Design of axial-flux permanent-magnet low-speed machines and performance comparison between radial-flux and axial-flux machines

This thesis presents an alternative approach to the analytical design of surface-mounted axialflux permanent-magnet machines. Emphasis has been placed on the design of axial-flux machines with a one-rotor-two-stators configuration. The design model developed in this study incorporates facilities to include both the electromagnetic design and thermal design of the machine as well as to take into consideration the complexity of the permanent-magnet shapes, which is a typical requirement for the design of high-performance permanent-magnet motors. A prototype machine with rated 5 kW output power at 300 min-1 rotation speed has been designed and constructed for the purposesof ascertaining the results obtained from the analytical design model. A comparative study of low-speed axial-flux and low-speed radial-flux permanent-magnet machines is presented. The comparative study concentrates on 55 kW machines with rotation speeds 150 min-1, 300 min-1 and 600 min-1 and is based on calculated designs. A novel comparison method is introduced. The method takes into account the mechanical constraints of the machine and enables comparison of the designed machines, with respect to the volume, efficiency and cost aspects of each machine. It is shown that an axial-flux permanent-magnet machine with one-rotor-two-stators configuration has generally a weaker efficiency than a radial-flux permanent-magnet machine if for all designs the same electric loading, air-gap flux density and current density have been applied. On the other hand, axial-flux machines are usually smaller in volume, especially when compared to radial-flux machines for which the length ratio (axial length of stator stack vs. air-gap diameter)is below 0.5. The comparison results show also that radial-flux machines with alow number of pole pairs, p < 4, outperform the corresponding axial-flux machines.

Permanent magnet synchronous motor for industrial inverter applications - analysis and design

During the latest few years the need for new motor types has grown, since both high efficiency and an accurate dynamic performance are demanded in industrial applications. For this reason, new effective control systems such as direct torque control (DTC) have been developed. Permanent magnet synchronous motors (PMSM) are well suitable for new adjustable speed AC inverter drives, because their efficiency and power factor are not depending on the pole pair number and speed to the same extent as it is the case in induction motors. Therefore, an induction motor (IM) with a mechanical gearbox can often be replaced with a direct PM motor drive. Space as well as costs will be saved, because the efficiency increases and the cost of maintenance decreases as well. This thesis deals with design criterion, analytical calculation and analysis of the permanent magnet synchronous motor for both sinusoidal air-gap flux density and rectangular air-gapflux density. It is examined how the air-gap flux, flux densities, inductances and torque can be estimated analytically for salient pole and non-salient pole motors. It has been sought by means of analytical calculations for the ultimate construction for machines rotating at relative low 300 rpm to 600 rpm speeds, which are suitable speeds e.g. in Pulp&Paper industry. The calculations are verified by using Finite Element calculations and by measuring of prototype motor. The prototype motor is a 45 kW, 600 rpm PMSM with buried V-magnets, which is a very appropriate construction for high torque motors with a high performance. With the purposebuilt prototype machine it is possible not only to verify the analytical calculations but also to show whether the 600 rpm PMSM can replace the 1500 rpm IM with a gear. It can also be tested if the outer dimensions of the PMSM may be the same as for the IM and if the PMSM in this case can produce a 2.5 fold torque, in consequence of which it may be possible to achieve the same power. The thesis also considers the question how to design a permanent magnet synchronous motor for relatively low speed applications that require a high motor torqueand efficiency as well as bearable costs of permanent magnet materials. It is shown how a selection of different parameters affects the motor properties. Key words: Permanent magnet synchronous motor, PMSM, surface magnets, buried magnets

Reluktanssiverkkomalli kestomagneettitahtikoneen staattisen ilmavälivuontiheyden mallinnukseen

Kaikissa pyörivissä sähkömoottoreissa vääntömomentin tuoton kannalta olennainen magneettivuo kulkee staattorin ja roottorin välillä ilmavälin kautta. Ilmaväli mallinnetaan koneensuunnittelun yhteydessä tämän vuoksi tarkasti. Elementtimenetelmällä voidaan analysoida moottoreita varsin tarkasti, mutta menetelmän käyttö vie paljon aikaa ja sovittaminen muihin laskentaympäristöihin on usein hankalaa. Tämän vuoksi voidaan käyttää riittävän tarkkuuden omaavia analyyttisiä laskentamenetelmiä, joiden sovittaminen muihin ohjelmaympäristöihin on helpompaa kuin elementtimenetelmää käytettäessä. Diplomityössä kehitetään reluktanssiverkkomalli kestomagneettien aikaansaaman ilmavälivuontiheyden mallintamiseen kestomagneettitahtikoneille, joissa on pinta-asennetut kestomagneetit. Kehitetyn reluktanssiverkkomallin toimivuutta vertaillaan muihin ilmavälivuontiheyden laskentamenetelmiin.

