Inductively coupled reactive ion etching studies on sputtered yttria stabilized zirconia thin films in SF6, Cl-2, and BCl3 chemistries

Downscaling of yttria stabilized zirconia (YSZ) based electrochemical devices and gate oxide layers requires successful pattern transfer on YSZ thin films. Among a number of techniques available to transfer patterns to a material, reactive ion etching has the capability to offer high resolution, easily controllable, tunable anisotropic/isotropic pattern transfer for batch processing. This work reports inductively coupled reactive ion etching studies on sputtered YSZ thin films in fluorine and chlorine based plasmas and their etch chemistry analyses using x-ray photoelectron spectroscopy. Etching in SF6 plasma gives an etch rate of 7 nm/min chiefly through physical etching process. For same process parameters, in Cl-2 and BCl3 plasmas, YSZ etch rate is 17 nm/min and 45 nm/min, respectively. Increased etch rate in BCl3 plasma is attributed to its oxygen scavenging property synergetic with other chemical and physical etch pathways. BCl3 etched YSZ films show residue-free and smooth surface. The surface atomic concentration ratio of Zr/Y in BCl3 etched films is closer to as-annealed YSZ thin films. On the other hand, Cl-2 etched films show surface yttrium enrichment. Selectivity ratio of YSZ over silicon (Si), silicon dioxide (SiO2) and silicon nitride (Si3N4) are 1:2.7, 1:1, and 1:0.75, respectively, in BCl3 plasma. YSZ etch rate increases to 53 nm/min when nonoxygen supplying carrier wafer like Si3N4 is used. (C) 2015 American Vacuum Society.

High tuning range AlSi RF MEMS capacitors fabricated with sacrificial amorphous silicon surface micromachining

This paper reports the fabrication and electrical characterization of high tuning range AlSi RF MEMS capacitors. We present experimental results obtained by a surface micromachining process that uses dry etching of sacrificial amorphous silicon to release Al-1%Si membranes and has a low thermal budget (<450 °C) being compatible with CMOS post-processing. The proposed silicon sacrificial layer dry etching (SSLDE) process is able to provide very high Si etch rates (3-15 μm/min, depending on process parameters) with high Si: SiO2 selectivity (>10,000:1). Single- and double-air-gap MEMS capacitors, as well as some dedicated test structures needed to calibrate the electro-mechanical parameters and explore the reliability of the proposed technology, have been fabricated with the new process. S-parameter measurements from 100 MHz up to 2 GHz have shown a capacitance tuning range higher than 100% with the double-air-gap architecture. The tuning range can be enlarged with a proper DC electrical bias of the capacitor electrodes. Finally, the reported results make the proposed MEMS tuneable capacitor a good candidate for above-IC integration in communications applications. © 2004 Elsevier B.V. All rights reserved.

Determination Ofinterfacial Mechanical Parameters For An Al/Epoxy/Al2O3 System Byusing Peel Test Simulations

Peel test measurements and simulations of the interfacial mechanical parameters for the Al/Epoxy/Al2O3 system are performed in the present investigation. A series of Al film thicknesses between 20 and 250 microns and three peel angles of 90, 135 and 180 degrees are considered. Two types of epoxy adhesives are adopted to obtain both strong and weak interface adhesions. A finite element model with cohesive zone elements is used to identify the interfacial parameters and simulate the peel test process. By simulating and recording normal stress near the crack tip, the separation strength is obtained. Furthermore, the cohesive energy is identified by comparing the simulated steady-state peel force and the experimental result. It is found from the research that both the cohesive energy and the separation strength can be taken as the intrinsic interfacial parameters which are dependent on the thickness of the adhesive layer and independent of the film thickness and peel angle.

