7.0 keV impact energies. Incident Ar2+ ions have produced by controlled electron impact ionisation of argon atoms. Reactions have been examined as a function of ionising electron energy and cross sections determined for ground state Ar2+(3P) ions. Charge transfer cross sections have been determined to be in the range of 3*10-16 cm2 for the systems examined. Double-electron transfer cross sections are the same order of magnitude as those measured for the corresponding single-electron transfer reactions. The state distribution of the reactant ion beam has been estimated and electron transfer cross sections obtained for single- and double-electron transfer reactions of metastable Ar2+ions. The magnitudes of electron transfer cross sections in individual systems are similar for both ground and metastable state Ar2+ reactions.

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We demonstrate a reliable microfabrication process for a combined atomic force microscopy (AFM) and scanning electrochemical microscopy (SECM) measurement tool. Integrated cone-shaped sensors with boron doped diamond (BDD) or gold (Au) electrodes were fabricated from commercially available AFM probes. The sensor formation process is based on mature semiconductor processing techniques, including focused ion beam (FIB) machining, and highly selective reactive ion etching (RIE). The fabrication approach preserves the geometry of the original AFM tips resulting in well reproducible nanoscaled sensors. The feasibility and functionality of the fully featured tips are demonstrated by cyclic voltammetry, showing good agreement between the measured and calculated currents of the cone-shaped AFM-SECM electrodes.

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The patterning of photoactive purple membrane (PM) films onto electronic substrates to create a biologically based light detection device was investigated. This research is part of a larger collaborative effort to develop a miniaturized toxin detection platform. This platform will utilize PM films containing the photoactive protein bacteriorhodopsin to convert light energy to electrical energy. Following an effort to pattern PM films using focused ion beam machining, the photolithography based bacteriorhodopsin patterning technique (PBBPT) was developed. This technique utilizes conventional photolithography techniques to pattern oriented PM films onto flat substrates. After the basic patterning process was developed, studies were conducted that confirmed the photoelectric functionality of the PM films after patterning. Several process variables were studied and optimized in order to increase the pattern quality of the PM films. Optical microscopy, scanning electron microscopy, and interferometric microscopy were used to evaluate the PM films produced by the patterning technique. Patterned PM films with lateral dimensions of 15 μm have been demonstrated using this technique. Unlike other patterning techniques, the PBBPT uses standard photolithographic processes that make its integration with conventional semiconductor fabrication feasible. The final effort of this research involved integrating PM films patterned using the PBBPT with PMOS transistors. An indirect integration of PM films with PMOS transistors was successfully demonstrated. This indirect integration used the voltage produced by a patterned PM film under light exposure to modulate the gate of a PMOS transistor, activating the transistor. Following this success, a study investigating how this PM based light detection system responded to variations in light intensity supplied to the PM film. This work provides a successful proof of concept for a portion of the toxin detection platform currently under development.

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Hall-effect thruster (HET) cathodes are responsible for the generation of the free electrons necessary to initiate and sustain the main plasma discharge and to neutralize the ion beam. The position of the cathode relative to the thruster strongly affects the efficiency of thrust generation. However, the mechanisms by which the position affects the efficiency are not well understood. This dissertation explores the effect of cathode position on HET efficiency. Magnetic field topology is shown to play an important role in the coupling between the cathode plasma and the main discharge plasma. The position of the cathode within the magnetic field affects the ion beam and the plasma properties of the near-field plume, which explains the changes in efficiency of the thruster. Several experiments were conducted which explored the changes of efficiency arising from changes in cathode coupling. In each experiment, the thrust, discharge current, and cathode coupling voltage were monitored while changes in the independent variables of cathode position, cathode mass flow and magnetic field topology were made. From the telemetry data, the efficiency of the HET thrust generation was calculated. Furthermore, several ion beam and plasma properties were measured including ion energy distribution, beam current density profile, near-field plasma potential, electron temperature, and electron density. The ion beam data show how the independent variables affected the quality of ion beam and therefore the efficiency of thrust generation. The measurements of near-field plasma properties partially explain how the changes in ion beam quality arise. The results of the experiments show that cathode position, mass flow, and field topology affect several aspects of the HET operation, especially beam divergence and voltage utilization efficiencies. Furthermore, the experiments show that magnetic field topology is important in the cathode coupling process. In particular, the magnetic field separatrix plays a critical role in impeding the coupling between cathode and HET. Suggested changes to HET thruster designs are provided including ways to improve the position of the separatrix to accommodate the cathode.