Cost Reduction of Permanent Magnet Synchronous Machines

Electrical machine drives are the most electrical energy-consuming systems worldwide. The largest proportion of drives is found in industrial applications. There are, however many other applications that are also based on the use of electrical machines, because they have a relatively high efficiency, a low noise level, and do not produce local pollution. Electrical machines can be classified into several categories. One of the most commonly used electrical machine types (especially in the industry) is induction motors, also known as asynchronous machines. They have a mature production process and a robust rotor construction. However, in the world pursuing higher energy efficiency with reasonable investments not every application receives the advantage of using this type of motor drives. The main drawback of induction motors is the fact that they need slipcaused and thus loss-generating current in the rotor, and additional stator current for magnetic field production along with the torque-producing current. This can reduce the electric motor drive efficiency, especially in low-speed, low-power applications. Often, when high torque density is required together with low losses, it is desirable to apply permanent magnet technology, because in this case there is no need to use current to produce the basic excitation of the machine. This promotes the effectiveness of copper use in the stator, and further, there is no rotor current in these machines. Again, if permanent magnets with a high remanent flux density are used, the air gap flux density can be higher than in conventional induction motors. These advantages have raised the popularity of PMSMs in some challenging applications, such as hybrid electric vehicles (HEV), wind turbines, and home appliances. Usually, a correctly designed PMSM has a higher efficiency and consequently lower losses than its induction machine counterparts. Therefore, the use of these electrical machines reduces the energy consumption of the whole system to some extent, which can provide good motivation to apply permanent magnet technology to electrical machines. However, the cost of high performance rare earth permanent magnets in these machines may not be affordable in many industrial applications, because the tight competition between the manufacturers dictates the rules of low-cost and highly robust solutions, where asynchronous machines seem to be more feasible at the moment. Two main electromagnetic components of an electrical machine are the stator and the rotor. In the case of a conventional radial flux PMSM, the stator contains magnetic circuit lamination and stator winding, and the rotor consists of rotor steel (laminated or solid) and permanent magnets. The lamination itself does not significantly influence the total cost of the machine, even though it can considerably increase the construction complexity, as it requires a special assembly arrangement. However, thin metal sheet processing methods are very effective and economically feasible. Therefore, the cost of the machine is mainly affected by the stator winding and the permanent magnets. The work proposed in this doctoral dissertation comprises a description and analysis of two approaches of PMSM cost reduction: one on the rotor side and the other on the stator side. The first approach on the rotor side includes the use of low-cost and abundant ferrite magnets together with a tooth-coil winding topology and an outer rotor construction. The second approach on the stator side exploits the use of a modular stator structure instead of a monolithic one. PMSMs with the proposed structures were thoroughly analysed by finite element method based tools (FEM). It was found out that by implementing the described principles, some favourable characteristics of the machine (mainly concerning the machine size) will inevitable be compromised. However, the main target of the proposed approaches is not to compete with conventional rare earth PMSMs, but to reduce the price at which they can be implemented in industrial applications, keeping their dimensions at the same level or lower than those of a typical electrical machine used in the industry at the moment. The measurement results of the prototypes show that the main performance characteristics of these machines are at an acceptable level. It is shown that with certain specific actions it is possible to achieve a desirable efficiency level of the machine with the proposed cost reduction methods.

