978 resultados para Atomic layer deposition (ALD)
Abscheidung und Charakterisierung von Plasmapolymerschichten auf Fluorkohlenstoff- und Siloxan-Basis
Resumo:
In dieser Arbeit wurden Fluorkohlenstoff-basierte und siliziumorganische Plasmapolymerfilme hergestellt und hinsichtlich ihrer strukturellen und funktionalen Eigenschaften untersucht. Beide untersuchten Materialsysteme sind in der Beschichtungstechnologie von großem wissenschaftlichen und anwendungstechnischen Interesse. Die Schichtabscheidung erfolgte mittels plasmachemischer Gasphasenabscheidung (PECVD) an Parallelplattenreaktoren. Bei den Untersuchungen zur Fluorkohlenstoff-Plasmapolymerisation stand die Herstellung ultra-dünner, d. h. weniger als 5 nm dicker Schichten im Vordergrund. Dies wurde durch gepulste Plasmaanregung und Verwendung eines Gasgemisches aus Trifluormethan (CHF3) und Argon realisiert. Die Bindungsstruktur der Schichten wurden in Abhängigkeit der eingespeisten Leistung, die den Fragmentationsgrad der Monomere im Plasma bestimmt, analysiert. Hierzu wurden die Röntgen-Photoelektronenspektroskopie (XPS), Rasterkraftmikroskopie (AFM), Flugzeit-Sekundärionenmassenspektrometrie (ToF-SIMS) und Röntgenreflektometrie (XRR) eingesetzt. Es zeigte sich, dass die abgeschiedenen Schichten ein homogenes Wachstumsverhalten und keine ausgeprägten Interfacebereiche zum Substrat und zur Oberfläche hin aufweisen. Die XPS-Analysen deuten darauf hin, dass Verkettungsreaktionen von CF2-Radikalen im Plasma eine wichtige Rolle für den Schichtbildungsprozess spielen. Weiterhin konnte gezeigt werden, dass der gewählte Beschichtungsprozess eine gezielte Reduzierung der Benetzbarkeit verschiedener Substrate ermöglicht. Dabei genügen Schichtdicken von weniger als 3 nm zur Erreichung eines teflonartigen Oberflächencharakters mit Oberflächenenergien um 20 mN/m. Damit erschließen sich neue Applikationsmöglichkeiten ultra-dünner Fluorkohlenstoffschichten, was anhand eines Beispiels aus dem Bereich der Nanooptik demonstriert wird. Für die siliziumorganischen Schichten unter Verwendung des Monomers Hexamethyldisiloxan (HMDSO) galt es zunächst, diejenigen Prozessparameter zu identifizieren, die ihren organischen bzw. glasartigen Charakter bestimmen. Hierzu wurde der Einfluss von Leistungseintrag und Zugabe von Sauerstoff als Reaktivgas auf die Elementzusammensetzung der Schichten untersucht. Bei niedrigen Plasmaleistungen und Sauerstoffflüssen werden vor allem kohlenstoffreiche Schichten abgeschieden, was auf eine geringere Fragmentierung der Kohlenwasserstoffgruppen zurückgeführt wurde. Es zeigte sich, dass die Variation des Sauerstoffanteils im Prozessgas eine sehr genaue Steuerbarkeit der Schichteigenschaften ermöglicht. Mittels Sekundär-Neutralteilchen-Massenspektrometrie (SNMS) konnte die prozesstechnische Realisierbarkeit und analytische Quantifizierbarkeit von Wechselschichtsystemen aus polymerartigen und glasartigen Lagen demonstriert werden. Aus dem Intensitätsverhältnis von Si:H-Molekülen zu Si-Atomen im SNMS-Spektrum ließ sich der Wasserstoffgehalt bestimmen. Weiterhin konnte gezeigt werden, dass durch Abscheidung von HMDSO-basierten Gradientenschichten eine deutliche Reduzierung von Reibung und Verschleiß bei Elastomerbauteilen erzielt werden kann.
