Transport and mixing enhancement in fluid-thermal microsystems

En esta tesis se investiga de forma experimental el transporte pasivo de magnitudes físicas en micro-sistemas con carácter de inmediata aplicación industrial, usando métodos innovadores para mejorar la eficiencia de los mismos optimizando parámetros críticos del diseño o encontrar nuevos destinos de posible aplicación. Parte de los resultados obtenidos en estos experimentos han sido publicados en revistas con un índice de impacto tal que pertenecen al primer cuarto del JCR. Primero de todo se ha analizado el efecto que produce en un intercambiador de calor basado en micro-canales el hecho de dejar un espacio entre canales y tapa superior para la interconexión de los mismos. Esto genera efectos tridimensionales que mejoran la exracción de calor del intercambiador y reducen la caída de presión que aparece por el transcurso del fluido a través de los micro-canales, lo que tiene un gran impacto en la potencia que ha de suministrar la bomba de refrigerante. Se ha analizado también la mejora producida en términos de calor disipado de un micro-procesador refrigerado con un ampliamente usado plato de aletas al implementar en éste una cámara de vapor que almacena un fluido bifásico. Se ha desarrollado de forma paralela un modelo numérico para optimizar las nuevas dimensiones del plato de aletas modificado compatibles con una serie de requerimientos de diseño en el que tanto las dimensiones como el peso juegan un papel esencial. Por otro lado, se han estudiado los fenomenos fluido-dinámicos que aparecen aguas abajo de un cuerpo romo en el seno de un fluido fluyendo por un canal con una alta relación de bloqueo. Los resultados de este estudio confirman, de forma experimental, la existencia de un régimen intermedio, caracterizado por el desarrollo de una burbuja de recirculación oscilante entre los regímenes, bien diferenciados, de burbuja de recirculación estacionaria y calle de torbellinos de Karman, como función del número de Reynolds del flujo incidente. Para la obtención, análisis y post-proceso de los datos, se ha contado con la ayuda de un sistema de Velocimetría por Imágenes de Partículas (PIV). Finalmente y como adición a este último punto, se ha estudiado las vibraciones de un cuerpo romo producidas por el desprendimiento de torbellinos en un canal de alta relación de bloqueo con la base obtenida del estudio anterior. El prisma se mueve con un movimiento armónico simple para un intervalo de números de Reynolds y este movimiento se transforma en vibración alrededor de su eje a partir de un ciero número de Reynolds. En relación al fluido, el régimen de desprendimiento de torbellinos se alcanza a menores números de Reynolds que en el caso de tener el cuerpo romo fijo. Uniendo estos dos registros de movimientos y variando la relación de masas entre prisma y fluido se obtiene un mapa con diferentes estados globales del sistema. Esto no solo tiene aplicación como método para promover el mezclado sino también como método para obtener energía a partir del movimiento del cuerpo en el seno del fluido. Abstract In this thesis, experimental research focused on passive scalar transport is performed in micro-systems with marked sense of industrial application, using innovative methods in order to obtain better performances optimizing critical design parameters or finding new utilities. Part of the results obtained in these experiments have been published into high impact factor journals belonged to the first quarter of the Journal Citation Reports (JCR). First of all the effect of tip clearance in a micro-channel based heat sink is analyzed. Leaving a gap between channels and top cover, letting the channels communicate each other causes three-dimensional effects which improve the heat transfer between fluid and heat sink and also reducing the pressure drop caused by the fluid passing through the micro-channels which has a great impact on the total cooling pumping power needed. It is also analyzed the enhancement produced in terms of dissipated heat in a micro-processor cooling system by improving the predominantly used fin plate with a vapour chamber based heat spreader which contains a two-phase fluid inside. It has also been developed at the same time a numerical model to optimize the new fin plate dimensions compatible with a series of design requirements in which both size and wight plays a very restrictive role. On the other hand, fluid-dynamics phenomena that appears downstream of a bluff body in the bosom of a fluid flow with high blockage ratio has been studied. This research experimentally confirms the existence of an intermediate regime characterized by an oscillating closed recirculation bubble intermediate regime between the steady closed recirculation bubble regime and the vortex shedding regime (Karman street like regime) as a function of the incoming flow Reynolds number. A particle image velocimetry technique (PIV) has been used in order to obtain, analyze and post-process the fluid-dynamic data. Finally and as an addition to the last point, a study on the vortexinduced vibrations (VIV) of a bluff body inside a high blockage ratio channel has been carried out taking advantage of the results obtained with the fixed square prism. The prism moves with simple harmonic motion for a Reynolds number interval and this movement becomes vibrational around its axial axis after overcoming at definite Reynolds number. Regarding the fluid, vortex shedding regime is reached at Reynolds numbers lower than the previous critical ones. Merging both movement spectra and varying the square prism to fluid mass ratio, a map with different global states is reached. This is not only applicable as a mixing enhancement technique but as an energy harvesting method.

