Elastic modulus study of gold thin film for use as an actuated membrane in a superconductive radio frequency (RF) microelectromechanical (MEM) switch

The objective of this research was to find Young's elastic modulus for thin gold films at room and cryogenic temperatures based on the flexional model which has not been previously attempted. Electrical Sonnet simulations and numerical methods using Abacus for the mechanical responses were employed for this purpose. A RF MEM shunt switch was designed and a fabrication process developed in house. The switch is composed of a superconducting YBa2 Cu3O7 coplanar waveguide structure with an Au bridge membrane suspended above an area of the center conductor covered with BaTiO3 dielectric. The Au membrane is actuated by the electrostatic attractive force acting between the transmission line and the membrane when voltage is applied. The value of the actuation force will greatly depend on the switch pull-down voltage and on the geometry and mechanical properties of the bridge material. Results show that the elastic modulus for Au thin film can be 484 times higher at cryogenic temperature than it is at room temperature. ^

Temperature dependence and characterization of gold thin film actuated membranes for radio frequency microelectromechanical switches

Over the last 10 years, the development and the understanding of the mechanical properties of thin film material have been essential for improving the reliability and lifetime in operation of microelectromechanical systems (MEMS). Although the properties of a bulk material might be well characterized, thin-film properties are considerably different from those of the bulk and it cannot be assumed that mechanical properties measured using bulk specimens will apply to the same materials when used as a thin film in MEMS. For many microelectronic thin films, the material properties depend strongly on the details of the deposition process and the growth conditions on its substrate. ^ The purpose of this dissertation is to determine the temperature dependence of a gold thin film membrane on the pull down voltage of a MEMS switch as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K). For this purpose, an RF MEMS shunt switch was designed and fabricated. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when voltage is applied. ^ Material characterization of the gold evaporated thin film membrane was obtained via AFM, SEM, TEM and X-ray diffraction analyses. A mathematical relation was used to estimate the pull down voltage of the switch at cryogenic temperature and results showed that the mathematical theory match the experimental values of the tested MEMS switches. ^

Elastic modulus study of gold thin film for use as an actuated membrane in a superconductive radio frequency (RF) MicroElectroMechanical (MEM) switch

The objective of this research was to find Young's elastic modulus for thin gold films at room and cryogenic temperatures based on the flexional model which has not been previously attempted. Electrical Sonnet simulations and numerical methods using Abacus for the mechanical responses were employed for this purpose. A RF MEM shunt switch was designed and a fabrication process developed in house. The switch is composed of a superconducting YBa2Cu3O7 coplanar waveguide structure with an Au bridge membrane suspended above an area of the center conductor covered with BaTiO3 dielectric. The Au membrane is actuated by the electrostatic attractive force acting between the transmission line and the membrane when voltage is applied. The value of the actuation force will greatly depend on the switch pull-down voltage and on the geometry and mechanical properties of the bridge material. Results show that the elastic modulus for Au thin film can be 484 times higher at cryogenic temperature than it is at room temperature.

Space division multiple access for wireless sensor networks

This dissertation proposed a self-organizing medium access control protocol (MAC) for wireless sensor networks (WSNs). The proposed MAC protocol, space division multiple access (SDMA), relies on sensor node position information and provides sensor nodes access to the wireless channel based on their spatial locations. SDMA divides a geographical area into space divisions, where there is one-to-one map between the space divisions and the time slots. Therefore, the MAC protocol requirement is the sensor node information of its position and a prior knowledge of the one-to-one mapping function. The scheme is scalable, self-maintaining, and self-starting. It provides collision-free access to the wireless channel for the sensor nodes thereby, guarantees delay-bounded communication in real time for delay sensitive applications. This work was divided into two parts: the first part involved the design of the mapping function to map the space divisions to the time slots. The mapping function is based on a uniform Latin square. A Uniform Latin square of order k = m 2 is an k x k square matrix that consists of k symbols from 0 to k-1 such that no symbol appears more than once in any row, in any column, or in any m x in area of main subsquares. The uniqueness of each symbol in the main subsquares presents very attractive characteristic in applying a uniform Latin square to time slot allocation problem in WSNs. The second part of this research involved designing a GPS free positioning system for position information. The system is called time and power based localization scheme (TPLS). TPLS is based on time difference of arrival (TDoA) and received signal strength (RSS) using radio frequency and ultrasonic signals to measure and detect the range differences from a sensor node to three anchor nodes. TPLS requires low computation overhead and no time synchronization, as the location estimation algorithm involved only a simple algebraic operation.