Resumo:
Cor-Ten is a particular kind of steel, belonging to low-alloyed steel; thanks to his aesthetic features and resistance to atmospheric corrosion, this material is largely used in architectural, artistic and infrastructural applications. After environmental exposure, Cor-Ten steel exhibits the characteristic ability to self-protect from corrosion, by the development of a stable and adherent protective layer. However, some environmental factors can influence the formation and stability of the patina. In particular, exposure of Cor-Ten to polluted atmosphere (NOx, SOx, O3) or coastal areas (marine spray) may cause problems to the protective layer and, as a consequence, a release of alloying metals, which can accumulate near the structures. Some of these metals, such as Cr and Ni, could be very dangerous for soils and water because of their large toxicity. The aim of this work was to study the corrosion behavior of Cor-Ten exposed to an urban-coastal site (Rimini, Italy). Three different kinds of commercial surface finish (bare and pre-patinated, with or without a beeswax covering) were examined, both in sheltered and unsheltered exposure conditions. Wet deposition brushing the specimens surface (leaching solutions) are monthly collected and analyzed to evaluate the extent of metal release and the form in which they leave the surface, for example, as water-soluble compounds or non-adherent corrosion products. Five alloying metals (Fe, Cu, Cr, Mn and Ni) and nine ions (Cl-, NO3-, NO2-, SO42-, Na+, Ca2+, K+, Mg2+, NH4+) are determined through Atomic Absorption Spectroscopy and Ion Chromatography, respectively. Furthermore, the evolution and the behaviour of the patina are periodically followed by surface investigations (SEM-EDS and Raman Spectroscopy). After two years of exposure, the results show that Bare Cor-Ten, cheaper than the other analyzed specimens, even though undergoes the greater mass variation, his metal release is comparable to the release of the pre-patinated samples. The behavior of pre-patinated steel, with or without beeswax covering, do not show particular difference. This exposure environment doesn’t allow a completely stabilization of the patina; nevertheless an estimate of metal release after 10 years of exposure points out that the environmental impact of Cor-Ten is very low: for example, the release of chromium in the soluble fraction is less than 10 mg if we consider an exposed wall of 10 m2.
Resumo:
Self-assembled molecular structures were investigated on insulating substrate surfaces using non-contact atomic force microscopy. Both, substrate preparation and molecule deposition, took place under ultra-high vacuum conditions. First, C60 molecules were investigated on the TiO2 (110) surface. This surface exhibits parallel running troughs at the nanometer scale, which strongly steer the assembly of the molecules. This is in contrast to the second investigated surface. The CaF2 (111) surface is atomically flat and the molecular assemblyrnwas observed to be far less affected by the surface. Basically different island structures were observed to what is typically know. Based on extensive experimental studies and theoretical considerations, a comprehensive picture of the processes responsible for the island formation of C60 molecules on this insulating surfaces was developed. The key process for the emergence of the observed novel island structures was made out to be the dewetting of molecules from the substrate. This new knowledge allows to further understand andrnexploit self-assembly techniques in structure fabrication on insulating substrate surfaces. To alter island formation and island structure, C60 molecules were codeposited with second molecule species (PTCDI and SubPc) on the CaF2 (111) surface. Depending on the order of deposition, quiet different structures were observed to arise. Thus, these are the first steps towards more complex functional arrangements consisting of two molecule species on insulating surfaces.
Resumo:
Ice clouds have a strong effect on the Earth-atmosphere radiative energy balance, on the distribution of condensable gases in the atmosphere, as well as on the chemical composition of the air. The ice particles in these clouds can take on a variety of shapes which makes the description of the cloud microphysical properties more difficult. In the tropical upper troposphere/lower stratosphere (UTLS), a region where ice cloud abundance is relatively high, different types of ice clouds can be observed. However, in situ measurements are rare due to the high altitude of these clouds and the few available research aircraft, only three worldwide, that can fly at such altitudes.rnThis work focuses on in situ measurements of the tropical UTLS clouds performedrnwith a Cloud Imaging Probe (CIP) and a Forward Scattering Spectrometer Probern(FSSP-100), whereof the CIP is the key instrument of this thesis. The CIP is anrnairborne in situ instrument that obtains two-dimensional shadow images of cloud particles. Several cloud microphysical parameters can be derived from these measurements, e.g. number concentrations and size distributions. In order to obtain a high quality data set, a careful image analysis and several corrections need to be applied to the CIP observations. These methods are described in detail.rnMeasurements within the tropical UTLS have been performed during two campaigns:rnSCOUT-O3, 2005 in Northern Australia and SCOUT-AMMA, 2006 inWest Africa. Thernobtained data set includes first observations of subvisible cirrus clouds over a continental area and observations of the anvils of deep convective clouds. The latter can be further divided into clouds in mesoscale convective system outflows of different ages and clouds in overshooting cloud turrets that even penetrated the stratosphere. The microphysical properties of these three cloud types are discussed in detail. Furthermore, the vertical structure of the ice clouds in the UTLS is investigated. The values of the microphysical parameters were found to decrease with increasing altitude in the upper troposphere. Particle numbers and maximum sizes were also decreasing with increasing age of the outflow clouds. Further differences between the deep convective clouds and subvisible cirrus were found in the particle morphology as well as in the ratio of the observed aerosol particles to cloud particles which indicates that the different freezing processes (deposition, contact, immersion freezing) play different roles in the formation of the respective clouds. For the achievementrnof a better microphysical characterisation and description numerical fits have been adjusted onto the cloud particle size distributions of the subvisible cirrus as well as on the size distributions of the clouds at different altitudes in the UTLS.
