Optimization of the Mechanical and Optical Properties of Tunable Optical Sensor Arrays (TOSA) for a Nanospectrometer in the Visible and Near Infrared Spectral Range

Tunable Optical Sensor Arrays (TOSA) based on Fabry-Pérot (FP) filters, for high quality spectroscopic applications in the visible and near infrared spectral range are investigated within this work. The optical performance of the FP filters is improved by using ion beam sputtered niobium pentoxide (Nb2O5) and silicon dioxide (SiO2) Distributed Bragg Reflectors (DBRs) as mirrors. Due to their high refractive index contrast, only a few alternating pairs of Nb2O5 and SiO2 films can achieve DBRs with high reflectivity in a wide spectral range, while ion beam sputter deposition (IBSD) is utilized due to its ability to produce films with high optical purity. However, IBSD films are highly stressed; resulting in stress induced mirror curvature and suspension bending in the free standing filter suspensions of the MEMS (Micro-Electro-Mechanical Systems) FP filters. Stress induced mirror curvature results in filter transmission line degradation, while suspension bending results in high required filter tuning voltages. Moreover, stress induced suspension bending results in higher order mode filter operation which in turn degrades the optical resolution of the filter. Therefore, the deposition process is optimized to achieve both near zero absorption and low residual stress. High energy ion bombardment during film deposition is utilized to reduce the film density, and hence the film compressive stress. Utilizing this technique, the compressive stress of Nb2O5 is reduced by ~43%, while that for SiO2 is reduced by ~40%. Filters fabricated with stress reduced films show curvatures as low as 100 nm for 70 μm mirrors. To reduce the stress induced bending in the free standing filter suspensions, a stress optimized multi-layer suspension design is presented; with a tensile stressed metal sandwiched between two compressively stressed films. The stress in Physical Vapor Deposited (PVD) metals is therefore characterized for use as filter top-electrode and stress compensating layer. Surface micromachining is used to fabricate tunable FP filters in the visible spectral range using the above mentioned design. The upward bending of the suspensions is reduced from several micrometers to less than 100 nm and 250 nm for two different suspension layer combinations. Mechanical tuning of up to 188 nm is obtained by applying 40 V of actuation voltage. Alternatively, a filter line with transmission of 65.5%, Full Width at Half Maximum (FWHM) of 10.5 nm and a stopband of 170 nm (at an output wavelength of 594 nm) is achieved. Numerical model simulations are also performed to study the validity of the stress optimized suspension design for the near infrared spectral range, wherein membrane displacement and suspension deformation due to material residual stress is studied. Two bandpass filter designs based on quarter-wave and non-quarter-wave layers are presented as integral components of the TOSA. With a filter passband of 135 nm and a broad stopband of over 650 nm, high average filter transmission of 88% is achieved inside the passband, while maximum filter transmission of less than 1.6% outside the passband is achieved.

Interferometrisch messender faseroptischer Sensor mit mechanisch oszillierender Sonde

Punktförmig messende optische Sensoren zum Erfassen von Oberflächentopografien im Nanometerbereich werden in der Forschung und Industrie benötigt. Dennoch ist die Auswahl unterschiedlicher Technologien und kommerziell verfügbarer Sensoren gering. In dieser Dissertationsschrift werden die wesentlichen Aspekte eines Messsystems untersucht das über das Potenzial verfügt, zu den künftigen Standardmessmethoden zu gehören. Das Messprinzip beruht auf einem Common-Path-Interferometer. In einer mikrooptischen Sonde wird das Laserlicht auf die zu untersuchende Oberfläche gerichtet. Das vom Messobjekt reflektierte Licht interferiert sondenintern mit einem Referenzreflex. Die kompakte Bauweise bewirkt kurze optische Wege und eine gewisse Robustheit gegen Störeinflüsse. Die Abstandsinformation wird durch eine mechanische Oszillation in eine Phasenmodulation überführt. Die Phasenmodulation ermöglicht eine robuste Auswertung des Interferenzsignals, auch wenn eine zusätzliche Amplitudenmodulation vorhanden ist. Dies bietet den Vorteil, unterschiedlich geartete Oberflächen messen zu können, z. B. raue, teilweise transparente und geneigte Oberflächen. Es können wiederholbar Messungen mit einer Standardabweichung unter einem Nanometer erzielt werden. Die beschriebene mechanische Oszillation wird durch ein periodisches elektrisches Signal an einem piezoelektrischen Aktor hervorgerufen, der in einem Biegebalken integriert ist. Die Bauform des Balkens gestattet eine Hybridisierung von optischen und mechanischen Komponenten zu einer Einheit, welche den Weg zur weiteren Miniaturisierung aufzeigt. Im Rahmen dieser Arbeit konnte so u. a. eine Sonde mit einer Bauhöhe unter 10 mm gefertigt werden. Durch eine zweite optische Wellenlänge lässt sich der eingeschränkte Eindeutigkeitsbereich des Laserinterferometers nachweislich vergrößern. Die hierfür eingesetzte Methode, die Stand der Technik ist, konnte erfolgreich problemspezifisch angepasst werden. Um das volle Potenzial des Sensors nutzen zu können, wurden zudem zahlreiche Algorithmen entworfen und erfolgreich getestet. Anhand von hier dokumentierten Messergebnissen können die Möglichkeiten, als auch die Schwächen des Messsystems abgeschätzt werden.

