957 resultados para Chemical vapor deposition (CVD)


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Thin films of Ga1-xMnxN have great interest in its potential for control of electron spin (spintronics), in most cases this material is synthesized by techniques that have a high degree of control the deposition parameters, such as molecular beam epitaxy (MBE) and deposition of metalorganic chemical vapor deposition (MOCVD). The sputtering technique is an alternative route to produce such materials. Here we study the film deposition Ga1-xMnxN by reactive sputtering technique and apply enhancements such as a glove box, a residual gas analyzer and temperature control system, in order to growth films epitaxially using an analysis of the preconditions of films analyzed by spectroscopic techniques and microscopic. These procedures helped to improve the technique of deposition by cleaning substrates in an inert environment, and by the analysis of trace gases and heating the substrate holder as explained in the literature. Through the applications and comparisons it can be pointed out that the technique has the advantage of its simplicity and relatively low cost compared to MBE and MOCVD, but produces polycrystalline material

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Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)

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Backgroud: The influence of diamond-like-carbon (DLC) films on bacterial leakage through the interface between abutments and dental implants of external hexagon (EH) and internal hexagon (IH) was evaluated. Film deposition was performed by PECVD (Plasma Enhanced Chemical Vapor Deposition). Sets of implants and abutments (N=180, n=30) were divided according to the connection design and the treatment of the abutment base: (1) no treatment (control); (2) DLC film deposition, and (3) Ag-DLC film deposition. Under sterile conditions, 1 µL of Enterococcus faecalis was inoculated inside the implants, and abutments were tightened. The sets were tested for immediate external contamination, suspended in test tubes containing sterile culture broth, and followed-up for five days. Turbidity of the broth indicated bacterial leakage. At the end of the period, the abutments were removed and the internal content of the implants was collected with paper points and plated in Petri dishes. They were incubated for 24 h for bacterial viability assessment and colony-forming unit (CFU) counting. Bacterial leakage was analyzed by Chi-square and Fisher exact tests (α=5%). The percentage of bacterial leakage was 16.09% for EH implants and 80.71% for IH implants (P<0.0001). The bacterial load was higher inside these implants (P=0.000). The type of implant significantly influenced the results (P=0.000), whereas the films did not (P=0.487). We concluded that: (1) IH implants showed a higher frequency of bacterial leakage and (2) the DLC and Ag-DLC films did not significantly reduce the frequency of bacterial leakage and bacteria load inside the implants.

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The purpose of this work is the deposition of films in order to increase the corrosion resistance of AISI 304 steel, which is a material used to construct the reactors for bioethanol production. This deposition inhibits the permeation of corrosive species to the film-metal interface. Thin films were prepared by radio-frequency plasma enhanced chemical vapor deposition (RF-PECVD) method using plasmas of hexamethyldisiloxane/argon/oxygen mixtures excited by signals of different powers. The plasma was generated by the application of RF power of 13.56 MHz to the sample holder while keeping grounded the topmost electrode and the chamber walls. The effect of the RF power on the properties of the samples was investigated by perfilometry, X-ray photoelectron spectroscopy (XPS), contact angle, and electrochemical impedance spectroscopy (EIS). The results of the corrosion resistance tests of the AISI 304 steel were interpreted in terms of the energy delivered to the growing layer by plasma excitation power.

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As the area of nanotechnology continues to grow, the development of new nanomaterials with interesting physical and electronic properties and improved characterization techniques are several areas of research that will be remain vital for continued improvement of devices and the understanding in nanoscale phenomenon. In this dissertation, the chemical vapor deposition synthesis of rare earth (RE) compounds is described in detail. In general, the procedure involves the vaporization of a REClx (RE = Y, La, Ce, Pr, Nd, Sm, Gd, Tb, Dy, Ho) in the presence of hydride phase precursors such as decaborane and ammonia at high temperatures and low pressures. The vapor-liquid-solid mechanism was used in combination with the chemical vapor deposition process to synthesize single crystalline rare earth hexaboride nanostructures. The crystallographic orientation of as-synthesized rare earth hexaboride nanostructures and gadolinium nitride thin films was controlled by judicious choice of specific growth substrates and modeled by analyzing x-ray diffraction powder patterns and crystallographic models. The rare earth hexaboride nanostructures were then implemented into two existing technologies to enhance their characterization capabilities. First, the rare earth hexaboride nanowires were used as a test material for the development of a TEM based local electrode atom probe tomography (LEAP) technique. This technique provided some of the first quantitative compositional information of the rare earth hexaboride systems. Second, due to the rigidity and excellent conductivity of the rare earth hexaborides, nanostructures were grown onto tungsten wires for the development of robust, oxidation resistant nanomanipulator electronic probes for semiconductor device failure analysis.

