Degradation evaluation of microelectromechanical thermal actuators

Metal based thermal microactuators normally have lower operation temperatures than those of Si-based ones; hence they have great potential for applications. However, metal-based thermal actuators easily suffer from degradation such as plastic deformation. In this study, planar thermal actuators were made by a single mask process using electroplated nickel as the active material, and their thermal degradation has been studied. Electrical tests show that the Ni-based thermal actuators deliver a maximum displacement of ∼20μm at an average temperature of ∼420°C, much lower than that of Si-based microactuators. However, the displacement strongly depends on the frequency and peak voltage of the pulse applied. Back bending was clearly observed at a maximum temperature as low as 240°C. Both forward and backward displacements increase with increasing the temperature up to ∼450°C, and then decreases with power. Scanning electron microscopy observation clearly showed that Ni structure deforms and reflows at power above 50mW. The compressive stress is believed to be responsible for Ni piling-up (creep), while the tensile stress upon removing the pulse current is responsible for necking at the hottest section of the device. Energy dispersive X-ray diffraction analysis revealed severe oxidation of the Ni-structure induced by Joule-heating of the current.

Losses in inductor-less piezoelectric transformer ballast for compact fluorescent lamps

In this study an inductor-less piezoelectric transformer (PT) based ballast for a 5 W CFL has been designed and simulated. The predictions of circuit currents and losses closely match experimentally measured values. The total simulated loss figure was confirmed against practically determined losses using a precision mini-calorimeter. Using simulation to disaggregate the total loss figure, it is seen that the PT makes the largest contribution to the total losses in such ballast.

Optimisation of a piezoelectric system for energy harvesting from traffic vibrations

Piezoelectric systems are viewed as a promising approach to energy harvesting from environmental vibrations. The energy harvested from real vibration sources is usually difficult to estimate analytically. Therefore, it is hard to optimise the associated energy harvesting system. This work investigates the optimisation of a piezoelectric cantilever system using a genetic algorithm based approach with numerical simulations. The genetic algorithm globally considers the effects of each parameter to produce an optimal frequency response to scavenge more energy from the real vibrations while the conventional sinusoidal based method can only optimise the resistive load for a given resonant frequency. Experimental acceleration data from the vibrations of a vehicle-excited manhole cover demonstrates that the optimised harvester automatically selects the right frequency and also synchronously optimises the damper and the resistive load. This method shows great potential for optimizing the energy harvesting systems with real vibration data. ©2009 IEEE.

Active control of sound radiated by a submarine hull in bending vibration using inertial actuators

Submarines are efficient sources of low frequency radiated noise due to the vibrations induced by the rotation of the propeller in a non uniform wake. In this work the possibility of using inertial actuators to reduce the far field sound pressure is investigated. The submerged vessel is modelled as a cylindrical shell with two conical end caps. Complicating effects such as ring stiffeners, bulkheads and the fluid loading are taken into account. A harmonic radial force is transmitted from the propeller to the hull through the stern end cone and it is tonal at the blade passing frequency (rotational speed of the shaft multiplied by the number of blades). The actuators are attached at the inside of the prow end cone to form a circumferential array. Both Active Vibration Control (AVC) and Active Structural Acoustic Control (ASAC) are analysed and it is shown that the inertial actuators can significantly reduce the far field sound pressure.

Guided propagation of surface acoustic waves and piezoelectric field enhancement in ZnO/GaAs systems

The characteristics and dispersion of the distinct surface acoustic waves (SAWs) propagating in ZnO/GaAs heterostructures have been studied experimentally and theoretically. Besides the Rayleigh mode, strong Sezawa modes, which propagate confined in the overlayer, arise due to the smaller sound velocity in ZnO than in the substrate. The design parameters of the structure providing the strongest piezoelectric field at a given depth within the layered system for the different modes have been determined. The piezoelectric field of the Rayleigh mode is shown to be more than 10 times stronger at the interface region of the tailored ZnO/GaAs structure than at the surface region of the bulk GaAs, whereas the same comparison for the first Sezawa mode yields a factor of 2. This enhancement, together with the capacity of selecting waves with different piezoelectric and strain field depth profiles, will facilitate the development of SAW-modulated optoelectronic applications in GaAs-based systems. © 2011 American Institute of Physics.

