Design, Technology and Characterization of Micromechanised Sensors and Actuators for Harsh Environments

Los sistemas micro electro mecánicos (MEMS) han demostrado ser una exitosa familia de dispositivos que pueden usarse como plataforma para el desarrollo de dispositivos con aplicaciones en óptica, comunicaciones, procesado de señal y sensorización. Los dispositivos MEMS estándar suelen estar fabricados usando tecnología de silicio. Sin embargo, el rendimiento de estos MEMS se puede mejorar si se usan otros materiales. Por ejemplo, el diamante nanocristalino (NCD) ofrece unas excelentes propiedades mecánicas, transparencia y una superficie fácil de funcionalizar. Por otro lado, el sistema de materiales (In; Ga; Al)N, los materiales IIIN, se pueden usar para producir estructuras monocristalinas con alta sensibilidad mecánica y química. Además, el AlN se puede depositar por pulverización catódica reactiva sobre varios substratos, incluyendo NCD, para formar capas policristalinas orientadas con alta respuesta piezoeléctrica. Adicionalmente, tanto el NCD como los materiales III-N muestran una gran estabilidad térmica y química, lo que los hace una elección idónea para desarrollar dispositivos para aplicaciones para alta temperatura, ambientes agresivos e incluso para aplicaciones biocompatibles. En esta tesis se han usado estos materiales para el diseño y medición de demostradores tecnológicos. Se han perseguido tres objetivos principales: _ Desarrollo de unos procesos de fabricación apropiados. _ Medición de las propiedades mecánicas de los materiales y de los factores que limitan el rendimiento de los dispositivos. _ Usar los datos medidos para desarrollar dispositivos demostradores complejos. En la primera parte de esta tesis se han estudiado varias técnicas de fabricación. La estabilidad de estos materiales impide el ataque y dificulta la producción de estructuras suspendidas. Los primeros capítulos de esta disertación se dedican al desarrollo de unos procesos de transferencia de patrones por ataque seco y a la optimización del ataque húmedo sacrificial de varios substratos propuestos. Los resultados de los procedimientos de ataque se presentan y se describe la optimización de las técnicas para la fabricación de estructuras suspendidas de NCD y materiales III-N. En un capítulo posterior se estudia el crecimiento de AlN por pulverización catódica. Como se ha calculado en esta disertación para obtener una actuación eficiente de MEMS, las capas de AlN han de ser finas, típicamente d < 200 nm, lo que supone serias dificultades para la obtención de capas orientadas con respuesta piezoeléctrica. Las condiciones de depósito se han mapeado para identificar las fronteras que proporcionan el crecimiento de material orientado desde los primeros pasos del proceso. Además, durante la optimización de los procesos de ataque se estudió un procedimiento para fabricar películas de GaN nanoporoso. Estas capas porosas pueden servir como capas sacrificiales para la fabricación de estructuras suspendidas de GaN con baja tensión residual o como capas para mejorar la funcionalización superficial de sensores químicos o biológicos. El proceso de inducción de poros se discutirá y también se presentarán experimentos de ataque y funcionalización. En segundo lugar, se han determinado las propiedades mecánicas del NCD y de los materiales III-N. Se han fabricado varias estructuras suspendidas para la medición del módulo de Young y de la tensión residual. Además, las estructuras de NCD se midieron en resonancia para calcular el rendimiento de los dispositivos en términos de frecuencia y factor de calidad. Se identificaron los factores intrínsecos y extrínsecos que limitan ambas figuras de mérito y se han desarrollado modelos para considerar estas imperfecciones en las etapas de diseño de los dispositivos. Por otra parte, los materiales III-N normalmente presentan grandes gradientes de deformación residual que causan la deformación de las estructuras al ser liberadas. Se han medido y modelado estos efectos para los tres materiales binarios del sistema para proporcionar puntos de interpolación que permitan predecir las características de las aleaciones del sistema III-N. Por último, los datos recabados se han usado para desarrollar modelos analíticos y numéricos para el diseño de varios dispositivos. Se han estudiado las propiedades de transducción y se proporcionan topologías optimizadas. En el último capítulo de esta disertación se presentan diseños optimizados de los siguientes dispositivos: _ Traviesas y voladizos de AlN=NCD con actuación piezoeléctrica aplicados a nanoconmutadores de RF para señales de alta potencia. _ Membranas circulares de AlN=NCD con actuación piezoeléctrica aplicadas a lentes sintonizables. _ Filtros ópticos Fabry-Pérot basados en cavidades aéreas y membranas de GaN actuadas electrostáticamente. En resumen, se han desarrollado unos nuevos procedimientos optimizados para la fabricación de estructuras de NCD y materiales