A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

The Bogota – sabana region : the political economy behind the struggle to implement a sustainable urban development model

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Stock return comovements and integration within the Latin American integrated market

Financial integration has been pursued aggressively across the globe in the last fifty years; however, there is no conclusive evidence on the diversification gains (or losses) of such efforts. These gains (or losses) are related to the degree of comovements and synchronization among increasingly integrated global markets. We quantify the degree of comovements within the integrated Latin American market (MILA). We use dynamic correlation models to quantify comovements across securities as well as a direct integration measure. Our results show an increase in comovements when we look at the country indexes, however, the increase in the trend of correlation is previous to the institutional efforts to establish an integrated market in the region. On the other hand, when we look at sector indexes and an integration measure, we find a decreased in comovements among a representative sample of securities form the integrated market.

A deterministic model for lake clarity; application to management of Lake Tahoe (California-Nevada), USA

This dissertation has as its goal the quantitative evaluation of the application of coupled hydrodynamic, ecological and clarity models, to address the deterministic prediction of water clarity in lakes and reservoirs. Prediction of water clarity is somewhat unique, insofar as it represents the integrated and coupled effects of a broad range of individual water quality components. These include the biological components such as phytoplankton, together with the associated cycles of nutrients that are needed to sustain their popuiations, and abiotic components such as suspended particles that may be introduced by streams, atmospheric deposition or sediment resuspension. Changes in clarity induced by either component will feed back on the phytoplankton dynamics, as incident light also affects biological growth. Thus ability to successfully model changes in clarity will by necessity have to achieve the correct modeling of these other water quality parameters. Water clarity is also unique in that it may be one of the earliest and most easily detected wamings of the acceleration of the process of eutrophication in a water body.

Cap a un model per interpretar i facilitar l'aprendre: estratègies i recursos per a la reflexió-acció en i des de la pràctica

