Characterization of HFO2 Capacitors

Hafnium oxide (HfOn) is a promising dielectric for future microelectronic applications. Hf02 thin films (10-75nm) were deposited on Pt/Si02/Si substrates by pulsed DC magnetron reactive sputtering. Top electrodes of Pt were formed by e-beam evapo- ration through an aperture mask on the samples to create MIM (Metal-Insulator-Metal) capacitors. Various processing conditions (Arloz ratio, DC power and deposition rate) and post-deposition annealing conditions (time and temperature) were investigated. The structure of the Hf02 films was characterized by X-ray diffraction (XRD) and the roughness was measured by a profilometer. The electrical properties were characterized in terms of their relative permittivity (E,(T) and ~,.(f)) and leakage behavior (I-V, I-T and I- time). The electrical measurements were performed over a temperature range from -5 to 200°C. For the samples with best experimental results, the relative permittivity of HfOa was found to be -- 27 after anneal and increased by 0.027%/"C with increasing temperature over the measured temperature range. At 25"C, leakage current density was below lop8 ~ l c m ' at 1 volt. The leakage current increased with temperature above a specific threshold temperature below which the leakage current didn't change much. The leakage current increased with voltage. At voltages below lvolt, it's ohmic; at higher voltages, it follows Schottky model. The breakdown field is - 1 . 8 2 ~ lo6 Vlcm. The optical bandgap was measured with samples deposited on quartz substrates to be 5.4eV after anneal.

Description and chemical composition of manganese nodules collected in the Pacific Ocean

Chemical and X-ray analyses were performed on the fifteen manganese nodules collected from the Pacific Ocean floor. The results were discussed compared with the previous data on the manganese nodules. Minerals were found to be todorokite, delta-MnO2 and other silicates, montmorillonite, illite, phillipsite and alpha-Si02. Average composition shows that copper is concentrated on the deep sea nodules more than the shallow ones, and that the todorokite rich nodules contain more copper and nickel than the delta-MnO2 rich ones. The analyses of fresh water iron-manganese precipitates by bacterial activity suggest that biological process is one of the important factors on the genesis of the sedimentary iron-manganese deposits, in¬cluding the manganese nodule.

High sensitivity biosensors based on shear mode AIN resonators for in liquid operation