III-N. Estas técnicas se han usado para producir estructuras que llevaron a la determinación de las principales propiedades mecánicas y de los parámetros de los dispositivos necesarios para el diseño de MEMS. Finalmente, los datos obtenidos se han usado para el diseño optimizado de varios dispositivos demostradores. ABSTRACT Micro Electro Mechanical Systems (MEMS) have proven to be a successful family of devices that can be used as a platform for the development of devices with applications in optics, communications, signal processing and sensorics. Standard MEMS devices are usually fabricated using silicon based materials. However, the performance of these MEMS can be improved if other material systems are used. For instance, nanocrystalline diamond (NCD) offers excellent mechanical properties, optical transparency and ease of surface functionalization. On the other hand, the (In; Ga; Al)N material system, the III-N materials, can be used to produce single crystal structures with high mechanical and chemical sensitivity. Also, AlN can be deposited by reactive sputtering on various substrates, including NCD, to form oriented polycrystalline layers with high piezoelectric response. In addition, both NCD and III-N materials exhibit high thermal and chemical stability, which makes these material the perfect choice for the development of devices for high temperatures, harsh environments and even biocompatible applications. In this thesis these materials have been used for the design and measurement of technological demonstrators. Three main objectives have been pursued: _ Development of suitable fabrication processes. _ Measurement of the material mechanical properties and device performance limiting factors. _ Use the gathered data to design complex demonstrator devices. In a first part of the thesis several fabrication processes have been addressed. The stability of these materials hinders the etching of the layers and hampers the production of free standing structures. The first chapters of this dissertation are devoted to the development of a dry patterning etching process and to sacrificial etching optimization of several proposed substrates. The results of the etching processes are presented and the optimization of the technique for the manufacturing of NCD and III-N free standing structures is described. In a later chapter, sputtering growth of thin AlN layers is studied. As calculated in this dissertation, for efficient MEMS piezoelectric actuation the AlN layers have to be very thin, typically d < 200 nm, which poses serious difficulties to the production of c-axis oriented material with piezoelectric response. The deposition conditions have been mapped in order to identify the boundaries that give rise to the growth of c-axis oriented material from the first deposition stages. Additionally, during the etching optimization a procedure for fabricating nanoporous GaN layers was also studied. Such porous layers can serve as a sacrificial layer for the release of low stressed GaN devices or as a functionalization enhancement layer for chemical and biological sensors. The pore induction process will be discussed and etching and functionalization trials are presented. Secondly, the mechanical properties of NCD and III-N materials have been determined. Several free standing structures were fabricated for the measurement of the material Young’s modulus and residual stress. In addition, NCD structures were measured under resonance in order to calculate the device performance in terms of frequency and quality factor. Intrinsic and extrinsic limiting factors for both figures were identified and models have been developed in order to take into account these imperfections in the device design stages. On the other hand, III-N materials usually present large strain gradients that lead to device deformation after release. These effects have been measured and modeled for the three binary materials of the system in order to provide the interpolation points for predicting the behavior of the III-N alloys. Finally, the gathered data has been used for developing analytic and numeric models for the design of various devices. The transduction properties are studied and optimized topologies are provided. Optimized design of the following devices is presented at the last chapter of this dissertation: _ AlN=NCD piezoelectrically actuated beams applied to RF nanoswitches for large power signals. _ AlN=NCD piezoelectrically actuated circular membranes applied to tunable lenses. _ GaN based air gap tunable optical Fabry-Pérot filters with electrostatic actuation. On the whole, new optimized fabrication processes has been developed for the fabrication of NCD and III-N MEMS structures. These processing techniques was used to produce structures that led to the determination of the main mechanical properties and device parameters needed for MEMS design. Lastly, the gathered data was used for the design of various optimized demonstrator devices.