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We have explored the effects of atmospheric environment on Kelvin force microscopy (KFM) measurements of potential difference between different regions of test polycrystalline diamond surfaces. The diamond films were deposited by microwave plasma-assisted chemical vapor deposition, which naturally produces hydrogen terminations on the surface of the films formed. Selected regions were patterned by electron-beam lithography and chemical terminations of oxygen or fluorine were created by exposure to an oxygen or fluorine plasma source. For KFM imaging, the samples were mounted in a hood with a constant flow of helium gas. Successive images were taken over a 5-h period showing the effect of the environment on KFM imaging. We conclude that the helium flow removes water molecules adsorbed on the surface of the samples, resulting in differences in surface potential between adjacent regions. The degree of water removal is different for surfaces with different terminations. The results highlight the importance of taking into account the atmospheric environment when carrying out KFM analysis. (C) 2012 Wiley Periodicals, Inc.

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The thiadiazolylurea derivative tebuthiuron (TBH) is commonly used as an herbicide even though it is highly toxic to humans. While various processes have been proposed for the removal of organic contaminants of this type from wastewater, electrochemical degradation has shown particular promise. The aim of the present study was to investigate the electrochemical degradation of TBH using anodes comprising boron-doped (5000 and 30000 ppm) diamond (BDD) films deposited onto Ti substrates operated at current densities in the range 10-200 mA cm(-2). Both anodes removed TBH following a similar pseudo first-order reaction kinetics with k(ap)p close to 3.2 x 10(-2) min(-1). The maximum mineralization efficiency obtained was 80%. High-pressure liquid chromatography with UV-VIS detection established that both anodes degraded TBH via similar intermediates. Ion chromatography revealed that increasing concentrations of nitrate ions (up to 0.9 ppm) were formed with increasing current density, while the formation of nitrite ions was observed with both anodes at current densities >= 150 mA cm(-2). The BDD film prepared at the lower doping level (5000 ppm) was more efficient in degrading TBH than its more highly doped counterpart. This unexpected finding may be explained in terms of the quantity of impurities incorporated into the diamond lattice during chemical vapor deposition. (C) 2012 Elsevier Ltd. All rights reserved.

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Syntesis of carbon nanomaterials from corn waste (DDGS). The world's largest ethanol producer (USA) uses corn as feedstock. DDGS (distillers dried grains with solubles) is the main waste generated from this process (around 32 million t/year). DDGS samples were pyrolyzed at 1000 degrees C in a furnace with controlled atmosphere. The effluent was channeled to a second furnace, in which catalyst substrates were placed. Chromatographic analysis was used to evaluate the gaseous effluents, showing that the catalyst reduced hydrocarbon emissions. The solid products formed were analyzed by SEM and TEM. Graphitic structures and carbon nanofibers, 50 mu m in length and with diameters of 80-200 nm, were formed.

