Holographic optical tweezers combined with back-focal-plane displacement detection

A major problem with holographic optical tweezers (HOTs) is their incompatibility with laser-based position detection methods, such as back-focal-plane interferometry (BFPI). The alternatives generally used with HOTs, like high-speed video tracking, do not offer the same spatial and temporal bandwidths. This has limited the use of this technique in precise quantitative experiments. In this paper, we present an optical trap design that combines digital holography and back-focal-plane displacement detection. We show that, with a particularly simple setup, it is possible to generate a set of multiple holographic traps and an additional static non-holographic trap with orthogonal polarizations and that they can be, therefore, easily separated for measuring positions and forces with the high positional and temporal resolutions of laser-based detection. We prove that measurements from both polarizations contain less than 1% crosstalk and that traps in our setup are harmonic within the typical range. We further tested the instrument in a DNA stretching experiment and we discuss an interesting property of this configuration: the small drift of the differential signal between traps.

Magneto-optische Oberflächenplasmonresonanzeffekte in austauschverschobenen Dünnschichtsystemen

Die Wechselwirkungen zwischen Biomolekülen spielen eine zentrale Rolle in der biochemischen und pharmazeutischen Forschung. In der biomolekularen Interaktionsanalyse sind dabei Biosensoren auf Basis des Oberflächenplasmonresonanzeffekts (SPR-Effekt) weitverbreitet. Seit Einführung der ersten kommerziellen SPR-Biosensoren Anfang der 1990er Jahre wurden verschiedenste Messanordnungen sowie Materialsysteme mit dem Ziel einer möglichst hohen Empfindlichkeit getestet. Eine Möglichkeit zur Steigerung der Empfindlichkeit klassischer SPR-Systeme bieten sogenannte magneto-optische SPR-Biosensoren (MOSPR-Biosensoren). Grundlage der Empfindlichkeitssteigerung ist die gleichzeitige Messung des SPR-Effekts und des transversalen magneto-optischen KERR-Effekts (tMOKE). Bisherige Untersuchungen haben sich meist auf den Einfluss der Magnetisierung freier ferromagnetischer Schichten beschränkt. Im Rahmen dieser Arbeit wurden erstmals austauschverschobene Dünnschichtsysteme (EB-Systeme), eine Kombination aus Ferromagnet und Antiferromagnet, hinsichtlich ihrer Eignung für SPR- und MOSPR-basierte biosensorische Anwendungen untersucht. Aufgrund der remanenten Magnetisierung der ferromagnetischen Schicht und ihrer magnetischen Strukturierbarkeit sind EB-Systeme eine hochinteressante Plattform zur Realisierung neuer Biosensorkonzepte. Zur Reduzierung der stark dämpfendenden Wirkung magnetischer Materialien wurde das hier betrachtete IrMn/Co EB-System zwischen zwei Goldschichten eingebettet. Eine Gegenüberstellung optimierter Au/ IrMn/Co/Au-Systeme mit einem reinen Au-System, wie es typischerweise in kommerziellen SPR-basierten Biosensoren eingesetzt wird, demonstriert, dass mit den entwickelten EB-Systemen vergleichbare Empfindlichkeiten in SPR-Sensor-Anwendungen erreicht werden können. Die magneto-optische Aktivität der untersuchten Dünnschichtsysteme liegt im Bereich der Literaturwerte für Au/Co/Au-Systeme, mit denen erhöhte Empfindlichkeiten gegenüber Standard-SPR-Biosensoren realisiert wurden. Auf Grundlage magnetisch strukturierter Au/IrMn/Co/Au-Systeme wurden neue Biosensorkonzepte entwickelt und getestet. Erste Experimente belegen, dass mit diesen Schichtsystemen eine gleichzeitige Detektion der magnetisierungsabhängigen Reflektivitäten in ortsauflösenden MOSPR-Messungen möglich ist. Eine solche Messanordnung profitiert von der erhöhten Empfindlichkeit MOSPR-basierter Biosensoren, hohen Messgeschwindigkeiten und einem verbesserten Signal-Rausch-Verhältnis. Weiterhin wurde der domänenwandassistierte Transport (DOWMAT) superparamagnetischer Partikel über der Oberfläche eines exemplarischen EB-Systems, zur Sensorintegration von Misch-, Reinigungs- und Aufkonzentrationsfunktionen erfolgreich getestet. Die Ergebnisse demonstrieren, dass ein Transport von Partikelreihen mit hohen Geschwindigkeiten bei moderaten externen Magnetfeldern über den entwickelten Schichtsystemen möglich ist. Die Agglomeration der Partikel wird dabei intrinsisch vermieden. Diese Beobachtungen verdeutlichen die Vorzüge des DOWMAT-Mechanismus für biosensorische Anwendungen. Die präsentierten Untersuchungen bilden die Grundlage auf dem Weg zur Umsetzung neuer vielversprechender Biosensorkonzepte, die eine Schlüsselfunktion in der medizinischen point-of-care-Diagnostik bei der Detektion kleinster Konzentrationen krankheitsrelevanter Biomarker einnehmen können.