AVALIAÇÃO DA REPRODUTIBILIDADE DE PONTOS CEFALOMÉTRICOS NAS TELERRADIOGRAFIAS DIGITAIS EM NORMA LATERAL NOS FORMATOS DICOM, TIFF E JPEG

A imagem radiográfica digital adquirida pelo sistema de placa de fósforo foto ativada é normalmente visualizada no monitor do computador no formato DICOM, caracterizado pela alta resolução das imagens. Como este formato ocupa muito espaço para armazenamento, as imagens digitais são submetidas a uma compressão, que otimiza a capacidade de espaço dos computadores e reduz o tempo de transmissão pela Internet. O objetivo desse estudo foi avaliar a influência da compressão TIFF e JPEG na reprodutibilidade intra e interexaminador da marcação de pontos cefalométricos em imagens de telerradiografias em norma lateral comparadas com o formato DICOM. A amostra consistiu de 90 imagens de telerradiografias obtidas a partir de 30 indivíduos, dos quais se obteve uma radiografia digital exibida no formato DICOM. Estas imagens foram convertidas para os formatos JPEG, com Fator de Qualidade 80 e TIFF. Após o cegamento e randomização da amostra, três ortodontistas calibrados marcaram a localização de 15 pontos cefalométricos em cada imagem utilizando o sistema de coordenadas x e y. Os resultados mostraram que as marcações dos pontos cefalométricos apresentaram concordância de reprodutibilidade tanto intra como interexaminador, exceto para os pontos Go, Po, Or, B e Pog . Os diferentes formatos de arquivo mostraram resultados estatisticamente semelhantes para cada ponto e eixo aferido. As compressões JPEG e TIFF estudadas não tiveram efeito, em imagens de telerradiografias em norma lateral, na reprodutibilidade intra e interexaminadores da marcação dos pontos cefalométricos testados.(AU)

AVALIAÇÃO DA REPRODUTIBILIDADE DE PONTOS CEFALOMÉTRICOS NAS TELERRADIOGRAFIAS DIGITAIS EM NORMA LATERAL NOS FORMATOS DICOM, TIFF E JPEG

A imagem radiográfica digital adquirida pelo sistema de placa de fósforo foto ativada é normalmente visualizada no monitor do computador no formato DICOM, caracterizado pela alta resolução das imagens. Como este formato ocupa muito espaço para armazenamento, as imagens digitais são submetidas a uma compressão, que otimiza a capacidade de espaço dos computadores e reduz o tempo de transmissão pela Internet. O objetivo desse estudo foi avaliar a influência da compressão TIFF e JPEG na reprodutibilidade intra e interexaminador da marcação de pontos cefalométricos em imagens de telerradiografias em norma lateral comparadas com o formato DICOM. A amostra consistiu de 90 imagens de telerradiografias obtidas a partir de 30 indivíduos, dos quais se obteve uma radiografia digital exibida no formato DICOM. Estas imagens foram convertidas para os formatos JPEG, com Fator de Qualidade 80 e TIFF. Após o cegamento e randomização da amostra, três ortodontistas calibrados marcaram a localização de 15 pontos cefalométricos em cada imagem utilizando o sistema de coordenadas x e y. Os resultados mostraram que as marcações dos pontos cefalométricos apresentaram concordância de reprodutibilidade tanto intra como interexaminador, exceto para os pontos Go, Po, Or, B e Pog . Os diferentes formatos de arquivo mostraram resultados estatisticamente semelhantes para cada ponto e eixo aferido. As compressões JPEG e TIFF estudadas não tiveram efeito, em imagens de telerradiografias em norma lateral, na reprodutibilidade intra e interexaminadores da marcação dos pontos cefalométricos testados.(AU)

Q meter TS-617B/U.

"February 1956."

AVALIAÇÃO DA REPRODUTIBILIDADE DE PONTOS CEFALOMÉTRICOS NAS TELERRADIOGRAFIAS DIGITAIS EM NORMA LATERAL NOS FORMATOS DICOM, TIFF E JPEG

A imagem radiográfica digital adquirida pelo sistema de placa de fósforo foto ativada é normalmente visualizada no monitor do computador no formato DICOM, caracterizado pela alta resolução das imagens. Como este formato ocupa muito espaço para armazenamento, as imagens digitais são submetidas a uma compressão, que otimiza a capacidade de espaço dos computadores e reduz o tempo de transmissão pela Internet. O objetivo desse estudo foi avaliar a influência da compressão TIFF e JPEG na reprodutibilidade intra e interexaminador da marcação de pontos cefalométricos em imagens de telerradiografias em norma lateral comparadas com o formato DICOM. A amostra consistiu de 90 imagens de telerradiografias obtidas a partir de 30 indivíduos, dos quais se obteve uma radiografia digital exibida no formato DICOM. Estas imagens foram convertidas para os formatos JPEG, com Fator de Qualidade 80 e TIFF. Após o cegamento e randomização da amostra, três ortodontistas calibrados marcaram a localização de 15 pontos cefalométricos em cada imagem utilizando o sistema de coordenadas x e y. Os resultados mostraram que as marcações dos pontos cefalométricos apresentaram concordância de reprodutibilidade tanto intra como interexaminador, exceto para os pontos Go, Po, Or, B e Pog . Os diferentes formatos de arquivo mostraram resultados estatisticamente semelhantes para cada ponto e eixo aferido. As compressões JPEG e TIFF estudadas não tiveram efeito, em imagens de telerradiografias em norma lateral, na reprodutibilidade intra e interexaminadores da marcação dos pontos cefalométricos testados.(AU)