El diagnóstico y detección temprana de enfermedades son clave para reducir la tasa de mortalidad, las hospitalizaciones de larga duración y el desaprovechamiento de recursos. En los últimos años se ha impulsado, mediante un aumento de la financiación, el desarrollo de nuevos biosensores de bajo coste capaces de detectar y cuantificar cantidades muy pequeñas de especies biológicas de una forma barata y sencilla. El trabajo presentado en esta Tesis Doctoral describe la investigación llevada a cabo en el desarrollo de sensores gravimétricos basados en resonadores de ondas acústicas de volumen (BAW) de estructura maciza (SMR). Los dispositivos emplean películas delgadas de A1N como material piezoeléctrico y operan en modo de cizalladura, para así poder detectar especies biológicas en medio líquido. El principio de funcionamiento de estos sensores se basa en la variación que experimenta la frecuencia de resonancia al quedar una pequeña masa adherida a su superficie. Necesitan operar en modo de cizalladura para que su resonancia no se atenúe al trabajar en medio líquido, así como ofrecer una superficie capaz de ser funcionalizada específicamente para la especie biológica a detectar. El reto planteado en esta tesis requiere un acercamiento pluridisciplinar al problema que incluye el estudio de los diferentes materiales que constituyen la estructura multicapa que forma un SMR, el diseño y fabricación del dispositivo y del sistema de fluídica, la funcionalización bioquímica de la superficie del sensor, la demostración de la capacidad de detección de especies biológicas y finalmente el diseño y fabricación de la electrónica asociada para la detección de la señal eléctrica. Todas esas tareas han sido abordadas en las distintas etapas del desarrollo de esta tesis y las contribuciones más relevantes se describen en el documento. En el campo de desarrollo de los materiales, se propone un proceso en dos etapas para la pulverización reactiva de capas de A1N que contengan microcristales inclinados capaces de excitar el modo de cizalladura. Se caracteriza la velocidad acústica del modo de cizalladura en todos los materiales que componen la estructura, con el fin de poder obtener un diseño más adecuado del reflector acústico. Se propone un nuevo tipo de material aislante de alta impedancia acústica consistente en capas de W03 pulverizadas que presenta ciertas ventajas tecnológicas frente a las capas convencionales de Ta205. Respecto del diseño del transductor, se estudia la influencia que tienen los con tactos eléctricos extendidos del resonador necesarios para poder adaptar el sistema de fluídica a la estructura. Los resultados indican que es necesario trabajar sobre sustratos aislantes (tanto el soporte como el espejo acústico) para evitar efectos parásitos asociados al uso de capas metálicas bajo los electrodos del resonador que dañan su resonancia. Se analiza la influencia de las diferentes capas del dispositivo en el coeficiente de temperatura de la frecuencia (TCF) del resonador llegando a la conclusión de que las dos últimas capas del reflector acústico afectan significativamente al TCF del SMR, pudiendo reducirse ajusfando adecuadamente sus espesores. De acuerdo con los resultados de estos estudios, se han diseñado finalmente resonadores SMR operando a f .3 GHz en modo de cizalladura, con un área activa de 65000 /xm2, contactos eléctricos que se extienden f .7 mm y factores de calidad en líquido de f 50. Las extensiones eléctricas permiten adaptar el resonador a un sistema de fluídica de metacrilato. Para la detección de especies biológicas se realiza un montaje experimental que permite circular 800 ¡A por la superficie del sensor a través de un circuito cerrado que trabaja a volumen constante. La circulación de soluciones iónicas sobre el sensor descubierto pone de manifiesto que las altas frecuencias de operación previenen los cortocircuitos y por tanto el aislamiento de los electrodos es prescindible. Se desarrolla un protocolo ad-hoc de funcionalización basado en el proceso estándar APTESGlutaraldehído. Se proponen dos alternativas novedosas para la funcionalización de las áreas activas del sensor basadas en el uso de capas de oxidación de Ir02 y su activación a través de un plasma de oxígeno que no daña al dispositivo. Ambos procesos contribuyen a simplificar notablemente la funcionalización de los sensores gravimétricos. Se utilizan anticuerpos y aptámeros como receptores para detectar trombina, anticuerpo monoclonal IgG de ratón y bacteria sonicadas. Una calibración preliminar del sensor con depósitos de capas finas de Si02 de densidad y espesor conocidos permite obtener una sensibilidad de 1800 kHz/pg-cm2 y un límite de detección of 4.2 pg. Finalmente se propone el prototipo de un circuito electrónico de excitación y lectura de bajo coste diseñado empleando teoría de circuitos de microondas. Aunque su diseño y funcionamiento admite mejoras, constituye la última etapa de un sistema completo de bajo coste para el diagnóstico de especies biológicas basado en resonadores SMR de A1N. ABSTRACT Early diagnosis and detection of diseases are essential for reducing mortality rate and preventing long-term hospitalization and waste of resources. These requirements have boosted the efforts and funding on the research of accurate and reliable means for detection and quantification of biological species, also known as biosensors. The work presented in this thesis describes the development and fabrication of gravimetric biosensors based on piezoelectric AlN bulk acoustic wave (BAW) solidly mounted resonators (SMRs) for detection of biological species in liquid media. These type of devices base their sensing principles in the variation that their resonant frequency suffers when a mass is attached to their surface. They need to operate in the shear mode to maintain a strong resonance in liquid and an adequate functionalisation of their sensing area to guarantee that only the targeted molecules cause the shift. The challenges that need to be overcome to achieve piezoelectric BAW resonators for high sensitivity detection in fluids require a multidisciplinary approach, that include the study of the materials involved, the design of the device and the fluidic system, the biochemical functionalisation of the active area, the experimental proof-of-concept with different target species and the design of an electronic readout circuit. All this tasks have been tackled at different stages of the thesis and the relevant contributions are described in the document. In the field of materials, a two-stage sputtering deposition process has been developed to obtain good-quality AlN films with uniformly tilted grains required to excite the shear mode. The shear acoustic velocities of the materials composing the acoustic reflector have been accurately studied to ensure an optimum design of the reflector stack. WO3 sputtered films have been proposed as high acoustic impedance material for insulating acoustic reflectors. They display several technological advantages for the processing of the resonators. Regarding the design, a study of the influence of the electrical extensions necessary to fit a fluidic system on the performance of the devices has been performed. The results indicate that high resistivity substrates and insulating reflectors are necessary to avoid the hindering of the resonance due to the parasitic effects induced by the extensions. The influence of the different layers of the stack on the resultant TCF of the SMRs has also been investigated. The two layers of the reflector closer to the piezoelectric layer have a significant influence on the TCF, which can be reduced by modifying their thicknesses accordingly. The data provided by these studies has led to the final design of the devices, which operate at 1.3 GHz in the shear mode and display an active area of 65000 /xm2 and electrical extensions of 1.7 mm while keeping a Qahear=150 in liquid. The extensions enable to fit a custom-made fluidic system made of methacrylate. To perform the biosensing experiments, an experimental setup with a liquid closed circuit operating at constant flow has been developed. Buffers of ionic characteristics have been tested on non-isolated devices, revealing that high operation frequencies prevent the risk of short circuit. An ad-hoc functionalisation protocol based on the standard APTES - Glutaraldehyde process has been developed. It includes two new processes that simplify the fabrication of the transducers: the use of IrO2 as oxidation layer and its functionalisation through an O2 plasma treatment that does not damage the resonators. Both antibodies and aptamers are used as receptors. In liquid sensing proof-of-concept experiments with thrombin, IgG mouse monoclonal antibody and sonicated bacteria have been displayed. A preliminary calibration of the devices using SiO2 layers reveals a sensitivity of 1800 kHz/pg-cm2 and a limit of detection of 4.2 pg. Finally, a first prototype of a low-cost electronic readout circuit designed using a standard microwave approach has been developed. Although its performance can be significantly improved, it is an effective first approach to the final stage of a portable low-cost diagnostic system based on shear mode AlN SMRs.