Efeitos biológicos dos campos eletromagnéticos de ultra alta freqüência

Vários estudos têm sugerido que seres vivos podem ser suscetíveis aos campos eletromagnéticos (CEMs). Os supostos efeitos dos Campos Eletromagnéticos de Ultra Alta Freqüência (CEMUAFs) em sistemas biológicos são pouco conhecidos. Os relatos de um possível efeito biológico dependente da alteração de estados de oxidação entre pares de radicais sugerem um mecanismo de transdução orgânica para os campos. Outros trabalhos obtiveram alterações na sinalização celular e defesas antioxidantes após a exposição CEMUAFs e, tais alterações, poderiam ser um agente causador de doenças como, por exemplo, a leucemia infantil, esta já correlacionada com a exposição aos CEMs. Desta forma o objetivo deste estudo foi investigar se o CEMUAF (834 MHz) poderia interferir com o balanço oxidativo de planárias e ratos, assim como, estudar a participação de enzimas responsáveis pela hidrólise de nucleotídeos, enzimas estas reconhecidas por serem influenciadas pela ação de radicais livres. As planárias foram expostas por 1, 3 e 6 dias (8 h/dia). Após a exposição foi feito um homogenato de todo o corpo de cada animal. Foi encontrado um aumento na atividade da superóxido desmutase (SOD) e um decréscimo na atividade da catalase (CAT) e na defesa antioxidante não-enzimática (TRAP) após 6 dias de exposição. Adicionalmente, houve um aumento na freqüência de micronúcleos (MN) após 3 e 6 dias de exposição. Não houve alteração nos parâmetros de dano oxidativo a lipídios (TBARS) e proteínas (Carbonil) em nenhum dos tempos de exposição. Estes resultados sugerem um aumento nos níveis de radicais livres e de danos aos ácidos nucléicos. Estudos posteriores deverão determinar se estes efeitos apresentam ou não associações do tipo causa e efeito. Foram utilizados três modelos com ratos. No primeiro modelo, animais com idades de 30, 80 e 210 dias foram expostos por 6 dias (7:30 h/dia). Não foram encontradas mudanças nos parâmetros de TRAP, TBARS e Carbonil em nenhuma das idades expostas ao CEMUAF. Estes resultados sugerem que os tempos de exposição utilizados não foram suficientes para causar alguma mudança perceptível nos parâmetros de estresse oxidativo. No segundo modelo, utilizou-se o sangue e fígado dos neonatos expostos ao CEMUAF ainda no útero de suas mães durante todo o seu desenvolvimento embrionário (8:30 h/dia). Não foram encontradas mudanças em nenhum parâmetro oxidativo. Foi encontrado um aumento na freqüência de MN nas hemácias, sugerindo um efeito genotóxico da irradiação do celular afetando o tecido hematopoiético dos fetos. No terceiro modelo, utilizou-se o sangue de ratos adultos (180 dias) expostos por 12 dias (8:30 h/dia). Os níveis da hidrólise de ATP e ADP estavam aumentados no grupo irradiado. Nenhum efeito foi observado nas atividades da SOD e da CAT, sugerindo nenhuma participação de radicais livres nestes resultados. Ainda são necessários muitíssimos estudos para determinar quais os mecanismos transdutores dos CEMUAFs em sistemas biológicos e de que forma esta interação ocorre, porém estes resultados sugerem: (a) um papel para os radicais livres sobre, pelo menos, alguns dos efeitos atribuídos aos CEMUAFs e (b) que os organismos em fase de formação podem ser mais sensíveis aos campos. Por fim, sugerimos que sistemas biológicos podem sofrer a ação da irradiação com uma quantidade de energia muito menor do que a esperada para promover algum efeito no metabolismo.

