Through wafer 3D Vertical Micro-Coaxial Probe for high frequency material characterization and millimeter wave packaging systems

This work presents the development of an in-plane vertical micro-coaxial probe using bulk micromachining technique for high frequency material characterization. The coaxial probe was fabricated in a silicon substrate by standard photolithography and a deep reactive ion etching (DRIE) technique. The through-hole structure in the form of a coaxial probe was etched and metalized with a diluted silver paste. A co-planar waveguide configuration was integrated with the design to characterize the probe. The electrical and RF characteristics of the coaxial probe were determined by simulating the probe design in Ansoft's High Frequency Structure Simulator (HFSS). The reflection coefficient and transducer gain performance of the probe was measured up to 65 GHz using a vector network analyzer (VNA). The probe demonstrated excellent results over a wide frequency band, indicating its ability to integrate with millimeter wave packaging systems as well as characterize unknown materials at high frequencies. The probe was then placed in contact with 3 materials where their unknown permittivities were determined. To accomplish this, the coaxial probe was placed in contact with the material under test and electromagnetic waves were directed to the surface using the VNA, where its reflection coefficient was then determined over a wide frequency band from dc-to -65GHz. Next, the permittivity of each material was deduced from its measured reflection coefficients using a cross ratio invariance coding technique. The permittivity results obtained when measuring the reflection coefficient data were compared to simulated permittivity results and agreed well. These results validate the use of the micro-coaxial probe to characterize the permittivity of unknown materials at high frequencies up to 65GHz.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20091004Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20091011Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20091025Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20091031Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20091111Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20091122Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20091214Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20111124Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20111230Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20120212Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20120223Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20110509Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20110626Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.

Properties of seawater from a Sea-Bird TSG temperature and conductivity sensor mounted on the continuous surface water sampling system during campaign TARA_20110726Z of the Tara Oceans expedition 2009-2013

The Tara Oceans Expedition (2009-2013) sampled the world oceans on board a 36 m long schooner, collecting environmental data and organisms from viruses to planktonic metazoans for later analyses using modern sequencing and state-of-the-art imaging technologies. Tara Oceans Data are particularly suited to study the genetic, morphological and functional diversity of plankton. The present data publication contains measurements from the Continuous Surface Sampling System [CSSS] made during one campaign of the Tara Oceans Expedition. Water was pumped at the front of the vessel from ~2m depth, then de-bubbled and circulated to a Sea-Bird TSG temperature and conductivity sensor. System maintenance (instrument cleaning, flushing) was done approximately once a week and in port between successive legs. All data were stamped with a GPS.