997 resultados para Plasma (Ionized gases)


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"STL/TR-60-0000-09114."

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"Contract no. Nonr 3501 (00), Order no. 209-61 [and 209-62] Task no. NR 09-358 [and 399-358]"

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"ARL 65-91."

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"Supported in part by a National Science Foundation grant for theoretical physics related to I. G. Y."

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"This research was supported by the McDonnell Aircraft Corporation under Contract no. 6140-20 P.O. 7S4899-R."

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Nanostructured Si thin films, also referred as polymorphous, were grown by plasma-enhanced chemical vapor deposition. The term "polymorphous" is used to define silicon material that consists of a two-phase mixture of amorphous and ordered Si. The plasma conditions were set to obtain Si thin films from the simultaneous deposition of radical and ordered nanoparticles. Here, a careful analysis by electron transmission microscopy and electron diffraction is reported with the aim to clarify the specific atomic structure of the nanocrystalline particles embedded in the films. Whatever the plasma conditions, the electron diffraction images always revealed the existence of a well-defined crystalline structure different from the diamondlike structure of Si. The formation of nanocrystallinelike films at low temperature is discussed. A Si face-cubic-centered structure is demonstrated here in nanocrystalline particles produced in low-pressure silane plasma at room temperature.

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In this paper, a remote O2 ion source is used for the formation of nano-oxide layers. The oxidation efficiency was measured in CoFe-oxide films, and a decrease of the oxide layer with the pan angle and the oxidation pressure is observed. For the same oxidation pressure, the oxidation efficiency depends on the O2 content in the Ar-O2 plasma. These results were applied in optimizing the fabrication of Al2O3 barrier for tunnel junctions. This method was also used to fabricate junctions with Fe-oxide layers inserted at the Al2O3-CoFe interface. TEM and magnetization data indicate that after anneal at 385°C, a homogeneous ferromagnetic Fe-oxide layer (Fe3O4?) is formed.

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"Controlled Thermonuclear Processes ; Distributed according to TID-4500 (15th Ed.)."

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Thesis--University of Illinois at Urbana-Champaign.

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"Prepared for the Air Force Bassistic Missle Division, Headquarters Air Research and Development Command, under Contract AF 04 (647)-594, Thermonuclear propulsion research."

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"Sponsored by the Air Force Flight Dynamics Laboratory ... under Contract AF 33(615)-1835."