A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

A Multi-scale Model for Copper Dishing in Chemical-Mechanical Polishing

The present success in the manufacture of multi-layer interconnects in ultra-large-scale integration is largely due to the acceptable planarization capabilities of the chemical-mechanical polishing (CMP) process. In the past decade, copper has emerged as the preferred interconnect material. The greatest challenge in Cu CMP at present is the control of wafer surface non-uniformity at various scales. As the size of a wafer has increased to 300 mm, the wafer-level non-uniformity has assumed critical importance. Moreover, the pattern geometry in each die has become quite complex due to a wide range of feature sizes and multi-level structures. Therefore, it is important to develop a non-uniformity model that integrates wafer-, die- and feature-level variations into a unified, multi-scale dielectric erosion and Cu dishing model. In this paper, a systematic way of characterizing and modeling dishing in the single-step Cu CMP process is presented. The possible causes of dishing at each scale are identified in terms of several geometric and process parameters. The feature-scale pressure calculation based on the step-height at each polishing stage is introduced. The dishing model is based on pad elastic deformation and the evolving pattern geometry, and is integrated with the wafer- and die-level variations. Experimental and analytical means of determining the model parameters are outlined and the model is validated by polishing experiments on patterned wafers. Finally, practical approaches for minimizing Cu dishing are suggested.

Utilidad de los conceptos y estrategias comunitarias en el marketing online para la prevención de la copia ilegal en el mercado musical

Esta investigación se dirige a determinar cuál es la utilidad de los conceptos y estrategias comunitarias en el marketing online para la prevención de la copia ilegal en el mercado musical. Con este proyecto se desea que por medio de una nueva disquera enfocada en el comercio online, y usando los conceptos del mercadeo comunitario y el mercadeo relacional, se pueda desarrollar nuevas estrategias de mercadeo en donde se logre incentivar y promover la compra de música original por medio de la creación de una relación más estrecha entre la compañía y el cliente, en la cual pueda afectar de forma positiva a la comunidad a la que este pertenece. El objetivo general es determinar cuál es la utilidad de los conceptos y estrategias comunitarias en el marketing online para la prevención de la copia ilegal en el mercado musical. Los objetivos específicos son: 1. Mostrar la utilidad de los conceptos y estrategias del marketing comunitario en la prevención de la copia ilegal del mercado musical y 2. Implementar las estrategias logradas en la investigación en un plan de creación de empresa. Se utilizará el método de investigación y análisis de caso, utilizando el plan de empresa en la creación de una empresa del mercado musical, tomando la relación estratégica comunitaria y el marketing dentro del plan de mercadeo como estrategia para la prevención de la copia ilegal. Mediante este proyecto se desea que por medio del marketing relacional y de los conceptos del mercadeo hacia comunidades, enfocado en une- marketing sepuedanestablecerestrategiasparalaprevencióndelacopiailegalydelacomprade estos productos Además, se busca implementar dichos resultados en la empresa que se pretende crear en el sector de la industria musical, puesto que la seguridad que tendrán los productos a la venta, serán la ventaja competitiva de la empresa.

Moving towards a more mechanistic approach in the determination of soil heat flux from remote measurements - I. A universal approach to calculate thermal inertia

In this paper we pledge that physically based equations should be combined with remote sensing techniques to enable a more theoretically rigorous estimation of area-average soil heat flux, G. A standard physical equation (i.e. the analytical or exact method) for the estimation of G, in combination with a simple, but theoretically derived, equation for soil thermal inertia (F), provides the basis for a more transparent and readily interpretable method for the estimation of G; without the requirement for in situ instrumentation. Moreover, such an approach ensures a more universally applicable method than those derived from purely empirical studies (employing vegetation indices and albedo, for example). Hence, a new equation for the estimation of Gamma(for homogeneous soils) is discussed in this paper which only requires knowledge of soil type, which is readily obtainable from extant soil databases and surveys, in combination with a coarse estimate of moisture status. This approach can be used to obtain area-averaged estimates of Gamma(and thus G, as explained in paper II) which is important for large-scale energy balance studies that employ aircraft or satellite data. Furthermore, this method also relaxes the instrumental demand for studies at the plot and field scale (no requirement for in situ soil temperature sensors, soil heat flux plates and/or thermal conductivity sensors). In addition, this equation can be incorporated in soil-vegetation-atmosphere-transfer models that use the force restore method to update surface temperatures (such as the well-known ISBA model), to replace the thermal inertia coefficient.

