Nano-Hardness Tester and its Application in MEMS

微机电系统(MEMS)技术的迅速崛起,推动了对其所用材料和结构的力学性能研究。简要介绍纳米硬度技术的发展展、理论模型和MTS公司的Nano Indenter XP系统的配置、测量原理及功能。并根据我们的一些研究结果,说明它在微机电系统中的应用。

Portable Hardness tester for timber classification

Hardness is a property largely used in material specifications, mechanical and metallurgical research and quality control of several materials. Specifically for timber, Janka hardness is a simple, quick and easy test, with good correlations with the compression parallel to grain strength, a strong reference in structural classification for this material. More recently, international studies have reported the use of Brinell hardness for timber assessment which resumes the advantages previously mentioned for Janka hardness and make it easier to be performed in the field, especially because of the lower magnitude of the involved loads. A first generation of an equipment for field evaluation of hardness in wood - Portable Hardness tester for wood - based on Brinell hardness has already been developed by the Research Group on Forest Products from FCA/UNESP, Brazil, with very good correlations between the evaluated hardness and several other mechanical properties of the material when performing tests with different species of native and reforested wood (traditionally used as ties - sleepers - in railways). This paper presents results obtained in the experimental program with the first generation of this equipment and preliminary tests with its second generation, which uses accelerometers to substitute the indentation measurements in wood. For the first generation of the equipment functional and calibration tests were carried out using 16 native and reforestation timber lots, among there E. citriodora, E. tereticornis, E. saligna, E. urophylla, E. grandis, Goupia glabra and Bagassa guianenses, with different origins and ages. The results obtained confirm its potential in the classification of specimens, with inclusion errors varying from 4.5% to 16.6%.

Estimating hardness of eucalyptus wood with a portable hardness tester

More than 80% of the 29600 km of the Brazilian railroad mesh employs wooden sleepers. The problem of hard availability of native wood for this purpose leads to the alternative use of reforestation species to produce sleepers. Considering the great difficulty to, in field condition, evaluate characteristics that are of major importance to define its suitability to sleeper production the Research Group on Forest Products from FCA/UNESP - Brazil had developed equipment for field evaluation of hardness in wood - Portable Hardness Tester. This paper reports the functional validation tests, performed with different species of Eucalyptus. Results revealed the equipment great functionality, easy-to-use characteristics and applicability to Eucalyptus wood. Moderate to strong relationships between laboratory and validated values of hardness were found. The best validation model was obtained using the data provided by the experimental dispositive 3 (R2=0.74 and SSE= 7.71 kJ/m2) while the experimental dispositive 1 gave the worse validation (R2=0.55 and SSE= 13.46 kJ/m2).

Hardness and Electrical Resistivity of Copper-Iron Powder Metal Compacts

Although powder metallurgical methods have been used for years to fabricate tungsten and platinum, very little scientific data have been recorded until the beginning of this century. A large percentage of all commercial production at present is based upon past practice rather than upon scientific knowledge.

Visoelastic studies on thermoplastic polyurethane nanocomposites using a nano-hardness tester

The viscoelastic behaviour of a range of polyurethane thermoplastic elastomer montmorillonite nanocomposites has been studied using a nanohardness tester. For softer Shore hardness 80A materials, the introduction of the organo-clay increased the creep strain obtained while the nano-indentor was held at constant load. The increase in creep strain was greatest for materials containing an organo-clay modified with a more hydrophilic quaternary alkylammonium surfactant and with higher loadings of the hydrophilic organo-clay. This suggested the effect might be due to a plasticising effect of the excess surfactant. For the harder Shore hardness 55D materials, the addition of the organo-clays produced only a small decrease in the creep strain, probably due to the interconnected hard domains in this material.

The Age-Hardening of Aluminum with MgZn2

The purpose of this thesis is to investigate the age-hardening of aluminum with magnesium and zinc in such proportions as to conform to the compound MgZn2. Because of a lack of time and proper equipment, the only property investigated was the hardness as indicated by the Rockwell Superficial Hardness Tester.

An Experimental Investigation of the Age Hardening of Copper with Manganese Silicide

The subject of the thesis was based upon the theory of precipitation or age hardening of the copper by the compound formed by the Manganese and silicon present in the ternary Cu-Mn-Si alloy. The effect of the heat treat­ment to such an alloy was to be studied and the best aging time and temperature was to be determined.

The Effects of Some Percentages of Nickel on the Annealing of Cartridge Brass

The most important element in the alloying of steels, has also been used quite extensively as a third constituent in copper-zinc alloys. The chief characteristics of nickel which make it desirable as an alloying element are its toughness, high strength, and resistance to corrosion.