Resumo:
In this thesis, elemental research towards the implantation of a diamond-based molecular quantum computer is presented. The approach followed requires linear alignment of endohedral fullerenes on the diamond C(100) surface in the vicinity of subsurface NV-centers. From this, four fundamental experimental challenges arise: 1) The well-controlled deposition of endohedral fullerenes on a diamond surface. 2) The creation of NV-centers in diamond close to the surface. 3) Preparation and characterization of atomically-flat diamondsurfaces. 4) Assembly of linear chains of endohedral fullerenes. First steps to overcome all these challenges were taken in the framework of this thesis. Therefore, a so-called “pulse injection” technique was implemented and tested in a UHV chamber that was custom-designed for this and further tasks. Pulse injection in principle allows for the deposition of molecules from solution onto a substrate and can therefore be used to deposit molecular species that are not stable to sublimation under UHV conditions, such as the endohedral fullerenes needed for a quantum register. Regarding the targeted creation of NV-centers, FIB experiments were carried out in cooperation with the group of Prof. Schmidt-Kaler (AG Quantum, Physics Department, Johannes Gutenberg-Universität Mainz). As an entry into this challenging task, argon cations were implanted into (111) surface-oriented CaF2 crystals. The resulting implantation spots on the surface were imaged and characterized using AFM. In this context, general relations between the impact of the ions on the surface and their valency or kinetic energy, respectively, could be established. The main part of this thesis, however, is constituted by NCAFM studies on both, bare and hydrogen-terminated diamond C(100) surfaces. In cooperation with the group of Prof. Dujardin (Molecular Nanoscience Group, ISMO, Université de Paris XI), clean and atomically-flat diamond surfaces were prepared by exposure of the substrate to a microwave hydrogen plasma. Subsequently, both surface modifications were imaged in high resolution with NC-AFM. In the process, both hydrogen atoms in the unit cell of the hydrogenated surface were resolved individually, which was not achieved in previous STM studies of this surface. The NC-AFM images also reveal, for the first time, atomic-resolution contrast on the clean, insulating diamond surface and provide real-space experimental evidence for a (2×1) surface reconstruction. With regard to the quantum computing concept, high-resolution NC-AFM imaging was also used to study the adsorption and self-assembly potential of two different kinds of fullerenes (C60 and C60F48) on aforementioned diamond surfaces. In case of the hydrogenated surface, particular attention was paid to the influence of charge transfer doping on the fullerene-substrate interaction and the morphology emerging from self-assembly. Finally, self-assembled C60 islands on the hydrogen-terminated diamond surface were subject to active manipulation by an NC-AFM tip. Two different kinds of tip-induced island growth modes have been induced and were presented. In conclusion, the results obtained provide fundamental informations mandatory for the realization of a molecular quantum computer. In the process it was shown that NC-AFM is, under proper circumstances, a very capable tool for imaging diamond surfaces with highest resolution, surpassing even what has been achieved with STM up to now. Particular attention was paid to the influence of transfer doping on the morphology of fullerenes on the hydrogenated diamond surface, revealing new possibilities for tailoring the self-assembly of molecules that have a high electron affinity.
