Fabrication and Nonlinear Thermomechanical Analysis of SU8 Thermal Actuator

SU8-based micromechanical structures are widely used as thermal actuators in the development of compliant micromanipulation tools. This paper reports the design, nonlinear thermomechanical analysis, fabrication, and thermal actuation of SU8 actuators. The thermomechanical analysis of the actuator incorporates nonlinear temperature-dependent properties of SU8 polymer to accurately model its thermal response during actuation. The designed SU8 thermal actuators are fabricated using surface micromachining techniques and the electrical interconnects are made to them using flip-chip bonding. The issues due to thermal stress during fabrication are discussed and a novel strategy is proposed to release the thermal stress in the fabricated actuators. Subsequent characterization of the actuator using an optical profilometer reveals excellent thermal response, good repeatability, and low hysteresis. The average deflection is similar to 8.5 mu m for an actuation current of similar to 5 mA. The experimentally obtained deflection profile and the tip deflection at different currents are both shown to be in good agreement with the predictions of the nonlinear thermomechanical model. This underscores the need to consider nonlinearities when modeling the response of SU8 thermal actuators. 2015-0087]

Pension system's reform in Spain: a dynamic analysis of the effects in Welfare

100 p. : graf.

Advances in Nonlinear Complexity Analysis for Partial Differential Equations

1 p. -- [Editorial Material]

Analog methods of nonlinear vibration analysis

This thesis presents methods by which electrical analogies can be obtained for nonlinear systems. The accuracy of these methods is investigated and several specific types of nonlinear equations are studied in detail.

In Part I a general method is given for obtaining electrical analogs of nonlinear systems with one degree of freedom. Loop and node methods are compared and the stability of the loop analogy is briefly considered.

Parts II and III give a description of the equipment and a discussion of its accuracy. Comparisons are made between experimental and analytic solutions of linear systems.

Part IV is concerned with systems having a nonlinear restoring force. In particular, solutions of Duffing's equation are obtained, both by using the electrical analogy and also by approximate analytical methods.

Systems with nonlinear damping are considered in Part V. Two specific examples are chosen: (1) forced oscillations and (2) self-excited oscillations (van der Pol’s equation). Comparisons are made with approximate analytic solutions.

Part VI gives experimental data for a system obeying Mathieu's equation. Regions of stability are obtained. Examples of subharmonic, ultraharmonic, and ultrasubharmonic oscillat1ons are shown.

Dynamic analysis of V-folded cavity for TEM00 operation of end-pumped solid-state laser

Based on graphic analysis design method of optical resonator, a simple design expression of V-folded cavity of end-pumped solid-state lasers with TEM00 operation is described, which satisfies two criterias of the resonator design. We give numerical simulation of spot size as a function of thermal focal length using this design approach whose advantages are validated experimentally.