Trajectory privacy preservation in mobile Wireless Sensor Networks

In recent years, there has been an enormous growth of location-aware devices, such as GPS embedded cell phones, mobile sensors and radio-frequency identification tags. The age of combining sensing, processing and communication in one device, gives rise to a vast number of applications leading to endless possibilities and a realization of mobile Wireless Sensor Network (mWSN) applications. As computing, sensing and communication become more ubiquitous, trajectory privacy becomes a critical piece of information and an important factor for commercial success. While on the move, sensor nodes continuously transmit data streams of sensed values and spatiotemporal information, known as ``trajectory information". If adversaries can intercept this information, they can monitor the trajectory path and capture the location of the source node. ^ This research stems from the recognition that the wide applicability of mWSNs will remain elusive unless a trajectory privacy preservation mechanism is developed. The outcome seeks to lay a firm foundation in the field of trajectory privacy preservation in mWSNs against external and internal trajectory privacy attacks. First, to prevent external attacks, we particularly investigated a context-based trajectory privacy-aware routing protocol to prevent the eavesdropping attack. Traditional shortest-path oriented routing algorithms give adversaries the possibility to locate the target node in a certain area. We designed the novel privacy-aware routing phase and utilized the trajectory dissimilarity between mobile nodes to mislead adversaries about the location where the message started its journey. Second, to detect internal attacks, we developed a software-based attestation solution to detect compromised nodes. We created the dynamic attestation node chain among neighboring nodes to examine the memory checksum of suspicious nodes. The computation time for memory traversal had been improved compared to the previous work. Finally, we revisited the trust issue in trajectory privacy preservation mechanism designs. We used Bayesian game theory to model and analyze cooperative, selfish and malicious nodes' behaviors in trajectory privacy preservation activities.^

Trajectory Privacy Preservation in Mobile Wireless Sensor Networks

In recent years, there has been an enormous growth of location-aware devices, such as GPS embedded cell phones, mobile sensors and radio-frequency identification tags. The age of combining sensing, processing and communication in one device, gives rise to a vast number of applications leading to endless possibilities and a realization of mobile Wireless Sensor Network (mWSN) applications. As computing, sensing and communication become more ubiquitous, trajectory privacy becomes a critical piece of information and an important factor for commercial success. While on the move, sensor nodes continuously transmit data streams of sensed values and spatiotemporal information, known as ``trajectory information". If adversaries can intercept this information, they can monitor the trajectory path and capture the location of the source node. This research stems from the recognition that the wide applicability of mWSNs will remain elusive unless a trajectory privacy preservation mechanism is developed. The outcome seeks to lay a firm foundation in the field of trajectory privacy preservation in mWSNs against external and internal trajectory privacy attacks. First, to prevent external attacks, we particularly investigated a context-based trajectory privacy-aware routing protocol to prevent the eavesdropping attack. Traditional shortest-path oriented routing algorithms give adversaries the possibility to locate the target node in a certain area. We designed the novel privacy-aware routing phase and utilized the trajectory dissimilarity between mobile nodes to mislead adversaries about the location where the message started its journey. Second, to detect internal attacks, we developed a software-based attestation solution to detect compromised nodes. We created the dynamic attestation node chain among neighboring nodes to examine the memory checksum of suspicious nodes. The computation time for memory traversal had been improved compared to the previous work. Finally, we revisited the trust issue in trajectory privacy preservation mechanism designs. We used Bayesian game theory to model and analyze cooperative, selfish and malicious nodes' behaviors in trajectory privacy preservation activities.