Electric field alignment in thin films of cylinder-forming diblock copolymer

We investigate thin films of cylinder-forming diblock copolymer confined between electrically charged parallel plates, using self-consistent-field theory ( SCFT) combined with an exact treatment for linear dielectric materials. Our study focuses on the competition between the surface interactions, which tend to orient cylinder domains parallel to the plates, and the electric field, which favors a perpendicular orientation. The effect of the electric field on the relative stability of the competing morphologies is demonstrated with equilibrium phase diagrams, calculated with the aid of a weak-field approximation. As hoped, modest electric fields are shown to have a significant stabilizing effect on perpendicular cylinders, particularly for thicker films. Our improved SCFT-based treatment removes most of the approximations implemented by previous approaches, thereby managing to resolve outstanding qualitative inconsistencies among different approximation schemes.

Design of a biomimetic skin for an octopus-inspired robot - Part II: Development of the skin artefact

In order to develop skin artefact for an octopus-inspired robot arm, which is designed to be able to elongate 60% of its original length, silicone rubber and knitted nylon sheet were selected to manufacture an artificial skin, due to their higher elastic strain and high flexibility. Tensile and scissors cutting tests were conducted to characterise the matrix and reinforcing materials and the skin artefact. Material properties of the individual and the composite materials were compared with the measured properties of real octopus skin presented in Part I. The Young’s modulus of the skin should be below 20 MPa and the elastic strain range should be over 60%. The fracture toughness should be at least 0.9 kJ·m−2. Tubes made of the skin artefact filled with liquid were tested to study volume change under deformation. Finite element analysis model was developed to simulate the material and arm structure under tensile loading. Results show that the skin artefact developed has similar mechanical properties as the real octopus skin and satisfies all the design specifications of the OCTOPUS robot.

Rheology of milk foams produced by steam injection

Rheology of milk foams generated by steam injection was studied during the transient destabilization process using steady flow and dynamic oscillatory techniques: yield stress (τ_y) values were obtained from a stress ramp (0.2 to 25 Pa) and from strain amplitude sweep (0.001 to 3 at 1 Hz of frequency); elastic (G') and viscous (G") moduli were measured by frequency sweep (0.1 to 150 Hz at 0.05 of strain); and the apparent viscosity (η_a) was obtained from the flow curves generated from the stress ramp. The effect of plate roughness and the sweep time on τ_y was also assessed. Yield stress was found to increase with plate roughness whereas it decreased with the sweep time. The values of yield stress and moduli—G' and G"—increased during foam destabilization as a consequence of the changes in foam properties, especially the gas volume fraction, φ, and bubble size, R_32 (Sauter mean bubble radius). Thus, a relationship between τ_y, φ, R_32, and σ (surface tension) was established. The changes in the apparent viscosity, η, showed that the foams behaved like a shear thinning fluid beyond the yield point, fitting the modified Cross model with the relaxation time parameter (λ) also depending on the gas volume fraction. Overall, it was concluded that the viscoelastic behavior of the foam below the yield point and liquid-like behavior thereafter both vary during destabilization due to changes in the foam characteristics.

INCREASED WATER STORAGE CAPACITY IN CACTUS WOOD: A STUDY IN THE TRIBE CEREEAE (CACTOIDEAE, CACTACEAE)

Secondary xylem of fibrous cactus wood is characterized by short narrow vessel elements with both simple perforation plates and large intervessel pits, libriform septate fibers, and large rays. These are present in basal cactus taxa, as well as in many other groups of the family. In Cactoideae, the most diversified and most derived subfamily, there are remarkable variations found in the secondary xylem, with the more highly derived taxa containing the greatest water storage capacity. Unlignified parenchyma is one specialization found in the fibrous wood of cacti. We observed this tissue in the secondary xylem at the base of the sterns of several Brazilian endemic species of Arrojadoa, Melocactus, and Stephanocereus, all members of the tribe Cereeae. In Arrojadoa and Melocactus the unlignified parenchyma occurs in lines and bands amongst the axial and radial xylem elements, while in Stephanocereus it is mainly restricted to the rays and does not form bands. We address the adaptive importance of the unlignified parenchyma in the fibrous wood in tribe Cereeae and the family Cactaceae as a whole.

Crystallization of nordstrandite in ethylene glycol water solutions: electron microscopic studies

The present work shows the growth of nordstrandile microcrystals observed by transmission and scanning electron microscopy. Nordstrandite was synthesised from non-crystalline aluminium hydroxide reacted in 20% ethylene glycol/water solution, at room temperature. This material was characterized by TEM, SEM, SAED, XRD and EDS/TEM, during six month and revealed the formation and growth of nordstrandite. Fibrillar pseudoboehmite is the only aluminium hydroxide which could be identified during the first two weeks. The nuclei grow, from complete dissolution/recrystallization of pseudoboehmite fibrils, into platy rectangular microscrystals of nordstrandite. Some tabular microcrystals recrystallise, forming after six months only the mufti-point nordstrandite stars. This electron-optical study suggest that the star shape results from the overlapping of rectangular plates, and pseudoboehmite fibrils act as the precursor of nordstrandite crystallisation in ethylene glycol/water solution.

