电子束物理气相沉积钇钛合金薄膜的组分和厚度分布

大面积薄膜的组分和厚度分布是实际工艺中最为关心的问题之一.利用实验和直接模拟Monte Carlo(DSMC)方法,分别研究了双电子束和三电子束物理气相沉积(EBPVD)中,钇和钛蒸气原子的三维低密度、非平衡射流,获得了它们在100和150mm单晶硅基片表面的沉积厚度和组分的分布.DSMC结果与钇和钛的蒸发速率的石英晶振探头原位测量值,沉积薄膜厚度分布的台阶仪和Rutherford背散射仪的测量数据,沉积薄膜组分分布的Rutherford背散射仪和电感耦合等离子体原子发射光谱仪测量值,均相符甚好.这表明通过DSMC方法与精细测量相结合,可在原子水平上实现EBPVD输运工艺的定量预测和设计。

Analysis of beam-quality degradation in nonlinear frequency conversion

Based on the ripple transfers of electric-field amplitude and phase in frequency tripling, simple formulas are derived for the harmonic laser's beam-quality factor M-3omega(2), with an arbitrary fundamental incidence to ideal nonlinear crystals. Whereas the harmonic beam's quality is generally degraded, the beam's divergence is similar to that of the fundamental after nonlinear frequency conversion. For practical crystals with periodic surface ripples that are caused by their machining, a multiorder diffractive model is presented with which the focusing properties of harmonic beams can be studied. Predictions of the theories are shown to be in excellent agreement with full numerical simulations. (C) 2002 Optical Society of America.

光学薄膜的分层界面散射模型

提出了一种计算光学介质膜系表面总积分散射（TIS）的理论模型。该模型认为，介质膜系粗糙的膜层界面和表面为微观结构不均匀的微薄过渡区；过渡区可用折射率为不同常量的层数足够多的均匀子层来代替，同时这些均匀子层的折射率变化满足指数函数的分布规律。利用矩阵法对积分散射的表达式进行了推导。对于电子束蒸发方法在K9玻璃上沉积的ZrO2单层膜，分层界面散射模型对积分散射的理论计算值要比非相关表面散射模型的计算值更加符合总积分散射仪的实验测量结果。

Development and experimental validation of a mathematical model for friction between fabrics and a volar forearm phantom.

An analytical mathematical model for friction between a fabric strip and the volar forearm has been developed and validated experimentally. The model generalizes the common assumption of a cylindrical arm to any convex prism, and makes predictions for pressure and tension based on Amontons' law. This includes a relationship between the coefficient of static friction (mu) and forces on either end of a fabric strip in contact with part of the surface of the arm and perpendicular to its axis. Coefficients of friction were determined from experiments between arm phantoms of circular and elliptical cross-section (made from Plaster of Paris covered in Neoprene) and a nonwoven fabric. As predicted by the model, all values of mu calculated from experimental results agreed within +/- 8 per cent, and showed very little systematic variation with the deadweight, geometry, or arc of contact used. With an appropriate choice of coordinates the relationship predicted by this model for forces on either end of a fabric strip reduces to the prediction from the common model for circular arms. This helps to explain the surprisingly accurate values of mu obtained by applying the cylindrical model to experimental data on real arms.