Peeling Experiments Of Ductile Thin Films Along Ceramic Substrates - Critical Assessment Of Analytical Models

Two types of peeling experiments are performed in the present research. One is for the Al film/Al2O3 substrate system with an adhesive layer between the film and the substrate. The other one is for the Cu film/Al2O3 substrate system without adhesive layer between the film and the substrate, and the Cu films are electroplated onto the Al2O3 substrates. For the case with adhesive layer, two kinds of adhesives are selected, which are all the mixtures of epoxy and polyimide with mass ratios 1:1.5 and 1:1, respectively. The relationships between energy release rate, the film thickness and the adhesive layer thickness are measured during the steady-state peeling process. The effects of the adhesive layer on the energy release rate are analyzed. Using the experimental results, several analytical criteria for the steady-state peeling based on the bending model and on the two-dimensional finite element analysis model are critically assessed. Through assessment of analytical models, we find that the cohesive zone criterion based on the beam bend model is suitable for a weak interface strength case and it describes a macroscale fracture process zone case, while the two-dimensional finite element model is effective to both the strong interface and weak interface, and it describes a small-scale fracture process zone case. (C) 2007 Elsevier Ltd. All rights reserved.

Bio-inspired mechanics of reversible adhesion: Orientation-dependent adhesion strength for non-slipping adhesive contact with transversely isotropic elastic materials

Geckos and many insects have evolved elastically anisotropic adhesive tissues with hierarchical structures that allow these animals not only to adhere robustly to rough surfaces but also to detach easily upon movement. In order to improve Our understanding of the role of elastic anisotropy in reversible adhesion, here we extend the classical JKR model of adhesive contact mechanics to anisotropic materials. In particular, we consider the plane strain problem of a rigid cylinder in non-slipping adhesive contact with a transversely isotropic elastic half space with the axis of symmetry oriented at an angle inclined to the surface. The cylinder is then subjected to an arbitrarily oriented pulling force. The critical force and contact width at pull-off are calculated as a function of the pulling angle. The analysis shows that elastic anisotropy leads to an orientation-dependent adhesion strength which can vary strongly with the direction of pulling. This study may suggest possible mechanisms by which reversible adhesion devices can be designed for engineering applications. (C) 2006 Elsevier Ltd. All rights reserved.

Fiber Bragg Gratings, IT Techniques and Strain Gauge Validation for Strain Calculation on Aged Metal Specimens

This paper studies the feasibility of calculating strains in aged F114 steel specimens with Fiber Bragg Grating (FBG) sensors and infrared thermography (IT) techniques. Two specimens have been conditioned under extreme temperature and relative humidity conditions making comparative tests of stress before and after aging using different adhesives. Moreover, a comparison has been made with IT tecniques and conventional methods for calculating stresses in F114 steel. Implementation of Structural Health Monitoring techniques on real aircraft during their life cycle requires a study of the behaviour of FBG sensors and their wiring under real conditions, before using them for a long time. To simulate aging, specimens were stored in a climate chamber at 70 degrees C and 90% RH for 60 days. This study is framed within the Structural Health Monitoring (SHM) and Non Destructuve Evaluation (NDE) research lines, integrated into the avionics area maintained by the Aeronautical Technologies Centre (CTA) and the University of the Basque Country (UPV/EHU).

Proton transfers at the air-water interface

Proton transfer reactions at the interface of water with hydrophobic media, such as air or lipids, are ubiquitous on our planet. These reactions orchestrate a host of vital phenomena in the environment including, for example, acidification of clouds, enzymatic catalysis, chemistries of aerosol and atmospheric gases, and bioenergetic transduction. Despite their importance, however, quantitative details underlying these interactions have remained unclear. Deeper insight into these interfacial reactions is also required in addressing challenges in green chemistry, improved water quality, self-assembly of materials, the next generation of micro-nanofluidics, adhesives, coatings, catalysts, and electrodes. This thesis describes experimental and theoretical investigation of proton transfer reactions at the air-water interface as a function of hydration gradients, electrochemical potential, and electrostatics. Since emerging insights hold at the lipid-water interface as well, this work is also expected to aid understanding of complex biological phenomena associated with proton migration across membranes.

