In situ surface topography measurement method of granite base in scanning wafer stage with laser interferometer

Topography of a granite surface has an effect on the vertical positioning of a wafer stage in a lithographic tool, when the wafer stage moves on the granite. The inaccurate measurement of the topography results in a bad leveling and focusing performance. In this paper, an in situ method to measure the topography of a granite surface with high accuracy is present. In this method, a high-order polynomial is set up to express the topography of the granite surface. Two double-frequency laser interferometers are used to measure the tilts of the wafer stage in the X- and Y-directions. From the sampling tilts information, the coefficients of the high-order polynomial can be obtained by a special algorithm. Experiment results shows that the measurement reproducibility of the method is better than 10 nm. (c) 2006 Elsevier GmbH. All rights reserved.

Forty Years of Winter: Cetaceans Observed During the Southbound Migration of Gray Whales, Eschrichtius robustus, Near Granite Canyon, Central California

From December to February in most years from 1967 to 2007, observers counted gray whales, Eschrichtius robustus, from shore sites south of Carmel in central California. In addition to gray whales, other cetacean species were also recorded. These observations were summarized and compared among survey platforms and to ocean conditions. Eleven cetacean species were identified including eight odontocete species (killer whale, Orcinus orca; Pacific white-sided dolphin, Lagenorhynchus obliquidens; common dolphin, Delphinus spp.; bottlenose dolphin, Tursiops truncatus, northern right whale dolphin, Lissodelphis borealis; Risso’s dolphin, Grampus griseus; Dall’s porpoise, Phocoenoides dalli; and harbor porpoise, Phocoena phocoena) and three mysticete species (humpback whale, Megaptera novaeangliae; minke whale, Balaenoptera acutorostrata; and blue whale, Balaenoptera musculus). As expected, the detection of certain species among survey platforms (shore-based census watches, 25-power “Big Eye” binocular watches, and aerial surveys) was limited by species surfacing behavior and/or bathymetric preference. Comparisons among the shore-based census efforts showed a significant difference in sightings rates from 1967–84 (n = 14, mean = 0.11, SD = 0.11) to 1985–2007 (n = 11, mean = 1.48, SD = 0.47; t-Test: p < 0.001, df = 23). The warm period observed during the 1990’s may partially explain the increase in sighting rates and diversity of species observed at the census site compared to the much cooler temperatures of the 1970’s.

Environmental Isotopes as Indicators for Ground Water Recharge to Fractured Granite

To assess the contribution of accumulated winter precipitation and glacial meltwater to the recharge of deep ground water flow systems in fracture crystalline rocks, measurements of environmental isotope ratios, hydrochemical composition, and in situ parameters of ground water were performed in a deep tunnel. The measurements demonstrate the significance of these ground water recharge components for deep ground water flow systems in fractured granites of a high alpine catchment in the Central Alps, Switzerland. Hydrochemical and in situ parameters, as well as d18O in ground water samples collected in the tunnel, show only small temporal variations. The precipitation record of d18O shows seasonal variations of ~14‰ and a decrease of 0.23‰ ± 0.03‰ per 100 m elevation gain. d2H and d18O in precipitation are well correlated and plot close to the meteoric water line, as well as d2H and d18O in ground water samples, reflecting the meteoric origin of the latter. The depletion of 18O in ground water compared to 18O content in precipitation during the ground water recharge period indicates significant contributions from accumulated depleted winter precipitation to ground water recharge. The hydrochemical composition of the encountered ground water, Na-Ca-HCO3-SO4(-F), reflects an evolution of the ground water along the flowpath through the granite body. Observed tritium concentrations in ground water range from 2.6 to 16.6 TU, with the lowest values associated with a local negative temperature anomaly and anomalous depleted 18O in ground water. This demonstrates the effect of local ground water recharge from meltwater of submodern glacial ice. Such localized recharge from glaciated areas occurs along preferential flowpaths within the granite body that are mainly controlled by observed hydraulic active shear fractures and cataclastic faults.

Post-depositional modification of atmospheric dust on a granite building in central Rio de Janeiro: implications for surface induration and subsequent stone decay

Extensive contour scaling of a 200 year old granite church is associated with the breaching of an apparently iron-rich crust and the widespread deposition of atmospheric dust within the canyon-like streetscape of Rio de Janeiro. Contemporary dust, accumulated dust from within the a depression on the building surface, the surface crust and the underlying granite are examined by a combination of total element analysis and sequential extraction, X-ray diffraction and energy dispersive X-ray fluorescence. Results indicate an increase in total organic carbon and a marked decrease in pH within the accumulated dust, and a rapid mobilization of anions and cations from the water-soluble and carbonate phases. It is considered that the latter is linked to salt accumulation within and eventual salt weathering of the granite. Post-depositional alteration of the dust is also linked with the de-silicification of clay minerals (Illite to kaolinite) and the loss of silica from the amorphous Fe/Mn phase of the accumulated dust under the initially saline and progressively more acidic conditions experienced at the stone - atmosphere interface. This mobilization of silica is associated with the formation of what is, in effect, a thin silica-rich surface crust or glaze. Within the glaze, assessory amounts of extractable iron are concentrated within the amorphous and crystalline Fe/Mn phases at levels that are significantly elevated with respect to the underlying granite, but much lower than the equivalent phases of the accumulated dust from which it is principally assumed to derive. The protection afforded to the stone work by the crust is not, however, permanent and within the last 15 years it has been possible to observe a rapid increase in the surface delamination of the church close to street level.