A Novel Slotless Halbach-Array Permanent-Magnet Brushless DC Motor for Spacecraft Applications

This paper presents the design and analysis of a novel machine family—the enclosed-rotor Halbach-array permanentmagnet brushless dcmotors for spacecraft applications. The initial design, selection of major parameters, and air-gap magnetic flux density are estimated using the analytical model of the machine. The proportion of the Halbach array in the machine is optimized using finite element analysis to obtain a near-trapezoidal flux pattern. The machine is found to provide uniform air-gap flux density along the radius, thus avoiding circulating currents in stator conductors and thereby reducing torque ripple. Furthermore, the design is validated with experimental results on a fabricated machine and is found to suit the design requirements of critical spacecraft applications

A Novel Slotless PMBLDC Motor for Precise Positioning Applications

This paper presents the design and analysis of a novel machine family of Siotiess Permanent Magnet Brushless DC motors (PMBLDC) for precise positioning applications of spacecrafts. Initial design, selection of major parameters and air gap magnetic flux density are estimated using the analytical model of the machine. The proportion of the halbach array in the machine was optimized using FE to obtain near trapezoidal flux pattern. The novel machine topology is found to deliver high torque density, high efficiency, zero cogging torque, better positional stability, high torque to inertia ratio and zero magnetic stiction suiting space requirements. The machine provides uniform air gap flux density along the radius thus avoiding circulating currents in stator conductors and hence reducing torque ripple

Magnetic flux density distribution in the air gap of a ferromagnetic core with superconducting blocks: three-dimensional analysis and experimental NMR results

The design of magnetic cores can be carried out by taking into account the optimization of different parameters in accordance with the application requirements. Considering the specifications of the fast field cycling nuclear magnetic resonance (FFC-NMR) technique, the magnetic flux density distribution, at the sample insertion volume, is one of the core parameters that needs to be evaluated. Recently, it has been shown that the FFC-NMR magnets can be built on the basis of solenoid coils with ferromagnetic cores. Since this type of apparatus requires magnets with high magnetic flux density uniformity, a new type of magnet using a ferromagnetic core, copper coils, and superconducting blocks was designed with improved magnetic flux density distribution. In this paper, the designing aspects of the magnet are described and discussed with emphasis on the improvement of the magnetic flux density homogeneity (Delta B/B-0) in the air gap. The magnetic flux density distribution is analyzed based on 3-D simulations and NMR experimental results.

Relationships of Photosynthetic Photon Flux Density, air Temperature and Humidity with Tomato Leaf Diffusive Conductance and Temperature

The objective was to study the leaf temperature (LT) and leaf diffusive vapor conductance (gs) responses to temperature, humidity and incident flux density of photosynthetically active photons (PPFD) of tomato plants grown without water restriction in a plastic greenhouse in Santa Maria, RS, Brazil. The plants were grown in substrate and irrigated daily. The gs was measured using a steady-state null-balance porometer on the abaxial face of the leaves during the daytime. Both leaf surfaces were measured in one day. The PPFD and LT were measured using the porometer. Leaf temperature was determined using an infrared thermometer, and air temperature and humidity were measured using a thermohygrograph. The leaves on the upper layer of the plants had higher gs than the lower layer. The relationship between the gs and PPFD was different for the two layers in the plants. A consistent relationship between the gs and atmospheric water demand was observed only in the lower layer. The LT tended to be lower than the air temperature. The mean value for the gs was 2.88 times higher on the abaxial than adaxial leaf surface.

Relationships of photosynthetic photon flux density, air temperature and humidity with tomato leaf diffusive conductance and temperature

The objective was to study the leaf temperature (LT) and leaf diffusive vapor conductance (gs) responses to temperature, humidity and incident flux density of photosynthetically active photons (PPFD) of tomato plants grown without water restriction in a plastic greenhouse in Santa Maria, RS, Brazil. The plants were grown in substrate and irrigated daily. The gs was measured using a steady-state null-balance porometer on the abaxial face of the leaves during the daytime. Both leaf surfaces were measured in one day. The PPFD and LT were measured using the porometer. Leaf temperature was determined using an infrared thermometer, and air temperature and humidity were measured using a thermohygrograph. The leaves on the upper layer of the plants had higher gs than the lower layer. The relationship between the gs and PPFD was different for the two layers in the plants. A consistent relationship between the gs and atmospheric water demand was observed only in the lower layer. The LT tended to be lower than the air temperature. The mean value for the gs was 2.88 times higher on the abaxial than adaxial leaf surface.