Transverse galloping of two-dimensional bodies having a rhombic cross-section

Transverse galloping is a type of aeroelastic instability characterized by oscillations perpendicular to wind direction, large amplitude and low frequency, which appears in some elastic two-dimensional bluff bodies when they are subjected to an incident flow, provided that the flow velocity exceeds a threshold critical value. Understanding the galloping phenomenon of different cross-sectional geometries is important in a number of engineering applications: for energy harvesting applications the interest relies on strongly unstable configurations but in other cases the purpose is to avoid this type of aeroelastic phenomenon. In this paper the aim is to analyze the transverse galloping behavior of rhombic bodies to understand, on the one hand, the dependence of the instability with a geometrical parameter such as the relative thickness and, on the other hand, why this cross-section shape, that is generally unstable, shows a small range of relative thickness values where it is stable. Particularly, the non-galloping rhombus-shaped prism?s behavior is revised through wind tunnel experiments. The bodies are allowed to freely move perpendicularly to the incoming flow and the amplitude of movement and pressure distributions on the surfaces is measured.

CMOS integration of AlN based piezoelectric microcantilevers

El gran crecimiento de los sistemas MEMS (Micro Electro Mechanical Systems) así como su presencia en la mayoría de los dispositivos que usamos diariamente despertó nuestro interés. Paralelamente, la tecnología CMOS (Complementary Metal Oxide Semiconductor) es la tecnología más utilizada para la fabricación de circuitos integrados. Además de ventajas relacionadas con el funcionamiento electrónico del dispositivo final, la integración de sistemas MEMS en la tecnología CMOS reduce significantemente los costes de fabricación. Algunos de los dispositivos MEMS con mayor variedad de aplicaciones son los microflejes. Estos dispositivos pueden ser utilizados para la extracción de energía, en microscopios de fuerza atómica o en sensores, como por ejemplo, para biodetección. Los materiales piezoeléctricos más comúnmente utilizados en aplicaciones MEMS se sintetizan a altas temperaturas y por lo tanto no son compatibles con la tecnología CMOS. En nuestro caso hemos usado nitruro de alumino (AlN), que se deposita a temperatura ambiente y es compatible con la tecnología CMOS. Además, es biocompatible, y por tanto podría formar parte de un dispositivo que actúe como biosensor. A lo largo de esta tesis hemos prestado especial atención en desarrollar un proceso de fabricación rápido, reproducible y de bajo coste. Para ello, todos los pasos de fabricación han sido minuciosamente optimizados. Los parámetros de sputtering para depositar el AlN, las distintas técnicas y recetas de ataque, los materiales que actúan como electrodos o las capas sacrificiales para liberar los flejes son algunos de los factores clave estudiados en este trabajo. Una vez que la fabricación de los microflejes de AlN ha sido optimizada, fueron medidos para caracterizar sus propiedades piezoeléctricas y finalmente verificar positivamente su viabilidad como dispositivos piezoeléctricos. ABSTRACT The huge growth of MEMS (Micro Electro Mechanical Systems) as well as their presence in most of our daily used devices aroused our interest on them. At the same time, CMOS (Complementary Metal Oxide Semiconductor) technology is the most popular technology for integrated circuits. In addition to advantages related with the electronics operation of the final device, the integration of MEMS with CMOS technology reduces the manufacturing costs significantly. Some of the MEMS devices with a wider variety of applications are the microcantilevers. These devices can be used for energy harvesting, in an atomic force microscopes or as sensors, as for example, for biodetection. Most of the piezoelectric materials used for these MEMS applications are synthesized at high temperature and consequently are not compatible with CMOS technology. In our case we have used aluminum nitride (AlN), which is deposited at room temperature and hence fully compatible with CMOS technology. Otherwise, it is biocompatible and and can be used to compose a biosensing device. During this thesis work we have specially focused our attention in developing a high throughput, reproducible and low cost fabrication process. All the manufacturing process steps of have been thoroughly optimized in order to achieve this goal. Sputtering parameters to synthesize AlN, different techniques and etching recipes, electrode material and sacrificial layers are some of the key factors studied in this work to develop the manufacturing process. Once the AlN microcantilevers fabrication was optimized, they were measured to characterize their piezoelectric properties and to successfully check their viability as piezoelectric devices.