A review of sensor fusion techniques for underwater vehicle navigation

This work provides a general description of the multi sensor data fusion concept, along with a new classification of currently used sensor fusion techniques for unmanned underwater vehicles (UUV). Unlike previous proposals that focus the classification on the sensors involved in the fusion, we propose a synthetic approach that is focused on the techniques involved in the fusion and their applications in UUV navigation. We believe that our approach is better oriented towards the development of sensor fusion systems, since a sensor fusion architecture should be first of all focused on its goals and then on the fused sensors

Accuracy estimation of a new omnidirectional 3D vision sensor

We present a computer vision system that associates omnidirectional vision with structured light with the aim of obtaining depth information for a 360 degrees field of view. The approach proposed in this article combines an omnidirectional camera with a panoramic laser projector. The article shows how the sensor is modelled and its accuracy is proved by means of experimental results. The proposed sensor provides useful information for robot navigation applications, pipe inspection, 3D scene modelling etc

Calibration of a Structured Light-Based Stereo Catadioptric Sensor

Catadioptric sensors are combinations of mirrors and lenses made in order to obtain a wide field of view. In this paper we propose a new sensor that has omnidirectional viewing ability and it also provides depth information about the nearby surrounding. The sensor is based on a conventional camera coupled with a laser emitter and two hyperbolic mirrors. Mathematical formulation and precise specifications of the intrinsic and extrinsic parameters of the sensor are discussed. Our approach overcomes limitations of the existing omni-directional sensors and eventually leads to reduced costs of production

Integració d'un sensor sonar d'escombrat lateral en un robot submarí

El grup de Visió per Computador i Robòtica (VICOROB) disposa de varis robots submarins per a la recerca i inspecció subaquàtica. Recentment s’ha adquirit un sensor sonar d’escombrat lateral el qual s’utilitza per realitzar imatges acústiques del fons marí quan aquest es mou principalment a velocitat constant i mantenint el rumb. Els robots del grup VICOROB estan equipats amb diferents tipus de sensors i càmeres per analitzar el fons marí. Aquest sensors són de gran qualitat i permeten conèixer de manera bastant satisfactòria l’entorn a les proximitats del robot. Freqüentment però, aquest sensors estant sotmesos a diferents restriccions depenent de la seva naturalesa de funcionament, de tal manera que es necessària la seva combinació per resoldre determinats problemes en diferents situacions. Amb aquest projecte, es pretén integrar un nou sistema de captura d’imatges sonores del fons marí, en un dels robots. Amb la integració d’aquest nou sensor, s’espera obtenir una opció alternativa els sistemes actuals que pugui aportar informació addicional sobre el fons. Aquest sistema podrà ser utilitzat per realitzar tasques per les quals els altres sensors no estant preparats o bé per complementar informació d’altres sensor

A lightweight balloon-carried cloud charge sensor

Despite the importance of microphysical cloud processes on the climate system, some topics are under-explored. For example, few measurements of droplet charges in nonthunderstorm clouds exist. Balloon carried charge sensors can be used to provide new measurements. A charge sensor is described for use with meteorological balloons, which has been tested over a range of atmospheric temperatures from -60 to 20 degrees C, in cloudy and clear air. The rapid time response of the sensor (to >10 V s(-1)) permits charge densities from 100 fC m(-3) to 1 nC m(-3) to be determined, which is sufficient for it to act as a cloud edge charge detector at weakly charged horizontal cloud boundaries.

Assessing the sources and magnitude of diurnal nitrate variability in the San Joaquin River (California) with an in-situ optical nitrate sensor and dual nitrate isotopes

We investigated diurnal nitrate (NO3-) concentration variability in the San Joaquin River using an in situ optical NO3- sensor and discrete sampling during a 5-day summer period characterized by high algal productivity. Dual NO3- isotopes (delta N-15(NO3) and delta O-18(NO3)) and dissolved oxygen isotopes (delta O-18(DO)) were measured over 2 days to assess NO3- sources and biogeochemical controls over diurnal time-scales. Concerted temporal patterns of dissolved oxygen (DO) concentrations and delta O-18(DO) were consistent with photosynthesis, respiration and atmospheric O-2 exchange, providing evidence of diurnal biological processes independent of river discharge. Surface water NO3- concentrations varied by up to 22% over a single diurnal cycle and up to 31% over the 5-day study, but did not reveal concerted diurnal patterns at a frequency comparable to DO concentrations. The decoupling of delta N-15(NO3) and delta O-18(NO3) isotopes suggests that algal assimilation and denitrification are not major processes controlling diurnal NO3- variability in the San Joaquin River during the study. The lack of a clear explanation for NO3- variability likely reflects a combination of riverine biological processes and time-varying physical transport of NO3- from upstream agricultural drains to the mainstem San Joaquin River. The application of an in situ optical NO3- sensor along with discrete samples provides a view into the fine temporal structure of hydrochemical data and may allow for greater accuracy in pollution assessment.

