Effects of Thermocapillary Convection on the Growth Process in Industrial 8-inch Silicon Czochralski Growth

Czochralski (CZ) crystal growth process is a widely used technique in manufacturing of silicon crystals and other semiconductor materials. The ultimate goal of the IC industry is to have the highest quality substrates, which are free of point defect, impurities and micro defect clusters. The scale up of silicon wafer size from 200 mm to 300 mm requires large crucible size and more heat power. Transport phenomena in crystal growth processes are quite complex due to melt and gas flows that may be oscillatory and/or turbulent, coupled convection and radiation, impurities and dopant distributions, unsteady kinetics of the growth process, melt crystal interface dynamics, free surface and meniscus, stoichiometry in the case of compound materials. A global model has been developed to simulate the temperature distribution and melt flow in an 8-inch system. The present program features the fluid convection, magnetohydrodynamics, and radiation models. A multi-zone method is used to divide the Cz system into different zones, e.g., the melt, the crystal and the hot zone. For calculation of temperature distribution, the whole system inside the stainless chamber is considered. For the convective flow, only the melt is considered. The widely used zonal method divides the surface of the radiation enclosure into a number of zones, which has a uniform distribution of temperature, radiative properties and composition. The integro-differential equations for the radiative heat transfer are solved using the matrix inversion technique. The zonal method for radiative heat transfer is used in the growth chamber, which is confined by crystal surface, melt surface, heat shield, and pull chamber. Free surface and crystal/melt interface are tracked using adaptive grid generation. The competition between the thermocapillary convection induced by non-uniform temperature distributions on the free surface and the forced convection by the rotation of the crystal determines the interface shape, dopant distribution, and striation pattern. The temperature gradients on the free surface are influenced by the effects of the thermocapillary force on the free surface and the rotation of the crystal and the crucible.

Studies of the effects of industrial pollution in the lower Patapsco river area: 1. Curtis Bay Region 1941

Industrial effluents in the lower Patapsco area, which constitutes the navigable portion of the river and includes Baltimore Harbor, are many and include waste acid, distillery waters, tannery wastes and copper as (ferrous sulphate) from pigment and steel industries. (PDF contains 22 pages (2 on 1)

Comunicaciones integradas feriales o como planificar con éxito una feria industrial

En este artículo se explica que la feria es una herramienta comercial utilizada habitualmente en el área de Marketing Industrial y que, a pesar de las ventajas que ofrece, recibe diversas críticas. Los frenos a su utilización están muy relacionados con la inversión que suponen tanto en recursos económicos como humanos. En definitiva, la feria es una herramienta con una gran potencialidad pero que requiere de un proceso de planificación riguroso y sistemático, con unos objetivos claros y definidos a partir de la estrategia de marketing global de la empresa. La aplicación del concepto de Comunicaciones Integradas Feriales pretende garantizar al expositor la optimización del esfuerzo realizado, maximizando el valor que las distintas herramientas de Marketing pueden aportar al programa ferial.