Aerodinámica experimental de elementos de parques energéticos

La creciente demanda de energía eléctrica y la necesidad de implementar energías no contaminantes hace que las llamadas tecnologías verdes sean cada día más solicitadas. Entre estas tecnologías encontramos la energía solar y la energía eólica; ambas tienen una trayectoria de uso e investigación bastante amplia, sin embargo aún presentan problemas de fondo que impiden dar mayor impulso a su uso. El objetivo de la presente tesis es presentar soluciones a problemas de optimización en campos conversores de energía. Para ello se analizan y resuelven dos problemas por medio de técnicas de aerodinámica experimental: el primero sobre campos de colectores solares y el segundo sobre campos eólicos. Las técnicas de medición utilizadas en aerodinámica, y en el presente trabajo, son: medición de cargas, anemometría de hilo caliente, velocimetría por imagen de partículas y escaneo de presiones; además de un análisis estadístico de los datos. En el primer caso se ensayan experimentalmente colectores solares parabólicos en donde, por cuestiones de seguridad o por protección contra el viento, se utilizan cercas. Éstas modifican el comportamiento del flujo corriente abajo y se ha encontrado que la distancia a la cual se colocan, así como el tipo de cercas (sólida o permeable), modifican las cargas estructurales a las que los colectores están expuestos. Los resultados demuestran que existe una distancia crítica en la cual la presencia de la cerca aumenta la carga en lugar de disminuirla, por lo cual la selección adecuada del parapeto y la distancia a la cual se coloca son de suma importancia para la optimización de la estructura. En el segundo caso se ensaya experimentalmente y simula numéricamente la estela de turbinas eólicas por medio de discos porosos. En donde un disco permeable simula el rotor de una turbina. El disco es capaz de semejar la estela y los efectos que ésta puede causar corriente abajo. Los resultados muestran que seleccionando adecuadamente la porosidad, es posible simular coeficientes de empuje similares a los desarrollados por los aerogeneradores, además la estela y sus efectos son semejantes a los medidos en campo. ABSTRACT The called green energy technologies are increasingly required because of the growing demand for electricity and the need to implement nonpolluting energy. Among the green energy technologies it is found the solar and the wind energy, both have a history of use and fairly extensive research; however they still have problems which limit to give them further impetus to its use. The aim of this thesis is to present solutions to optimization problems in energy harvesting. To this end it is analysed, and solved, two problems by means of techniques in experimental aerodynamics: the first issue with regard to parabolic troughs and the second about wind farms. The measurement techniques commonly used in aerodynamics, and used in this research work, are: measurement of loads, hot wire anemometry, particle image velocimetry and scanning of pressures; where data are collected and then an statistical analysis is done. In the first case it is tested parabolic troughs where, either for security reasons or protection against the wind actions, fences are used. These fences modify the behaviour of flow downstream and it was found that the distance at which they are placed, and the type of fences (solid or permeable) modify the structural loads to which the parabolic troughs are exposed. The results show that there is a critical distance at which the presence of the fence increases the load instead of protecting the parabolic trough, hence making the proper selection of the parapet and the distance at which it stands are paramount for the optimization of the structure. In the second case it is tested, experimentally and numerically, the wake of wind turbines by means of porous disks; where the permeable disc simulates a turbine rotor. The disc is able to mimic the wake and the effects that it can cause downstream. The results show that by properly selecting the porosity, it is possible to simulate drag coefficients similar to those developed by wind turbines; moreover the porous disk wake and its effects are similar to those measured on field.

Responsivity and resonant properties of dipole, bowtie, and spiral Seebeck nanoantennas

Seebeck nanoantennas, which are based on the thermoelectric effect, have been proposed for electromagnetic energy harvesting and infrared detection. The responsivity and frequency dependence of three types of Seebeck nanoantennas is obtained by electromagnetic simulation for different materials. Results show that the square spiral antenna has the widest bandwidth and the highest induced current of the three analyzed geometries. However, the geometry that presented the highest temperature gradient was the bowtie antenna, which favors the thermoelectric effect in a Seebeck nanoantenna. The results also show that these types of devices can present a voltage responsivity as high as 36  μV/W36  μV/W for titanium–nickel dipoles resonant at far-infrared wavelengths.