Montagem e construção de um magnetômetro a efeito Kerr magneto-óptico

n this master s dissertation a Kerr Magneto Optic s magnetometer effect was set up to do characterization of samples type films fine and ultra thin, these samples will be grown after the implementation of the sputtering technique at the magnetism laboratory of of this department. In this work a cooled electromagnet was also built the water and that it reaches close values to 10kOe with a gap of 22 mm including an area of uniform field of 25mm of diameter. The first chapter treats of the construction of this electromagnet from its dimensioning to the operation tests that involve measures of reached maximum field and temperature of the reels when operated during one hour. The second chapter is dedicated to the revision of the magnetism and the magnetization processes as well as it presents a theoretical base regarding the magnetic energies found in films and magnetic multilayer. In the sequence, the third chapter, is especially dedicated the description of the effects magneto opticians the effect kerr in the longitudinal, traverse and polar configurations, using for so much only the classic approach of the electromagnetism and the coefficients of Fresnel. Distinguished the two areas of observation of the effect regarding thickness of the film. The constructive aspects of the experimental apparatus as well as the details of its operation are explained at the room surrender, also presenting the preliminary results of the measures made in one serializes of permalloy films and concluding with the results of the characterization of the first films of iron and permalloy grown here at the theoretical and experimental physics department at UFRN

Experimental and theoretical study on the structure, optical properties, and growth of metallic silver nanostructures in Ag3PO4

Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)

In situ real-time investigation of Organic Ultra-Thin-Film transistors: growth, electrical properties and biosensing applications

Organic electronics has grown enormously during the last decades driven by the encouraging results and the potentiality of these materials for allowing innovative applications, such as flexible-large-area displays, low-cost printable circuits, plastic solar cells and lab-on-a-chip devices. Moreover, their possible field of applications reaches from medicine, biotechnology, process control and environmental monitoring to defense and security requirements. However, a large number of questions regarding the mechanism of device operation remain unanswered. Along the most significant is the charge carrier transport in organic semiconductors, which is not yet well understood. Other example is the correlation between the morphology and the electrical response. Even if it is recognized that growth mode plays a crucial role into the performance of devices, it has not been exhaustively investigated. The main goal of this thesis was the finding of a correlation between growth modes, electrical properties and morphology in organic thin-film transistors (OTFTs). In order to study the thickness dependence of electrical performance in organic ultra-thin-film transistors, we have designed and developed a home-built experimental setup for performing real-time electrical monitoring and post-growth in situ electrical characterization techniques. We have grown pentacene TFTs under high vacuum conditions, varying systematically the deposition rate at a fixed room temperature. The drain source current IDS and the gate source current IGS were monitored in real-time; while a complete post-growth in situ electrical characterization was carried out. At the end, an ex situ morphological investigation was performed by using the atomic force microscope (AFM). In this work, we present the correlation for pentacene TFTs between growth conditions, Debye length and morphology (through the correlation length parameter). We have demonstrated that there is a layered charge carriers distribution, which is strongly dependent of the growth mode (i.e. rate deposition for a fixed temperature), leading to a variation of the conduction channel from 2 to 7 monolayers (MLs). We conciliate earlier reported results that were apparently contradictory. Our results made evident the necessity of reconsidering the concept of Debye length in a layered low-dimensional device. Additionally, we introduce by the first time a breakthrough technique. This technique makes evident the percolation of the first MLs on pentacene TFTs by monitoring the IGS in real-time, correlating morphological phenomena with the device electrical response. The present thesis is organized in the following five chapters. Chapter 1 makes an introduction to the organic electronics, illustrating the operation principle of TFTs. Chapter 2 presents the organic growth from theoretical and experimental points of view. The second part of this chapter presents the electrical characterization of OTFTs and the typical performance of pentacene devices is shown. In addition, we introduce a correcting technique for the reconstruction of measurements hampered by leakage current. In chapter 3, we describe in details the design and operation of our innovative home-built experimental setup for performing real-time and in situ electrical measurements. Some preliminary results and the breakthrough technique for correlating morphological and electrical changes are presented. Chapter 4 meets the most important results obtained in real-time and in situ conditions, which correlate growth conditions, electrical properties and morphology of pentacene TFTs. In chapter 5 we describe applicative experiments where the electrical performance of pentacene TFTs has been investigated in ambient conditions, in contact to water or aqueous solutions and, finally, in the detection of DNA concentration as label-free sensor, within the biosensing framework.