A theoretical and experimental analysis of the no-load air gap magnetic field in squirrel cage induction machines

In induction machines the tooth frequency losses due to permeance variation constitute a signif'icant, portion of the total loss. In order to predict and estimate these losses it, is essential to obtain a clear understanding of the no-load distribution of the air gap magnetic field and the magnitude of flux pulsation in both stator and rotor teeth. The existing theories and methods by which the air gap permeance variation in a doubly slotted structure is calculated are either empirical or restricted. The main objective of this thesis is to obtain a detailed analysis of the no-load air gap magnetic field distribution and the effect of air gap geometry on the magnitude and waveform of the tooth flux pulsation. In this thesis a detaiiled theoretical and experimental analysis of flux distribution not only leads to a better understanding of the distribution of no-load losses but also provides theoretical analysis for calculating the losses with greater accuracy

Network air gap controller

As ameaças à segurança da informação, (INFOSEC) atentam contra a perda da respectiva confidencialidade, integridade e disponibilidade, pelo que as organizações são impelidas a implementar políticas de segurança, quer ao nível físico quer ao nível lógico, utilizando mecanismos específicos de defesa. O projecto Network Air Gap Controller (NAGC) foi concebido no sentido de contribuir para as questões da segurança, designadamente daquelas que se relacionam directamente com a transferência de informação entre redes de classificação de segurança diferenciadas ou de sensibilidades distintas, sem requisitos de comunicação em tempo real, e que mereçam um maior empenho nas condições de robustez, de disponibilidade e de controlo. Os organismos que, em razão das atribuições e competências cometidas, necessitam de fazer fluir informação entre este tipo de redes, são por vezes obrigados a realizar a transferência de dados com recurso a um processo manual, efectuado pelo homem e não pela máquina, que envolve dispositivos amovivéis, como sejam o CD, DVD, PEN, discos externos ou switches manuais. Neste processo, vulgarmente designado por Network Air Gap (NAG), o responsável pela transferência de dados deverá assumir de forma infalível, como atribuições intrínsecas e inalienáveis da função exercida, as garantias do cumprimento de um vasto conjunto de normas regulamentares. As regras estabelecidas desdobram-se em ferramentas e procedimentos que se destinam, por exemplo, à guarda em arquivo de todas as transferências efectuadas; à utilização de ferramentas de segurança (ex: antivírus) antes da colocação da informação na rede de classificação mais elevada; ao não consentimento de transferência de determinados tipos de ficheiro (ex: executáveis) e à garantia de que, em consonância com a autonomia que normalmente é delegada no elemento responsável pela operação das comunicações, apenas se efectuam transferências de informação no sentido da rede de classificação inferior para a rede de classificação mais elevada. Face ao valor da informação e do impacto na imagem deste tipo de organizações, o operador de comunicações que não cumpra escrupulosamente o determinado é inexoravelmente afastado dessas funções, sendo que o processo de apuramento de responsabilidades nem sempre poderá determinar de forma inequívoca se as razões apontam para um acto deliberado ou para factores não intencionais, como a inépcia, o descuido ou a fadiga. Na realidade, as actividades periódicas e rotineiras, tornam o homem propenso à falha e poderão ser incontornavelmente asseguradas, sem qualquer tipo de constrangimentos ou diminuição de garantias, por soluções tecnológicas, desde que devidamente parametrizadas, adaptadas, testadas e amadurecidas, libertando os recursos humanos para tarefas de manutenção, gestão, controlo e inspecção. Acresce que, para este tipo de organizações, onde se multiplicam o número de redes de entrada de informação, com diferentes classificações e actores distintos, e com destinatários específicos, a utilização deste tipo de mecanismos assume uma importância capital. Devido a este factor multiplicativo, impõe-se que o NAGC represente uma opção válida em termos de oferta tecnológica, designadamente para uma gama de produtos de baixíssimo custo e que possa desenvolver-se por camadas de contributo complementar, em função das reais necessidades de cada cenário.