1.- L'enquadrament d'aquest treball de recerca s'ha fet en i des de la praxis. EI que interessa és descobrir i proposar instruments pedagògics d'ajuda, assequibles i contextualitzats, especialment en el terreny de la comunicació i la interacció Educador-Educand. La metodologia que s'ha fet servir és de caire qualitatiu, etnogràfic, en un enfocament basat en la investigació-acció. La visió de la persona és volgudament holística; els sentiments, els significats, I' orientació personal, I' autodirecció. esdevenen elements centrals. La hipòtesi de treball, en la qual es fonamenta la recerca, podria formular-se així: 'En la pràctica, els Educadors, d'una forma més o menys reflexiva, perceben i interpreten el procés d'aprendre dels Educands; hi intervenen, el mediatitzen; n'avaluen la direcció i l'encert". A partir d'aquest supòsit, l'investigador veu convenient donar resposta a tres qüestions centrals: A) Com comprenem i interpretem els Educadors el procés d'aprendre dels Educands?; B) Quin tipus d'intervenció resultarà adient per promoure i/o facilitar l'aprendre?; C) Amb quins instruments i estratègies comptem per ajudar pedagògicament? 2.- Per llegir l'aprendre, l'investigador fa ús d'un model mental, indispensable per ordenar les dades de l'experiència. Convé, per tant, explicitar-lo, fer-ne ciència, coneixement compartit. En aquesta direcció de treball se li plantegen dos tipus d'interrogants: A) Quins són els elements comuns a qualsevol experiència d'aprenentatge?; Quina mena d'activitat o experiència personal desenvolupen tots els Educands; i B) Com es manifesta aquesta experiència? Amb quins indicadors? Quina mena de "text" llegeix l'Educador per orientar la seva intervenció d'ajuda? 3.- L'aprenentatge. en aquest treball, és considerat per l'investigador com la resultant de tres processos personals: el posicionament, l'estratègia i l'avaluació. Quan l'Educador vol compartir amb l'Educand el seu procés idiosincràtic d'aprendre, procura reconstruir amb ell aquestes tres accions bàsiques: A) Com es posiciona: què tem o desitja, què creu, què espera, quines expectatives viu, com es motiva? B) Quines són les seves pautes d'actuació: com treballa, com memoritza, com recupera la informació que té a la memòria, què fa davant d'un problema... ? C) Què busca; què és important per a ella; què pretén... ? 4.- Davant la complexitat dels missatges emesos per l'Educand l'investigador opta per llegir tres tipus de "textos": els productes i els resultats; les conductes; i els missatges parlats. Entre tots tres, pensa, podrà trobar elements i indicadors adequats per fonamentar, sempre hipotèticament, la seva actuació pedagògica. 5.- Procura sobretot detectar i fer existir els èxits, aquells productes i/o resultats que l'Educand troba valuosos, per tal d'ajudar-lo a prendre consciència dels seu repertori personal d'estratègies i capacitats. En aquest àmbit es proposen tres actituds o enfocaments del treball d'ajuda: A) El primer fa referència a la presa de consciència de l'estratègia personal, que s'amaga darrera el producte valorat. B) El segon apunta cap al respecte per l'estratègia que cadascú executa i, per tant, li és familiar. L'Educand la necessita. Es la seva. Es troba en la seva experiència, encara que no necessàriament existeixi en la seva construcció conscient. C) El tercer ,el duu a valorar l'estratègia d'acord amb les finalitats de l'Educand. La seva adequació es legitima pel que es proposa. Partim del supòsit que tota conducta es troba dirigida per un propòsit a vegades difícil de copsar i no sempre recomanable per a l'Educand. 6.- La conducta percebuda de l'Educand és entesa com un missatge, un conjunt d'indicadors de la seva activitat contextualitzada, interna i externa; missatge que, en relació amb altres, com els productes i les verbalitzacions, manifesta fragments dels seus significats, projectes, estratègies, valors. Es fa un èmfasi especial en les conductes "internes", els gestos mentals, l'acció interior, tramesa per mitja de microcomportaments sovint no conscient, i certificada per mitjà de la verbalització del viscut. 7.- Parlar amb l'Educand suposa dues menes d'accions: escoltar i emetre. Escoltem per comprendre; emetem per perfilar la comprensió i també per ajudar. En l'emissió, el missatge pedagògic té dues funcions: a) rellançar i orientar el pensament i l'autoexploració de l'Educand; i b) influir per tal que desenvolupi amb èxit el seu projecte d'aprendre. Interessa d'una manera especial ajudar a integrar en la consciència de l'Educand aquests elements de la seva experiència que poden facilitar-li l'adquisició del coneixement. I entenem que, en aquesta empresa, la paraula i la interacció verbal poden tenir-hi un joc important. Per aquesta raó s'ha considerat necessari oferir un model d'anàlisi de la interacció i els missatges verbals. 8.- "Les persones aprenen sempre, amb recursos, processos i sistemes de valoració idiosincràtics, per fa qual cosa la seva orientació en el context esdevé un referent central en el disseny de l'ajuda pedagògica i en la seva avaluació". Aquesta és la hipòtesi de sortida per dissenyar la intervenció pedagògica. Tothom aprèn, inevitablement; la qüestió és quina cosa està aprenent i de quina manera els seus resultats d'ara són mediatitzats per l'experiència passada i, alhora, condicionen el seu aprendre futur. L'aprenent es posiciona, anticipa el procés d' aprendre, valora la seva. capacitat per desenvolupar-lo amb èxit, es motiva en una determinada direcció, d'acord amb la seva experiència, els seus aprenentatges anteriors. Executa estratègies, mostra un tipus d'intel·ligència, una forma personal de processar la informació. Pretén quelcom. És un sistema obert en relació amb el medi: hi ha uns valors que dirigeixen la seva presa de decisions. Utilitza uns criteris propis, una gamma personal d'opcions conscients. Avalua el que fa, el resultat que obté i la seva capacitat personal. 9.- L'ajuda pedagògica que I' autor proposa s'encamina sobretot a facilitar en l'Educand la descoberta dels seus propis recursos. Es tracta de portar-lo cap a la consideració atenta de la seva pròpia experiència, per amplificar-la i fer-la existir com a recurs conscient . Ha dibuixat i experimentat tres conjunts d'intervenció cadascun enfocat vers un àmbit de l'experiència d'aprendre, el qual col·loca com a prioritari, sense oblidar qualsevol dels altres que pugui ser rellevant, per comprendre o ajudar. A) Intervenció sobre el posicionament. En aquest àmbit enfoca l'estil de motivació que executa l'Educand, mira de corregir-lo, si cal, a partir de l'anàlisi i la comprensió de les seves formes de motivar-se quan ell viu l'èxit. Treballa proposant objectius paradoxals de fracàs gairebé impossible, buscant l'assoliment de petits èxits, potser aparentment insignificants, però estratègics; prescriu l'automatisme, per modificar-lo si l'Educand ho desitja; comprova el procés d'anticipació de I' experiència que l'aprenent es construeix per orientar-se; l'ajuda a contextualitzar anticipació i a fer ús dels seus Ilenguatges interns més eficaços i còmodes;... B) Intervenció sobre les estratègies i processos. En un segon enfocament, no necessàriament posterior al descrit, considera les estratègies de I'Educand, també a partir dels seus encerts i èxits. Mira de portar-lo cap a fa descripció i presa de consciència de les seves maneres de fer mes còmodes i segures, les que lliguen amb les seves preferències cerebrals. Quan viu dificultats, el convida a explorar les excepcions, els moments en els quals les seves realitzacions són satisfactòries. Pretén sobretot modificar les seves creences limitants, posant-lo en conflicte amb els fets de l'experiència. A vegades, caldrà facilitar l'adquisició d'estratègies i procediments nous que l'Educand considera plausibles. Es tracta específicament de fer existir opcions noves d'actuació per tal d'assolir allò que vol i/o necessita. C) Intervenció sobre el sistema de valors de l'Educand. L'Educand viu uns valors, els quals expliquen el seu món intern les conductes que realitza i els resultats que obté. Aquest àmbit és col·locat, en el model, al centre del procés d'aprendre. Hom actua amb propòsits determinats, no necessariament conscients. L'obertura de la persona a l'experiència d'aprendre es dirigeix segons criteris i valors irrenunciables. 10.- L 'Educador procura compartir els objectius de l'Educand i els seus projectes per assolir-los; vol tanmateix que se'n faci coneixedor i director responsable. Per a això li convé preguntar-se per quina mena d'experiència està desenvolupant i quin sentit ecològic te per a ell. L'Educador, el seu model del món, la seva persona, està compromès en el procés d'ajuda. No és només un tècnic que aplica recursos objectius. El seu model de comunicació, el seu pensament, les seves expectatives i anticipacions, tenen un pes considerable en el tipus d'intervenció pedagògica que durà a terme i, d'escreix, en el tipus d' aprenentatge que facilita. En la intervenció, l'Educador parteix d'una avaluació intencionadament positiva, centrada en els recursos i les solucions, en la metacognició i l'autoregulació dels processos, a partir de premisses que pressuposen l'èxit personal.