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Spontane-Desorption-Massenspektrometrie zur Charakterisierung von gemischten, selbstorganisierten Schichten zur Metallabscheidung und zur Beobachtung von chemischen Reaktionen in dünnsten Filmen Stephan Krämer Ein Ziel dieser Arbeit war es, selbstorganisierte Schichten aus steifen benzolhaltigen Thiolen herzustellen und zu charakterisieren. Diese selbstorganisierten Schichten sollten als optimale Substrate zur Abscheidung von Metallen durch CVD dienen.In einem ersten Schritt wurden Schichten aus Biphenylthiol (BT) und Biphenyldithiol (BDT) auf Edelmetalloberflächen hergestellt. Die Abhängigkeit der Eigenschaften der Schicht von dem verwendeten Substrat und von der Dauer der Selbstorganisation wurde mit der Spontane-Desorption-Massenspektrometrie untersucht. Die Untersuchung der Schichtdicke erfolgte mit Oberflächenplasmonen-Spektroskopie und die Frage der Struktur der Schichten wurde versucht, mit Hilfe der Fourier-Transform-Infrarot-Spektroskopie zu klären. Nach der Charakterisierung der reinen Schichten wurden binäre Mischungen aus BT und BDT hergestellt und auf Goldoberflächen abgeschieden. Die so hergestellten binären Schichten wurden als Substrate zur Abscheidung von Gold benutzt. Dazu wurde mit Hilfe der CVD-Technik Gold auf den Filmen abgeschieden. Im nächsten Schritt wurden die einfacheren Halogen-substituierten Phenylthiole sowohl als reine Schichten als auch als binäre Mischungen untersucht. Ein weiterer Schwerpunkt stellte die Untersuchungen zur Abscheidung von Metallen auf selbstorganisierten Schichten durch CVD dar. Neben der schon vorgestellten Abscheidung von Gold wurde die Abscheidung von Palladium und von Kupfer untersucht. Im letzten Teil dieser Arbeit wurden der Verlauf einer chemischen Reaktion in einem ultradünnen Polymerfilm beobachtet. Dazu wurden die Vernetzungsreaktion und die Hydrolyse des Copolymer P[tBMA1-co-DMIMA0,11] untersucht.

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Here, we present the adaptation and optimization of (i) the solvothermal and (ii) the metal-organic chemical vapor deposition (MOCVD) approach as simple methods for the high-yield synthesis of MQ2 (M=Mo, W, Zr; Q = O, S) nanoparticles. Extensive characterization was carried out using X-ray diffraction (XRD), scanning and transmission electron micros¬copy (SEM/TEM) combined with energy dispersive X-ray analysis (EDXA), Raman spectroscopy, thermal analyses (DTA/TG), small angle X-ray scattering (SAXS) and BET measurements. After a general introduction to the state of the art, a simple route to nanostructured MoS2 based on the decomposition of the cluster-based precursor (NH4)2Mo3S13∙xH2O under solvothermal conditions (toluene, 653 K) is presented. Solvothermal decomposition results in nanostructured material that is distinct from the material obtained by decomposition of the same precursor in sealed quartz tubes at the same temperature. When carried out in the presence of the surfactant cetyltrimethyl¬ammonium bromide (CTAB), the decomposition product exhibits highly disordered MoS2 lamellae with high surface areas. The synthesis of WS2 onion-like nanoparticles by means of a single-step MOCVD process is discussed. Furthermore, the results of the successful transfer of the two-step MO¬CVD based synthesis of MoQ2 nanoparticles (Q = S, Se), comprising the formation of amorphous precursor particles and followed by the formation of fullerene-like particles in a subsequent annealing step to the W-S system, are presented. Based on a study of the temperature dependence of the reactions a set of conditions for the formation of onion-like structures in a one-step reaction could be derived. The MOCVD approach allows a selective synthesis of open and filled fullerene-like chalcogenide nanoparticles. An in situ heating stage transmission electron microscopy (TEM) study was employed to comparatively investigate the growth mechanism of MoS2 and WS2 nanoparticles obtained from MOCVD upon annealing. Round, mainly amorphous particles in the pristine sample trans¬form to hollow onion-like particles upon annealing. A significant difference between both compounds could be demonstrated in their crystallization conduct. Finally, the results of the in situ hea¬ting experiments are compared to those obtained from an ex situ annealing process under Ar. Eventually, a low temperature synthesis of monodisperse ZrO2 nanoparticles with diameters of ~ 8 nm is introduced. Whereas the solvent could be omitted, the synthesis in an autoclave is crucial for gaining nano-sized (n) ZrO2 by thermal decomposition of Zr(C2O4)2. The n-ZrO2 particles exhibits high specific surface areas (up to 385 m2/g) which make them promising candidates as catalysts and catalyst supports. Co-existence of m- and t-ZrO2 nano-particles of 6-9 nm in diameter, i.e. above the critical particle size of 6 nm, demonstrates that the particle size is not the only factor for stabilization of the t-ZrO2 modification at room temperature. In conclusion, synthesis within an autoclave (with and without solvent) and the MOCVD process could be successfully adapted to the synthesis of MoS2, WS2 and ZrO2 nanoparticles. A comparative in situ heating stage TEM study elucidated the growth mechanism of MoS2 and WS2 fullerene-like particles. As the general processes are similar, a transfer of this synthesis approach to other layered transition metal chalcogenide systems is to be expected. Application of the obtained nanomaterials as lubricants (MoS2, WS2) or as dental filling materials (ZrO2) is currently under investigation.

