954 resultados para Ion beam assisted


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Le mécanisme menant à des déformations structurales suivant le bombardement d'échantillons de a-Si d'un faisceau d'ions lourds et rapides est sujet de controverses. Nous nous sommes penchés sur l'hypothèse de la formation d'une zone liquide causée par la déposition d'énergie des ions incidents dans le contexte de la théorie du pic thermique. Des échantillons de silicium amorphe furent préparés dans le but d'observer les indices d'une transition de phase l-Si/a-Si suivant la déposition locale d'énergie sur le parcours d'un ion lourd énergétique dans le a-Si. Les échantillons furent implantés d'impuretés de Cu ou d'Ag avant d'être exposés à un faisceau d'ions Ag12+ de 70 MeV. L'utilisation de l'analyse GISAXS est projetée afin d'observer une concentration locale d'impuretés suivant leur ségrégation sur la trace de l'ion. Des masques d'implantation nanométriques d'oxide d'aluminium ont été fabriqués afin d'augmenter la sensibilité de l'analyse GISAXS et une méthode d'alignement de ces masques selon la direction du faisceau fut développée. Le bombardement d'échantillons au travers de ces masques a donné lieu à un réseau de sites d'impacts isolés presque équidistants.

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Cette thèse présente à la fois des résultats de simulations numériques en plus de ré- sultats expérimentaux obtenus en laboratoire sur le rôle joué par les défauts de structure dans le silicium amorphe. Nos travaux de simulation numérique furent réalisés avec une nouvelle méthode de simulation Monte-Carlo cinétique pour décrire l’évolution tempo- relle de modèles de silicium amorphe endommagés sur plusieurs échelles de temps jus- qu’à une seconde à la température pièce. Ces simulations montrent que les lacunes dans le silicium amorphe sont instables et ne diffusent pas sans être détruites. Nous montrons également que l’évolution d’un modèle de silicium amorphe endommagé par une colli- sion ionique lors d’un recuit peut être divisée en deux phases : la première est dominée exclusivement par la diffusion et la création/destruction de défauts de liaison, alors que la deuxième voit les créations/destructions de liens remplacées par des échanges de liens entre atomes parfaitement coordonnés. Les défauts ont aussi un effet sur la viscosité du silicium amorphe. Afin d’approfondir cette question, nous avons mesuré la viscosité du silicium amorphe et du silicium amorphe hydrogéné sous l’effet d’un faisceau d’ions. Nous montrons que la variation de la viscosité dans les deux matériaux est différente : le silicium amorphe hydrogéné a une viscosité constante en fonction de la fluence des ions alors que le silicium amorphe pur a une viscosité qui augmente de façon linéaire. Pour de faibles fluences, la viscosité du silicium hydrogéné est plus grande que la viscosité sans hydrogène. La présence d’hydrogène diminue également l’amplitude de la variation logarithmique de la contrainte observée lors de la relaxation à la température de la pièce.

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Corteo is a program that implements Monte Carlo (MC) method to simulate ion beam analysis (IBA) spectra of several techniques by following the ions trajectory until a sufficiently large fraction of them reach the detector to generate a spectrum. Hence, it fully accounts for effects such as multiple scattering (MS). Here, a version of Corteo is presented where the target can be a 2D or 3D image. This image can be derived from micrographs where the different compounds are identified, therefore bringing extra information into the solution of an IBA spectrum, and potentially significantly constraining the solution. The image intrinsically includes many details such as the actual surface or interfacial roughness, or actual nanostructures shape and distribution. This can for example lead to the unambiguous identification of structures stoichiometry in a layer, or at least to better constraints on their composition. Because MC computes in details the trajectory of the ions, it simulates accurately many of its aspects such as ions coming back into the target after leaving it (re-entry), as well as going through a variety of nanostructures shapes and orientations. We show how, for example, as the ions angle of incidence becomes shallower than the inclination distribution of a rough surface, this process tends to make the effective roughness smaller in a comparable 1D simulation (i.e. narrower thickness distribution in a comparable slab simulation). Also, in ordered nanostructures, target re-entry can lead to replications of a peak in a spectrum. In addition, bitmap description of the target can be used to simulate depth profiles such as those resulting from ion implantation, diffusion, and intermixing. Other improvements to Corteo include the possibility to interpolate the cross-section in angle-energy tables, and the generation of energy-depth maps.