Chemical studies of plasma etchants used in integrated circuit manufacture

Plasma or "dry" etching is an essential process for the production of modern microelectronic circuits. However, despite intensive research, many aspects of the etch process are not fully understood. The results of studies of the plasma etching of Si and Si02 in fluorine-containing discharges, and the complementary technique of plasma polymerisation are presented in this thesis. Optical emission spectroscopy with argon actinometry was used as the principle plasma diagnostic. Statistical experimental design was used to model and compare Si and Si02 etch rates in CF4 and SF6 discharges as a function of flow, pressure and power. Etch mechanisms m both systems, including the potential reduction of Si etch rates in CF4 due to fluorocarbon polymer formation, are discussed. Si etch rates in CF4 /SF6 mixtures were successfully accounted for by the models produced. Si etch rates in CF4/C2F6 and CHF3 as a function of the addition of oxygen-containing additives (02, N20 and CO2) are shown to be consistent with a simple competition between F, 0 and CFx species for Si surface sites. For the range of conditions studied, Si02 etch rates were not dependent on F-atom concentration, but the presence of fluorine was essential in order to achieve significant etch rates. The influence of a wide range of electrode materials on the etch rate of Si and Si02 in CF4 and CF4 /02 plasmas was studied. It was found that the Si etch rate in a CF4 plasma was considerably enhanced, relative to an anodised aluminium electrode, in the presence of soda glass or sodium or potassium "doped" quartz. The effect was even more pronounced in a CF4 /02 discharge. In the latter system lead and copper electrodes also enhanced the Si etch rate. These results could not be accounted for by a corresponding rise in atomic fluorine concentration. Three possible etch enhancement mechanisms are discussed. Fluorocarbon polymer deposition was studied, both because of its relevance to etch mechanisms and its intrinsic interest, as a function of fluorocarbon source gas (CF4, C2F6, C3F8 and CHF3), process time, RF power and percentage hydrogen addition. Gas phase concentrations of F, H and CF2 were measured by optical emission spectroscopy, and the resultant polymer structure determined by X-ray photoelectron spectroscopy and infrared spectroscopy. Thermal and electrical properties were measured also. Hydrogen additions are shown to have a dominant role in determining deposition rate and polymer composition. A qualitative description of the polymer growth mechanism is presented which accounts for both changes in growth rate and structure, and leads to an empirical deposition rate model.

Der Kauffunger Kalkstein (Bober-Katzbach Gebirge, Polen): Petrographie, Fossilinventar, Stratigraphie

In the Western Sudetes (Mts.) in SW Poland carbonate rocks occur which are well known in the older German literature as ’’Kauffung Limestone” or ’’Wojcieszow Limestone” in recent publications, respectively. They are intercalated in sedimentary (shales) and volcanic (greenstone) successions and are, presumed - due to the lack of index fossils - to be Cambrian in age. These deposits occur in a variety of isolated massifs in the Bober-Katzbach Mts. where they have been mined in many quarries in the past. In a single location (Polom quarry near Wojcieszow) they are exploited up until today. The predominantly calcitic rocks display a wide variety of different lithologies and are, consequently, subdivided into the following lithological units which differ in textural characteristics, mineral constituents, and different grades of diagenetic and metamorphic alteration: 1. Calcite Marble: massive, calcitic, chiefly metamorphic recrystallized. 2. Zebra Limestone: dolomitic-calcitic, certain content of metasomatic silica, fine bedding as a result of microbial calcite precipitation or of diagenetic to metamorphic separation of carbonate and silica constituents. 3. Massive matrix Dolomite: compact, of diagenetic to metamorphic origin. 4. Dolomite Marble: metamorphic. 5. Hydrothermal Dolomite: hydrothermal alteration of limestone, postdating the tectonic deformation. The recent appearance of ’’Kauffung Limestone” is mainly a result of regional metamorphosis at low temperature up to about 300°C and locally high pressure. The typical textural features are stress induced, mostly protomylonitic calcite recrystallisation and generally slowly or not infected dolomite crystals. The different reactions of the two carbonate phases are attributed to their mineral properties. Rhyolitic and dacitic dykes penetrating the carbonate rocks are interpreted as a result of post- orogenic, probably Carboniferous or Permian volcanism. Microprobe investigation on the carbonates revealed a stochiometric composition of dolomite and calcite. The stable isotope content (8 c 0,8* ^C) reflects increased crystallisation temperature of the carbonate minerals (8 O von -7,75 bis -15,78). A variety of fossil remains have been extracted from bulk samples, consisting of sponge needles, floral components, foramini- fera, and vertebrate remains the latter two of which indicate a depositional age younger than Ordovician. Due to the stratigraphic re-attribution of the Kauffung Limestone, the hypothesis of a Cambrian/Ordovician rifting in the Western Sudetes should be abandoned.