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As awareness of potential human and environmental impacts from toxins has increased, so has the development of innovative sensors. Bacteriorhodopsin (bR) is a light activated proton pump contained in the purple membrane (PM) of the bacteria Halobacterium salinarum. Bacteriorhodopsin is a robust protein which can function in both wet and dry states and can withstand extreme environmental conditions. A single electron transistor(SET) is a nano-scale device that exploits the quantum mechanical properties of electrons to switch on and off. SETs have tremendous potential in practical applications due to their size, ultra low power requirements, and electrometer-like sensitivity. The main goal of this research was to create a bionanohybrid device by integrating bR with a SET device. This was achieved by a multidisciplinary approach. The SET devices were created by a combination of sputtering, photolithography, and focused ion beam machining. The bionanomaterial bacteriorhodopsin was created through oxidative fermentation and a series of transmembrane purification processes. The bR was then integrated with the SET by electrophoretic deposition, creating a bionanohybrid device. The bionanohybrid device was then characterized using a semiconductor parametric analyzer. Characterization demonstrated that the bR modulated the operational characteristics of the SET when bR was activated with light within its absorbance spectrum. To effectively integrate bacteriorhodopsin with microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), it is critical to know the electrical properties of the material and to understand how it will affect the functionality of the device. Tests were performed on dried films of bR to determine if there is a relationship between inductance, capacitance, and resistance (LCR) measurements and orientation, light-on/off, frequency, and time. The results indicated that the LCR measurements of the bR depended on the thickness and area of the film, but not on the orientation, as with other biological materials such as muscle. However, there was a transient LCR response for both oriented and unoriented bR which depended on light intensity. From the impedance measurements an empirical model was suggested for the bionanohybrid device. The empirical model is based on the dominant electrical characteristics of the bR which were the parallel capacitance and resistance. The empirical model suggests that it is possible to integrate bR with a SET without influencing its functional characteristics.

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This research focused on the to modification of the surface structure of titanium implants with nanostructured morphology of TiO2 nanotubes and studied the interaction of nanotubes with osteoblast cells to understand the parameters that affect the cell growth. The electrical, mechanical, and structural properties of TiO2 nanotubes were characterized to establish a better understanding on the properties of such nanoscale morphological structures. To achieve the objectives of this research work I transformed the titanium and its alloys, either in bulk sheet form, bulk machined form, or thin film deposited on another substrate into a surface of titania nanotubes using a low cost and environmentally friendly process. The process requires only a simple electrolyte, low cost electrode, and a DC power supply. With this simple approach of scalable nanofabrication, a typical result is nanotubes that are each approximately 100nm in diameter and have a wall thickness of about 20nm. By changing the fabrication parameters, independent nanotubes can be fabricated with open volume between them. Titanium in this form is termed onedimensional since electron transport is narrowly confined along the length of the nanotube. My Ph.D. accomplishments have successfully shown that osteoblast cells, the cells that are the precursors to bone, have a strong tendency to attach to the inside and outside of the titanium nanotubes onto which they are grown using their filopodia – cell’s foot used for locomotion – anchored to titanium nanotubes. In fact it was shown that the cell prefers to find many anchoring sites. These sites are critical for cell locomotion during the first several weeks of maturity and upon calcification as a strongly anchored bone cell. In addition I have shown that such a surface has a greater cell density than a smooth titanium surface. My work also developed a process that uses a focused and controllably rastered ion beam as a nano-scalpel to cut away sections of the osteoblast cells to probe the attachment beneath the main cell body. Ultimately the more rapid growth of osteoblasts, coupled with a stronger cell-surface interface, could provide cost reduction, shorter rehabilitation, and fewer follow-on surgeries due to implant loosening.