Towards Batteryless Cardiac Implantable Electronic Devices – The Swiss Way

Energy harvesting devices are widely discussed as an alternative power source for todays active implantable medical devices. Repeated battery replacement procedures can be avoided by extending the implants life span, which is the goal of energy harvesting concepts. This reduces the risk of complications for the patient and may even reduce device size. The continuous and powerful contractions of a human heart ideally qualify as a battery substitute. In particular, devices in close proximity to the heart such as pacemakers, defibrillators or bio signal (ECG) recorders would benefit from this alternative energy source. The clockwork of an automatic wristwatch was used to transform the hearts kinetic energy into electrical energy. In order to qualify as a continuous energy supply for the consuming device, the mechanism needs to demonstrate its harvesting capability under various conditions. Several in-vivo recorded heart motions were used as input of a mathematical model to optimize the clockworks original conversion efficiency with respect to myocardial contractions. The resulting design was implemented and tested during in-vitro and in-vivo experiments, which demonstrated the superior sensitivity of the new design for all tested heart motions.

Determination of excitation profile and dielectric function spatial nonuniformity in porous silicon by using WKB approach

We develop an analytical model based on the WKB approach to evaluate the experimental results of the femtosecond pump-probe measurements of the transmittance and reflectance obtained on thin membranes of porous silicon. The model allows us to retrieve a pump-induced nonuniform complex dielectric function change along the membrane depth. We show that the model fitting to the experimental data requires a minimal number of fitting parameters while still complying with the restriction imposed by the Kramers-Kronig relation. The developed model has a broad range of applications for experimental data analysis and practical implementation in the design of devices involving a spatially nonuniform dielectric function, such as in biosensing, wave-guiding, solar energy harvesting, photonics and electro-optical devices.

Inspection of parts with complex geometry and welds with structural health monitoring techniques

Structural Health Monitoring (SHM) systems were developed to evaluate the integrity of a system during operation, and to quickly identify the maintenance problems. They will be used in future aerospace vehicles to improve safety, reduce cost and minimize the maintenance time of a system. Many SHM systems were already developed to evaluate the integrity of plates and used in marine structures. Their implementation in manufacturing processes is still expected. The application of SHM methods for complex geometries and welds are two important challenges in this area of research. This research work started by studying the characteristics of piezoelectric actuators, and a small energy harvester was designed. The output voltages at different frequencies of vibration were acquired to determine the nonlinear characteristics of the piezoelectric stripe actuators. The frequency response was evaluated experimentally. AA battery size energy harvesting devices were developed by using these actuators. When the round and square cross section devices were excited at 50 Hz frequency, they generated 16 V and 25 V respectively. The Surface Response to Excitation (SuRE) and Lamb wave methods were used to estimate the condition of parts with complex geometries. Cutting tools and welded plates were considered. Both approaches used piezoelectric elements that were attached to the surfaces of considered parts. The variation of the magnitude of the frequency response was evaluated when the SuRE method was used. The sum of the square of the differences was calculated. The envelope of the received signal was used for the analysis of wave propagation. Bi-orthogonal wavelet (Binlet) analysis was also used for the evaluation of the data obtained during Lamb wave technique. Both the Lamb wave and SuRE approaches along with the three methods for data analysis worked effectively to detect increasing tool wear. Similarly, they detected defects on the plate, on the weld, and on a separate plate without any sensor as long as it was welded to the test plate.

Hybrid Power System Intelligent Operation and Protection Involving Plug-in Electric Vehicles

Two key solutions to reduce the greenhouse gas emissions and increase the overall energy efficiency are to maximize the utilization of renewable energy resources (RERs) to generate energy for load consumption and to shift to low or zero emission plug-in electric vehicles (PEVs) for transportation. The present U.S. aging and overburdened power grid infrastructure is under a tremendous pressure to handle the issues involved in penetration of RERS and PEVs. The future power grid should be designed with for the effective utilization of distributed RERs and distributed generations to intelligently respond to varying customer demand including PEVs with high level of security, stability and reliability. This dissertation develops and verifies such a hybrid AC-DC power system. The system will operate in a distributed manner incorporating multiple components in both AC and DC styles and work in both grid-connected and islanding modes. The verification was performed on a laboratory-based hybrid AC-DC power system testbed as hardware/software platform. In this system, RERs emulators together with their maximum power point tracking technology and power electronics converters were designed to test different energy harvesting algorithms. The Energy storage devices including lithium-ion batteries and ultra-capacitors were used to optimize the performance of the hybrid power system. A lithium-ion battery smart energy management system with thermal and state of charge self-balancing was proposed to protect the energy storage system. A grid connected DC PEVs parking garage emulator, with five lithium-ion batteries was also designed with the smart charging functions that can emulate the future vehicle-to-grid (V2G), vehicle-to-vehicle (V2V) and vehicle-to-house (V2H) services. This includes grid voltage and frequency regulations, spinning reserves, micro grid islanding detection and energy resource support. The results show successful integration of the developed techniques for control and energy management of future hybrid AC-DC power systems with high penetration of RERs and PEVs.