Local model predictive control for navigation of a wheeled mobile robot using monocular information

Aquesta tesi està inspirada en els agents naturals per tal de planificar de manera dinàmica la navegació d'un robot diferencial de dues rodes. Les dades dels sistemes de percepció són integrades dins una graella d'ocupació de l'entorn local del robot. La planificació de les trajectòries es fa considerant la configuració desitjada del robot, així com els vértexs més significatius dels obstacles més propers. En el seguiment de les trajectòries s'utilitzen tècniques locals de control predictiu basades en el model, amb horitzons de predicció inferiors a un segon. La metodologia emprada és validada mitjançant nombrosos experiments.

An Integrated Traffic and Pedestrian Model_based Vision System

The paper describes a novel integrated vision system in which two autonomous visual modules are combined to interpret a dynamic scene. The first module employs a 3D model-based scheme to track rigid objects such as vehicles. The second module uses a 2D deformable model to track non-rigid objects such as people. The principal contribution is a novel method for handling occlusion between objects within the context of this hybrid tracking system. The practical aim of the work is to derive a scene description that is sufficiently rich to be used in a range of surveillance tasks. The paper describes each of the modules in outline before detailing the method of integration and the handling of occlusion in particular. Experimental results are presented to illustrate the performance of the system in a dynamic outdoor scene involving cars and people.

Ice supersaturation in the ECMWF integrated forecast system

A parametrization for ice supersaturation is introduced into the ECMWF Integrated Forecast System (IFS), compatible with the cloud scheme that allows partial cloud coverage. It is based on the simple, but often justifiable, diagnostic assumption that the ice nucleation and subsequent depositional growth time-scales are short compared to the model time step, thus supersaturation is only permitted in the clear-sky portion of the grid cell. Results from model integrations using the new scheme are presented, which is demonstrated to increase upper-tropospheric humidity, decrease high-level cloud cover and, to a much lesser extent, cloud ice amounts, all as expected from simple arguments. Evaluation of the relative distribution of supersaturated humidity amounts shows good agreement with the observed climatology derived from in situ aircraft observations. With the new scheme, the global distribution of frequency of occurrence of supersaturated regions compares well with remotely sensed microwave limb sounder (MLS) data, with the most marked errors of underprediction occurring in regions where the model is known to underpredict deep convection. Finally, it is also demonstrated that the new scheme leads to improved predictions of permanent contrail cloud over southern England, which indirectly implies upper-tropospheric humidity fields are better represented for this region.