Die Malmschichtfolge von Langenberg bei Oker (nördl. Harzvorland)

Im Steinbruch des Kalkwerkes Oker am Westende des Langen-Berges (nördl. Harzvorland) wurde ein etwa 200 m mächtiges Profil aufgenommen, das vom Unteren Korallenoolith bis in den Oberen Kimmeridge reicht. Darüber transgrediert Unter-IIauterive. Auf der Grundlage mikroskopischer Untersuchungen von Gesteinsanschnitten wurden die vorhandenen Ges teinstypen der Karbonatgesteine festgestellt und beschrieben. In der Malmschichtfolge, die aus mergeligen, dolomitischen und reinen Kalkgesteinen aufgebaut wird, überwiegen im Korallenoolith Oolithe und im Kimmeridge feinkörnig dichte Kalkgesteine (Mikrite). Als besondere Typen wurden an der Basis des Mittleren Kimmeridge auf Grund der Führung von Algenbällen (Onkoiden) ein Onkoid- dolomitstein und im untersten Teil des Oberen Kimmeridge wegen' des starken Anteils von Characeen-Gyrogoniten an den klastischen Komponenten des Gesteins ein Characeenkalkstein ausgej schieden. Von den einzelnen Gesteinstypen wurden Proben quantitativ chemisch auf ihren SiO2, Al, Fe, Mg und Ca-Gehalt untersucht. Durch diese Bestimmungen wurde eine Übersicht über die chemische Zusammensetzung der Gesteinsfolge gewonnen. Der Korallenoolith ist generell stärker eisenführend als der Kimmeridge, besonders aber im Unteren Korallenoolith und an der Basis des Mittleren und des Oberen Korallenooliths. Während des gesamten Mittleren Korallenooliths wurde ein sehr reines Karbonatgestein mit geringem Si02 und Al2O3-Gehalt gebildet. Als Durchschnittswert des Doloraitanteils am Gestein wurden, jeweils für größere Abschnitte berechnet, im Korallenoolith und Kimmeridge gleichermaßen etwa 15% gefunden. Im Mittleren Kimmeridge liegt als Grenzbank zum Oberen Kimmeridge eine 3 m mächtige, graugelbe Gesteinsbank, die von den Steinbrucharbeitern "Wasserstein" genannt wird und nach der chemischen Untersuchung aus sehr reinem Dolomitstein besteht. Die stratigraphische Grenzziehung erfolgte nach der mikropa- läontologischen Untersuchung einiger Mergelsteinproben. Innerhalb der Malmschichtfolge wurden Mindestartenzahlen von Foraminiferen und Ostrakoden sowie von kalkschaligen und von sand- schaligen Foraminiferen verglichen und die Anzahl gewisser vorwiegend mariner Fossilgruppen und das Auftreten von Characeen-Gyrogoniten festgestellt. Auf Grund der Ergebnisse wurde ein Wechsel der ökologischen Bedingungen gegen Ende des Oberen Korallenooliths angenommen. Nach ökologischen Untersuchungen an rezenten Foraminiferen deuten Dominanzen der sandschaligen Foraminiferen nach Arten- und Individuenzahl bei gleichzeitig geringer Gesamtartenzahl im Kimmeridge auf Flachwasserbedingungen mit möglicherweise verringertem Salzgehalt hin. Weitere Hinweise auf zeitweilige Brackwassereinflüsse während des Kimmeridges sind die Abnahme der Zahl vorwiegend mariner Fossilgruppen und das massenhafte Auftreten von Characeen-Gyrogoniten. Diese Deutungen passen gut in das paläogeographische Bild des Malms nach IIUCKRIEDE (1967). Danach gehörte das Gebiet des Langen-Berges seit dem Unteren Kimmeridge zu einer Bucht des Niedersächsischen Beckens, die im Süden und Osten vom nahen Mitteldeutschen Festland umschlossen wurde und von dorther Süßwasserzufluß erhielt.