Operation of a high frequency piezoelectric ultrasound array with an application specific integrated circuit

Integration of a piezoelectric high frequency ultrasound (HFUS) array with a microfabricated application specific integrated circuit (ASIC) performing a range of functions has several advantages for ultrasound imaging. The number of signal cables between the array/electronics and the data acquisition / imaging system can be reduced, cutting costs and increasing functionality. Electrical impedance matching is also simplified and the same approach can reduce overall system dimensions for applications such as endoscopic ultrasound. The work reported in this paper demonstrates early ASIC operation with a piezocomposite HFUS array operating at approximately 30 MHz. The array was tested in three different modes. Clear signals were seen in catch-mode, with an external transducer as a source of ultrasound, and in pitch-mode with the external transducer as a receiver. Pitch-catch mode was also tested successfully, using sequential excitation on three array elements, and viable signals were detected. However, these were relatively small and affected by interference from mixed-signal sources in the ASIC. Nevertheless, the functionality and compatibility of the two main components of an integrated HFUS - ASIC device have been demonstrated and the means of further optimization are evident.

Initial modelling and controller design for active control of spacecraft microvibrations

Microvibrations, at frequencies between 1 and 1000 Hz, generated by on board equipment, propagate throughout a spacecraft structure affecting the performance of sensitive payloads. The purpose of this work is to investigate strategies to model and reduce these dynamic disturbances by active control. Initial studies were performed by considering a mass loaded panel where the disturbance excitation source consisted of point forces, the objective being to minimise the displacement at an arbitrary output location. Piezoelectric patches acting as sensors and actuators were used. The equations of motion are derived by using Lagrange's equation with modal shapes as Ritz functions. The number of sensors/actuators and their location is variable. The set of equations obtained is then transformed into state variables and some initial controller design studies have been undertaken. These are based on feedback control implemented using a full state feedback and an observer which reconstructs the state vector from the available sensor signal. Here, the basics behind the structural modelling and controller design will be described. This preliminary analysis will also be used to identify short to medium term further work.

Active control of sound radiated by a submarine hull in axisymmetric vibration using inertial actuators

This paper investigates the use of inertial actuators to reduce the sound radiated by a submarine hull under excitation from the propeller. The axial forces from the propeller are tonal at the blade passing frequency. The hull is modeled as a fluid-loaded cylindrical shell with ring stiffeners and equally spaced bulkheads. The cylinder is closed at each end by circular plates and conical end caps. The forces from the propeller are transmitted to the hull by a rigid foundation connected to the propeller shaft. Inertial actuators are used as the structural control inputs. The actuators are arranged in circumferential arrays and attached to the internal end plates of the hull. Two active control techniques corresponding to active vibration control and discrete structural acoustic sensing are implemented to attenuate the structural and acoustic responses of the submarine. In the latter technique, error information on the radiated sound fields is provided by a discrete structural acoustic sensor. An acoustic transfer function is defined to estimate the far field sound pressure from a single point measurement on the hull. The inertial actuators are shown to provide control forces with a magnitude large enough to reduce the sound due to hull vibration. © 2012 American Society of Mechanical Engineers.

Film bulk acoustic resonator nanosensors for multi-task sensing

This paper shows that film bulk acoustic resonator (FBAR) arrays can be very useful sensors either to detect physical parameters such as temperature and pressure directly or to detect bio-chemicals with extremely high sensitivities by incorporating a chemisorption layer or bio-probe molecules. Furthermore, it also shows that surface acoustic wave devices can be integrated with a FBAR sensor array on the same piezoelectric substrate as the microfluidics systems to perform transportation and mixing of biosamples etc. demonstrating the possibility to fabricate integrated lab-on-a-chip detection systems, in which all the actuators and sensors are operated by acoustic wave devices. This makes the detection system simple, low cost and easy to operate and hence has great commercial potential. © 2011 Inderscience Enterprises Ltd.