Scientific program of the Radioactive Ion Beams Facility in Brasil (RIBRAS)

The RIBRAS facility (Radioactive Ion Beams in Brasil) is installed in connection with the 8MV Pelletron tandem of the University of Sao Paulo Physics Institute. It consists of two superconducting solenoids which focalize light radioactive secondary beams of low energy, produced by transfer reactions. Recent experimental results include the elastic scattering and transfer reactions of (6)He halo nucleus on (9)Be, (27)Al, (51)V and (120)Sn targets. The elastic scattering and transfer of (8)Li and (7)Be on several targets is also being studied. The transfer reaction (8)Li(p,alpha)(5)He of astrophysical interest was also Studied in the E(cm)=0.2-2.5 MeV energy range.

In vitro effect of low-level laser on odontoblast-like cells

The aim of this study was to evaluate the metabolism of odontoblast-like MDPC-23 cells subjected to direct LLL irradiation. The cells were seeded (20,000 cells/well) in 24-well plates and incubated for 24 hours at 37 degrees C. After this period, the culture medium (DMEM) was replaced by fresh DMEM supplemented with 2 or 5% (stress induction by nutritional deficit) or 10% fetal bovine serum (FBS). The cells were exposed to laser doses of 2, 4, 10, 15 and 25 J/cm(2) from a near infrared InGaAsP diode laser prototype (LASERTable; 780 +/- 3 nm, 40 mW). One control group (sham irradiation) was established for each experimental condition (laser dose x FBS supplementation). Three and 72 hours after the last irradiation, cells were analyzed with respect to metabolism, morphology, total protein expression and alkaline phosphatase (ALP) activity. Higher metabolism and total protein expression were observed 72 hours after the last irradiation at the doses of 15 and 25 J/cm(2) (Mann-Whitney; p<0.05). Higher ALP activity was obtained with 5% FBS when the cells were irradiated with doses of 2 and 10 J/cm(2). For the dose of 25 J/cm(2), the highest ALP activity was observed with 10% FBS. It was concluded that the LLLT parameters used in this study stimulated the metabolic activity of the MDPC-23 cells, especially at the doses of 15 and 25 J/cm(2).

Placas maxilo-dentárias em Rincossauros Hyperodapedon Huxley, 1859. Histologia e morfogênese maxilo-dental: nova abordagem.

O estudo das estruturas da placas maxilo-dentárias dos rincossauros Hyperodapedon Huxley, 1859, do Triássico da Formação Santa Maria, em nova abordagem histológica e ontogênica resultou na identificação da natureza do esmalte aprismático verdadeiro, de variados elementos histológicos dentinários e osteológicos, e de um centro de ossificação periosteal primário. Também foram encontradas evidências histológicas dos mecanismos de fusionamento maxilo-dentinário e amelo-maxilar. Com estes elementos, inferimos os modelos de organogênese dental, da ontogênese maxilar e dos mecanismos de fusionamento maxilodental. Encontrou-se uma singular e raríssima coroa dental, imatura e ainda não erupcionada, na região posterior da placa dental e assim evidenciou-se a correta posição da margem odontogenicamente ativa. Adicionalmente inferiu-se a localização da posição da lâmina dentária embrionária. Constatou-se a não formação de alvéolos dentários, de cemento radicular e do espaço necessário à formação do ligamento periodontal e, assim, se deduziu a não formação do folículo dental embriônico. As presenças de especiais elementos anatômicos e histológicos nos tecidos ósseos periapicais evidenciam o crescimento radicular contínuo, enquanto a forma e o fusionamento radicular imediato depõe a favor de uma função dentária fisiológica diferenciada para as baterias dentárias maxilares dos Rincossauros do gênero Hyperodapedon. Os mecanismos que possibilitaram o controle embriônico para a deposição das lamelas de tecido ósseo coronal e seu preciso fusionamento sobre o esmalte dentário, declinam por modificações nas funções tardias do órgão reduzido do esmalte e pela presença de uma membrana oral com funções osteogênicas e também protetivas, situada nas porções posteriores da placa maxilo-dentária em desenvolvimento. Mudanças heterocrônicas no tempo de diferenciação das células da crista neural embriônica e em seus derivados, como a lâmina dentária e órgãos dentários embrionários ou correlacionadas com a organogênese das placas maxilo-dentárias e seus anexos periodontais, todos como condições plesiomórficas para Diápsidas Triássicos, poderiam ser as causas responsáveis pela origem e evolução deste estranho aparelho estomatognático nos clados de Hyperodapedon sp..