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Tunable Optical Sensor Arrays (TOSA) based on Fabry-Pérot (FP) filters, for high quality spectroscopic applications in the visible and near infrared spectral range are investigated within this work. The optical performance of the FP filters is improved by using ion beam sputtered niobium pentoxide (Nb2O5) and silicon dioxide (SiO2) Distributed Bragg Reflectors (DBRs) as mirrors. Due to their high refractive index contrast, only a few alternating pairs of Nb2O5 and SiO2 films can achieve DBRs with high reflectivity in a wide spectral range, while ion beam sputter deposition (IBSD) is utilized due to its ability to produce films with high optical purity. However, IBSD films are highly stressed; resulting in stress induced mirror curvature and suspension bending in the free standing filter suspensions of the MEMS (Micro-Electro-Mechanical Systems) FP filters. Stress induced mirror curvature results in filter transmission line degradation, while suspension bending results in high required filter tuning voltages. Moreover, stress induced suspension bending results in higher order mode filter operation which in turn degrades the optical resolution of the filter. Therefore, the deposition process is optimized to achieve both near zero absorption and low residual stress. High energy ion bombardment during film deposition is utilized to reduce the film density, and hence the film compressive stress. Utilizing this technique, the compressive stress of Nb2O5 is reduced by ~43%, while that for SiO2 is reduced by ~40%. Filters fabricated with stress reduced films show curvatures as low as 100 nm for 70 μm mirrors. To reduce the stress induced bending in the free standing filter suspensions, a stress optimized multi-layer suspension design is presented; with a tensile stressed metal sandwiched between two compressively stressed films. The stress in Physical Vapor Deposited (PVD) metals is therefore characterized for use as filter top-electrode and stress compensating layer. Surface micromachining is used to fabricate tunable FP filters in the visible spectral range using the above mentioned design. The upward bending of the suspensions is reduced from several micrometers to less than 100 nm and 250 nm for two different suspension layer combinations. Mechanical tuning of up to 188 nm is obtained by applying 40 V of actuation voltage. Alternatively, a filter line with transmission of 65.5%, Full Width at Half Maximum (FWHM) of 10.5 nm and a stopband of 170 nm (at an output wavelength of 594 nm) is achieved. Numerical model simulations are also performed to study the validity of the stress optimized suspension design for the near infrared spectral range, wherein membrane displacement and suspension deformation due to material residual stress is studied. Two bandpass filter designs based on quarter-wave and non-quarter-wave layers are presented as integral components of the TOSA. With a filter passband of 135 nm and a broad stopband of over 650 nm, high average filter transmission of 88% is achieved inside the passband, while maximum filter transmission of less than 1.6% outside the passband is achieved.