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The single electron transistor (SET) is a charge-based device that may complement the dominant metal-oxide-semiconductor field effect transistor (MOSFET) technology. As the cost of scaling MOSFET to smaller dimensions are rising and the the basic functionality of MOSFET is encountering numerous challenges at dimensions smaller than 10nm, the SET has shown the potential to become the next generation device which operates based on the tunneling of electrons. Since the electron transfer mechanism of a SET device is based on the non-dissipative electron tunneling effect, the power consumption of a SET device is extremely low, estimated to be on the order of 10^-18J. The objectives of this research are to demonstrate technologies that would enable the mass produce of SET devices that are operational at room temperature and to integrate these devices on top of an active complementary-MOSFET (CMOS) substrate. To achieve these goals, two fabrication techniques are considered in this work. The Focus Ion Beam (FIB) technique is used to fabricate the islands and the tunnel junctions of the SET device. A Ultra-Violet (UV) light based Nano-Imprint Lithography (NIL) call Step-and-Flash- Imprint Lithography (SFIL) is used to fabricate the interconnections of the SET devices. Combining these two techniques, a full array of SET devices are fabricated on a planar substrate. Test and characterization of the SET devices has shown consistent Coulomb blockade effect, an important single electron characteristic. To realize a room temperature operational SET device that function as a logic device to work along CMOS, it is important to know the device behavior at different temperatures. Based on the theory developed for a single island SET device, a thermal analysis is carried out on the multi-island SET device and the observation of changes in Coulomb blockade effect is presented. The results show that the multi-island SET device operation highly depends on temperature. The important parameters that determine the SET operation is the effective capacitance Ceff and tunneling resistance Rt . These two parameters lead to the tunneling rate of an electron in the SET device, Γ. To obtain an accurate model for SET operation, the effects of the deviation in dimensions, the trap states in the insulation, and the background charge effect have to be taken into consideration. The theoretical and experimental evidence for these non-ideal effects are presented in this work.

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The single-electron transistor (SET) is one of the best candidates for future nano electronic circuits because of its ultralow power consumption, small size and unique functionality. SET devices operate on the principle of Coulomb blockade, which is more prominent at dimensions of a few nano meters. Typically, the SET device consists of two capacitively coupled ultra-small tunnel junctions with a nano island between them. In order to observe the Coulomb blockade effects in a SET device the charging energy of the device has to be greater that the thermal energy. This condition limits the operation of most of the existing SET devices to cryogenic temperatures. Room temperature operation of SET devices requires sub-10nm nano-islands due to the inverse dependence of charging energy on the radius of the conducting nano-island. Fabrication of sub-10nm structures using lithography processes is still a technological challenge. In the present investigation, Focused Ion Beam based etch and deposition technology is used to fabricate single electron transistors devices operating at room temperature. The SET device incorporates an array of tungsten nano-islands with an average diameter of 8nm. The fabricated devices are characterized at room temperature and clear Coulomb blockade and Coulomb oscillations are observed. An improvement in the resolution limitation of the FIB etching process is demonstrated by optimizing the thickness of the active layer. SET devices with structural and topological variation are developed to explore their impact on the behavior of the device. The threshold voltage of the device was minimized to ~500mV by minimizing the source-drain gap of the device to 17nm. Vertical source and drain terminals are fabricated to realize single-dot based SET device. A unique process flow is developed to fabricate Si dot based SET devices for better gate controllability in the device characteristic. The device vi parameters of the fabricated devices are extracted by using a conductance model. Finally, characteristic of these devices are validated with the simulated data from theoretical modeling.