Numerical and ExperimentalModelling of Gas Flow and Heat Transfer in the Air Gap of An Electric Machine

This work deals with the cooling of high-speed electric machines, such as motors and generators, through an air gap. It consists of numerical and experimental modelling of gas flow and heat transfer in an annular channel. Velocity and temperature profiles are modelled in the air gap of a high-speed testmachine. Local and mean heat transfer coefficients and total friction coefficients are attained for a smooth rotor-stator combination at a large velocity range. The aim is to solve the heat transfer numerically and experimentally. The FINFLO software, developed at Helsinki University of Technology, has been used in the flow solution, and the commercial IGG and Field view programs for the grid generation and post processing. The annular channel is discretized as a sector mesh. Calculation is performed with constant mass flow rate on six rotational speeds. The effect of turbulence is calculated using three turbulence models. The friction coefficient and velocity factor are attained via total friction power. The first part of experimental section consists of finding the proper sensors and calibrating them in a straight pipe. After preliminary tests, a RdF-sensor is glued on the walls of stator and rotor surfaces. Telemetry is needed to be able to measure the heat transfer coefficients at the rotor. The mean heat transfer coefficients are measured in a test machine on four cooling air mass flow rates at a wide Couette Reynolds number range. The calculated values concerning the friction and heat transfer coefficients are compared with measured and semi-empirical data. Heat is transferred from the hotter stator and rotor surfaces to the coolerair flow in the air gap, not from the rotor to the stator via the air gap, althought the stator temperature is lower than the rotor temperature. The calculatedfriction coefficients fits well with the semi-empirical equations and precedingmeasurements. On constant mass flow rate the rotor heat transfer coefficient attains a saturation point at a higher rotational speed, while the heat transfer coefficient of the stator grows uniformly. The magnitudes of the heat transfer coefficients are almost constant with different turbulence models. The calibrationof sensors in a straight pipe is only an advisory step in the selection process. Telemetry is tested in the pipe conditions and compared to the same measurements with a plain sensor. The magnitudes of the measured data and the data from the semi-empirical equation are higher for the heat transfer coefficients than thenumerical data considered on the velocity range. Friction and heat transfer coefficients are presented in a large velocity range in the report. The goals are reached acceptably using numerical and experimental research. The next challenge is to achieve results for grooved stator-rotor combinations. The work contains also results for an air gap with a grooved stator with 36 slots. The velocity field by the numerical method does not match in every respect the estimated flow mode. The absence of secondary Taylor vortices is evident when using time averagednumerical simulation.

Narrow Gap flux-cored arc welding of high strength shipbuilding steels

This thesis is part of the Arctic Materials Technologies Development –project. The research of the thesis was done in cooperation with Arctech Helsinki Shipyard, Lappeenranta University of Technology and Kemppi Oy. Focus of the thesis was to study narrow gap flux-cored arc welding of two high strength steels with three different groove angles of 20°, 10° and 5°. Welding of the 25 mm thick E500 TMCP and 10 mm thick EH36 steels was mechanized and Kemppi WisePenetration and WiseFusion processes were tested with E500 TMCP steel. EH36 steel test pieces were welded without Wise processes. Shielding gases chosen were carbon dioxide and a mixture of argon and carbon dioxide. Welds were tested with non-destructive and destructive testing methods. Radiographic, visual, magnetic particle and liquid penetrant testing proved that welds were free from imperfections. After non-destructive testing, welds were tested with various destructive testing methods. Impact strength, bending, tensile strength and hardess tests proved that mechanized welding and Wise processes produced quality welds with narrower gap. More inconsistent results were achieved with test pieces welded without Wise processes. Impact test results of E500 TMCP exceeded the 50 J limit on weld, set by Russian Maritime Register of Shipping. EH36 impact test results were much closer to the limiting values of 34 J on weld and 47 on HAZ. Hardness values of all test specimens were below the limiting values. Bend testing and tensile testing results fulfilled the the Register requirements. No cracking or failing occurred on bend test specimens and tensile test results exceeded the Register limits of 610 MPa for E500 TMCP and 490 MPa for EH36.