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Micromirror arrays are a very strong candidate for future energy saving applications. Within this work, the fabrication process for these micromirror arrays has been optimized and some steps for the large area fabrication of micromirror modules were performed. At first the surface roughness of the insulation layer of silicon dioxide (SiO2) was investigated. This SiO2 thin layer was deposited on three different type of substrates i.e. silicon, glass and Polyethylene Naphthalate (PEN) substrates. The deposition techniques which has been used are Plasma Enhanced Chemical Vapor Deposition (PECVD), Physical Vapor Deposition (PVD) and Ion Beam Sputter Deposition (IBSD). The thickness of the SiO2 thin layer was kept constant at 150nm for each deposition process. The surface roughness was measured by Stylus Profilometry and Atomic Force Microscopy (AFM). It was found that the layer which was deposited by IBSD has got the minimum surface roughness value and the layer which was deposited by PECVD process has the highest surface roughness value. During the same investigation, the substrate temperature of PECVD was varied from 80° C to 300° C with the step size of 40° C and it was found that the surface roughness keeps on increasing as the substrate holder temperature increases in the PECVD process. A new insulation layer system was proposed to minimize the dielectric breakdown effect in insulation layer for micromirror arrays. The conventional bilayer system was replaced by five layer system but the total thickness of insulation layer remains the same. It was found that during the actuation of micromirror arrays structure, the dielectric breakdown effect was reduced considerably as compared to the bilayer system. In the second step the fabrication process of the micromirror arrays was successfully adapted and transferred from glass substrates to the flexible PEN substrates by optimizing the conventional process recipe. In the last section, a large module of micromirror arrays was fabricated by electrically interconnecting four 10cm×10cm micromirror modules on a glass pane having dimensions of 21cm×21cm.

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The mechanisms by which coatings develop on weathered grain surfaces, and their potential impact on rates of fluid-mineral interaction, have been investigated by examining feldspars from a 1.1 ky old soil in the Glen Feshie chronosequence, Scottish highlands. Using the focused ion beam technique, electron-transparent, foils for characterization by transmission electron microscopy were cut from selected parts of grain surfaces. Some parts were bare whereas others had accumulations, a few micrometres thick, of Weathering products, often mixed with mineral and microbial debris. Feldspar exposed at bare grain surfaces is crystalline throughout and so there is no evidence for the presence of the amorphous 'leached layers' that typically form in acid-dissolution experiments and have been described from some natural Weathering contexts. The weathering products comprise sub-mu m thick crystallites of an Fe-K aluminosilicate, probably smectite, that have grown within an amorphous and probably organic-rich matrix. There is also evidence for crystallization of clays having been mediated by fungal hyphae. Coatings formed within Glen Feshie soils after similar to 1.1 ky are insufficiently continuous or impermeable to slow rates Of fluid-feldspar reactions, but provide valuable insights into the complex Weathering microenvironments oil debris and microbe-covered mineral surfaces.

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Using a focused ion beam (FIB) instrument, electron-transparent samples (termed foils) have been cut from the naturally weathered surfaces of perthitic alkali feldspars recovered from soils overlying the Shap granite, northwest England. Characterization of these foils by transmission electron microscopy (TEM) has enabled determination of the crystallinity and chemical composition of near-surface regions of the feldspar and an assessment of the influence of intragranular microtextures on the microtopography of grain surfaces and development of etch pits. Damage accompanying implantation of the 30 kV Ga+ ions used for imaging and deposition of protective platinum prior to ion milling creates amorphous layers beneath outer grain surfaces, but can be overcome by coating grains with > 85 nm of gold before FIB work. The sidewalls of the foil and feldspar surrounding original voids are also partially amorphized during later stages of ion milling. No evidence was found for the presence of amorphous or crystalline weathering products or amorphous "leached layers" immediately beneath outer grain surfaces. The absence of a leached layer indicates that chemical weathering of feldspar in the Shap soils is stoichiometric, or if non-stoichiometric, either the layer is too thin to resolve by the TEM techniques used (i.e., <=similar to 2.5 nm) or an insufficient proportion of ions have been leached from near-surface regions so that feldspar crystallinity is maintained. No evidence was found for any difference in the mechanisms of weathering where a microbial filament rests on the feldspar surface. Sub-micrometer-sized steps on the grain surface have formed where subgrains and exsolution lamellae have influenced the propagation of fractures during physical weathering, whereas finer scale corrugations form due to compositional or strain-related differences in dissolution rates of albite platelets and enclosing tweed orthoclase. With progressive weathering, etch pits that initiated at the grain surface extend into grain interiors as etch tubes by exploiting preexisting networks of nanopores that formed during the igneous history of the grain. The combination of FIB and TEM techniques is an especially powerful way of exploring mechanisms of weathering within the "internal zone" beneath outer grain surfaces, but results must be interpreted with caution owing to the ease with which artifacts can be created by the high-energy ion and electron beams used in the preparation and characterization of the foils.

