Degradation evaluation of microelectromechanical thermal actuators

Metal based thermal microactuators normally have lower operation temperatures than those of Si-based ones; hence they have great potential for applications. However, metal-based thermal actuators easily suffer from degradation such as plastic deformation. In this study, planar thermal actuators were made by a single mask process using electroplated nickel as the active material, and their thermal degradation has been studied. Electrical tests show that the Ni-based thermal actuators deliver a maximum displacement of ∼20μm at an average temperature of ∼420°C, much lower than that of Si-based microactuators. However, the displacement strongly depends on the frequency and peak voltage of the pulse applied. Back bending was clearly observed at a maximum temperature as low as 240°C. Both forward and backward displacements increase with increasing the temperature up to ∼450°C, and then decreases with power. Scanning electron microscopy observation clearly showed that Ni structure deforms and reflows at power above 50mW. The compressive stress is believed to be responsible for Ni piling-up (creep), while the tensile stress upon removing the pulse current is responsible for necking at the hottest section of the device. Energy dispersive X-ray diffraction analysis revealed severe oxidation of the Ni-structure induced by Joule-heating of the current.

Active control of sound radiated by a submarine hull in bending vibration using inertial actuators

Submarines are efficient sources of low frequency radiated noise due to the vibrations induced by the rotation of the propeller in a non uniform wake. In this work the possibility of using inertial actuators to reduce the far field sound pressure is investigated. The submerged vessel is modelled as a cylindrical shell with two conical end caps. Complicating effects such as ring stiffeners, bulkheads and the fluid loading are taken into account. A harmonic radial force is transmitted from the propeller to the hull through the stern end cone and it is tonal at the blade passing frequency (rotational speed of the shaft multiplied by the number of blades). The actuators are attached at the inside of the prow end cone to form a circumferential array. Both Active Vibration Control (AVC) and Active Structural Acoustic Control (ASAC) are analysed and it is shown that the inertial actuators can significantly reduce the far field sound pressure.

Active control of sound radiated by a submarine hull in axisymmetric vibration using inertial actuators

This paper investigates the use of inertial actuators to reduce the sound radiated by a submarine hull under excitation from the propeller. The axial forces from the propeller are tonal at the blade passing frequency. The hull is modeled as a fluid-loaded cylindrical shell with ring stiffeners and equally spaced bulkheads. The cylinder is closed at each end by circular plates and conical end caps. The forces from the propeller are transmitted to the hull by a rigid foundation connected to the propeller shaft. Inertial actuators are used as the structural control inputs. The actuators are arranged in circumferential arrays and attached to the internal end plates of the hull. Two active control techniques corresponding to active vibration control and discrete structural acoustic sensing are implemented to attenuate the structural and acoustic responses of the submarine. In the latter technique, error information on the radiated sound fields is provided by a discrete structural acoustic sensor. An acoustic transfer function is defined to estimate the far field sound pressure from a single point measurement on the hull. The inertial actuators are shown to provide control forces with a magnitude large enough to reduce the sound due to hull vibration. © 2012 American Society of Mechanical Engineers.