Resumo:
In the last years technologies related to photovoltaic energy have rapidly developed and the interest on renewable energy power source substantially increased. In particular, cost reduction and appropriate feed-in tariff contributed to the increase of photovoltaic installation, especially in Germany and Italy. However, for several technologies, the observed experimental efficiency of solar cells is still far from the theoretical maximum efficiency, and thus there is still room for improvement. In this framework the research and development of new materials and new solar devices is mandatory. In this thesis the morphological and optical properties of thin films of nanocrystalline silicon oxynitride (nc-SiON) have been investigated. This material has been studied in view of its application in Si based heterojunction solar cells (HIT). Actually, a-Si:H is used now in these cells as emitter layer. Amorphous SiO_x N_y has already shown excellent properties, such as: electrical conductivity, optical energy gap and transmittance higher than the ones of a-Si:H. Nc-SiO_x N_y has never been investigated up to now, but its properties can surpass the ones of amorphous SiON. The films of nc-SiON have been deposited at the University of Konstanz (Germany). The properties of these films have been studied using of atomic force microscopy and optical spectroscopy methods. This material is highly complex as it is made by different coexisting phases. The main purpose of this thesis is the development of methods for the analyses of morphological and optical properties of nc-SiON and the study of the reliability of those methods to the measurement of the characteristics of these silicon films. The collected data will be used to understand the evolution of the properties of nc-SiON, as a function of the deposition parameters. The results here obtained show that nc-SiON films have better properties with respect to both a-Si:H and a-SiON, i. e. higher optical band-gap and transmittance. In addition, the analysis of the variation of the observed properties as a function of the deposition parameters allows for the optimization of deposition conditions for obtaining optimal efficiency of a HIT cell with SiON layer.
Resumo:
Detrital zircon and igneous zircon U-Pb ages are reported from Proterozoic metamorphic rocks in northern New Mexico. These data give new insight into the provenance and depositional age of a >3-km-thick metasedimentary succession and help resolve the timing of orogenesis within an area of overlapping accretionary orogens and thermal events related to the Proterozoic tectonic evolution of southwest Laurentia. Three samples from the Paleoproterozoic Vadito Group yield narrow, unimodal detrital zircon age spectra with peak ages near 1710 Ma. Igneous rocks that intrude the Vadito Group include the Cerro Alto metadacite, the Picuris Pueblo granite, and the Penasco quartz monzonite and yield crystallization ages of 1710 +/- 10 Ma, 1699 +/- 3 Ma, and 1450 +/- 10 Ma, respectively. Within the overlying Hondo Group, a metamorphosed tuff layer from the Pilar Formation yields an age of 1488 +/- 6 Ma and represents the first direct depositional age constraint on any part of the Proterozoic metasedimentary succession in northern New Mexico. Detrital zircon from the overlying Piedra Lumbre Formation yield a minimum age peak of 1475 Ma, and similar to 60 grains (similar to 25%) yield ages between 1500 Ma and 1600 Ma, possibly representing non-Laurentian detritus originating from Australia and/or Antarctica. Detrital zircons from the basal metaconglomerate and the middle quartzite member of the Marquenas Formation yield minimum age peaks of 1472 Ma and 1471 Ma, consistent with earlier results. We interpret the onset of ca. 1490-1450 Ma deposition followed by tectonic burial, regional Al2SiO5 triple-point metamorphism, and ductile deformation at depths of 12-18 km to reflect a Mesoproterozoic contractional orogenic event, possibly related to the final suturing of the Mazatzal crustal province to the southern margin of Laurentia. We propose to call this event the Picuris orogeny.