Based on our current understanding, it is known that the physicochemical properties of the gas-phase water are drastically different from those of bulk water. For example, the gas-phase hydronium ion, H₃O⁺(g), can protonate most (non-alkane) organic species, whereas H₃O⁺(aq) can neutralize only relatively strong bases. Thus, to be able to understand and engineer water-hydrophobe interfaces, it is imperative to investigate this fluctuating region of molecular thickness wherein the ‘function’ of chemical species transitions from one phase to another via steep gradients in hydration, dielectric constant, and density. Aqueous interfaces are difficult to approach by current experimental techniques because designing experiments to specifically sample interfacial layers (< 1 nm thick) is an arduous task. While recent advances in surface-specific spectroscopies have provided valuable information regarding the structure of aqueous interfaces, but structure alone is inadequate to decipher the function. By similar analogy, theoretical predictions based on classical molecular dynamics have remained limited in their scope.

Recently, we have adapted an analytical electrospray ionization mass spectrometer (ESIMS) for probing reactions at the gas-liquid interface in real time. This technique is direct, surface-specific,and provides unambiguous mass-to-charge ratios of interfacial species. With this innovation, we have been able to investigate the following:

1. How do anions mediate proton transfers at the air-water interface?

2. What is the basis for the negative surface potential at the air-water interface?

3. What is the mechanism for catalysis ‘on-water’?

In addition to our experiments with the ESIMS, we applied quantum mechanics and molecular dynamics to simulate our experiments toward gaining insight at the molecular scale. Our results unambiguously demonstrated the role of electrostatic-reorganization of interfacial water during proton transfer events. With our experimental and theoretical results on the ‘superacidity’ of the surface of mildly acidic water, we also explored implications on atmospheric chemistry and green chemistry. Our most recent results explained the basis for the negative charge of the air-water interface and showed that the water-hydrophobe interface could serve as a site for enhanced autodissociation of water compared to the condensed phase.

Discontinuous yielding and fracture initiation near a notch in mild steel

This thesis presents the results of an experimental investigation of the initiation of brittle fracture and the nature of discontinuous yielding in small plastic enclaves in an annealed mild steel. Upper and lower yield stress data have been obtained from unnotched specimens and nominal fracture stress data have been obtained from specimens of two scale factors and two grain sizes over a range of nominal stress rates from 10^2 to 10^7 lb/in.^2 sec at -111°F and -200°F. The size and shape of plastic enclaves near the notches were revealed by an etch technique.

A stress analysis utilizing slip-line field theory in the plastic region has been developed for the notched specimen geometry employed in this investigation. The yield stress of the material in the plastic enclaves near the notch root has been correlated with the lower yield stress measured on unnotched specimens through a consideration of the plastic boundary velocity under dynamic loading. A maximum tensile stress of about 122,000 lb/in.^2 at the instant of fracture initiation was calculated with the aid of the stress analysis for the large scale specimens of ASTM grain size 8 1/4.

The plastic strain state adjacent to a plastic-elastic interface has been shown to cause the maximum shear stress to have a larger value on the elastic than the plastic side of the interface. This characteristic of dis continuous yielding is instrumental in causing the plastic boundaries to be nearly parallel to the slip-line field where the plastic strain is of the order of the Lüder's strain.

Influência do sistema de cimentação e do modo de ativação na resistência ao push-out de pinos de fibra de vidro