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This paper presents an overview of the results obtained during the Joint Experiments organized in the framework of the IAEA Coordinated Research Project on `Joint Research Using Small Tokamaks` that have been carried out on the tokamaks CASTOR at IPP Prague, Czech Republic (2005), T-10 at RRC `Kurchatov Institute`, Moscow, Russia (2006), and the most recent one at ISTTOK at IST, Lisbon, Portugal, in 2007. Experimental programmes were aimed at diagnosing and characterizing the core and the edge plasma turbulence in a tokamak in order to investigate correlations between the occurrence of transport barriers, improved confinement, electric fields and electrostatic turbulence using advanced diagnostics with high spatial and temporal resolution. On CASTOR and ISTTOK, electric fields were generated by biasing an electrode inserted into the edge plasma and an improvement of the global particle confinement induced by the electrode positive biasing has been observed. Geodesic acoustic modes were studied using heavy ion beam diagnostics on T-10 and ISTTOK and correlation reflectometry on T-10. ISTTOK is equipped with a gallium jet injector and the technical feasibility of gallium jets interacting with plasmas has been investigated in pulsed and ac operation. The first Joint Experiments have clearly demonstrated that small tokamaks are suitable for broad international cooperation to conduct dedicated joint research programmes. Other activities within the IAEA Coordinated Research Project on Joint Research Using Small Tokamaks are also overviewed.

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Neste trabalho estuda-se a formação de novas fases de carbono amorfo através da irradiação iônica de filmes de fulereno, a-C e a-C:H polimérico. Os efeitos da irradiação iônica na modificação das propriedades ópticas e mecânicas dos filmes de carbono irradiados são analisados de forma correlacionada com as alterações estruturais a nivel atômico. O estudo envolve tanto a análise dos danos induzidos no fulereno pela irradiação iônica a baixas fluências, correspondendo a baixas densidades de energia depositada, quanto a investigação das propriedades físico-químicas das fases amorfas obtidas após irradiações dos filmes de fulereno, a-C e a-C:H com altas densidades de energia depositada. As propriedades ópticas, mecânicas e estruturais das amostras são analisadas através de técnicas de espectroscopia Raman e infravermelho, espectrofotometria UV-VIS-NIR, microscopias ópticas e de força atômica, nanoindentação e técnicas de análise por feixe de íons, tais como retroespalhamento Rutherford e análises por reação nuclear. As irradiações produzem profundas modificações nas amostras de fulereno, a-C e a-C:H, e por conseqüência significativas alterações em suas propriedades ópticas e mecânicas. Após máximas fluências de irradiação fases amorfas rígidas (com dureza de 14 e 17 GPa) e com baixos gaps ópticos (0,2 e 0,5 eV) são formadas. Estas estruturas não usuais correspondem a arranjos atômicos com 90 a 100% de estados sp2. Em geral fases sp2 são planares e apresentam baixa dureza, como predito pelo modelo de “cluster”. Entretanto, os resultados experimentais mostram que as propriedades elásticas das novas fases formadas são alcançadas através da criação de uma estrutura sp2 tridimensional. A indução de altas distorções angulares, através da irradiação iônica, possibilita a formação de anéis de carbono não hexagonais, tais como pentágonos e heptágonos, permitindo assim a curvatura da estrutura. Utilizando um modelo de contagem de vínculos é feita uma análise comparativa entre a topologia (estrutura geométrica) de ligações C-sp2 e as propriedades nanomecânicas. São comparados os efeitos de estruturas sp2 planares e tridimensionais (aleatórias) no processo de contagem de vínculos e, conseqüentemente, nas propriedades elásticas de cada sistema. Os resultados mostram que as boas propriedades mecânicas das novas fases de carbono formadas seguem as predições do modelo de vínculos para uma rede atômica sp2 tridimensional. A formação de uma fase amorfa dura e 100% sp2 representa uma importante conquista na procura de novas estruturas rígidas de carbono. A síntese da estrutura desordenada sp2 tridimensional e vinculada aqui apresentada é bastante incomum na literatura. O presente trabalho mostra que o processo de não-equilíbrio de deposição de energia durante a irradiação iônica permite a formação de distorções angulares nas ligações sp2-C, possibilitando a criação de estruturas grafíticas tridimensionais.