Um modelo analítico e computacional para consideração de efeitos de envelhecimento em estruturas de material compósito

Os materiais compósitos reforçados por fibras apresentam vantagens quando comparados aos materiais de construção mais tradicionais como concreto e aço. Por outro lado, devido ao fato destes materiais serem relativamente recentes no mercado, questões a respeito de sua durabilidade são ainda objeto de discussão e faz-se necessária intensa pesquisa sobre o envelhecimento dos compósitos. Como conseqüência, recentemente têm surgido inúmeros trabalhos à respeito da degradação dos compósitos considerando efeitos como temperatura, oxidação, radiação UV, condições de carregamento, etc. A maioria destas pesquisas, no entanto, são realizadas a nível de material e não são diretamente aplicáveis à situações de projeto. Desta forma, existe grande demanda por novos estudos e dados compatíveis com aplicações estruturais. Neste trabalho apresenta-se um modelo analítico-numérico adequado para, interpretação e aplicação destes dados experimentais em análise e projeto de estrutural. A formulação proposta inclui relações constitutivas elásticas anisotrópicas com envelhecimento, relações constitutivas viscoelásticas anisotrópicas com envelhecimento em termos de variáveis de estado, análise de falhas com critério de degradação ajustado à idade do material e considera-se grandes deslocamentos e pequenas deformações. As diferenças essenciais entre os processos de envelhecimento em endurecimento e amolecimento são descritos juntamente com as relações constitutivas para cada caso. Estas equações são deduzidas na forma adequada para análise numérica via método dos elementos finitos usando uma solução incremental-iterativa com consideração de efeitos pos-críticos. Vários exemplos são apresentados, incluindo análises elásticas, viscoelásticas e de falha com envelhecimento.

Análise química e avaliação da atividade antiviral de hypericum connatum lam.

Plantas da família Guttiferae apresentam diversas atividades biológicas sendo Hypericum o gênero mais importante devido às atividades antidepressiva, antibacteriana e antiviral de algumas espécies. Hypericum connatum, utilizado no sul do Brasil para o tratamento de feridas de boca, demonstrou atividade contra o lentivírus, responsável pela imunodeficiência felina. Objetivo: isolar e identificar as substâncias majoritárias de H. connatum e testar a atividade de extratos obtidos das partes aéreas e raízes e das substâncias isoladas frente a duas cepas do herpesvírus simples tipo 1 (HSV-1). Método: foram obtidos frações nhexano, diclorometano e metanol e extratos bruto, aquosos a diferentes temperaturas e hidro-etanólico das partes aéreas e raízes. As frações n-hexano e metanólica das partes aéreas foram submetidas à coluna cromatográfica para o isolamento de substâncias. Os extratos e substâncias isoladas foram testados frente ao HSV-1, cepas KOS e ATCC-VR733. Determinou-se a concentração máxima não tóxica (CMNT) à célula e a concentração que provoca alteração morfológica em 50% das células (CC50) pela técnica da alteração morfológica celular, utilizando-se células VERO, linhagem ATCC CCL-81. A avaliação da atividade antiviral foi realizada em placas de microtitulação e medida pela inibição do efeito citopático (ECP) provocado pelo vírus. Resultados e Conclusões: da fração n-hexano foi isolado hiperbrasilol B, da fração metanólica foram isolados amentoflavona, hiperosídeo e guaijaveriana, além de um flavonol de estrutura ainda não definida (HCN3). A fração n-hexano e o extrato bruto das raízes inibiram o ECP das cepas KOS e ATCC-VR733. Os demais extratos testados não apresentaram atividade antiviral. Dentre as substâncias analisadas, hiperbrasilol B, amentoflavona e HCN3 foram ativos frente às duas cepas. Os flavonóides hiperosídeo e guaijaverina não apresentaram atividade anti-HSV-1.

Processamento e caracterização de compósitos Poli(METACRILATO DE METILA)/Sílica (PMMA/SiO2)

Currently the search for new materials with properties suitable for specific applications has increased the number of researches that aim to address market needs. The poly (methyl methacrylate) (PMMA) is one of the most important polymers of the family of polyacrylates and polymethacrylates, especially for its unique optical properties and weathering resistance, and exceptional hardness and gloss. The development of polymer composites by the addition of inorganic fillers to the PMMA matrix increases the potential use of this polymer in various fields of application. The most commonly used inorganic fillers are particles of silica (SiO2), modified clays, graphite and carbon nanotubes. The main objective of this work is the development of PMMA/SiO2 composites at different concentrations of SiO2, for new applications as engineering plastics. The composites were produced by extrusion of tubular film, and obtained via solution for application to commercial PMMA plates, and also by injection molding, for improved the abrasion and scratch resistance of PMMA without compromising transparency. The effects of the addition of silica particles in the polymer matrix properties were evaluated by the maximum tensile strength, hardness, abrasion and scratch resistance, in addition to preliminary characterization by torque rheometry and melt flow rate. The results indicated that it is possible to use silica particles in a PMMA matrix, and a higher silica concentration produced an increase of the abrasion and scratch resistance, hardness, and reduced tensile strength