Microchanneled chirped fibre Bragg gratings for simultaneous refractive index and temperature measurements

We report here the fabrication, charaterisation and refractive index sensing of two microchanneled chirped fiber Bragg gratings (MCFBGs) with different channel sizes (~550µm and ~1000µm). The chirped grating structures were UV-inscribed in optical fibre and the microchannels were created in the middle of the CFBGs by femtosecond (fs) laser assisted chemical etching method. The creation of microchannels in the CFBG structures gives an access to the external index liquid, thus inducing refractive index (RI) sensitivity to the structure. In comparison with previously reported FBG based RI sensors, for which the cladding layers usually were removed, the MCFBGs represent a more ideal solution for robust devices as the microchannel will not degrade the structure strength. The two MCFBGs were spectrally charaterised for their RI and temperature responses and both gratings exhibited unique thermal and RI sensitivities, which may be utilised for implementation of bio-chemical sensors with capability to eliminate temperature crosssensitivity.

In-fiber polymer–glass hybrid waveguide Bragg grating

A 1.2 µm (height) × 125 µm (depth) × 500 µm (length) microslot along a fiber Bragg grating was engraved across the optical fiber by femtosecond laser patterning and chemical etching. By filling epoxy in the slot and subsequent UV curing, a hybrid waveguide grating structure with a polymer core and glass cladding was fabricated. The obtained device is highly thermally responsive with linear coefficient of 211 pm/°C.

Refractometer based on a liquid core FBG device

A 1.2X500µm slot was engraved across a fiber Bragg grating (FBG) using femtosecond laser patterning and chemical etching. liquid core FBGs were constructed and their sensitivity to refractive index of up to 10-6/pm was measured.

Microstructures made in optical fiber with femtosecond laser

Different types of microstructures including microchannels and microslots were made in optical fibers using femtosecond laser inscription and chemical etching. Integrated with UV-inscribed fiber Bragg gratings, these microstructures have miniature, robustness and high sensitivity features and have been used to implement novel devices for various sensing applications. The fiber microchannels were used to detect the refractive index change of liquid presenting sensitivities up to 7.4 nm/refractive index unit (RIU) and 166.7 dB/RIU based on wavelength and power detection, respectively. A microslot-in-fiber based liquid core waveguide as a refractometer has been proposed and the device was used to measure refractive index, and a sensitivity up to 945 nm/RIU (10-6/pm) was obtained. By filling epoxy in the microslot and subsequent UV light curing, a hybrid waveguide grating structure with polymer core and glass cladding was fabricated. The obtained device was highly thermal responsive, demonstrating a linear coefficient of 211 pm/°C.

Microchannels in conventional single-mode fibers

Microchannels are fabricated into conventional single-mode fibers by femtosecond laser processing and chemical etching. Fabrication limitations imposed by the fiber geometry are highlighted and resolved through a simple technique without compromising fabrication flexibility. A microfluidic fiber device consisting of a 4 μm wide microchannel that intersects the fiber core for refractive index sensing is further demonstrated. © 2006 Optical Society of America.

Strain-facilitated process for the lift-off of a Si layer of less than 20 nm thickness

We report a process for the lift-off of an ultrathin Si layer. By plasma hydrogenation of a molecular-beam-epitaxy-grown heterostructure of SiSb-doped-SiSi, ultrashallow cracking is controlled to occur at the depth of the Sb-doped layer. Prior to hydrogenation, an oxygen plasma treatment is used to induce the formation of a thin oxide layer on the surface of the heterostructure. Chemical etching of the surface oxide layer after hydrogenation further thins the thickness of the separated Si layer to be only 15 nm. Mechanisms of hydrogen trapping and strain-facilitated cracking are discussed. © 2005 American Institute of Physics.

Refractometer based on a liquid core FBG device

A 1.2X500μm slot was engraved across a fiber Bragg grating (FBG) using femtosecond laser patterning and chemical etching. liquid core FBGs were constructed and their sensitivity to refractive index of up to 10-6/pm was measured.

Fibre laser using a microchannel based loss tuning element for refractive index sensing

We have proposed and demonstrated a fibre laser system using a microchannel as a cavity loss tuning element for surrounding medium refractive index (SRI) sensing. A ~6µm width microchannel was created by femtosecond (fs) laser inscription assisted chemical etching in the cavity fibre, which offers a direct access to the external liquids. When the SRI changes, the microchannel behaves as a loss tuning element, hence modulating the laser cavity loss and output power. The results indicate that the presented laser sensing system has a linear response to the SRI with a sensitivity in the order of 10-5. Using higher pump power and more sensitive photodetector, the SRI sensitivity could be further enhanced.

A refractometer based on a micro-slot in a fiber Bragg grating formed by chemically assisted femtosecond laser processing

A liquid core waveguide as a refractometer is proposed. Microtunnels were created in standard optical fiber using tightly focused femtoscond laser inscription and chemical etching. A 1.2(h)×l25(d) ×500(1) μm micro-slot engraved along a fiber Bragg grating (FBG) was used to construct liquid core waveguide by filling the slot with index matching oils. The device was used to measure refractive index and sensitivity up to 10-6/pm was obtained. © 2007 Optical Society of America.