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This work describes an XPS investigation of plasma-deposited polysiloxane films irradiated with 170 keV He+ ions at fluences, Phi, ranging from 1 x 10(14) to 1 x 10(16) cm(-2). Modifications in the atomic concentrations of the surface atoms with (D were revealed by changes in the [O]/[Si], [O]/[C] and [C]/[Si] atomic ratios. Surface chemical structure modifications were evidenced by the increasing C1s peak width and asymmetry as Phi was increased, due to the formation of ether and carboxyl functionalities. Moreover, structural transformations were indicated by the positive binding energy shift of the Si2p peaks, due to the increasing Si oxidation. Correlations of the XPS data with other results from previous work on polysiloxanes illustrate the role of ion beam-induced bond breaking on the structural modifications.

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In this work we demonstrate the use of holographic lithography for generation of large area plasmonic periodic structures. Submicrometric array of holes, with different periods and thickness, were recorded in gold films, in areas of about 1 cm2, with homogeneity similar to that of samples recorded by Focused Ion Beam. In order to check the plasmonic properties, we measured the transmission spectra of the samples. The spectra exhibit the typical surface plasmon resonances (SPR) in the infrared whose position and width present the expected behavior with the period of the array and film thickness. The shift of the peak position with the permittivity of the surrounding medium demonstrates the feasebility of the sample as large area sensors. © 2009 SPIE.

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Alfven eigenmodes (AEs) were studied in neutral beam injection (NBI) heated plasmas in the TJ-II stellarator using a heavy ion beam probe (HIBP) in the core, and by Langmuir (LP) and Mirnov probes (MP) at the edge. AEs were detected over the whole plasma radius by the HIBP with a spatial resolution of about 1 cm. AE-induced oscillations were detected in the plasma density n(e), electric potential phi and poloidal magnetic field B-pol with frequencies 50 kHz < f(AE) < 300 kHz. The LP, MP and HIBP data showed a high level of coherency for specific branches of AEs. Poloidal mode wave-vectors k(theta), mode numbers m (m < 8) and propagation velocities V-theta similar to 30 km s(-1) were detected for various branches of AEs, having different radial locations. When the density rose due to NBI fuelling, the AE frequency decreased as predicted by the Alfven law f(AE) similar to n(e)(-1/2). During the AE frequency decay the following new AE features were observed: (i) the poloidal wave-vector k(theta) and mode number m remained constant, (ii) the cross-phases between the oscillations in B-pol, n(e) and electric potential remained constant, having an individual value for each AE branch, (iii) V-theta decreased proportional to the AE frequency. The interaction of the AEs with the bulk (thermal) plasma resulted in clearly pronounced quasi-coherent peaks in the electrostatic turbulent particle flux spectra. Various AE branches exhibited different contributions to the particle flux: outward, inward and also zero, depending on the phase relations between the oscillations in E-pol and n(e), which are specific for each branch. A comparison with MHD mode modelling indicated that some of the more prominent frequency branches can be identified as radially extended helical AEs.