Bottle microresonators for applications in quantum optics and all-optical signal processing

This thesis reports on the experimental realization, characterization and application of a novel microresonator design. The so-called “bottle microresonator” sustains whispering-gallery modes in which light fields are confined near the surface of the micron-sized silica structure by continuous total internal reflection. While whispering-gallery mode resonators in general exhibit outstanding properties in terms of both temporal and spatial confinement of light fields, their monolithic design makes tuning of their resonance frequency difficult. This impedes their use, e.g., in cavity quantum electrodynamics (CQED) experiments, which investigate the interaction of single quantum mechanical emitters of predetermined resonance frequency with a cavity mode. In contrast, the highly prolate shape of the bottle microresonators gives rise to a customizable mode structure, enabling full tunability. The thesis is organized as follows: In chapter I, I give a brief overview of different types of optical microresonators. Important quantities, such as the quality factor Q and the mode volume V, which characterize the temporal and spatial confinement of the light field are introduced. In chapter II, a wave equation calculation of the modes of a bottle microresonator is presented. The intensity distribution of different bottle modes is derived and their mode volume is calculated. A brief description of light propagation in ultra-thin optical fibers, which are used to couple light into and out of bottle modes, is given as well. The chapter concludes with a presentation of the fabrication techniques of both structures. Chapter III presents experimental results on highly efficient, nearly lossless coupling of light into bottle modes as well as their spatial and spectral characterization. Ultra-high intrinsic quality factors exceeding 360 million as well as full tunability are demonstrated. In chapter IV, the bottle microresonator in add-drop configuration, i.e., with two ultra-thin fibers coupled to one bottle mode, is discussed. The highly efficient, nearly lossless coupling characteristics of each fiber combined with the resonator's high intrinsic quality factor, enable resonant power transfers between both fibers with efficiencies exceeding 90%. Moreover, the favorable ratio of absorption and the nonlinear refractive index of silica yields optical Kerr bistability at record low powers on the order of 50 µW. Combined with the add-drop configuration, this allows one to route optical signals between the outputs of both ultra-thin fibers, simply by varying the input power, thereby enabling applications in all-optical signal processing. Finally, in chapter V, I discuss the potential of the bottle microresonator for CQED experiments with single atoms. Its Q/V-ratio, which determines the ratio of the atom-cavity coupling rate to the dissipative rates of the subsystems, aligns with the values obtained for state-of-the-art CQED microresonators. In combination with its full tunability and the possibility of highly efficient light transfer to and from the bottle mode, this makes the bottle microresonator a unique tool for quantum optics applications.

Ein neuartiges Interferometer zur Messung magneto-optischer Effekte an L-Absorptionskanten von ferromagnetischen Metallen mit linearpolarisierter Undulatorstrahlung