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Nelle celle solari HIT (Heterojunction Intrinsic Thin layer) attualmente in circolazione il materiale maggiormente utilizzato è sicuramente il silicio, per la sua buona caratteristica di assorbimento e disponibilità in natura. Tuttavia, la struttura amorfa del silicio impiegato come emettitore, limita fortemente la conducibilità e aumenta gli effetti di degradazione legati all'esposizione alla luce. In quest'ottica, nel presente lavoro di tesi, vengono analizzati sottili layers di Silicon Oxynitride ossigenato, depositati in forma nanocristallina presso l'Università di Costanza su substrati in vetro, tramite PECVD (Plasma-Enhanced Chemical Vapor Deposition). Il materiale, che non presenta i difetti intrinseci della forma amorfa, è dal punto di vista delle proprietà fisiche fondamentali ancora poco conosciuto e rappresenta una possibile alternativa agli analoghi campioni in forma amorfa. Le misure e le analisi presentate in questa tesi, svolte presso il Dipartimento di Fisica e Astronomia di Bologna, sono finalizzate ad indagare le principali proprietà ottiche, quali l'energy gap e l'indice di rifrazione dei layers. I risultati ottenuti, espressi in funzione dei parametri di deposizione, mostrano che un aumento della concentrazione di ossigeno in fase di deposito implica un aumento lineare dell'ampiezza dell'energy gap e un calo dell'indice di rifrazione. Anche altri parametri come la potenza di deposito e il tempo di annealing sembrano giocare un ruolo importante sul valore dell'energy gap. I risultati appaiono inoltre essere in buon accordo con quanto ottenuto da studi precedenti su layers simili ma con una maggiore fase amorfa. In conclusione, la possibilità di regolare il valore dell'energy gap e l'indice di rifrazione in base ai parametri di deposizione, unita alle buone prerogative tipiche dei materiali cristallini, conferisce al materiale buone prospettive per applicazioni fotovoltaiche come emettitori in celle ad eterogiunzione o rivestimenti con proprietà antiriflettenti

