Control design and genetic algorithm optimization for electrostatic MEMS

This dissertation discusses structural-electrostatic modeling techniques, genetic algorithm based optimization and control design for electrostatic micro devices. First, an alternative modeling technique, the interpolated force model, for electrostatic micro devices is discussed. The method provides improved computational efficiency relative to a benchmark model, as well as improved accuracy for irregular electrode configurations relative to a common approximate model, the parallel plate approximation model. For the configuration most similar to two parallel plates, expected to be the best case scenario for the approximate model, both the parallel plate approximation model and the interpolated force model maintained less than 2.2% error in static deflection compared to the benchmark model. For the configuration expected to be the worst case scenario for the parallel plate approximation model, the interpolated force model maintained less than 2.9% error in static deflection while the parallel plate approximation model is incapable of handling the configuration. Second, genetic algorithm based optimization is shown to improve the design of an electrostatic micro sensor. The design space is enlarged from published design spaces to include the configuration of both sensing and actuation electrodes, material distribution, actuation voltage and other geometric dimensions. For a small population, the design was improved by approximately a factor of 6 over 15 generations to a fitness value of 3.2 fF. For a larger population seeded with the best configurations of the previous optimization, the design was improved by another 7% in 5 generations to a fitness value of 3.0 fF. Third, a learning control algorithm is presented that reduces the closing time of a radiofrequency microelectromechanical systems switch by minimizing bounce while maintaining robustness to fabrication variability. Electrostatic actuation of the plate causes pull-in with high impact velocities, which are difficult to control due to parameter variations from part to part. A single degree-of-freedom model was utilized to design a learning control algorithm that shapes the actuation voltage based on the open/closed state of the switch. Experiments on 3 test switches show that after 5-10 iterations, the learning algorithm lands the switch with an impact velocity not exceeding 0.2 m/s, eliminating bounce.

OPTIMAL SHAPE IN ELECTROMAGNETIC SCATTERING BY SMALL ASPHERICAL PARTICLES

We consider the question of optimal shapes, e.g., those causing minimal extinction among all shapes of equal volume. Guided by the isoperimetric property of a sphere, relevant in the geometrical optics limit of scattering by large particles, we examine an analogous question in the low frequency (electrostatics) approximation, seeking to disentangle electric and geometric contributions. To that end, we survey the literature on shape functionals and focus on ellipsoids, giving a simple proof of spherical optimality for the coated ellipsoidal particle. Monotonic increase with asphericity in the low frequency regime for orientation-averaged induced dipole moments and scattering cross-sections is also shown. Additional physical insight is obtained from the Rayleigh-Gans (transparent) limit and eccentricity expansions. We propose connecting low and high frequency regime in a single minimum principle valid for all size parameters, provided that reasonable size distributions of randomly oriented aspherical particles wash out the resonances for intermediate size parameters. This proposal is further supported by the sum rule for integrated extinction.

SCALABLE APPROXIMATION OF KERNEL FUZZY C-MEANS

Virtually every sector of business and industry that uses computing, including financial analysis, search engines, and electronic commerce, incorporate Big Data analysis into their business model. Sophisticated clustering algorithms are popular for deducing the nature of data by assigning labels to unlabeled data. We address two main challenges in Big Data. First, by definition, the volume of Big Data is too large to be loaded into a computer’s memory (this volume changes based on the computer used or available, but there is always a data set that is too large for any computer). Second, in real-time applications, the velocity of new incoming data prevents historical data from being stored and future data from being accessed. Therefore, we propose our Streaming Kernel Fuzzy c-Means (stKFCM) algorithm, which reduces both computational complexity and space complexity significantly. The proposed stKFCM only requires O(n2) memory where n is the (predetermined) size of a data subset (or data chunk) at each time step, which makes this algorithm truly scalable (as n can be chosen based on the available memory). Furthermore, only 2n2 elements of the full N × N (where N >> n) kernel matrix need to be calculated at each time-step, thus reducing both the computation time in producing the kernel elements and also the complexity of the FCM algorithm. Empirical results show that stKFCM, even with relatively very small n, can provide clustering performance as accurately as kernel fuzzy c-means run on the entire data set while achieving a significant speedup.