Numerically optimized implementations, mitigation and simulations of polarisation mode dispersion in real-time transmission systems

The aim of this thesis is to present numerical investigations of the polarisation mode dispersion (PMD) effect. Outstanding issues on the side of the numerical implementations of PMD are resolved and the proposed methods are further optimized for computational efficiency and physical accuracy. Methods for the mitigation of the PMD effect are taken into account and simulations of transmission system with added PMD are presented. The basic outline of the work focusing on PMD can be divided as follows. At first the widely-used coarse-step method for simulating the PMD phenomenon as well as a method derived from the Manakov-PMD equation are implemented and investigated separately through the distribution of a state of polarisation on the Poincaré sphere, and the evolution of the dispersion of a signal. Next these two methods are statistically examined and compared to well-known analytical models of the probability distribution function (PDF) and the autocorrelation function (ACF) of the PMD phenomenon. Important optimisations are achieved, for each of the aforementioned implementations in the computational level. In addition the ACF of the coarse-step method is considered separately, based on the result which indicates that the numerically produced ACF, exaggerates the value of the correlation between different frequencies. Moreover the mitigation of the PMD phenomenon is considered, in the form of numerically implementing Low-PMD spun fibres. Finally, all the above are combined in simulations that demonstrate the impact of the PMD on the quality factor (Q=factor) of different transmission systems. For this a numerical solver based on the coupled nonlinear Schrödinger equation is created which is otherwise tested against the most important transmission impairments in the early chapters of this thesis.

Electromechanical resonators as measuring transducers

With the increasing use of digital computers for data acquisition and digital process control, frequency domain transducers have become very attractive due to their virtual digital output. Essentially they are electrically maintained oscillators where the sensor is the controlling resonator.They are designed to make the frequency a function of the physical parameter being measured. Because of their high quality factor, mechanical resonators give very good frequency stability and are widely used as sensors. For this work symmetrical mechanical resonators such as the tuning fork were considered, to be the most promising. These are dynamically clamped and can be designed to have extensive regions where no vibrations occur.This enables the resonators to be robustly mounted in a way convenient for various applications. Designs for the measurement of fluid density and tension have been produced. The principle of the design of the resonator for fluid density measurement is a thin gap (trapping a lamina of fluid) between its two members which vibrate in antiphase.An analysis of the inter­ action between this resonator and the fluid lamina has carried out.In gases narrow gaps are needed for a good sensitivity and the use of the material fused quartz, because of its low density and very low temperature coefficient, is ideally suitable. In liquids an adequate sensitivity is achieved even with a wide lamina gap. Practical designs of such transducers have been evolved. The accuracy for liquid measurements is better than 1%. For gases it was found that, in air, a change of atmospheric pressure of 0.3% could be detected. In constructing a tension transducer using such a mechanical sensor as a wire or a beam, major difficulties are encountered in making an efficient clamping arrangement for the sensor. The use of dynamically clamped beams has been found to overcome the problem and this is the basis of the transducer investigated.

Fundamental characteristics of space-charge waves in photorefractive sillenite crystals

We investigate experimentally the fundamental characteristics of space-charge waves excited in a photorefractive crystal of Bi12SiO20. Features such as their transient rise and decay as well as their steady-state frequency response are investigated. Based on this, we find the dependence of the space-charge waves' quality factor on spatial frequency and electric-field biasing. The experimental findings are compared with the linear space-charge wave theory developed previously by Sturman et al. [J. Opt. Sec. Am. B 10, 1919 (1993)].

Fundamental characteristics of space-charge waves in photorefractive sillenite crystals

We investigate experimentally the fundamental characteristics of space-charge waves excited in a photorefractive crystal of Bi12SiO20. Features such as their transient rise and decay as well as their steady-state frequency response are investigated. Based on this, we find the dependence of the space-charge waves' quality factor on spatial frequency and electric-field biasing. The experimental findings are compared with the linear space-charge wave theory developed previously by Sturman et al. [J. Opt. Sec. Am. B 10, 1919 (1993)].