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The present thesis deals with the development of new branched polymer architectures containing hyperbranched polyglycerol. Materials investigated include hyperbranched oligomers, hyperbranched polyglycerols containing functional initiator-cores at the focal point, well-defined linear-hyperbranched block copolymers and also negatively charged hyperbranched polyelectrolytes.rnHyperbranched oligoglycerols (DPn = 7 and 14) have been synthesized for the first time. The materials show narrow polydispersity (Mw/Mn ca. 1.45) and a very low content in cyclic homopolymers. 13C NMR evidences the dendritic structure of the oligomers and the DB could be calculated (44% and 52%). These new oligoglycerols were compared with the industrial products obtained by polycondensation which exhibit narrow polydispersity (Mw/Mn<1.3) butrnmultimodal distribution in SEC. Detailed 13C NMR and Maldi-ToF studies reveal the presence of branched units and cyclic compounds. In comparison, the hyperbranched oligoglycerols comprise a very low proportion of cyclic homopolymer which render them very interesting materials for biomedical applications for example.rnThe site isolation of the core moiety in dendritic structure offers intriguing potential with respect to peculiar electro-optical properties. Various initiator-cores (n-alkyl amines, UVabsorbing amines and benzophenone) for the ROMBP of glycidol have been tested. The bisglycidolized amine initiator-cores show the best control over the molecular weight and the molecular weight distribution. The photochemical analyses of the naphthalene containingrnhyperbranched polyglycerols show a slight red shift, a pronounced hypochromic effect (decrease of the intensity of the band) compared with the parent model compound and the formation of a relative compact structure. The benzophenone containing polymers adopt an open structure in polar solvents. The fluorescence measurements show a clear “dendritic effect” on the fluorescence intensities and the quantum yield of the encapsulated benzophenone.rnA convenient 3-step strategy has been developed for the preparation of well-defined amphiphilic, linear-hyperbranched block copolymers via hypergrafting. The procedure represents a combination of carbanionic polymerization with the alkoxide-based, controlled ring-opening multibranching polymerization of glycidol. Materials consisting of a polystyrene linear block and a hyperbranched polyglycerol block exhibit narrow polydispersity (1.01-1.02rnfor 5.4% to 27% wt. PG and 1.74 for 52% wt. PG) with a high grafting efficiency. The strategy was also extended to materials with a linear polyisoprene block.rnDetailed investigations of the solution properties of the block copolymers with linear polystyrene blocks show that block copolymer micelles are stabilized by the highly branched block. The morphology of the aggregates is depending on the solvent: in chloroform monodisperse spherical shape aggregates and in toluene ellipsoidal aggregates are formed. On graphite these aggregates show interesting features, giving promising potential applications with respect to the presence of a very dense, functional and stable hyperbranched block.rnThe bulk morphology of the linear-hyperbranched block copolymers has been investigated. The materials with a linear polyisoprene block only behave like complex liquids due to the low Tg and the disordered nature of both components. For the materials with polystyrene, only the sample with 27% wt. hyperbranched polyglycerol forms some domains showing lamellae.rnThe preparation of hyperbranched polyelectrolytes was achieved by post-modification of the hydroxyl groups via Michael addition of acrylonitrile, followed by hydrolysis. In aqueous solution materials form large aggregates with size depending on the pH value. After deposition on mica the structures observed by AFM show the coexistence of aggregates andrnunimers. For the low molecular weight sample (PG 520 g·mol-1) extended and highly ordered terrace structures were observed. Materials were also successfully employed for the fabrication of composite organic-inorganic multilayer thin films, using electrostatic layer-bylayer self-assembly coupled with chemical vapor deposition.

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I materiali per applicazioni fotovoltaiche hanno destato un interesse crescente nella comunità scienti�ca negli ultimi decenni. Le celle HIT (Het- erojunction Intrinsic Thin Layer ) sono dispositivi di ultima generazione che hanno raggiunto e�cienza elevata mantenendo bassi i costi di pro- duzione, e impiegano silicio amorfo (a-Si) come strato emettitore per il suo buon assorbimento della luce e silicio cristallino come regione attiva. La struttura amorfa del silicio presenta però una bassa conducibilità, oltre ad e�etti di degradazione che limitano considerevolmente la durevolezza di una cella. Per questo motivo si stanno cercando possibili alternative al silicio amorfo, in particolare strutture multifase e composti di silicio, ossigeno ed azoto. In questo lavoro sono esposti i risultati dell'analisi di sottili lay- er di Silicon Oxynitride ossigenato (SiOx Ny :H), in forma microcristallina, deposti tramite PECVD (P lasma-Enhanced Chemical Vapor Deposition) su vetro presso l'università di Costanza. La forma microcristallina è una distribuzione di agglomerati cristallini dell'ordine di grandezza di un mi- crometro in una matrice di silicio amorfo, e attualmente le sue proprietà ottiche ed elettroniche non sono ancora state studiate in maniera appro- fondita. Nonostante ciò, è invece evidente che la fase microstallina non presenta tanti difetti intrinseci come la forma amorfa e ne è quindi una val- ida alternativa. In questa ottica, si è svolto uno studio sperimentale delle proprietà ottiche di layers in forma microcristallina di SiOx Ny :H, quali la misura del gap energetico. I risultati sperimentali, volti a trovare la dipen- denza delle caratteristiche dai parametri di deposizione dei layers, hanno mostrato una riduzione del gap energetico con la concentrazione di N2 O, uno dei gas precursori utilizzati nella deposizione dei layers in camera di processo. In conclusione si può dire che il μc−SiOx Ny :H ha le buone carat- teristiche tipiche dei semiconduttori cristallini, che unite alla possibilità di regolare il valore del gap energetico in base alle scelte in fase di deposizione, gli conferisce buone prospettive per applicazioni in celle fotovoltaiche, come emettitore in celle ad eterogiunzione.