Am Mainzer Mikrotron MAMI wurde ein neuartiges Interferometer entwickelt und getestet, mit dem magneto-optische Effekte an dünnen, freitragenden Folien von 3d-Übergangsmetallen wie Eisen, Kobalt oder Nickel an den L_{2,3}-Absorptionskanten (im Spektralbereich der weichen Röntgenstrahlung) gemessen werden können. Es handelt sich um eine Weiterentwicklung eines an MAMI erprobten Interferometers, das im wesentlichen aus einer kollinearen Anordnung zweier identischer Undulatoren, zwischen die die dünne Probefolie eingebracht wird, und einem Gitterspektrometer besteht. Aus den als Funktion des Abstands der Undulatoren beobachtbaren Intensitätsoszillation lassen sich das Dekrement des Realteils δ und der Absorptionskoeffizient β des komplexen Brechungsindex bestimmen.rnIm Rahmen der vorliegenden Arbeit wurde die Apparatur derart weiterentwickelt, dass auch die magnetisch zirkulare Doppelbrechung Δδ und der magnetisch zirkulare Dichroismus Δβ an den L_{2,3}-Absorptionskanten von Übergangsmetallen gemessen werden können. Der zweite Undulator wurde um die Elektronenstrahlachse um den Winkel Ψ = ±107° drehbar gemacht. Damit dient er auch als Analysator der aus der Folie austretenden elliptisch polarisierten weichen Röntgenstrahlung, für die - wie bei der Faraday-Rotation - die Polarisationsebene gedreht ist. Weiterhin kann die Spaltbreite der 10-poligen Hybrid-Undulatoren mit einer Periodenlänge von 12 mm und damit der Undulatorparameter über eine Antriebsmechanik kontinuierlich variiert werden, wodurch eine optimale Anpassung der Amplituden der Undulatorstrahlung aus den beiden Undulatoren möglich wird. Der maximale Undulatorparameter beträgt K = 1.1. Auch das Spektrometer, das auf einem selbstfokussierenden Gitter mit variierter Liniendichte (im Mittel 1400 Linien / mm) basiert, wurde weiterentwickelt. Als Detektor kommt jetzt eine fensterlose CCD mit 1024 x 1024 Pixeln und einer Pixelgröße von 13 μm x 13 μm zum Einsatz, die im Bildmodus betrieben wird, was die gleichzeitige Messung eines Energieintervalls von ca. 50 eV ermöglicht. Die totale Linienbreite wurde bei einer vertikalen Strahlfleckausdehnung von σ_y = 70 μm (rms) am Neon 1s-3p Übergang bei (867.18 ±0.02) eV zu Δħω = (0.218 ±0.002) eV (FWHM) gemessen. Das hohe Auflösungsvermögen von 4000 und die Möglichkeit der Eichung gegen den 1s-3p Übergang von Neon wurden ausgenutzt, um die Energie der Maxima an den Absorptionskanten von Nickel (weiße Linien) neu zu bestimmen. Die Ergebnisse E_{L_2}=(869.65_{-0.16}^{+0.27}) eV und E_{L_3}=(852.37_{-0.11}^{+0.16}) eV stellen eine Verbesserung früherer Messungen dar, die große Streuungen aufwiesen.rnAus systematischen Messungen als Funktion des Abstandes der Undulatoren und des Drehwinkels Ψ wurden die magnetisch zirkulare Doppelbrechung Δδ im Energiebereich 834 eV ≤ ħω ≤ 885 eV an einer freitragenden, bis zur Sättigung magnetisierten Nickelfolie der Dicke von (96.4 ±2.7) nm gemessen. Sowohl das Auflösungsvermögen als auch die Genauigkeit der Messungen für Δδ übersteigen bekannte Literaturangaben signifikant, so dass eine bisher nicht bekannte Feinstruktur gefunden werden konnte. Außerdem wurde der Betrag des magnetisch zirkularen Dichroismus |Δβ| im Bereich des Maximums an der L_3-Absorptionskante mit hoher Genauigkeit gemessen.rn

Planar magneto-photonic and gradient-photonic structures : crystals and metamaterials.

In the field of photonics, two new types of material structures, photonic crystals and metamaterials, are presently of great interest. Both are studied in the present work, which focus on planar magnetic materials in the former and planar gradient metamaterials in the latter. These planar periodic structures are easy to handle and integrate into optical systems. The applications are promising field for future optical telecommunication systems and give rise to new optical, microwave and radio technologies. The photonic crystal part emphasizes the utilization of magnetic material based photonic crystals due to its remarkable magneto-optical characteristics. Bandgaps tuning by magnetic field in bismuth-gadolinium-substituted lutetium iron garnet (Bi0.8 Gd0.2 Lu2.0 Fe5 O12) based one- dimensional photonic crystals are investigated and demonstrated in this work. Magnetic optical switches are fabricated and tested. Waveguide formulation for band structure in magneto photonic crystals is developed. We also for the first time demonstrate and test two- dimensional magneto photonic crystals optical. We observe multi-stopbands in two- dimensional photonic waveguide system and study the origin of multi-stopbands. The second part focus on studying photonic metamaterials and planar gradient photonic metamaterial design. We systematically study the effects of varying the geometry of the fishnet unit cell on the refractive index in optical frequency. It is the first time to design and demonstrate the planar gradient structure in the high optical frequency. Optical beam bending using planar gradient photonic metamaterials is observed. The technologies needed for the fabrication of the planar gradient photonic metamaterials are investigated. Beam steering devices, shifter, gradient optical lenses and etc. can be derived from this design.