Refractive index and temperature sensitivity characteristics of a micro-slot fiber Bragg grating

Fabrication and characterization of a UVinscribed fiber Bragg grating (FBG) with a micro-slot liquid core is presented. Femtosecond (fs) laser patterning/chemical etching technique was employed to engrave a micro-slot with dimensions of 5.74 μm(h) × 125 μm(w) × 1388.72 μm(l) across the whole grating. The device has been evaluated for refractive index (RI) and temperature sensitivities and exhibited distinctive thermal response and RI sensitivity beyond the detection limit of reported fiber gratings. This structure has not just been RI sensitive, but also maintained the robustness comparing with the bare core FBGs and long-period gratings with the partial cladding etched off. © 2012 Optical Society of America.

Synergistic synthesis of quasi-monocrystal CdS nanoboxes with high-energy facets

Hollow nanostructures with a highly oriented lattice structure and active facets are promising for catalytic applications, while their preparation via traditional approaches contains multiple steps and is time and energy consuming. Here, we demonstrate a new one-step strategy involving two complementary reactions which promote each other; it is capable of producing unique hollow nanoparticles. Specifically, we apply synergic cooperation of cation exchange and chemical etching to attack PbS nanosized cubes (NCs) and produce CdS quasi-monocrystal nanoboxes (QMNBs) which possess the smallest dimensions reported so far, a metastable zinc-blende phase, a large specific surface area, and particularly high-energy {100} facets directly visualized by aberration-corrected scanning transmission electron microscopy. These properties in combination allow the nanoboxes to acquire exceptional photocatalytic activities. As an extension of the approach, we use the same strategy to prepare Co9S8 and Cu7.2S4 single-crystal hollow nanooctahedrons (SCHNOs) successfully. Hence, the synergic reaction synthesis strategy exhibits great potential in engineering unique nanostructures with superior properties.

Optical RI sensor based on an in-fiber bragg grating fabry-perot cavity embedded with a micro-channel

We report a linear response optical refractive index (RI) sensor, which is fabricated based on a micro-channel created within a Fabry Perot (F-P) cavity by chemical etching assisted by femtosecond laser inscription. The experimental results show the F-P resonance peak has a linear response with the RI of medium and the measuring sensitivity is proportion to the length of micro-channel. The sensor with 5 μm -long micro-channel exhibited an RI sensitivity of 1.15nm/RIU and this sensitivity increased to 9.08nm/RIU when widening the micro-channel to 35μm. Furthermore, such micro-channel FP sensors show a much broader RI sensing dynamic range (from 1.3 to 1.7) than other reported optical fiber sensors. © 2012 SPIE.

Chemical studies of plasma etchants used in integrated circuit manufacture

Plasma or "dry" etching is an essential process for the production of modern microelectronic circuits. However, despite intensive research, many aspects of the etch process are not fully understood. The results of studies of the plasma etching of Si and Si02 in fluorine-containing discharges, and the complementary technique of plasma polymerisation are presented in this thesis. Optical emission spectroscopy with argon actinometry was used as the principle plasma diagnostic. Statistical experimental design was used to model and compare Si and Si02 etch rates in CF4 and SF6 discharges as a function of flow, pressure and power. Etch mechanisms m both systems, including the potential reduction of Si etch rates in CF4 due to fluorocarbon polymer formation, are discussed. Si etch rates in CF4 /SF6 mixtures were successfully accounted for by the models produced. Si etch rates in CF4/C2F6 and CHF3 as a function of the addition of oxygen-containing additives (02, N20 and CO2) are shown to be consistent with a simple competition between F, 0 and CFx species for Si surface sites. For the range of conditions studied, Si02 etch rates were not dependent on F-atom concentration, but the presence of fluorine was essential in order to achieve significant etch rates. The influence of a wide range of electrode materials on the etch rate of Si and Si02 in CF4 and CF4 /02 plasmas was studied. It was found that the Si etch rate in a CF4 plasma was considerably enhanced, relative to an anodised aluminium electrode, in the presence of soda glass or sodium or potassium "doped" quartz. The effect was even more pronounced in a CF4 /02 discharge. In the latter system lead and copper electrodes also enhanced the Si etch rate. These results could not be accounted for by a corresponding rise in atomic fluorine concentration. Three possible etch enhancement mechanisms are discussed. Fluorocarbon polymer deposition was studied, both because of its relevance to etch mechanisms and its intrinsic interest, as a function of fluorocarbon source gas (CF4, C2F6, C3F8 and CHF3), process time, RF power and percentage hydrogen addition. Gas phase concentrations of F, H and CF2 were measured by optical emission spectroscopy, and the resultant polymer structure determined by X-ray photoelectron spectroscopy and infrared spectroscopy. Thermal and electrical properties were measured also. Hydrogen additions are shown to have a dominant role in determining deposition rate and polymer composition. A qualitative description of the polymer growth mechanism is presented which accounts for both changes in growth rate and structure, and leads to an empirical deposition rate model.

Etching and microstructure of engineering ceramics

Engineering ceramics are often difficult to prepare metallographically because of their hardness, wear resistance and chemical inertness. Two silicon carbides, a silicon nitride and a sialon, are prepared and etched using several different techniques. The most efficient methods are identified. © 1995.

Optical biochemical sensors based on long-period fibre gratings UV-inscribed in D-fibre with enhanced sensitivity by HF etching process

We report a new concept of biochemical sensor device based on long-period grating structures UV-inscribed in D-fiber. The surrounding-medium refractive index sensitivity of the devices has been enhanced significantly by a hydrofluoric acid etching process. The devices have been used to measure the sugar concentrations showing clearly an encoding relation between the chemical concentration and the grating spectral response, demonstrating their capability for potential biochemical sensing applications.