Air-gap based vertical cavity micro-opto-electro-mechanical Fabry-Perot filters

Mikrooptische Filter sind heutzutage in vielen Bereichen in der Telekommunikation unersetzlich. Wichtige Einsatzgebiete sind aber auch spektroskopische Systeme in der Medizin-, Prozess- und Umwelttechnik. Diese Arbeit befasst sich mit der Technologieentwicklung und Herstellung von luftspaltbasierenden, vertikal auf einem Substrat angeordneten, oberflächenmikromechanisch hergestellten Fabry-Perot-Filtern. Es werden zwei verschiedene Filtervarianten, basierend auf zwei verschiedenen Materialsystemen, ausführlich untersucht. Zum einen handelt es sich dabei um die Weiterentwicklung von kontinuierlich mikromechanisch durchstimmbaren InP / Luftspaltfiltern; zum anderen werden neuartige, kostengünstige Siliziumnitrid / Luftspaltfilter wissenschaftlich behandelt. Der Inhalt der Arbeit ist so gegliedert, dass nach einer Einleitung mit Vergleichen zu Arbeiten und Ergebnissen anderer Forschergruppen weltweit, zunächst einige theoretische Grundlagen zur Berechnung der spektralen Reflektivität und Transmission von beliebigen optischen Schichtanordnungen aufgezeigt werden. Auß erdem wird ein kurzer theoretischer Ü berblick zu wichtigen Eigenschaften von Fabry-Perot-Filtern sowie der Möglichkeit einer mikromechanischen Durchstimmbarkeit gegeben. Daran anschließ end folgt ein Kapitel, welches sich den grundlegenden technologischen Aspekten der Herstellung von luftspaltbasierenden Filtern widmet. Es wird ein Zusammenhang zu wichtigen Referenzarbeiten hergestellt, auf denen diverse Weiterentwicklungen dieser Arbeit basieren. Die beiden folgenden Kapitel erläutern dann ausführlich das Design, die Herstellung und die Charakterisierung der beiden oben erwähnten Filtervarianten. Abgesehen von der vorangehenden Epitaxie von InP / GaInAs Schichten, ist die Herstellung der InP / Luftspaltfilter komplett im Institut durchgeführt worden. Die Herstellungsschritte sind ausführlich in der Arbeit erläutert, wobei ein Schwerpunktthema das trockenchemische Ä tzen von InP sowie GaInAs, welches als Opferschichtmaterial für die Herstellung der Luftspalte genutzt wurde, behandelt. Im Verlauf der wissenschaftlichen Arbeit konnten sehr wichtige technische Verbesserungen entwickelt und eingesetzt werden, welche zu einer effizienteren technologischen Herstellung der Filter führten und in der vorliegenden Niederschrift ausführlich dokumentiert sind. Die hergestellten, für einen Einsatz in der optischen Telekommunikation entworfenen, elektrostatisch aktuierbaren Filter sind aus zwei luftspaltbasierenden Braggspiegeln aufgebaut, welche wiederum jeweils 3 InP-Schichten von (je nach Design) 357nm bzw. 367nm Dicke aufweisen. Die Filter bestehen aus im definierten Abstand parallel übereinander angeordneten Membranen, die über Verbindungsbrücken unterschiedlicher Anzahl und Länge an Haltepfosten befestigt sind. Da die mit 357nm bzw. 367nm vergleichsweise sehr dünnen Schichten freitragende Konstrukte mit bis zu 140 nm Länge bilden, aber trotzdem Positionsgenauigkeiten im nm-Bereich einhalten müssen, handelt es sich hierbei um sehr anspruchsvolle mikromechanische Bauelemente. Um den Einfluss der zahlreichen geometrischen Strukturparameter studieren zu können, wurden verschiedene laterale Filterdesigns implementiert. Mit den realisierten Filter konnte ein enorm weiter spektraler Abstimmbereich erzielt werden. Je nach lateralem Design wurden internationale Bestwerte für durchstimmbare Fabry-Perot-Filter von mehr als 140nm erreicht. Die Abstimmung konnte dabei kontinuierlich mit einer angelegten Spannung von nur wenigen Volt durchgeführt werden. Im Vergleich zu früher berichteten Ergebnissen konnten damit sowohl die Wellenlängenabstimmung als auch die dafür benötigte Abstimmungsspannung signifikant verbessert werden. Durch den hohen Brechungsindexkontrast und die geringe Schichtdicke zeigen die Filter ein vorteilhaftes, extrem weites Stopband in der Größ enordnung um 