Advanced optical sensing techniques using novel fibre gratings

We describe some recently developed fibre grating sensing devices (Bragg and long-period types) and applications with emphasis on simultaneous measurement of multiple measurands using combinational grating structures, and the realisation of ultra-high sensitivity sensors utilising the quadratic dispersion of long-period grating structure.

Enabling transparent technologies for the development of highly granular flexible optical cross-connects

Flexible optical networking is identified today as the solution that offers smooth system upgradability towards Tb/s capacities and optimized use of network resources. However, in order to fully exploit the potentials of flexible spectrum allocation and networking, the development of a flexible switching node is required capable to adaptively add, drop and switch tributaries with variable bandwidth characteristics from/to ultra-high capacity wavelength channels at the lowest switching granularity. This paper presents the main concept and technology solutions envisioned by the EU funded project FOX-C, which targets the design, development and evaluation of the first functional system prototype of flexible add-drop and switching cross-connects. The key developments enable ultra-fine switching granularity at the optical subcarrier level, providing end-to-end routing of any tributary channel with flexible bandwidth down to 10Gb/s (or even lower) carried over wavelength superchannels, each with an aggregated capacity beyond 1Tb/s. © 2014 IEEE.

Spatial-spectral flexible optical networking:enabling switching solutions for a simplified and efficient SDM network platform

The traffic carried by core optical networks grows at a steady but remarkable pace of 30-40% year-over-year. Optical transmissions and networking advancements continue to satisfy the traffic requirements by delivering the content over the network infrastructure in a cost and energy efficient manner. Such core optical networks serve the information traffic demands in a dynamic way, in response to requirements for shifting of traffics demands, both temporally (day/night) and spatially (business district/residential). However as we are approaching fundamental spectral efficiency limits of singlemode fibers, the scientific community is pursuing recently the development of an innovative, all-optical network architecture introducing the spatial degree of freedom when designing/operating future transport networks. Spacedivision- multiplexing through the use of bundled single mode fibers, and/or multi-core fibers and/or few-mode fibers can offer up to 100-fold capacity increase in future optical networks. The EU INSPACE project is working on the development of a complete spatial-spectral flexible optical networking solution, offering the network ultra-high capacity, flexibility and energy efficiency required to meet the challenges of delivering exponentially growing traffic demands in the internet over the next twenty years. In this paper we will present the motivation and main research activities of the INSPACE consortium towards the realization of the overall project solution. © 2014 Copyright SPIE.

Advanced digital signal processing for coherent optical OFDM transmissions

Coherent optical orthogonal frequency division multiplexing (CO-OFDM) has been actively considered as a potential candidate for long-haul transmission and 400 Gb/s to 1 Tb/s Ethernet transport because of its high spectral efficiency, efficient implementation, flexibility and robustness against linear impairments such as chromatic dispersion and polarization mode dispersion. However, due to the long symbol duration and narrow subcarrier spacing, CO-OFDM systems are sensitive to laser phase noise and fibre nonlinearity induced penalties. As a result, the development of CO-OFDM transmission technology crucially relies on efficient techniques to compensate for the laser phase noise and fibre nonlinearity impairments. In this thesis, high performance and low complexity digital signal processing techniques for laser phase noise and fibre nonlinearity compensation in CO-OFDM transmissions are demonstrated. For laser phase noise compensation, three novel techniques, namely quasipilot-aided, decision-directed-free blind and multiplier-free blind are introduced. For fibre nonlinear compensation, two novel techniques which are referred to as phase conjugated pilots and phase conjugated subcarrier coding, are proposed. All these abovementioned digital signal processing techniques offer high performances and flexibilities while requiring relatively low complexities in comparison with other existing phase noise and nonlinear compensation techniques. As a result of the developments of these digital signal processing techniques, CO-OFDM technology is expected to play a significant role in future ultra-high capacity optical network. In addition, this thesis also presents preliminary study on nonlinear Fourier transform based transmission schemes in which OFDM is a highly suitable modulation format. The obtained result paves the way towards a truly flexible nonlinear wave-division multiplexing system that allows the current nonlinear transmission limitations to be exceeded.