Ag dopedWO(3)-based powder sensor for the detection of NO gas in air

WO3-based materials as sensors for the monitor of environmental gases such as NO2 (NO + NO2) have been rapidly developed for various potential applications (stationary and mobile uses). It has been reported that these materials are highly sensitive to NOx with the sensitivity further enhanced by adding precious group metals (PGM such as Pt, Pd, Au, etc.). However, there has been limited work in revealing the sensing mechanism for these gases over the WO3-based sensors. In particular, the role of promoter is not yet clear though speculations on their catalytic, electronic and structural effects have been made in the past. In parallel to these PGM promoters here we report,for the first time, that Ag promotion can also enhance WO3 sensitivity significantly. In addition, this promotion decreases the optimum sensor temperature of 300 degreesC for Most WO3-based sensors, to below 200 degreesC. Characterizations (XRD, TEM, and impedance measurement) reveal that there is no significant bulk structure change nor particle size alteration in the WO3 phases during the NO exposure. However, it is found that the Ag doping creates a high concentration of oxygen vacancies in form of coordinated crystallographic shear (CS) planes onto the underneath WO3. It is thus proposed that the Ag particle facilitates the oxidative conversion of NO to NO2 followed by a subsequent NO2 adsorption on the defective WO, sites created at the Ag-WO3 interface; hence, accounting for the high molecular sensitivity. (C) 2002 Elsevier Science B.V. All rights reserved.

Bis[1,1 '-N,N '-(2-picolyl)aminomethyl]ferrocene as a redox sensor for transition metal ions

The compound bis[1,1'-N,N'-(2-picolyl) aminomethyl] ferrocene, L-1, was synthesized. The protonation constants of this ligand and the stability constants of its complexes with Ni2+, Cu2+, Zn2+, Cd2+ and Pb2+ were determined in aqueous solution by potentiometric methods at 25degreesC and at ionic strength 0.10 mol dm(-3) in KNO3. The compound L-1 forms only 1:1 (M:L) complexes with Pb2+ and Cd2+ while with Ni2+ and Cu2+ species of 2:1 ratio were also found. The complexing behaviour of L-1 is regulated by the constraint imposed by the ferrocene in its backbone, leading to lower values of stability constants for complexes of the divalent first row transition metals when compared with related ligands. However, the differences in stability are smaller for the larger metal ions. The structure of the copper complex with L-1 was determined by single-crystal X-ray diffraction and shows that a species of 2:2 ratio is formed. The two copper centres display distorted octahedral geometries and are linked through the two L1 bridges at a long distance of 8.781(10) Angstrom. The electrochemical behaviour of L-1 was studied in the presence of Ni2+, Cu2+, Zn2+, Cd2+ and Pb2+, showing that upon complexation the ferrocene-ferrocenium half-wave potential shifts anodically in relation to that of the free ligand. The maximum electrochemical shift (DeltaE(1/2)) of 268 mV was found in the presence of Pb2+, followed by Cu2+ (218 mV), Ni2+ (152 mV), Zn2+ (111 mV) and Cd2+ (110 mV). Moreover, L-1 is able to electrochemically and selectively sense Cu2+ in the presence of a large excess of the other transition metal cations studied.

A sensor based intelligent building assessment model

While building provides shelter for human being, the previous models for assessing the intelligence of a building seldom consider the responses of occupants. In addition, the assessment is usually conducted by an authority organization on a yearly basis, thus can seldom provide timely assistance for facility manager to improve his daily facility maintenance performance. By the extending the law of entropy into the area of intelligent building, this paper demonstrate that both energy consumption and the response of occupants are important when partially assessing the intelligence of a building. This study then develops a sensor based real time building intelligence (BI) assessment model. An experimental case study demonstrates how the model can be implemented. The developed model can address the two demerits of the previous BI assessment model.

A conceptual design of a wireless sensor actuator system for optimising energy and well-being in a building

This article presents a prototype model based on a wireless sensor actuator network (WSAN) aimed at optimizing both energy consumption of environmental systems and well-being of occupants in buildings. The model is a system consisting of the following components: a wireless sensor network, `sense diaries', environmental systems such as heating, ventilation and air-conditioning systems, and a central computer. A multi-agent system (MAS) is used to derive and act on the preferences of the occupants. Each occupant is represented by a personal agent in the MAS. The sense diary is a new device designed to elicit feedback from occupants about their satisfaction with the environment. The roles of the components are: the WSAN collects data about physical parameters such as temperature and humidity from an indoor environment; the central computer processes the collected data; the sense diaries leverage trade-offs between energy consumption and well-being, in conjunction with the agent system; and the environmental systems control the indoor environment.

Wireless sensor networks

This paper provides an introduction to Wireless Sensor Networks (WSN), their applications in the field of control engineering and elsewhere and gives pointers to future research needs. WSN are collections of stand-alone devices which, typically, have one or more sensors (e.g. temperature, light level), some limited processing capability and a wireless interface allowing communication with a base station. As they are usually battery powered, the biggest challenge is to achieve the necessary monitoring whilst using the least amount of power.