On-demand generation and removal of alginate biocompatible microvalves for flow control in microfluidics

[EN] This paper describes, for the first time, the use of alginate hydrogels as miniaturised microvalves within microfluidic devices. These biocompatible and biodegradable microvalves are generated in situ and on demand, allowing for microfluidic flow control. The microfluidic devices were fabricated using an origami inspired technique of folding several layers of cyclic olefin polymer followed by thermocompression bonding. The hydrogels can be dehydrated at mild temperatures, 37◦C, to slightly open the microvalve and chemically erased using an ethylenediaminetetraacetic acid disodium salt (EDTA) solution, to completely open the channel, ensuring the reusability of the whole device and removal of damaged or defective valves for subsequent regeneration.

Nanostructuring of materials for device and sensor applications

The recent developments in nanotechnology are reviewed, with particular emphasis on its application in microsystem technology where increased reliability is achieved by integrating the sensor and the readout electronics on the same substrate. New applications may be possible using integrated micromechanical clips to connect optic fibers and components in integrated silicon systems. Some of the key developments in enabling technologies are also described, including the control of thin film deposition, nanostructuring to tailor the properties of thin film, silicon micromachining to make sensors, and microclips for the low-cost assembly of integrated optical microsystems.

Shock transmission and eigenvalue veering within a coupled system.

The operation of dynamical systems in harsh environments requires continuous monitoring. Internal sensors may be used to monitor the conditions in real time. A typical example is the sensor and electronic components used in space structures which, especially during launch, are subject to huge g force. The paper will present an experimental and theoretical study on a simplified model used to analyze the possible cause of high acceleration on the enclosed sensors and equipments due to impulsive loading. The model system consists of two beams coupled using compliant connections. An impulse hammer excites one beam, and vibrations are transmitted to the indirectly driven beam. A theoretical model is developed using a Rayleigh-Ritz approach and validated using experimental results in both the frequency and time domains. Monto Carlo simulation was done with random masses positioned on the indirectly driven beam to determine the worst-case conditions for maximum peak acceleration. Highest acceleration levels were found when mode matching in the two beams led to veering behavior in the coupled modes. The results suggest guidelines for the detailed design of internal components of a structure exposed to shock loading from its environment. [The authors thank Schlumberger Cambridge Research for financial support.].

Metal-polymer composite sensors for volatile organic compounds: Part 1. Flow-through chemi-resistors

A new type of chemi-resistor based on a novel metal-polymer composite is described. The composite contains nickel particles with sharp nano-scale surface features, which are intimately coated by the polymer matrix so that they do not come into direct physical contact. No conductive chains of filler particles are formed even at loadings above the percolation threshold and the composite is intrinsically insulating. However, when subjected to compression the composite becomes conductive, with sample resistance falling from ≥ 1012 Ω to < 0.01 Ω. The composite can be formed into insulating granules, which display similar properties to the bulk form. A bed of granules compressed between permeable frits provides a porous structure with a start resistance set by the degree of compression while the granules are free to swell when exposed to volatile organic compounds (VOCs). The granular bed presents a large surface area for the adsorption of VOCs from the gas stream flowing through it. The response of this system to a variety of vapours has been studied for two different sizes of the granular bed and for different matrix polymers. Large responses, ΔR/R0 ≥ 10^7, are observed when saturated vapours are passed through the chemi-resistor. Rapid response allows real time sensing of VOCs and the initial state is recovered in a few seconds by purging with an inert gas stream. The variation in response as a function of VOC concentration is determined.

Initial modelling and controller design for active control of spacecraft microvibrations

Microvibrations, at frequencies between 1 and 1000 Hz, generated by on board equipment, propagate throughout a spacecraft structure affecting the performance of sensitive payloads. The purpose of this work is to investigate strategies to model and reduce these dynamic disturbances by active control. Initial studies were performed by considering a mass loaded panel where the disturbance excitation source consisted of point forces, the objective being to minimise the displacement at an arbitrary output location. Piezoelectric patches acting as sensors and actuators were used. The equations of motion are derived by using Lagrange's equation with modal shapes as Ritz functions. The number of sensors/actuators and their location is variable. The set of equations obtained is then transformed into state variables and some initial controller design studies have been undertaken. These are based on feedback control implemented using a full state feedback and an observer which reconstructs the state vector from the available sensor signal. Here, the basics behind the structural modelling and controller design will be described. This preliminary analysis will also be used to identify short to medium term further work.