Controlling nitrate pollution: an integrated approach

The introduction of the EU Water Framework Directive requires policy to address non-point source pollution as part of an overall integrated strategy to improve the ecological status of water bodies. In this paper, we combine an economic optimisation framework with a dynamic simulation model of N transport in the Kennet Catchment to link decisions taken at the farm level to reductions in nitrate concentrations in the River Kennet. We examine a variety of policies targeted at reducing fertiliser use and changing the way in which farm land is used. We find that a tax on nitrogen emerges as the best policy both in terms of cost- and environmental effectiveness. Such a policy involves a considerable reduction in fertiliser use, as well as, a restructuring of land-use away from arable towards increased use of set-aside. Budgetary implications of such a radical move towards set-aside would be huge and hence unlikely to be politically palatable given the objective of reducing the EU budgetary allocation to agriculture. Additionally, the current rise in world demand for food may also mitigate calls for increasing the proportion of land taken out of agricultural production. Although the study succeeds in establishing a link between actions on the farm and nitrate concentrations in the stream water, further work is required to explore the effect of the retention of nitrates in the unsaturated zone and groundwater on this link.

An Integrated Assessment of changes in the thermohaline circulation

This paper discusses the risks of a shutdown of the thermohaline circulation (THC) for the climate system, for ecosystems in and around the North Atlantic as well as for fisheries and agriculture by way of an Integrated Assessment. The climate model simulations are based on greenhouse gas scenarios for the 21st century and beyond. A shutdown of the THC, complete by 2150, is triggered if increased freshwater input from inland ice melt or enhanced runoff is assumed. The shutdown retards the greenhouse gas-induced atmospheric warming trend in the Northern Hemisphere, but does not lead to a persistent net cooling. Due to the simulated THC shutdown the sea level at the North Atlantic shores rises by up to 80 cm by 2150, in addition to the global sea level rise. This could potentially be a serious impact that requires expensive coastal protection measures. A reduction of marine net primary productivity is associated with the impacts of warming rather than a THC shutdown. Regional shifts in the currents in the Nordic Seas could strongly deteriorate survival chances for cod larvae and juveniles. This could lead to cod fisheries becoming unprofitable by the end of the 21st century. While regional socioeconomic impacts might be large, damages would be probably small in relation to the respective gross national products. Terrestrial ecosystem productivity is affected much more by the fertilization from the increasing CO2 concentration than by a THC shutdown. In addition, the level of warming in the 22nd to 24th century favours crop production in northern Europe a lot, no matter whether the THC shuts down or not. CO2 emissions corridors aimed at limiting the risk of a THC breakdown to 10% or less are narrow, requiring departure from business-as-usual in the next few decades. The uncertainty about THC risks is still high. This is seen in model analyses as well as in the experts’ views that were elicited. The overview of results presented here is the outcome of the Integrated Assessment project INTEGRATION.

An eclectic morphostratigraphic model for the sedimentary response to Holocene sea-level rise in northwest Europe

The improved empirical understanding of silt facies in Holocene coastal sequences provided by such as diatom, foraminifera, ostracode and testate amoebae analysis, combined with insights from quantitative stratigraphic and hydraulic simulations, has led to an inclusive, integrated model for the palaeogeomorphology, stratigraphy, lithofacies and biofacies of northwest European Holocene coastal lowlands in relation to sea-level behaviour. The model covers two general circumstances and is empirically supported by a range of field studies in the Holocene deposits of a number of British estuaries, particularly, the Severn. Where deposition was continuous over periods of centuries to millennia, and sea level fluctuated about a rising trend, the succession consists of repeated cycles of silt and peat lithofacies and biofacies in which series of transgressive overlaps (submergence sequences) alternate with series of regressive overlaps (emergence sequences) in association with the waxing and waning of tidal creek networks. Environmental and sea-level change are closely coupled, and equilibrium and secular pattern is of the kind represented ideally by a closed limit cycle. In the second circumstance, characteristic of unstable wetland shores and generally affecting smaller areas, coastal erosion ensures that episodes of deposition in the high intertidal zone last no more than a few centuries. The typical response is a series of regressive overlaps (emergence sequence) in erosively based high mudflat and salt-marsh silts that record, commonly as annual banding, exceptionally high deposition rates and a state of strong disequilibrium. Environmental change, including creek development, and sea-level movement are uncoupled. Only if deposition proceeds for a sufficiently long period, so that marshes mature, are equilibrium and close coupling regained. (C) 2002 Elsevier Science B.V. All rights reserved.