The Effect of Boron on the Hardenability of Steel

Many attempts have been made to improve iron and steel and their alloys by the addition of boron. The re­sults obtained were not encouraging for the reason that the amount of boron used, generally from 0.2 to 2.0 per cent is altogether too high. This percentage of boron ren­ders the product hard and brittle and of late the experiments with boron in this connection have been practically abandoned.

电磁式纳米压入仪的载荷精度研究

纳米压入仪(Nanoindenter)已成为纳米/微米力学测试的基本工具之一,广泛应用于纳米材料、薄膜、MEMS微结构的力学性能测试。目前商业化仪器有MTS NanoIndenter(incorporated into Agi lent in 2008),Hysitron TriboIndenter,CSM NanoHardness Tester,MML NanoTest,and CSIRO UMIS,其中原MTS Nano Indenter、CSMNano Hardness Tester和MML NanoTest都采用电磁驱动兼载荷计量的原理设计。这类仪器主要优点之一是载荷分辨力高,可以达到50nN甚至更小。然而仪器制造商从未明确给出此类仪器的载荷精度。目前对纳米压痕测试技术的研究也主要集中在压头形状、试样表面粗糙度、毛细力等因素对压痕测试结果的影响,尚未见针对仪器载荷精度的研究报道。国际标准ISO 14577-2:2002虽对仪器施加的试验力的允差进行了规定,但由于电磁式纳米压入仪的结构响应和试样力学行为耦合在一起,试样上的载荷并不完全等同于通过电磁转换原理计量的试验力,因此实际测试时试样上的载荷精度仍是未知。

计算机控制的亚微米硬度计及其应用

本文描述了一台有微机控制的可变温亚微米深度灵敏的硬度计及其应用实例。该硬度计的负荷范围从0.01N到2N负荷测量精度为1mN。为该硬度计配备了各种角度的四棱锥型，三棱锥型和Knoop型金刚压头用来得到各种不同的深度面积比。利用该硬度计研究了测量中的压痕尺寸效应（ISE）马氏体不锈钢辐照和He注入后的硬化脆化效应，连接奥氏体不锈钢焊接材料和碳--金属焊接材料的辐照效应。同时，还研究了在稳定负荷下硬度与加压时间的关系（压痕蠕变）和在循环负荷下硬度与循环次数的关系（压痕疲劳）

Influence of the abrasive particles size in the micro-abrasion wear tests of TiAlSiN thin coatings

Ball rotating micro-abrasion tribometers are commonly used to carry out wear tests on thin hard coatings. In these tests, different kinds of abrasives were used, as alumina (Al2O3), silicon carbide (SiC) or diamond. In each kind of abrasive, several particle sizes can be used. Some studies were developed in order to evaluate the influence of the abrasive particle shape in the micro-abrasion process. Nevertheless, the particle size was not well correlated with the material removed amount and wear mechanisms. In this work, slurry of SiC abrasive in distilled water was used, with three different particles size. Initial surface topography was accessed by atomic force microscopy (AFM). Coating hardness measurements were performed with a micro-hardness tester. In order to evaluate the wear behaviour, a TiAlSiN thin hard film was used. The micro-abrasion tests were carried out with some different durations. The abrasive effect of the SiC particles was observed by scanning electron microscopy (SEM) both in the films (hard material) as in the substrate (soft material), after coating perforation. Wear grooves and removed material rate were compared and discussed.

Micro-abrasion wear behaviour of TiAlCrSiN nanostructured coatings

The injection process of glass fibres reinforced plastics promotes the moulds surface degradation by erosion. In order to improve its wear resistance, several kinds of PVD thin hard coatings were used. It is well-known that nanostructures present a better compromise between hardness and toughness. Indeed, when the coating is constituted by a large number of ultra-thin different layers, cracks and interface troubles tend to decrease. However, it is not clear that these nanostructures present a better wear behaviour in erosion processes. In order to study its wear behaviour, a sputtered PVD nanostructured TiAlCrSiN coating was used. The substrate and film surfaces topography were analyzed by profilometry and atomic force microscopy techniques. Film adhesion to the substrate was evaluated by scratch tests. The surface hardness was measured with a Vickers micro-hardness tester. The wear resistance was evaluated by micro-abrasion with a rotating ball tribometer tests. Slurry of SiC particles in distilled water was used in order to provoke the surface abrasion. Different duration tests were performed in order to analyze the wear evolution. After these tests, the wear mechanisms developed were analyzed by scanning electron microscopy. Wear craters were measured and the wear rate was calculated and discussed. With the same purpose, coated inserts were mounted in an injection mould working with a 30% glass fibres reinforced polypropylene. After 45 000 cycles no relevant wear was registered.

