Preparation and Characterization ofHigh-k Aluminum Oxide Thin Films by Atomic Layer Deposition for Gate Dielectric Applications

Present work deals with the Preparation and characterization of high-k aluminum oxide thin films by atomic layer deposition for gate dielectric applications.The ever-increasing demand for functionality and speed for semiconductor applications requires enhanced performance, which is achieved by the continuous miniaturization of CMOS dimensions. Because of this miniaturization, several parameters, such as the dielectric thickness, come within reach of their physical limit. As the required oxide thickness approaches the sub- l nm range, SiO 2 become unsuitable as a gate dielectric because its limited physical thickness results in excessive leakage current through the gate stack, affecting the long-term reliability of the device. This leakage issue is solved in the 45 mn technology node by the integration of high-k based gate dielectrics, as their higher k-value allows a physically thicker layer while targeting the same capacitance and Equivalent Oxide Thickness (EOT). Moreover, Intel announced that Atomic Layer Deposition (ALD) would be applied to grow these materials on the Si substrate. ALD is based on the sequential use of self-limiting surface reactions of a metallic and oxidizing precursor. This self-limiting feature allows control of material growth and properties at the atomic level, which makes ALD well-suited for the deposition of highly uniform and conformal layers in CMOS devices, even if these have challenging 3D topologies with high aspect-ratios. ALD has currently acquired the status of state-of-the-art and most preferred deposition technique, for producing nano layers of various materials of technological importance. This technique can be adapted to different situations where precision in thickness and perfection in structures are required, especially in the microelectronic scenario.

Elecrical conduction and dielectric behaviour of thin films of vacuum evaporated amorphous silicon, hydrogenated amorphous silicon and chemically deposited cadmium sulphide

A brief account of the several methods used for the production of thin films is presented in this Chapter. The discussions stress on the important methods used for the fabrication of a-si:H thin films. This review' also reveals ‘that almost all the general methods, like vacuum evaporation, sputtering, glow discharge and even chemical methods are currently employed for the production of a-Si:H thin films. Each method has its own advantages and disadvantages. However, certain methods are generally preferred. Subsequently a detailed account of the method used here for the preparation of amorphous silicon thin films and their hydrogenation is presented. The metal chamber used for the electrical and dielectric measurements is also described. A brief mention is made-on the electrode structure, film area and film geometry.

Design and Development of re configurable compact cross patch antenna for switchable polarization

Antennas are necessary and vital components of communication and radar systems, but sometimes their inability to adjust to new operating scenarios can limit system performance. Reconfigurable antennas can adjust with changing system requirements or environmental conditions and provide additional levels of functionality that may result in wider instantaneous frequency bandwidths, more extensive scan volumes, and radiation patterns with more desirable side lobe distributions. Their agility and diversity created new horizons for different types of applications especially in cognitive radio, Multiple Input Multiple Output Systems, satellites and many other applications. Reconfigurable antennas satisfy the requirements for increased functionality, such as direction finding, beam steering, radar, control and command, within a confined volume. The intelligence associated with the reconfigurable antennas revolved around switching mechanisms utilized. In the present work, we have investigated frequency reconfigurable polarization diversity antennas using two methods: 1. By using low-loss, high-isolation switches such as PIN diode, the antenna can be structurally reconfigured to maintain the elements near their resonant dimensions for different frequency bands and/or polarization. 2. Secondly, the incorporation of variable capacitors or varactors, to overcome many problems faced in using switches and their biasing. The performances of these designs have been studied using standard simulation tools used in industry/academia and they have been experimentally verified. Antenna design guidelines are also deduced by accounting the resonances. One of the major contributions of the thesis lies in the analysis of the designed antennas using FDTD based numerical computation to validate their performance.

Effective mass and dielectric constant mismatch effects in spherical multishell quantum dots

The role of effective mass and dielectric mismatches on chemical potentials and addition energies of many-electron multishell quantum dots (QDs) is explored within the framework of a recent extension of the spin density functional theory. It is shown that although the gross electronic density is located in the wells of these multishell QDs, taking position-dependent effective mass and dielectric constant into account can lead to the appearance of relevant differences in chemical potential and addition energies as compared to standard calculations in which the effective mass and the dielectric constant of the well is assumed for the whole multishell structure.

