966 resultados para LIFT-OFF
Resumo:
A systematic study of Gold catalyzed growth of Ge nanoneedles by PECVD at low temperatures (<400 degrees C) is presented. Morphology, growth rate and aspect ratio of the needles are studied as a function of power, gas flow rate and chamber pressure. Nanoneedles were grown at pre-defined positions with catalytic particles obtained by e-Beam Lithography and lift off. This opens up the possibility of using Ge Nano needles in photovoltaic, nanoelectronics and nanosensor device applications.
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Hexaazamacrocycle (L) stabilized gold nanoparticles (AuNPs) were prepared by combining L with HAuCl4 center dot 3H(2)O in a variety of alcohol-water (1 : 1) mixtures. The dual roles of L as a reducing and stabilizing agent were exploited for the synthesis of AuNPs under the optimized ratio of L to Au3+ (2 : 1). Self-assembled gold nanofilms (AuNFs) were constructed at liquid-liquid interfaces by adding equal volumes of hexane to the dispersions of AuNPs in the alcohol-water systems. The nanofilms were formed spontaneously by shaking the two-phase mixture for a minute followed by standing. The alcohols explored for the self-assembly phenomenon were methanol, ethanol, i-propanol and t-butanol. The systems containing methanol or t-butanol resulted in AuNFs at the interfaces, whereas the other two alcohols were found not suitable and the AuNPs remained dispersed in the corresponding alcohol-water medium. The AuNFs prepared under suitable conditions were coated on a variety of surfaces by the dip and lift-off method/solvent removal approach. The AuNFs were characterized by UV-vis, SEM, TEM, AFM and contact angle measurement techniques. A coated glass-vial or cuvette was used as a catalytic reservoir for nitro-reduction reactions under ambient and aqueous conditions using NaBH4 as the reducing agent. The reduced products (amines) were extracted by aqueous work-up using ethyl acetate followed by evaporation of the organic layer; the isolated products required no further purification. The catalyst was recovered by simply decanting the reaction mixture whereupon the isolated catalyst remained coated inside the vessel. The recovered catalyst was found to be equally efficient for further catalytic cycles.
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We report a new lithography technique based on electromigration driven material transport for drawing patterns at nanometer scales in ambient conditions. We use a thin metal film as a masking layer and a polymer layer beneath it as a pattern transfer layer. The desired pattern is drawn in the metal layer by etching the metal with a conducting scanning probe assisted by liquid electromigration. The pattern drawn on the metal layer is transferred to the polymer layer by etching the polymer with an appropriate solvent. Subsequently, the pattern is transferred to the desired material layer using a film deposition technique followed by conventional lift-off process. Using this simple technique, we have achieved pattern resolutions of 9 nm on the polymer and 40 nm on transferring the pattern to another material. Based on the ease of use and process costs, this technique promises to be competitive to e-beam lithography that employs high energy and ultra-high vacuum, or the industrial standard ultra-violet light photolithography that employs extremely expensive implements to reach nano-scale resolutions. We also demonstrate direct mask writing using this technique and explain the fundamentals behind the workings of the developed method.
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In this study, a micro-pump unit based on surface acoustic wave (SAW) on piezoelectric ZnO film is designed and fabricated as a micro-fluidic device. It employs a mechanical wave, which is generated electrically using an aluminum interdigital transducer (IDT), and propagates on the surface of the ZnO film. The ZnO film was used in this study because it has a high electromechanical coefficient and an excellent bonding with various substrate materials, in particular silicon. The sputtering parameters for ZnO film deposition have been optimized, and the ZnO films with different thickness from 1 micron to 5.5 microns were prepared. The film properties have been characterized using different methods, such as scanning electron microscopy, X-ray diffraction and atomic force microscopy. Aluminum IDT with a finger width and spacing of 8 microns was patterned on the ZnO film using a lift-off process. The frequency generated was measured using a network analyzer, and it varies from 130 MHz to 180 MHz as a function of film thickness. A signal generator was used to generate the frequency with a power amplifier to amplify the signal, which was then applied to aluminum IDT to generate the surface acoustic wave. If a liquid droplet exists on the surface carrying the acoustic wave, the energy and the momentum of the SAW will be coupled into the fluid, causing the liquid to vibrate and move on film surface. The strength of this movement is determined by the applied voltage and frequency. The volume of the liquid drop loaded on the SAW device in this study is of several hundreds of nanoliters. The movement of the liquid inside the droplet and also on the ZnO film surface can be demonstrated. The performance of ZnO SAW device was characterized as a function of film thickness. © 2007 IOP Publishing Ltd.
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We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
Resumo:
We report on a study into electrode fabrication for the gate control of carbon nanotubes partially suspended above an oxidised silicon substrate. A fabrication technique has been developed that allows self-aligned side-gate electrodes to be placed with respect to an individual nanotube with a spacing of less than 10 nm. The suspended multi-walled carbon nanotube (MWCNT) is used as an evaporation mask during metal deposition. The metal forms an island on the nanotube, with increasing width as the metal is deposited, forming a wedge shape, so that even thick deposited layers yield islands that remain separated from the metal deposited on the substrate due to shadowing of the evaporation. The island can be removed during lift-off to leave a set of self-aligned electrodes on the substrate. Results show that Cr yields self-aligned side gates with around 90% effectiveness. © 2003 Elsevier Science B.V. All rights reserved.