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Gold plasmonic lenses consisting of a planar concentric rings-groove with different periods were milled with a focused gallium ion beam on a gold thin film deposited onto an Er3+-doped tellurite glass. The plasmonic lenses were vertically illuminated with an argon ion laser highly focused by means of a 50x objective lens. The focusing mechanism of the plasmonic lenses is explained using a coherent interference model of surface plasmon-polariton (SPP) generation on the circular grating due to the incident field. As a result, phase modulation can be accomplished by the groove gap, similar to a nanoslit array with different widths. This focusing allows a high confinement of SPPs that can excite the Er3+ ions of the glass. The Er3+ luminescence spectra were measured in the far-field (500-750 nm wavelength range), where we could verify the excitation yield via the plasmonic lens on the Er3+ ions. We analyze the influence of the geometrical parameters on the luminescence spectra. The variation of these parameters results in considerable changes of the luminescence spectra.

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We present a detailed theoretical study of the stability of the gas-phase diatomic dications SnF2+, SnCl2+, and SnO2+ using ab initio computer calculations. The ground states of SnF2+, SnCl2+, and SnO2+ are thermodynamically stable, respectively, with dissociation energies of 0.45, 0.30, and 0.42 eV. Whereas SnF2+ dissociates into Sn2+ + F, the long range behaviour of the potential energy curves of SnCl2+ and SnO2+ is repulsive and wide barrier heights due to avoided crossing act as a kind of effective dissociation energy. Their equilibrium internuclear distances are 4.855, 5.201, and 4.852 a(0), respectively. The double ionisation energies (T-e) to form SnF2+, SnCl2+, and SnO2+ from their respective neutral parents are 25.87, 23.71, and 25.97 eV. We combine our theoretical work with the experimental results of a search for these doubly positively charged diatomic molecules in the gas phase. SnO2+ and SnF2+ have been observed for prolonged oxygen (O-16(-)) ion beam sputtering of a tin metal foil and of tin (II) fluoride (SnF2) powder, respectively, for ion flight times of about 10(-5) s through a magnetic-sector mass spectrometer. In addition, SnCl2+ has been detected for O-16(-) ion surface bombardment of stannous (tin (II)) chloride (SnCl2) powder. To our knowledge, SnF2+ is a novel gas-phase molecule, whereas SnCl2+ had been detected previously by electron-impact ionization mass spectrometry, and SnO2+ had been observed before by spark source mass spectrometry as well as by atom probe mass spectrometry. We are not aware of any previous theoretical studies of these molecular systems. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4758475]

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An dem Schwerionenspeicherring TSR (MPI für Kernphysik, Heidelberg) wurde ein 7 Li +-Ionenstrahl geringer Dichte durch RF-Bunchen und Laserkühlung präpariert.Die Phasenraumverteilung in dem Strahl wurde durch Laser- spektroskopie an Ionen im metastabilen Zustand untersucht. Ein umlaufsynchrones, zeitaufgelöstes Meßverfahren für das Fluoreszenzlicht ermöglichte die Bestimmung der räumlichen Struktur mit dieser rein optischen Methode.Durch einen speziellen Präparationsschritt wurden die Ionen im Grundzustand aus dem Speicherring entfernt. Der sonst dominierende Heizeffekt der strahlinternen Streuung war dadurch vernachlässigbar und es konnte eine Temperatur von 160 mK erreicht werden.Der präparierte Ionenstrahl bietet besondere Eigenschaften im Hinblick auf Präzisionsexperimente, bei denen mit möglichst ungestörten Ionen gearbeitet werden soll. Es wird gezeigt, daß die Phasenraumverteilung der Ionen nicht mehr durch Ion-Ion-Wechselwirkungen bestimmt ist und daß der verbleibende Heizmechanismus durch die Streuung am Restgas erklärt werden kann.1993 wurde durch Laserspektroskopie an 7 Li + im TSR die spezielle Relativitätstheorie im Hinblick auf die relativistische Zeitdilatation experimentell getestet. In diesem Zusammenhang wird das zu erwartende Ergebnis eines Experimentes diskutiert, das, basierend auf den in dieser Arbeit vorgestellten Verfahren, einen erneuten Test der relativistischen Zeitdilatation mit verbesserter Genauigkeit durchführen könnte.