550nm. Die gewählten, sehr kurzen Kavitätslängen ermöglichen einen freien Spektralbereich des Filters welcher ebenfalls in diesen Größ enordnungen liegt, so dass ein weiter spektraler Einsatzbereich ermöglicht wird. Während der Arbeit zeigte sich, dass Verspannungen in den freitragenden InPSchichten die Funktionsweise der mikrooptischen Filter stark beeinflussen bzw. behindern. Insbesondere eine Unterätzung der Haltepfosten und die daraus resultierende Verbiegung der Ecken an denen sich die Verbindungsbrücken befinden, führte zu enormen vertikalen Membranverschiebungen, welche die Filtereigenschaften verändern. Um optimale Ergebnisse zu erreichen, muss eine weitere Verbesserung der Epitaxie erfolgen. Jedoch konnten durch den zusätzlichen Einsatz einer speziellen Schutzmaske die Unterätzung der Haltepfosten und damit starke vertikale Verformungen reduziert werden. Die aus der Verspannung resultierenden Verformungen und die Reaktion einzelner freistehender InP Schichten auf eine angelegte Gleich- oder Wechselspannung wurde detailliert untersucht. Mittels Weisslichtinterferometrie wurden lateral identische Strukturen verglichen, die aus unterschiedlich dicken InP-Schichten (357nm bzw. 1065nm) bestehen. Einen weiteren Hauptteil der Arbeit stellen Siliziumnitrid / Luftspaltfilter dar, welche auf einem neuen, im Rahmen dieser Dissertation entwickelten, technologischen Ansatz basieren. Die Filter bestehen aus zwei Braggspiegeln, die jeweils aus fünf 590nm dicken, freistehenden Siliziumnitridschichten aufgebaut sind und einem Abstand von 390nm untereinander aufweisen. Die Filter wurden auf Glassubstraten hergestellt. Der Herstellungsprozess ist jedoch auch mit vielen anderen Materialien oder Prozessen kompatibel, so dass z.B. eine Integration mit anderen Bauelemente relativ leicht möglich ist. Die Prozesse dieser ebenfalls oberflächenmikromechanisch hergestellten Filter wurden konsequent auf niedrige Herstellungskosten optimiert. Als Opferschichtmaterial wurde hier amorph abgeschiedenes Silizium verwendet. Der Herstellungsprozess beinhaltet die Abscheidung verspannungsoptimierter Schichten (Silizium und Siliziumnitrid) mittels PECVD, die laterale Strukturierung per reaktiven Ionenätzen mit den Gasen SF6 / CHF3 / Ar sowie Fotolack als Maske, die nasschemische Unterätzung der Opferschichten mittels KOH und das Kritisch-Punkt-Trocken der Proben. Die Ergebnisse der optischen Charakterisierung der Filter zeigen eine hohe Ü bereinstimmung zwischen den experimentell ermittelten Daten und den korrespondierenden theoretischen Modellrechnungen. Weisslichtinterferometermessungen der freigeätzten Strukturen zeigen ebene Filterschichten und bestätigen die hohe vertikale Positioniergenauigkeit, die mit diesem technologischen Ansatz erreicht werden kann.

Air-earth current density measurements at Lerwick; implications for seasonality in the global electric circuit

Atmospheric electricity measurements were made at Lerwick Observatory in the Shetland Isles (60°09′N, 1°08′W) during most of the 20th century. The Potential Gradient (PG) was measured from 1926 to 84 and the air-earth conduction current (Jc) was measured during the final decade of the PG measurements. Daily Jc values (1978–1984) observed at 15 UT are presented here for the first time, with independently-obtained PG measurements used to select valid data. The 15 UT Jc (1978–1984) spans 0.5–9.5 pA/m2, with median 2.5 pA/m2; the columnar resistance at Lerwick is estimated as 70 PΩm2. Smoke measurements confirm the low pollution properties of the site. Analysis of the monthly variation of Lerwick Jc data shows that winter (DJF) Jc is significantly greater than the summer (JJA) Jc by 20%. The Lerwick atmospheric electricity seasonality differs from the global lightning seasonality, but Jc has a similar seasonal phasing to that observed in Nimbostratus clouds globally, suggesting a role for non-thunderstorm rain clouds in the seasonality of the global circuit.