Resumo:
We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90%.
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We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
Resumo:
We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems. © 2003 Materials Research Society.
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It becomes increasingly difficult to make continuous metal lines with well defined thickness and edges by the lift-off technique as the line width is decreased. We describe in this paper a technique in which the combination of high resolution electron beam lithography and ionized cluster beam (ICB) deposition has enabled very high quality gold lines ({all equal to}25nm wide) to be obtained on thick single crystal silicon substrates. © 1990.
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With the PDPA (Phase Doppler Particle Analyzer) measurement technology, the probability distributions of particle impact and lift-off velocities on bed surface and the particle velocity distributions at different heights are detected in a wind tunnel. The results show that the probability distribution of impact and lift-off velocities of sand grains can be expressed by a log-normal function, and that of impact and lift-off angles complies with an exponential function. The mean impact angle is between 28 degrees and 39 degrees, and the mean lift-off angle ranges from 30 degrees to 44 degrees. The mean lift-off velocity is 0.81-0.9 times the mean impact velocity. The proportion of backward-impacting particles is 0.05-0.11, and that of backward-entrained particles ranges from 0.04 to 0.13. The probability distribution of particle horizontal velocity at 4 mm height is positive skew, the horizontal velocity of particles at 20 mm height varies widely, and the variation of the particle horizontal velocity at 80 mm height is less than that at 20 mm height. The probability distribution of particle vertical velocity at different heights can be described as a normal function.
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A more generalized model of a beam resting on a tensionless Reissner foundation is presented. Compared with the Winkler foundation model, the Reissner foundation model is a much improved one. In the Winkler foundation model, there is no shear stress inside the foundation layer and the foundation is assumed to consist of closely spaced, independent springs. The presence of shear stress inside Reissner foundation makes the springs no longer independent and the foundation to deform as a whole. Mathematically, the governing equation of a beam on Reissner foundation is sixth order differential equation compared with fourth order of Winkler one. Because of this order change of the governing equation, new boundary conditions are needed and related discussion is presented. The presence of the shear stress inside the tensionless Reissner foundation together with the unknown feature of contact area/length makes the problem much more difficult than that of Winkler foundation. In the model presented here, the effects of beam dimension, gap distance, loading asymmetry and foundation shear stress on the contact length are all incorporated and studied. As the beam length increases, the results of a finite beam with zero gap distance converge asymptotically to those obtained by the previous model for an infinitely long beam. (C) 2008 Elsevier Ltd. All rights reserved.
Resumo:
A method to fabricate polymer field-effect transistors with submicron channel lengths is described. A thin polymer film is spin coated on a prepatterned resist with a low resolution to create a thickness contrast in the overcoated polymer layer. After plasma and solvent etching, a submicron-sized line structure, which templates the contour of the prepattern, is obtained. A further lift-off process is applied to define source-drain electrodes of transistors. With a combination of ink-jet printing, transistors with channel length down to 400 nm have been fabricated by this method. We show that drive current density increases as expected, while the on/off current ratio 106 is achieved. © 2005 American Institute of Physics.
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Experiments have been performed in a blowdown supersonic wind tunnel to investigate the effect of arrays of sub-boundary layer vortex generators placed upstream of a normal shock/ boundary layer interaction. The investigation makes use of a recovery shock wave and the naturally grown turbulent boundary layer on the wind tunnel floor. Experiments were performed at Mach numbers of 1.5 and 1.3 and a freestream Reynolds number of 28 × 106. Two types of vortex generators were investigated - wedge-shaped and arrays of counter-rotating vanes. It was found that at Mach 1.5 the vane-type VGs eliminated and the wedge-type VGs greatly reduced the separation bubble under the shock. When placed in the supersonic part of the flow both VGs caused a wave pattern consisting of a shock, re-expansion and shock. The re-expansion and double shocks are undesirable features since they equate to increased total pressure losses and hence increased -wave drag. Furthermore there are indications that the vortex intensity is reduced by the normal shock/ boundary layer interaction. When the shock was located directly over the VGs there was no re-expansion present, but the 'damping' effect of the shock on the vortex persisted. It appears that the vortices produced by the wedge-shaped VGs lift off the surface more rapidly. Similar results were observed at Mach 1.3, where the flow was unseparated.
Resumo:
Simulations of an n-heptane spray autoigniting under conditions relevant to a diesel engine are performed using two-dimensional, first-order conditional moment closure (CMC) with full treatment of spray terms in the mixture fraction variance and CMC equations. The conditional evaporation term in the CMC equations is closed assuming interphase exchange to occur at the droplet saturation mixture fraction values only. Modeling of the unclosed terms in themixture fraction variance equation is done accordingly. Comparison with experimental data for a range of ambient oxygen concentrations shows that the ignition delay is overpredicted. The trend of increasing ignition delay with decreasing oxygen concentration, however, is correctly captured. Good agreement is found between the computed and measured flame lift-off height for all conditions investigated. Analysis of source terms in the CMC temperature equation reveals that a convective-reactive balance sets in at the flame base, with spatial diffusion terms being important, but not as important as in lifted jet flames in cold air. Inclusion of droplet terms in the governing equations is found to affect the mixture fraction variance field in the region where evaporation is the strongest, and to slightly increase the ignition delay time due to the cooling associated with the evaporation. Both flame propagation and stabilization mechanisms, however, remain unaffected. © 2011 Taylor & Francis.