Salient elements in novice solutions to code writing problems

This paper presents an approach to the evaluation of novice programmers' solutions to code writing problems. The first step was the development a framework comprised of the salient elements, or programming constructs, used in a set of student solutions to three typical code writing assessment problems. This framework was then refined to provide a code quality factor framework that was compared with an analysis using the SOLO taxonomy. We found that combining our framework with the SOLO taxonomy helped to define the SOLO categories and provided an improved approach to applying the principles of SOLO to code writing problems. © 2011, Australian Computer Society, Inc.

Periodic polymer photonic bandgap structures for on-chip optical cavities

Integrated on-chip optical platforms enable high performance in applications of high-speed all-optical or electro-optical switching, wide-range multi-wavelength on-chip lasing for communication, and lab-on-chip optical sensing. Integrated optical resonators with high quality factor are a fundamental component in these applications. Periodic photonic structures (photonic crystals) exhibit a photonic band gap, which can be used to manipulate photons in a way similar to the control of electrons in semiconductor circuits. This makes it possible to create structures with radically improved optical properties. Compared to silicon, polymers offer a potentially inexpensive material platform with ease of fabrication at low temperatures and a wide range of material properties when doped with nanocrystals and other molecules. In this research work, several polymer periodic photonic structures are proposed and investigated to improve optical confinement and optical sensing. We developed a fast numerical method for calculating the quality factor of a photonic crystal slab (PhCS) cavity. The calculation is implemented via a 2D-FDTD method followed by a post-process for cavity surface energy radiation loss. Computational time is saved and good accuracy is demonstrated compared to other published methods. Also, we proposed a novel concept of slot-PhCS which enhanced the energy density 20 times compared to traditional PhCS. It combines both advantages of the slot waveguide and photonic crystal to localize the high energy density in the low index material. This property could increase the interaction between light and material embedded with nanoparticles like quantum dots for active device development. We also demonstrated a wide range bandgap based on a one dimensional waveguide distributed Bragg reflector with high coupling to optical waveguides enabling it to be easily integrated with other optical components on the chip. A flexible polymer (SU8) grating waveguide is proposed as a force sensor. The proposed sensor can monitor nN range forces through its spectral shift. Finally, quantum dot - doped SU8 polymer structures are demonstrated by optimizing spin coating and UV exposure. Clear patterns with high emission spectra proved the compatibility of the fabrication process for applications in optical amplification and lasing.

Estudo da variação da periodicidade e do acoplamento entre superfícies seletivas de frequência com elementos fractais e helicoidais em estruturas de multicamadas

This work aims to investigate the behavior of fractal and helical elements structures in planar microstrip. In particular, the frequency selective surfaces (FSSs) had changed its conventional elements to fractal and helical formats. The dielectric substrate used was fiberglass (FR-4) and has a thickness of 1.5 mm, a relative permittivity 4.4 and tangent loss equal to 0.02. For FSSs, was adopting the Dürer’s fractal geometry and helical geometry. To make the measurements, we used two antennas horns in direct line of sight, connected by coaxial cable to the vector network analyzer. Some prototypes were select for built and measured. From preliminary results, it was aimed to find practical applications for structures from the cascading between them. For FSSs with Dürer’s fractal elements was observed behavior provided by the multiband fractal geometry, while the bandwidth has become narrow as the level of iteration fractal increased, making it a more selective frequency with a higher quality factor. A parametric analysis allowed the analysis of the variation of the air layer between them. The cascading between fractal elements structure were considered, presented a tri-band behavior for certain values of the layer of air between them, and find applications in the licensed 2.5GHz band (2.3-2.7) and 3.5GHz band (3.3-3.8). For FSSs with helical elements, six structures were considered, namely H0, H1, H2, H3, H4 and H5. The electromagnetic behavior of them was analyzed separately and cascaded. From preliminary results obtained from the separate analysis of structures, including the cascade, the higher the bandwidth, in that the thickness of the air layer increases. In order to find practical applications for helical structures cascaded, the helical elements structure has been cascaded find applications in the X-band (8.0-12.0) and unlicensed band (5.25-5.85). For numerical and experimental characterization of the structures discussed was used, respectively, the commercial software Ansoft Designer and a vector network analyzer, Agilent N5230A model.

