In situ surface topography measurement method of granite base in scanning wafer stage with laser interferometer

Topography of a granite surface has an effect on the vertical positioning of a wafer stage in a lithographic tool, when the wafer stage moves on the granite. The inaccurate measurement of the topography results in a bad leveling and focusing performance. In this paper, an in situ method to measure the topography of a granite surface with high accuracy is present. In this method, a high-order polynomial is set up to express the topography of the granite surface. Two double-frequency laser interferometers are used to measure the tilts of the wafer stage in the X- and Y-directions. From the sampling tilts information, the coefficients of the high-order polynomial can be obtained by a special algorithm. Experiment results shows that the measurement reproducibility of the method is better than 10 nm. (c) 2006 Elsevier GmbH. All rights reserved.

A singular perturbation method of calculating the behavior of supercavitating hydrofoils with rounded noses

A simple, direct and accurate method to predict the pressure distribution on supercavitating hydrofoils with rounded noses is presented. The thickness of body and cavity is assumed to be small. The method adopted in the present work is that of singular perturbation theory. Far from the leading edge linearized free streamline theory is applied. Near the leading edge, however, where singularities of the linearized theory occur, a non-linear local solution is employed. The two unknown parameters which characterize this local solution are determined by a matching procedure. A uniformly valid solution is then constructed with the aid of the singular perturbation approach.

The present work is divided into two parts. In Part I isolated supercavitating hydrofoils of arbitrary profile shape with parabolic noses are investigated by the present method and its results are compared with the new computational results made with Wu and Wang's exact "functional iterative" method. The agreement is very good. In Part II this method is applied to a linear cascade of such hydrofoils with elliptic noses. A number of cases are worked out over a range of cascade parameters from which a good idea of the behavior of this type of important flow configuration is obtained.

Some of the computational aspects of Wu and Wang's functional iterative method heretofore not successfully applied to this type of problem are described in an appendix.

A new method of modeling cladding band structure of air-guiding photonic crystal fibers

Cladding band structure of air-guiding photonic crystal fibers with high air-filling fraction is calculated in terms of fiber shape variation. The fundamental photonic band gap dependence on structure parameters, air-filling fraction and spacing, is also investigated. The numerical results show that the band gap edges shift toward longer wavelength as the air-filling fraction is increased, whereas the relative band gap width increases linearly. For a fixed air-filling fraction, the band gap edges with respect to spacing keep constant. With this method, the simulation results agree well with the reported data. © 2007 Elsevier B.V. All rights reserved.

Trawling pull exerted by a trawler: a method of estimation from propeller dimensions and its comparison with sea measurements

The proper matching of the pull exerted by a trawler and the size of trawl is important for maximizing the catching efficiency. The available pull is more dependent on the propeller and its working conditions than the installed engine power. The normal practice is to directly connect net size to the installed power in the boat by formulae without reference to the prope1ler dimensions or the available trawling pull and this is not adequate to find out the optimum combination. By the method outlined in this paper, the accurate calculation of trawling pull is possible by taking into account only the propeller diameter, pitch and r. p. m. The predictions by the method are compared for trawlers with powers between 30 and 60 hp and agreement is found to be within + 5%. The power absorbed by the propeller in trawling condition can also be calculated by this method for checking whether the engine is being overloaded.