Controllo ultra-low power di un modulatore back-scattering per applicazioni di localizzazione in sistemi RFID

In questa tesi viene elaborata un'applicazione ultra-low power (ULP) basata su microcontrollore, per implementare la procedura di controllo di diversi circuiti di un tag RFID. Il tag preso in considerazione è pensato per lavorare in assenza di batteria, da cui la necessita' di ridurre i consumi di potenza. La sua attivazione deve essere inoltre comandata attraverso un'architettura Wake up Radio (WuR), in cui un segnale di controllo radio indirizza e attiva il circuito. Nello specifico, la rete di decodifica dell'indirizzo è stata realizzata mediante il modulo di comunicazione seriale del microcontrollore. Nel Capitolo 1 verrà introdotto il tema dell'Energy Harvesting. Nel Capitolo 2 verrà illustrata l'architettura del sistema nel suo complesso. Nel Capitolo 3 verrà spiegato dettagliatamente il funzionamento del microcontrollore scelto. Il Capitolo 4 sarà dedicato al firmware implementato per svolgere le operazioni fondamentali imputate al micro per i compiti di controllo. Verrà inoltre introdotto il codice VHDL sviluppato per emulare l'output del modulo WuR mediante un FPGA della famiglia Cyclone II. Nel Capitolo 5 verrà presentata una stima dei consumi del microcontrollore in funzione dei parametri di configurazione del sistema. Verrà inoltre effettuato un confronto con un altro microcontrollore che in alcune condizioni potrebbe rappresentare iun'alternativa valida di progetto. Nei Capitoli 6 e 7 saranno descritti possibili sviluppi futuri e conclusioni del progetto. Le specifiche di progetto rilevanti della tesi sono: 1. minimo consumo energetico possibile del microcontrollore ULP 2. elevata rapidità di risposta per la ricezione dei tag, per garantire la ricezione di un numero maggiore possibile di indirizzi (almeno 20 letture al secondo), in un range di tempo limitato 3. generazione di un segnale PWM a 100KHz di frequenza di commutazione con duty cycle 50% su cui basare una modulazione in back-scattering.

Dispositivi di recupero energetico: la valvola di regolazione GreenValve del Politecnico di Milano

Oggetto della trattazione è il recupero di energia da parte di una valvola idraulica durante il processo di regolazione del flusso di corrente in un impianto. Questa valvola di regolazione, detta GreenValve, è un brevetto del Politecnico di Milano, ad opera del Prof. Ing. Stefano Malavasi coadiuvato da un gruppo di ricercatori e tesisti, tra i quali spicca il nome di Cecilia Paris. Cecilia ha incentrato il proprio lavoro sull’analisi teorica e sperimentale della “Valvola Verde”, ed è dalla sua Tesi che il suddetto elaborato trae ispirazione.

Towards the design of monolithic decoupled XYZ compliant parallel mechanisms for multi-function applications

This paper deals with the monolithic decoupled XYZ compliant parallel mechanisms (CPMs) for multi-function applications, which can be fabricated monolithically without assembly and has the capability of kinetostatic decoupling. At first, the conceptual design of monolithic decoupled XYZ CPMs is presented using identical spatial compliant multi-beam modules based on a decoupled 3-PPPR parallel kinematic mechanism. Three types of applications: motion/positioning stages, force/acceleration sensors and energy harvesting devices are described in principle. The kinetostatic and dynamic modelling is then conducted to capture the displacements of any stage under loads acting at any stage and the natural frequency with the comparisons with FEA results. Finally, performance characteristics analysis for motion stage applications is detailed investigated to show how the change of the geometrical parameter can affect the performance characteristics, which provides initial optimal estimations. Results show that the smaller thickness of beams and larger dimension of cubic stages can improve the performance characteristics excluding natural frequency under allowable conditions. In order to improve the natural frequency characteristic, a stiffness-enhanced monolithic decoupled configuration that is achieved through employing more beams in the spatial modules or reducing the mass of each cubic stage mass can be adopted. In addition, an isotropic variation with different motion range along each axis and same payload in each leg is proposed. The redundant design for monolithic fabrication is introduced in this paper, which can overcome the drawback of monolithic fabrication that the failed compliant beam is difficult to replace, and extend the CPM’s life.