Fiber-optic vibration sensing of cantilevers immersed in fluids

An all fiber-optical method to monitor densities and viscosities of liquids utilizing a steel cantilever (4 x 0.3 x 0.08 cm3) is presented. The actuation is performed by photothermally heating the cantilever at its base with an intensity-modulated 808 nm diode laser. The cantilever vibrations are picked up by an in-fiber Fabry Perot cavity sensor attached along the length of the cantilever. The fluid properties can be related to the resonance characteristics of the cantilever, e.g. a shift in the resonance frequency corresponds to a change in fluid density, and the width of the resonance peak gives information on the dynamic viscosity after calibration of the system. Aqueous glycerol, sucrose and ethanol samples in the range of 0.79–1.32 gcm−3 (density) and 0.89–702 mPas (viscosity) were used to investigate the limits of the sensor. A good agreement with literature values could be found with an average deviation of around 10 % for the dynamic viscosities, and 5–16 % for the mass densities. A variety of clear and opaque commercial spirits and an unknown viscous sample, e.g. home-made maple syrup, were analyzed and compared to literature values. The unique detection mechanism allows for the characterization of opaque samples and is superior to conventional microcantilever sensors. The method is expected to be beneficial in various industrial sectors such as quality control of food samples.

Microcantilever sensors for biochemical detection and analysis

Biochemical agents, including bacteria and toxins, are potentially dangerous and responsible for a wide variety of diseases. Reliable detection and characterization of small samples is necessary in order to reduce and eliminate their harmful consequences. Microcantilever sensors offer a potential alternative to the state of the art due to their small size, fast response time, and the ability to operate in air and liquid environments. At present, there are several technology limitations that inhibit application of microcantilever to biochemical detection and analysis, including difficulties in conducting temperature-sensitive experiments, material inadequacy resulting in insufficient cell capture, and poor selectivity of multiple analytes. This work aims to address several of these issues by introducing microcantilevers having integrated thermal functionality and by introducing nanocrystalline diamond as new material for microcantilevers. Microcantilevers are designed, fabricated, characterized, and used for capture and detection of cells and bacteria. The first microcantilever type described in this work is a silicon cantilever having highly uniform in-plane temperature distribution. The goal is to have 100 μm square uniformly heated area that can be used for thermal characterization of films as well as to conduct chemical reactions with small amounts of material. Fabricated cantilevers can reach above 300C while maintaining temperature uniformity of 2−4%. This is an improvement of over one order of magnitude over currently available cantilevers. The second microcantilever type is a doped single crystal silicon cantilever having a thin coating of ultrananocrystalline diamond (UNCD). The primary application of such a device is in biological testing, where diamond acts as a stable, electrically isolated reaction surface while silicon layer provides controlled heating with minimum variations in temperature. This work shows that composite cantilevers of this kind are an effective platform for temperature-sensitive biological experiments, such as heat lysing and polymerase chain reaction. The rapid heat-transfer of Si-UNCD cantilever compromised the membrane of NIH 3T3 fibroblast and lysed the cell nucleus within 30 seconds. Bacteria cells, Listeria monocytogenes V7, were shown to be captured with biotinylated heat-shock protein on UNCD surface and 90% of all viable cells exhibit membrane porosity due to high heat in 15 seconds. Lastly, a sensor made solely from UNCD diamond is fabricated with the intention of being used to detect the presence of biological species by means of an integrated piezoresistor or through frequency change monitoring. Since UNCD diamond has not been previously used in piezoresistive applications, temperature-denpendent piezoresistive coefficients and gage factors are determined first. The doped UNCD exhibits a significant piezoresistive effect with gauge factor of 7.53±0.32 and a piezoresistive coefficient of 8.12×10^−12 Pa^−1 at room temperature. The piezoresistive properties of UNCD are constant over the temperature range of 25−200C. 300 μm long cantilevers have the highest sensitivity of 0.186 m-Ohm/Ohm per μm of cantilever end deflection, which is approximately half that of similarly sized silicon cantilevers. UNCD cantilever arrays were fabricated consisting of four sixteen-cantilever arrays of length 20–90 μm in addition to an eight-cantilever array of length 120 μm. Laser doppler vibrometry (LDV) measured the cantilever resonant frequency, which ranged as 218 kHz−5.14 MHz in air and 73 kHz−3.68 MHz in water. The quality factor of the cantilever was 47−151 in air and 18−45 in water. The ability to measure frequencies of the cantilever arrays opens the possibility for detection of individual bacteria by monitoring frequency shift after cell capture.

Comparison of High Q microresonators operating on a thin plate mode : the Lamé-mode

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