Development of a new type of simulated scalar feed

This thesis presents the results of an investigation conducted for the development of a new type of feed horn antenna called "Simulated Scalar Feed". A schematic presentation of the work is given below. A review of the past important work done in the field of conventional/multimode electromagnetic horn antennas is presented in the first part of the second chapter. The work carried out on corrugated horns and surfaces are included in the second part of the review. In the third part, work on dielectric and dielectric loaded metal horns are reviewed. In all the parts of the review, special emphasis is given to theoretical design considerations. The methodology adopted for the experimental investigations is presented in the third chapter. The instrumentation utilized and thThis thesis presents the results of an investigation conducted for the development of a new type of feed horn antenna called "Simulated Scalar Feed". A schematic presentation of the work is given below. A review of the past important work done in the field of conventional/multimode electromagnetic horn antennas is presented in the first part of the second chapter. The work carried out on corrugated horns and surfaces are included in the second part of the review. In the third part, work on dielectric and dielectric loaded metal horns are reviewed. In all the parts of the review, special emphasis is given to theoretical design considerations. The methodology adopted for the experimental investigations is presented in the third chapter. The instrumentation utilized and the details of fabrication ofe details of fabrication of the new simulated scalar feed are described. The method of measurements of radiation characteristics of the antenna are also explained in this chapter. In the fourth chapter the outcome of the experimental results of the investigations carried out on horn antennas fabricated with different physical dimensions and different parameters for the E—plane boundary walls are highlighted. The theoretical explanation used to explain the experimental results is given in the fifth chapter of the thesis. A comparison between the experimental and the theoretical results is also presented in this chapter. In chapter six, the conclusions drawn from the experimental as well as the theoretical investigations are discussed. The advantages and features of the newly developed simulated scalar feed is examined in this chapter. Scope of further investigations in this field is also discussed at the end of this chapter.

Design and Development of Compact Coplanar Waveguide Fed Antennas for Wireless Applications

The need of miniaturization in the present day communication industry is challenging. In the present scenario, printed antenna technology is highly suitable for wireless communication due to its low profile and other desirable radiation characteristics. Small monopole type antennas are overruled by compact small antennas for present day mobile communication applications. Coplanar waveguides (CPW) are printed on one side of a dielectric substrate. CPW have attracted the attention of antenna designers due to their excellent properties like ease of integration with ‘MMIC’, low cost, wide bandwidth, flexibility towards multiband operation, low radiation leakage and less dispersion. The requirement of omnidirectional coverage, light weight and low cost made these CPW fed antennas a good candidate for wireless applications. The main focus of the thesis is the study of coplanar waveguide transmission line. Rigorous investigations were performed on both the ground plane and signal strip of a coplanar waveguide transmission line to create effective radiation characteristics. Good amount of works have been done to transform CPW line to antenna suitable for mobile phone applications

Modifications of secondary reflector antenna patterns due to shaped beams from flanged primary horn feeds

With the advent of satellite communication and radio astronomy, the need for large and efficient reflector antennas had triggered a widespread investigation in reflector feed design techniques. Major improvements sought are reduction in spill-over, cross polarization losses and the enhancement of aperture efficiency. The search for such a feed culminated in the corrugated horn. The main idea behind the present work is to use the H-plane sectoral horns fitted with,corrugated flanges as feeds of a paraboloid and see how the secondary pattern of the reflector antenna varies with different parameters of the feed. An offset paraboloid is used as the secondary reflector in order to avoid the adverse effect of aperture ‘blocking by the feed horn structure on the secondary radiation pattern. The measurements were repeated for three different H-plane sectoral horns with the same set of corrugated flanges at various X-band frequencies. The following parameters of the whole system are studied: (a) Beam shaping. (b) Gain. (c) Variation of VSWR and (d) Cross polarization

Investigation of dielectric and elastic properties of selected dielectric ceramics and oxide glasses

The dielectric and elastic properties are of considerable significance to the science and technology of matter in the solid state. The study of these properties give information about the magnitude of the forces and nature of the bonding between the atoms. Our aim has been to investigate systematically the effect of doping of an appropriate element on the elastic and dielectric properties of selected dielectric ceramics and oxide glasses. These materials have got wide technological applications due to their interesting electrical, optical, thermal and elastic behaviour. Ultrasound propagation and capacitance measurement techniques have been employed for the systematic investigation of the elastic and dielectric properties of selected number of these materials. Details of the work done and results obtained are presented in this thesis.