Aquisição por Visão Artificial e Medição Automática de Micro Dureza Vickers

O ensaio de dureza, e mais concretamente o ensaio de micro dureza Vickers, é no universo dos ensaios mecânicos um dos mais utilizados quer seja na indústria, no ensino ou na investigação e desenvolvimento de produto no âmbito das ciências dos materiais. Na grande maioria dos casos, a utilização deste ensaio tem como principal aplicação a caracterização ou controlo da qualidade de fabrico de materiais metálicos. Sendo um ensaio de relativa simplicidade de execução, rapidez e com resultados comparáveis e relacionáveis a outras grandezas físicas das propriedades dos materiais. Contudo, e tratando-se de um método de ensaio cuja intervenção humana é importante, na medição da indentação gerada por penetração mecânica através de um sistema ótico, não deixa de exibir algumas debilidades que daí advêm, como sendo o treino dos técnicos e respetivas acuidades visuais, fenómenos de fadiga visual que afetam os resultados ao longo de um turno de trabalho; ora estes fenómenos afetam a repetibilidade e reprodutibilidade dos resultados obtidos no ensaio. O CINFU possui um micro durómetro Vickers, cuja realização dos ensaios depende de um técnico treinado para a execução do mesmo, apresentando todas as debilidades já mencionadas e que o tornou elegível para o estudo e aplicação de uma solução alternativa. Assim, esta dissertação apresenta o desenvolvimento de uma solução alternativa ao método ótico convencional na medição de micro dureza Vickers. Utilizando programação em LabVIEW da National Instruments, juntamente com as ferramentas de visão computacional (NI Vision), o programa começa por solicitar ao técnico a seleção da câmara para aquisição da imagem digital acoplada ao micro durómetro, seleção do método de ensaio (Força de ensaio); posteriormente o programa efetua o tratamento da imagem (aplicação de filtros para eliminação do ruído de fundo da imagem original), segue-se, por indicação do operador, a zona de interesse (ROI) e por sua vez são identificadas automaticamente os vértices da calote e respetivas distâncias das diagonais geradas concluindo, após aceitação das mesmas, com o respetivo cálculo de micro dureza resultante. Para validação dos resultados foram utilizados blocos-padrão de dureza certificada (CRM), cujos resultados foram satisfatórios, tendo-se obtido um elevado nível de exatidão nas medições efetuadas. Por fim, desenvolveu-se uma folha de cálculo em Excel com a determinação da incerteza associada às medições de micro dureza Vickers. Foram então comparados os resultados nas duas metodologias possíveis, pelo método ótico convencional e pela utilização das ferramentas de visão computacional, tendo-se obtido bons resultados com a solução proposta.

Estruturas cerâmicas a base de zircônia e alumina utilizadas na confecção de infra - estruturas para coroas e pontes fixas

The continuous advances in ceramic systems for crowns and bridges infrastructure getting researchers and manufacturers looking for a material that has good mechanical properties and aesthetic. The purpose of this study was to verify in which composition and sintering temperature the ceramic system for infrastructure composed of alumina and zirconia would have the best mechanical properties. With this objective we made in UFRN laboratories 45 test bodies in the form of rectangular bars with the following dimensions: 30mm x 8mm x 3mm, where we separated by the sintering temperature: 1200°C, 1300ºC and 1400ºC, and by comp osition: 33% Zirconia + 67% Alumina; 50% Zirconia + 50% Alumina and 25% Zirconia + 75% Alumina, these test bodies were not infiltrated with glass. Also, were made nine test bodies by a technical from a laboratory with a commercial ceramic system: in the Ceram Zircônia (Vita - Zahnfabrik) with the following dimensions: 20mm x 10mm x 0.5mm, these test bodies following all recommendations of the manufacturer and were infiltrated with glass. Were realized optical and electronic microscopy analyses, hardness testing, resistance to bending in three points, porosity and bulk density. After analysis of the results we verified that with the increasing of sintering temperature, increased the value of resistance to bending, but with the same temperature there was no significant difference between the different compositions, samples made with the commercial ceramic that were infiltrated, presented a resistance to bending six times greater than the samples sintered to 1400°C and which have not been infiltra ted. There was no significant difference between the values of apparent porosity for the samples made in UFRN laboratories, but the samples of commercial ceramic obtained 0% in porosity apparent value. In tests of Rockwell Hardness there is an increase in the value of Hardness, with the increase of sintering temperature for the samples not infiltrated. Samples infiltrated showed similar values as the samples sintered in 1400°C. There was no significant difference between the values of apparent density among samples manufactured in UFRN laboratories and samples made with a commercial ceramic