Fabrication and Characterization of Efficient Optical Filter Arrays Implemented by 3D Nanoimprint

In dieser Arbeit werden optische Filterarrays für hochqualitative spektroskopische Anwendungen im sichtbaren (VIS) Wellenlängenbereich untersucht. Die optischen Filter, bestehend aus Fabry-Pérot (FP)-Filtern für hochauflösende miniaturisierte optische Nanospektrometer, basieren auf zwei hochreflektierenden dielektrischen Spiegeln und einer zwischenliegenden Resonanzkavität aus Polymer. Jeder Filter erlaubt einem schmalbandigem spektralen Band (in dieser Arbeit Filterlinie genannt) ,abhängig von der Höhe der Resonanzkavität, zu passieren. Die Effizienz eines solchen optischen Filters hängt von der präzisen Herstellung der hochselektiven multispektralen Filterfelder von FP-Filtern mittels kostengünstigen und hochdurchsatz Methoden ab. Die Herstellung der multiplen Spektralfilter über den gesamten sichtbaren Bereich wird durch einen einzelnen Prägeschritt durch die 3D Nanoimprint-Technologie mit sehr hoher vertikaler Auflösung auf einem Substrat erreicht. Der Schlüssel für diese Prozessintegration ist die Herstellung von 3D Nanoimprint-Stempeln mit den gewünschten Feldern von Filterkavitäten. Die spektrale Sensitivität von diesen effizienten optischen Filtern hängt von der Genauigkeit der vertikalen variierenden Kavitäten ab, die durch eine großflächige ‚weiche„ Nanoimprint-Technologie, UV oberflächenkonforme Imprint Lithographie (UV-SCIL), ab. Die Hauptprobleme von UV-basierten SCIL-Prozessen, wie eine nichtuniforme Restschichtdicke und Schrumpfung des Polymers ergeben Grenzen in der potenziellen Anwendung dieser Technologie. Es ist sehr wichtig, dass die Restschichtdicke gering und uniform ist, damit die kritischen Dimensionen des funktionellen 3D Musters während des Plasmaätzens zur Entfernung der Restschichtdicke kontrolliert werden kann. Im Fall des Nanospektrometers variieren die Kavitäten zwischen den benachbarten FP-Filtern vertikal sodass sich das Volumen von jedem einzelnen Filter verändert , was zu einer Höhenänderung der Restschichtdicke unter jedem Filter führt. Das volumetrische Schrumpfen, das durch den Polymerisationsprozess hervorgerufen wird, beeinträchtigt die Größe und Dimension der gestempelten Polymerkavitäten. Das Verhalten des großflächigen UV-SCIL Prozesses wird durch die Verwendung von einem Design mit ausgeglichenen Volumen verbessert und die Prozessbedingungen werden optimiert. Das Stempeldesign mit ausgeglichen Volumen verteilt 64 vertikal variierenden Filterkavitäten in Einheiten von 4 Kavitäten, die ein gemeinsames Durchschnittsvolumen haben. Durch die Benutzung der ausgeglichenen Volumen werden einheitliche Restschichtdicken (110 nm) über alle Filterhöhen erhalten. Die quantitative Analyse der Polymerschrumpfung wird in iii lateraler und vertikaler Richtung der FP-Filter untersucht. Das Schrumpfen in vertikaler Richtung hat den größten Einfluss auf die spektrale Antwort der Filter und wird durch die Änderung der Belichtungszeit von 12% auf 4% reduziert. FP Filter die mittels des Volumengemittelten Stempels und des optimierten Imprintprozesses hergestellt wurden, zeigen eine hohe Qualität der spektralen Antwort mit linearer Abhängigkeit zwischen den Kavitätshöhen und der spektralen Position der zugehörigen Filterlinien.

Photochemical dynamics of laser-irradiated semiconductor nanostructures

Thesis (Ph.D.)--University of Washington, 2016-08