Ferroelectric-carbon nanotube memory devices

One-dimensional ferroelectric nanostructures, carbon nanotubes (CNT) and CNTinorganic oxides have recently been studied due to their potential applications for microelectronics. Here, we report coating of a registered array of aligned multi-wall carbon nanotubes (MWCNT) grown on silicon substrates by functional ferroelectric Pb(Zr,Ti)O 3 (PZT) which produces structures suitable for commercial prototype memories. Microstructural analysis reveals the crystalline nature of PZT with small nanocrystals aligned in different directions. First-order Raman modes of MWCNT and PZT/MWCNT/n-Si show the high structural quality of CNT before and after PZT deposition at elevated temperature. PZT exists mostly in the monoclinic Cc/Cm phase, which is the origin of the high piezoelectric response in the system. Lowloss square piezoelectric hysteresis obtained for the 3D bottom-up structure confirms the switchability of the device. Currentvoltage mapping of the device by conducting atomic force microscopy (c-AFM) indicates very low transient current. Fabrication and functional properties of these hybrid ferroelectriccarbon nanotubes is the first step towards miniaturization for future nanotechnology sensors, actuators, transducers and memory devices. © 2012 IOP Publishing Ltd.

Application of gel-casting to the fabrication of 1-3 piezoelectric ceramic-polymer composites for high-frequency ultrasound devices

A modified gel-casting technique was used to fabricate a 1-3 piezoelectric ceramic/polymer composite substrate formed by irregular-shaped pillar arrays of small dimensions and kerfs. This technique involves the polymerization of aqueous piezoelectric (PZT) suspensions with added water-soluble epoxy resin and polyamine-based hardener that lead to high strength, high density and resilient ceramic bodies. Soft micromoulding was used to shape the ceramic segments, and micropillars with lateral features down to 4 m and height-to-width aspect ratios of ∼10 were achieved. The composite exhibited a clear thickness resonance mode at approximately 70 MHz and a k eff ∼ 0.51, demonstrating that the ceramic micropillars possess good electrical properties. Furthermore, gel-casting allows the fabrication of ceramic structures with non-conventional shapes; hence, device design is not limited by the standard fabrication methods. This is of particular benefit for high-frequency transducers where the critical design dimensions are reduced. © 2012 IOP Publishing Ltd.

Hybrid passive/active inertial actuators to attenuate the structural response of a submerged hull

This paper theoretically investigates the application of tuned vibration absorbers and hybrid passive/active inertial actuators to reduce the vibrational responses of plates and shells. The passive/active actuators are initially applied to a simple plate. A model of a submerged hull consisting of a ring stiffened finite cylinder with bulkheads and external fluid loading is then considered. The fluctuating forces from the propeller result in excitation of the low frequency global hull modes. Inertial actuators and tuned vibration absorbers are located at each end of the hull and in circumferential arrays to reduce the hull structural response at its axial resonances. The control performance of the hybrid passive/active inertial actuator, where the passive component is tuned to a structural resonance, is compared to the attenuation achieved by a fully passive tuned vibration absorber. This work shows the potential of using hybrid passive/active inertial actuators to attenuate the global structural responses of a submerged vessel.

Flexible pneumatic micro-actuators: Analysis and production

Compliant pneumatic micro-actuators are interesting for applications requiring large strokes and forces in delicate environments. These include for instance minimally invasive surgery and assembly of microcomponents. This paper presents a theoretical and experimental analysis of a balloon-type compliant micro-actuator. Finite element modeling is used to describe the complex behavior of these actuators, which is validated through prototype experiments. Prototypes with dimensions ranging from 11mm × 2mm × 0.24mm to 4mm × 1mm × 0.12mm are fabricated by a newly developed production process based on micromilling and micromolding. The larger actuators are capable of delivering out-of-plane strokes of up to 7mm. Further, they have been integrated in a platform with two rotational and one translational degree of freedom. © 2011 Published by Elsevier Ltd.