Resumo:
Three fundamental types of suppressor additives for copper electroplating could be identified by means of potential Transient measurements. These suppressor additives differ in their synergistic and antagonistic interplay with anions that are chemisorbed on the metallic copper surface during electrodeposition. In addition these suppressor chemistries reveal different barrier properties with respect to cupric ions and plating additives (Cl, SPS). While the type-I suppressor selectively forms efficient barriers for copper inter-diffusion on chloride-terminated electrode surfaces we identified a type-II suppressor that interacts non-selectively with any kind of anions chemisorbed on copper (chloride, sulfate, sulfonate). Type-I suppressors are vital for the superconformal copper growth mode in Damascene processing and show an antagonistic interaction with SPS (Bis-Sodium-Sulfopropyl-Disulfide) which involves the deactivation of this suppressor chemistry. This suppressor deactivation is rationalized in terms of compositional changes in the layer of the chemisorbed anions due to the competition of chloride and MPS (Mercaptopropane Sulfonic Acid) for adsorption sites on the metallic copper surface. MPS is the product of the dissociative SPS adsorption within the preexisting chloride matrix on the copper surface. The non-selectivity in the adsorption behavior of the type-II suppressor is rationalized in terms of anion/cation pairing effects of the poly-cationic suppressor and the anion-modified copper substrate. Atomic-scale insights into the competitive Cl/MPS adsorption are gained from in situ STM (Scanning Tunneling Microscopy) using single crystalline copper surfaces as model substrates. Type-III suppressors are a third class of suppressors. In case of type-land type-II suppressor chemistries the resulting steady-state deposition conditions are completely independent on the particular succession of additive adsorption. In contrast to that a strong dependence of the suppressing capabilities on the sequence of additive adsorption ("first comes, first serves" principle) is observed for the type-IIIsuppressor. This behavior:is explained by a suppressor barrier that impedes not only the copper inter-diffusion but also the transport of other additives (e.g. SPS) to the copper surface. (C) 2011 Elsevier Ltd. All rights reserved.
Resumo:
High resolution friction force maps of the benzylammonium terminated crystalline surface of a layer compound are presented. The lateral force map acquired with an atomic force microscope, reveals a significant contrast between different molecular orientations yielding molecular rows which differ from their neighboring ones. The single crystals are formed by stacks of copper oxalate sheets sandwiched between stereoregular organic cations, resulting in highly organized surface structures. Single molecular defects are observed at small loads. The experimental results are compared with numerical calculations which indicate a transition from an unperturbed state at small loads to a distorted state at higher loads. (C) 2011 American Institute of Physics.
Resumo:
The time course of lake recovery after a reduction in external loading of nutrients is often controlled by conditions in the sediment. Remediation of eutrophication is hindered by the presence of legacy organic carbon deposits, that exert a demand on the terminal electron acceptors of the lake and contribute to problems such as internal nutrient recycling, absence of sediment macrofauna, and flux of toxic metal species into the water column. Being able to quantify the timing of a lake’s response requires determination of the magnitude and lability, i.e., the susceptibility to biodegradation, of the organic carbon within the legacy deposit. This characterization is problematic for organic carbon in sediments because of the presence of different fractions of carbon, which vary from highly labile to refractory. The lability of carbon under varied conditions was tested with a bioassay approach. It was found that the majority of the organic material found in the sediments is conditionally-labile, where mineralization potential is dependent on prevailing conditions. High labilities were noted under oxygenated conditions and a favorable temperature of 30 °C. Lability decreased when oxygen was removed, and was further reduced when the temperature was dropped to the hypolimnetic average of 8° C . These results indicate that reversible preservation mechanisms exist in the sediment, and are able to protect otherwise labile material from being mineralized under in situ conditions. The concept of an active sediment layer, a region in the sediments in which diagenetic reactions occur (with nothing occurring below it), was examined through three lines of evidence. Initially, porewater profiles of oxygen, nitrate, sulfate/total sulfide, ETSA (Electron Transport System Activity- the activity of oxygen, nitrate, iron/manganese, and sulfate), and methane were considered. It was found through examination of the porewater profiles that the edge of diagenesis occurred around 15-20 cm. Secondly, historical and contemporary TOC profiles were compared to find the point at which the profiles were coincident, indicating the depth at which no change has occurred over the (13 year) interval between core collections. This analysis suggested that no diagenesis has occurred in Onondaga Lake sediment below a depth of 15 cm. Finally, the time to 99% mineralization, the t99, was viewed by using a literature estimate of the kinetic rate constant for diagenesis. A t99 of 34 years, or approximately 30 cm of sediment depth, resulted for the slowly decaying carbon fraction. Based on these three lines of evidence , an active sediment layer of 15-20 cm is proposed for Onondaga Lake, corresponding to a time since deposition of 15-20 years. While a large legacy deposit of conditionally-labile organic material remains in the sediments of Onondaga Lake, it becomes clear that preservation, mechanisms that act to shield labile organic carbon from being degraded, protects this material from being mineralized and exerting a demand on the terminal electron acceptors of the lake. This has major implications for management of the lake, as it defines the time course of lake recovery following a reduction in nutrient loading.