Slot Line Fed Dipole Antenna For Wide Band Applications

A slot line fed planar dipole antenna with a parasitic strip for wide band applications is presented. The presented antenna offers a 2:1 VSWR bandwidth from 1.66 to 2.71 GHz covering the DCS/ PCS/UMTS and IEEE 802.11b/g bands with a gain better than 6.5 dBi. The uniplanar design, simple feeding, and high gain make it a versatile antenna for wireless applications

Design of an Edge -coupled dual -ring Split-ring resonator

Electric permittivity and magnetic permeability control electromagnetic wave propagation th rough materials. I n naturally occu rring materials, these are positive. Artificial materials exhi b iting negative material properties have been reported : they are referred to as metamaterials. This paper concentrates on a ring-type split-ring resonator (SRR) exhibiting negative magnetic permeability. The design and synthesis of the SRR using the genetic-algorithm approach is explained in detail. A user-friendly g raphical user i nterface (G U I ) for an SRR optim izer and estimator using MATLAB TM is also presented

Chipless RFID Tag Using Multiple Microstrip Open Stub Resonators

A novel compact RFID tag employing open stubs in a microstrip transmission line is proposed. The prototype of the tag is fabricated on a substrate of dielectric constant 4.4 and loss tangent 0.0018. The tag consists of microstrip open stub resonators and cross polarized transmitting and receiving disc monopole antennas. A prototype of 8 bit data encoded tag is demonstrated in this communication. Method for enhancing the performance of the RFID tag is also proposed. Magnitude or group delay response can be used to decode the tag informations

Design of a Compact Multiband Microstrip Antenna

A compact microstrip multiband antenna on a modified ground plane which can operate over the bands starting from 900 MHz to 5.35 GHz which includes the GSM (880-960) GPS (1568-1592 MHz), DCS (1710-1880 MHz), and PCS (1850- 1990 MHz). UMTS (1920-2170 MHz), IEEE 802.11 b/g (2400- 2484) and WLAN IEEE 802.11a band (5.15-5.35) is reported in this paper. The overall dimension of the antenna is 33 x 33 mm2 including the top patch with a dimension 22 x 22 mm2. The experimental results of the antenna are presented in this paper. The results confirm that the antenna exhibits wide band characteristics and covers 7 bands of operation

Compact Coplanar Waveguide Fed Ground Meandered Antenna for Wireless Application

A compact Co-Planar Waveguide (CPW) fed antenna operating at 2.4GHz with 300MHz 2:1 VSWR bandwidth is presented. Compared to a conventional quarter wavelength CPW fed monopole antenna, the aperture area reduction of the present antenna is 85%. The prototype antenna fabricated on a substrate of εr = 4.4 and thickness 1.6mm is only 22x10x1.6mm3. This much size reduction and impedance matching is achieved by adjusting the signal to ground plane separation and meandering the ground plane of a 50Ω CPW transmission line

Octagon Shaped Microstrip Patch Antenna For Dual Band Applications

The paper proposes an octagon shaped Microstrip Patch Antenna suitable for dual band applications. The striking features of this compact, planar antenna are sufficient isolation between the two operating bands and an area reduction of - 29% in comparison to a conventional circular patch antenna operating in the same band

A Novel Planar Fractal Antenna with CPW-Feed for Multiband Applications

In this paper, a multiband antenna using a novel fractal design is presented. The antenna structure is formed by inscribing a hexagonal slot within a circle. This base structure is then scaled and arranged within the hexagon along its sides without touching the outer structure. The proposed CPW fed, low profile antenna offers good performance in the 1.65 – 2.59 GHz, 4.16 – 4.52 GHz and 5.54 – 6.42 GHz bands and is suitable for GSM 1800/1900, Bluetooth, IMT advanced systems and upper WLAN applications. The antenna has been fabricated on a substrate of height 1.6 mm and εr = 4.4 and simulation and experimental results are found to be in good agreement