Comprehensive Property Retrieval and Measurement of Concrete Spalling Using Machine Vision for Post-Earthquake Safety Assessments

Active vibration control (AVC) is a relatively new technology for the mitigation of annoying human-induced vibrations in floors. However, recent technological developments have demonstrated its great potential application in this field. Despite this, when a floor is found to have problematic floor vibrations after construction the unfamiliar technology of AVC is usually avoided in favour of more common techniques, such as Tuned Mass Dampers (TMDs) which have a proven track record of successful application, particularly for footbridges and staircases. This study aims to investigate the advantages and disadvantages that AVC has, when compared with TMDs, for the application of mitigation of pedestrian-induced floor vibrations in offices. Simulations are performed using the results from a finite element model of a typical office layout that has a high vibration response level. The vibration problems on this floor are then alleviated through the use of both AVC and TMDs and the results of each mitigation configuration compared. The results of this study will enable a more informed decision to be made by building owners and structural engineers regarding suitable technologies for reducing floor vibrations.

Studying adsorbent dynamics on a quartz crystal resonator using its nonlinear electrical response

The quartz crystal resonator has been traditionally employed in studying surface-confined physisorbed films and particles by measuring dissipation and frequency shifts. However, theoretical interpretation of the experimental observations is often challenged due to limited understanding of physical interaction mechanisms at the interfaces involved. Here we model a physisorbed interaction between particles and gold electrode surface of a quartz crystal and demonstrate how the nonlinear modulation of the electric response of the crystal due to the nonlinear interaction forces may be used to study the dynamics of the particles. In particular, we show that the graphs of the deviation in the third Fourier harmonic response versus oscillation amplitude provide important information about the onset, progress and nature of sliding of the particles. The graphs also present a signature of the surface-particle interaction and could be used to estimate the interaction energy profile. Interestingly, the insights gained from the model help to explain some of the experimental observations with physisorbed streptavidin-coated polystyrene microbeads on quartz resonators. © 2012 Elsevier B.V. All rights reserved.

Theoretical and experimental analysis of pneumatic balloon microactuators

This paper presents a theoretical and experimental analysis of a biologically inspired balloon-type pneumatic microactuator. The operation principle of pneumatic balloon actuators (PBA's) is based on an asymmetric deflection of two PDMS layers with different thicknesses or different Young's moduli that are bonded together. A new analytical 2D model that describes the complex behavior of these actuators is presented and validated using both 3D FEM models and measurements. The actuators have dimensions ranging from 11 mm × 2 mm × 0.24 mm to 4 mm × 1 mm × 0.12 mm. Their fabrication is based on micromolding of PDMS, and can therefore easily be fabricated in high throughput. Measurements showed that the analytical model provides a qualitative description of the actuator behavior, and showed that the larger actuators are capable of delivering a 7 mm stroke at a supply pressure of 70 kPa and a force of max 22 mN at a supply pressure of 105 kPa. © 2011 Elsevier B.V. All rights reserved.

Fabrication and control of miniature McKibben actuators

This paper investigates the development of miniature McKibben actuators. Due to their compliancy, high actuation force, and precision, these actuators are on the one hand interesting for medical applications such as prostheses and instruments for surgery and on the other hand for industrial applications such as for assembly robots. During this research, pneumatic McKibben actuators have been miniaturized to an outside diameter of 1.5 mm and a length ranging from 22 mm to 62 mm. These actuators are able to achieve forces of 6 N and strains up to about 15% at a supply pressure of 1 MPa. The maximal actuation speed of the actuators measured during this research is more than 350 mm/s. Further, positioning experiments with a laser interferometer and a PI controller revealed that these actuators are able to achieve sub-micron positioning resolution. © 2010 Published by Elsevier B.V. All rights reserved.

Development of a hybrid ferrofluid seal technology for miniature pneumatic and hydraulic actuators

Future microrobotic applications require actuators that can generate a high actuation force and stroke in a limited volume. Up to now, little research has been performed on the development of pneumatic and hydraulic microactuators, although they offer great prospects in achieving high force densities. One of the main technological barriers in the development of these actuators is the fabrication of powerful seals with low leakage. This paper presents a seal technology for linear fluidic microactuators based on ferrofluids. A design and simulation method for these seals has been developed and validated by measurements on miniaturized actuator prototypes. These actuators have an outside diameter of 2 mm, a length of 13 mm and have been tested using both pressurized air and water. Our current actuator prototypes are able to operate at pressures up to 1.6 MPa without leakage. At these pressures, forces up to 0.65 N have been achieved. The stroke of the actuators is 10 mm. © 2009 Elsevier B.V. All rights reserved.