Resumo:
The single-electron transistor (SET) is one of the best candidates for future nano electronic circuits because of its ultralow power consumption, small size and unique functionality. SET devices operate on the principle of Coulomb blockade, which is more prominent at dimensions of a few nano meters. Typically, the SET device consists of two capacitively coupled ultra-small tunnel junctions with a nano island between them. In order to observe the Coulomb blockade effects in a SET device the charging energy of the device has to be greater that the thermal energy. This condition limits the operation of most of the existing SET devices to cryogenic temperatures. Room temperature operation of SET devices requires sub-10nm nano-islands due to the inverse dependence of charging energy on the radius of the conducting nano-island. Fabrication of sub-10nm structures using lithography processes is still a technological challenge. In the present investigation, Focused Ion Beam based etch and deposition technology is used to fabricate single electron transistors devices operating at room temperature. The SET device incorporates an array of tungsten nano-islands with an average diameter of 8nm. The fabricated devices are characterized at room temperature and clear Coulomb blockade and Coulomb oscillations are observed. An improvement in the resolution limitation of the FIB etching process is demonstrated by optimizing the thickness of the active layer. SET devices with structural and topological variation are developed to explore their impact on the behavior of the device. The threshold voltage of the device was minimized to ~500mV by minimizing the source-drain gap of the device to 17nm. Vertical source and drain terminals are fabricated to realize single-dot based SET device. A unique process flow is developed to fabricate Si dot based SET devices for better gate controllability in the device characteristic. The device vi parameters of the fabricated devices are extracted by using a conductance model. Finally, characteristic of these devices are validated with the simulated data from theoretical modeling.
Resumo:
A set of optimized deposition conditions for the inner wall coating of fused silica tubes with amorphous selenium was elaborated. The method is based on the vapor transport deposition of pure elemental selenium on a cooled substrate held at liquid nitrogen temperatures. Morphological and structural examination of the deposited layer was performed by optical microscopy and X-ray diffraction studies. Neutron activated selenium was used to monitor the deposition pattern and its stability under high gas flows. Monte Carlo simulations allowed the estimation of the different Se species composing the amorphous phase, at the given experimental deposition conditions. The versatility of the coating method presented in this work allows for the coating of tubes of different lengths and diameters, opening the way for several applications of amorphous selenium films in various fields.
Resumo:
Thirty sediment cores (30-40 cm in length), 47 Ekman dredge sediments, and Mn concretions were collected from Lake Biwa. The concentrations of 36 elements in the samples were determined by instrumental neutron activation, X-ray fluorescence, atomic absorption, and colorimetric analyses. The elements determined included Mn, P, As, Sb, Fe, Ni, Co, Zn, Cu, Pb, Hg, Cr, Ti, Na, K, Rb, Cs, Mg, Ca, Sr, Ba, Sc, Hf, La, Ce, Sm, Eu, Yb, Lu, U, Th, Au, Ta, Nd, Br and N. Based on statistical considerations and calculation of the concentration factors of the elements, the features of the elemental distribution in Lake Biwa sediment were determined. The main results are summarized as follows : (1) Concentrations of Mn and As were very high in the uppermost oxidized layer of the offshore sediment and Mn concretions. This resulted from the dissolution-deposition cycles of these elements within the sedimentary column and the bottom water. The fixation of As at the sediment surface is mainly attributed to the adsorption of arsenate onto Mn (II) -rich hydrous Mn (IV) oxide. (2) There were high concentrations of Zn, Cu, Pb and Hg in the recent sediments. Although the source of these elements is attributed to human activities, the individual distributions of Zn and Cu in the sediment may result from the deposition of metal-rich planktonic debris and subsequent degradation of the debris. (3) The orders of increasing concentrations of alkali metals and lanthanides in the sediment from the central region compared with the nearshore pediment were identical to the orders of increasing atomic numbers from Na to Cs and from La to Lu, respectively.
Resumo:
The Albian/Cenomanian strata in Hole 530A are organically richer than are the post-Cenomanian strata. Organic matter is thermally immature and appears to be of dominantly marine origin with either variable levels of oxidation or variable amounts of terrestrial input. Geochemical data alone cannot establish whether the black shales present in Hole 530A represent deposition within a stagnant basin or within an expanded oxygen-minimum layer