Sensitivity analysis of a catchment-scale nitrogen model

There are now considerable expectations that semi-distributed models are useful tools for supporting catchment water quality management. However, insufficient attention has been given to evaluating the uncertainties inherent to this type of model, especially those associated with the spatial disaggregation of the catchment. The Integrated Nitrogen in Catchments model (INCA) is subjected to an extensive regionalised sensitivity analysis in application to the River Kennet, part of the groundwater-dominated upper Thames catchment, UK The main results are: (1) model output was generally insensitive to land-phase parameters, very sensitive to groundwater parameters, including initial conditions, and significantly sensitive to in-river parameters; (2) INCA was able to produce good fits simultaneously to the available flow, nitrate and ammonium in-river data sets; (3) representing parameters as heterogeneous over the catchment (206 calibrated parameters) rather than homogeneous (24 calibrated parameters) produced a significant improvement in fit to nitrate but no significant improvement to flow and caused a deterioration in ammonium performance; (4) the analysis indicated that calibrating the flow-related parameters first, then calibrating the remaining parameters (as opposed to calibrating all parameters together) was not a sensible strategy in this case; (5) even the parameters to which the model output was most sensitive suffered from high uncertainty due to spatial inconsistencies in the estimated optimum values, parameter equifinality and the sampling error associated with the calibration method; (6) soil and groundwater nutrient and flow data are needed to reduce. uncertainty in initial conditions, residence times and nitrogen transformation parameters, and long-term historic data are needed so that key responses to changes in land-use management can be assimilated. The results indicate the general, difficulty of reconciling the questions which catchment nutrient models are expected to answer with typically limited data sets and limited knowledge about suitable model structures. The results demonstrate the importance of analysing semi-distributed model uncertainties prior to model application, and illustrate the value and limitations of using Monte Carlo-based methods for doing so. (c) 2005 Elsevier B.V. All rights reserved.

An application of the GLUE methodology for estimating the parameters of the INCA-N model

The conceptual and parameter uncertainty of the semi-distributed INCA-N (Integrated Nutrients in Catchments-Nitrogen) model was studied using the GLUE (Generalized Likelihood Uncertainty Estimation) methodology combined with quantitative experimental knowledge, the concept known as 'soft data'. Cumulative inorganic N leaching, annual plant N uptake and annual mineralization proved to be useful soft data to constrain the parameter space. The INCA-N model was able to simulate the seasonal and inter-annual variations in the stream-water nitrate concentrations, although the lowest concentrations during the growing season were not reproduced. This suggested that there were some retention processes or losses either in peatland/wetland areas or in the river which were not included in the INCA-N model. The results of the study suggested that soft data was a way to reduce parameter equifinality, and that the calibration and testing of distributed hydrological and nutrient leaching models should be based both on runoff and/or nutrient concentration data and the qualitative knowledge of experimentalist. (c) 2006 Elsevier B.V. All rights reserved.

A GIS-based empirical model for vegetation prediction in Lefka Ori, Crete

The aim of the study was to establish and verify a predictive vegetation model for plant community distribution in the alti-Mediterranean zone of the Lefka Ori massif, western Crete. Based on previous work three variables were identified as significant determinants of plant community distribution, namely altitude, slope angle and geomorphic landform. The response of four community types against these variables was tested using classification trees analysis in order to model community type occurrence. V-fold cross-validation plots were used to determine the length of the best fitting tree. The final 9node tree selected, classified correctly 92.5% of the samples. The results were used to provide decision rules for the construction of a spatial model for each community type. The model was implemented within a Geographical Information System (GIS) to predict the distribution of each community type in the study site. The evaluation of the model in the field using an error matrix gave an overall accuracy of 71%. The user's accuracy was higher for the Crepis-Cirsium (100%) and Telephium-Herniaria community type (66.7%) and relatively lower for the Peucedanum-Alyssum and Dianthus-Lomelosia community types (63.2% and 62.5%, respectively). Misclassification and field validation points to the need for improved geomorphological mapping and suggests the presence of transitional communities between existing community types.