O objetivo deste estudo foi avaliar a influência do tipo de sistema de cimentação (condicionamento ácido total ou autoadesivo), do modo de ativação (autoativado ou dual), do terço do conduto radicular (cervical, médio ou apical) e da espessura do filme de cimento sobre a resistência de união de pinos de fibra de vidro cimentados em dentes humanos. Quarenta raízes foram incluídas em resina epóxi, submetidas a tratamento endodôntico e obturadas com guta percha e cimento endodôntico sem eugenol. Decorridos sete dias, os condutos foram preparados a uma profundidade de 10mm com brocas padronizadas do sistema dos pinos de fibra (WhitePost DC #2) e aleatoriamente divididos em 4 grupos, conforme o sistema de cimentação e o modo de ativação: (G1) RelyX ARC/Adper Scotchbond Multi-Purpose Plus (condicionamento ácido total), ativação dual, (G2) RelyX ARC/Adper Scotchbond Multi-Purpose Plus, autoativado, (G3) RelyX U100 (autoadesivo), dual e (G4) RelyX U100, autoativado. Após uma semana, cada raiz foi seccionada em máquina de corte, originando 6 fatias de 1 mm de espessura (n=60). Antes do ensaio de push-out cada fatia foi fotografada em ambas as faces, para determinação do raio dos pinos e da espessura do filme de cimento. Após o ensaio mecânico, novas imagens foram capturadas para determinação do modo de falha. Para automatizar a determinação da espessura de cimento, foi desenvolvida uma macro no software KS 400. Os dados foram estatisticamente analisados com ANOVA 3 fatores (resistência de união) e teste de Kruskall-Wallis (espessura do cimento). Comparações múltiplas foram realizadas com o teste Student-Newman-Keuls. Análise de regressão, modelo linear, foi empregada para verificar a correlação entre espessura do cimento e resistência de união. Todos os testes foram aplicados com α = 0,05. O fator cimento exerceu influência significativa para a resistência de união (p = 0,0402): o RelyX U100 apresentou a maior média. A ativação dual elevou os valores de resistência de união em comparação ao modo quimicamente ativado (p < 0,0001). Houve diferenças significantes entre os grupos, sendo G1 (22,4 4,0 MPa) > G3 (20,4 3,6 MPa) > G4 (17,8 5,2 MPa) > G2 (13,5 4,3 MPa). O terço do conduto não exerceu influência significativa sobre a resistência adesiva (p = 0,4749). As espessuras dos filmes de cimento foram estatisticamente diferentes nos diferentes terços: cervical (102 45 m) > médio (75 29 m) > apical (52 28m). Não foi observada forte correlação entre os valores de espessura e os de resistência ao push-out (r = - 0,2016, p = 0,0033). O tipo de falha predominante foi a mista, exceto para o G2, que apresentou 74% das falhas na interface cimento-pino. Dessa forma, o cimento autoadesivo apresentou melhor desempenho que o convencional, e ambos os sistemas duais, sobretudo o RelyX ARC, apresentaram dependência da fotoativação para atingirem maiores valores de resistência de união.

Optimized condition for etching fused-silica phase gratings with inductively coupled plasma technology

Polymer deposition is a serious problem associated with the etching of fused silica by use of inductively coupled plasma (ICP) technology, and it usually prevents further etching. We report an optimized etching condition under which no polymer deposition will occur for etching fused silica with ICP technology. Under the optimized etching condition, surfaces of the fabricated fused silica gratings are smooth and clean. Etch rate of fused silica is relatively high, and it demonstrates a linear relation between etched depth and working time. Results of the diffraction of gratings fabricated under the optimized etching condition match theoretical results well. (c) 2005 Optical Society of America.

Efeito de um primer autocondicionante na resistência ao cisalhamento de bráquetes com compósito pré-incorporado

O uso de primers autocondicionantes e de bráquetes com compósito pré-incorporado tem sido apresentado como uma alternativa para a redução de passos clínicos. O propósito deste estudo foi avaliar o efeito de um primer autocondicionante (Transbond Plus Self-Etching Primer - SEP) na resistência ao cisalhamento de bráquetes com compósito pré-incorporado colados in vivo. A amostra consistiu de 92 dentes obtidos de 23 pacientes com indicação prévia de extração de 4 pré-molares. Os dentes foram divididos em 4 grupos, sendo os bráquetes colados pelo mesmo operador, alternando os quadrantes em cada paciente: Grupo 1 (controle) - Ácido fosfórico à 37% + primer (Transbond XT Primer) + compósito (Transbond XT Adhesive Paste) + bráquete convencional; Grupo 2 - Ácido fosfórico à 37% + primer + bráquete com compósito pré-incorporado; Grupo 3 SEP + compósito + bráquete convencional; Grupo 4 - SEP + bráquete com compósito pré-incorporado. Após 30 dias os pré-molares foram extraídos, sendo submetidos ao teste de resistência ao cisalhamento através da uma Máquina de Ensaios Universal, com velocidade de 0,5mm/min. Os dados obtidos pelos grupos foram analisados com 2-way ANOVA (p<0,05). As forças médias e desvios padrão obtidos foram os seguintes: Grupo 1 = 11,35 (2,36) MPa; Grupo 2 = 9,77 (2,49) MPa; Grupo 3 = 10,89 (2,60) MPa; e Grupo 4 = 10,16 (2,75) MPa. Não foi observada diferença significativa entre o uso do SEP e o de condicionador e primer tradicionais (p = 0,948). De qualquer modo, diferenças significativas na força de adesão foram observadas quando utilizados bráquetes com compósito pré-incorporado (p = 0,032). Pode ser concluído que a combinação do primer autocondicionante com o bráquete com compósito pré-incorporado apresentou valores de força de adesão adequados, sendo promissora para uso clínico.