Dynamics of the Disk-Pendulum Coupled System With Vertical Excitation

This paper investigates the static and dynamic characteristics of the semi-elliptical rocking disk on which a pendulum pinned. This coupled system’s response is also analyzed analytically and numerically when a vertical harmonic excitation is applied to the bottom of the rocking disk. Lagrange’s Equation is used to derive the motion equations of the disk-pendulum coupled system. The second derivative test for the system’s potential energy shows how the location of the pendulum’s pivotal point affects the number and stability of equilibria, and the change of location presents different bifurcation diagrams for different geometries of the rocking disk. For both vertically excited and unforced cases, the coupled system shows chaos easily, but the proper chosen parameters can still help the system reach and keep the steady state. For the steady state of the vertically excited rocking disk without a pendulum, the variation of the excitation’s amplitude and frequency result in the hysteresis for the amplitude of the response. When a pendulum is pinned on the rocking disk, three major categories of steady states are presently in the numerical way.

A New Method for Modeling Free Surface Flows and Fluid-structure Interaction with Ocean Applications

The computational modeling of ocean waves and ocean-faring devices poses numerous challenges. Among these are the need to stably and accurately represent both the fluid-fluid interface between water and air as well as the fluid-structure interfaces arising between solid devices and one or more fluids. As techniques are developed to stably and accurately balance the interactions between fluid and structural solvers at these boundaries, a similarly pressing challenge is the development of algorithms that are massively scalable and capable of performing large-scale three-dimensional simulations on reasonable time scales. This dissertation introduces two separate methods for approaching this problem, with the first focusing on the development of sophisticated fluid-fluid interface representations and the second focusing primarily on scalability and extensibility to higher-order methods.

We begin by introducing the narrow-band gradient-augmented level set method (GALSM) for incompressible multiphase Navier-Stokes flow. This is the first use of the high-order GALSM for a fluid flow application, and its reliability and accuracy in modeling ocean environments is tested extensively. The method demonstrates numerous advantages over the traditional level set method, among these a heightened conservation of fluid volume and the representation of subgrid structures.

Next, we present a finite-volume algorithm for solving the incompressible Euler equations in two and three dimensions in the presence of a flow-driven free surface and a dynamic rigid body. In this development, the chief concerns are efficiency, scalability, and extensibility (to higher-order and truly conservative methods). These priorities informed a number of important choices: The air phase is substituted by a pressure boundary condition in order to greatly reduce the size of the computational domain, a cut-cell finite-volume approach is chosen in order to minimize fluid volume loss and open the door to higher-order methods, and adaptive mesh refinement (AMR) is employed to focus computational effort and make large-scale 3D simulations possible. This algorithm is shown to produce robust and accurate results that are well-suited for the study of ocean waves and the development of wave energy conversion (WEC) devices.

Supercapattery based on binder-free Co3 (PO4)2·8H2O multilayer nano/microflakes on nickel foam

A binder-free cobalt phosphate hydrate (Co3(PO4)2·8H2O) multilayer nano/microflake structure is synthesized on nickel foam (NF) via a facile hydrothermal process. Four different concentrations (2.5, 5, 10, and 20 mM) of Co2+ and PO4–3 were used to obtain different mass loading of cobalt phosphate on the nickel foam. The Co3(PO4)2·8H2O modified NF electrode (2.5 mM) shows a maximum specific capacity of 868.3 C g–1 (capacitance of 1578.7 F g–1) at a current density of 5 mA cm–2 and remains as high as 566.3 C g–1 (1029.5 F g–1) at 50 mA cm–2 in 1 M NaOH. A supercapattery assembled using Co3(PO4)2·8H2O/NF as the positive electrode and activated carbon/NF as the negative electrode delivers a gravimetric capacitance of 111.2 F g–1 (volumetric capacitance of 4.44 F cm–3). Furthermore, the device offers a high specific energy of 29.29 Wh kg–1 (energy density of 1.17 mWh cm–3) and a specific power of 4687 W kg–1 (power density of 187.5 mW cm–3).