Characterization and control of a pneumatic microactuator with an integrated inductive position sensor

As the intelligence and the functionality of microrobots increase, there is a growing need to incorporate sensors into these robots. In order to limit the outer dimensions of these microsystems, this research investigates sensors that can be integrated efficiently into microactuators. Here, a pneumatic piston-cylinder microactuator with an integrated inductive position sensor was developed. The main advantage of pneumatic actuators is their high force and power density at microscale. The outside diameter of the actuator is 1.3 mm and the length is 15 mm. The stroke of the actuator is 12 mm, and the actuation force is 1 N at a supply pressure of 1.5 MPa. The position sensor consists of two coils wound around the cylinder of the actuator. The measurement principle is based on the change in coupling factor between the coils as the piston moves in the actuator. The sensor is extremely small since one layer of 25 μm copper wire is sufficient to achieve an accuracy of 10 μm over the total stroke. Position tests with a PI controller and a sliding mode controller showed that the actuator is able to position with an accuracy up to 30 μm. Such positioning systems offer great opportunities for all devices that need to control a large number of degrees of freedom in a restricted volume. © 2007 Elsevier B.V. All rights reserved.

Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs

Film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs) have the potential to significantly improve upon the sensitivity and minimum detection limit of traditional gravimetric sensors based on quartz crystal microbalances (QCMs) and surface acoustic wave resonators (SAWs). To date, neither FBAR nor SMR devices have been demonstrated to be superior to the other; hence the choice between them depends primarily on the users' ability to design/fabricate membranes and/or Bragg reflectors. In this work, it is shown that identically designed FBAR and SMR devices resonating at the same frequency exhibit different responsivities to mass loadings, Rm, and that the SMRs are less responsive than the FBARs. For the specific device design and resonant frequency (~2 GHz) of the resonators presented here, the FBARs' mass responsivity is ~20% greater than that of the SMRs', and although this value is not universal for all possible device designs, it clearly shows that FBAR devices should be favoured over SMRs in gravimetric sensing applications where the FBARs' fragility is not an issue. Numerical calculations based on Mason's model offer an insight into the physical mechanisms behind the greater FBARs responsivity, and it was shown that the Bragg reflector has an effect on the acoustic load at one of the facets of the piezoelectric films which is in turn responsible for the SMRs' lower responsivity to mass loadings. © 2013 Elsevier B.V.

Ni(Pt)-silicide contacts on CMOS devices: Impact of substrate nature and Pt concentration on the phase formation

Ni silicides used as contacts in source/drain and gate of advanced CMOS devices were analyzed by atom probe tomography (APT) at atomic scale. These measurements were performed on 45 nm nMOS after standard self-aligned silicide (salicide) process using Ni(5 at.% Pt) alloy. After the first annealing (RTA1), δ-Ni2Si was the only phase formed on gate and source/drain while, after the second annealing (RTA2), two different Ni silicides have been formed: NiSi on the gate and δ-Ni2Si on the source and drain. This difference between source/drain and gate regions in nMOS devices has been related to the Si substrate nature (poly or mono-crystalline) and to the size of the contact. In fact, NiSi seems to have difficulties to nucleate in the narrow source/drain contact on mono-crystalline Si. The results have been compared to analysis performed on 28 nm nMOS where the Pt concentration is higher (10 at.% Pt). In this case, θ-Ni2Si is the first phase to form after RTA1 and NiSi is then formed at the same time on source (or drain) and gate after RTA2. The absence of the formation of NiSi from δ-Ni 2Si/Si(1 0 0) interface compared to θ-Ni2Si/Si(1 0 0) interface could be related to the difference of the interface energies. The redistributions of As and Pt in different silicides and interfaces were measured and discussed. In particular, it has been evidenced that Pt redistributions obtained on both 45 and 28 nm MOS transistors correspond to respective Pt distributions measured on blanket wafers. © 2013 Elsevier B.V. All rights reserved.