Estudo aleatório e controlado do uso clínico de um primer autocondicionante na colagem de bráquetes ortodônticos

O uso de primers autocondicionantes tem sido proposto como uma alternativa para a redução de passos clínicos. O objetivo deste estudo clínico aleatório e controlado foi avaliar a performance de um sistema autocondicionante (Transbond Plus Self-Etching Primer, 3M Unitek - SEP) comparado a um sistema multipasso convencional (Transbond XT, 3M Unitek - TBXT) de colagem ortodôntica, durante um período de 12 meses. Vinte e oito pacientes participaram deste estudo, sendo estes alocados aos grupos SEP ou TBXT de forma aleatória, através de randomização em bloco. Um total de 548 bráquetes metálicos (Micro-Arch, prescrição Alexander, GAC International, Bohemia, NY) foram colados com uso da pasta adesiva Transbond XT (3M Unitek), sendo todos os produtos manuseados de acordo com as recomendações dos fabricantes. Foram totalizados 276 bráquetes no grupo controle e 272 no segundo. Curvas de sobrevivência Kaplan-Meier e o teste log-rank (p<0,05) foram utilizados para comparar o percentual de falhas adesivas para as duas técnicas. Ao final do período foram verificadas trinta e duas falhas adesivas (bráquetes descolados), sendo 19 (6,98%) falhas quando utilizado o primer autocondicionante (SEP) e 13 (4,71%) quando usado o primer convencional (TBXT). Não houve diferença significante entre a sobrevivência dos bráquetes entre os dois grupos avaliados (log-rank test, p=0,311). Quando a influência de gênero do paciente, arco dentário e tipo dentário (anterior ou posterior) foram analisados, somente o tipo dentário foi achado significante. Bráquetes de dentes posteriores apresentaram uma maior probabilidade de falha adesiva que os colados em dentes anteriores (p=0,013) Os autores concluem que o primer autocondicionante pode ser utilizado para colagem direta de bráquetes ortodônticos sem que sua sobrevivência clínica seja afetada.

Raman spectra of undoped and uranium doped CaF2 single crystals

Raman scattering experiments for nominally pure and uranium doped CaF2 single crystals were presented. In all crystals, the Raman active T_(2g) vibration mode of CaF2 was observed, whose frequency shift and full-width at half-maximum (FWHM) broadening correspond well with defects and impurities in CaF2 lattice. Additional Raman peaks develop in nominally pure CaF2 with high etch pits density and U^(6+):CaF2 crystals. Part of additional Raman peaks in the experimental results, which are assumed due to vibration modes from F- interstitials and vacancies, are in well agreement with the theoretical predications by employing the Green-function formulation.

硅酸钇晶体的生长、腐蚀形貌和光谱性能研究

本文采用中频感应提拉法成功生长了未掺杂的Y2SiO5(YSO)晶体，经过定向、切割、抛光后得到样品。经过腐蚀后，利用大视场显微镜和扫描电镜在样品表面上观察到了菱形和四边形的位错蚀坑、小角晶界和包裹物等缺陷；测试了经过氢气、空气退火前后，辐照前后YSO晶体的透过谱，结果表明：YSO晶体的吸收边大约在202nm，氢气退火后在200～300nm波段透过率增加，空气退火后透过率显著降低；辐照后，氢气退火的样品在200～500nm波段透过率显著降低。