Implementation of porous silicon technology for a fluidic flow-through optical sensor for pH measurements

This work presents an innovative integration of sensing and nano-scaled fluidic actuation in the combination of pH sensitive optical dye immobilization with the electro-osmotic phenomena in polar solvents like water for flow-through pH measurements. These flow-through measurements are performed in a flow-through sensing device (FTSD) configuration that is designed and fabricated at MTU. A relatively novel and interesting material, through-wafer mesoporous silica substrates with pore diameters of 20 -200 nm and pore depths of 500 µm are fabricated and implemented for electro-osmotic pumping and flow-through fluorescence sensing for the first time. Performance characteristics of macroporous silicon (> 500 µm) implemented for electro-osmotic pumping include, a very large flow effciency of 19.8 µLmin-1V-1 cm-2 and maximum pressure effciency of 86.6 Pa/V in comparison to mesoporous silica membranes with 2.8 µLmin-1V-1cm-2 flow effciency and a 92 Pa/V pressure effciency. The electrical current (I) of the EOP system for 60 V applied voltage utilizing macroporous silicon membranes is 1.02 x 10-6A with a power consumption of 61.74 x 10-6 watts. Optical measurements on mesoporous silica are performed spectroscopically from 300 nm to 1000 nm using ellipsometry, which includes, angularly resolved transmission and angularly resolved reflection measurements that extend into the infrared regime. Refractive index (n) values for oxidized and un-oxidized mesoporous silicon sample at 1000 nm are found to be 1.36 and 1.66. Fluorescence results and characterization confirm the successful pH measurement from ratiometric techniques. The sensitivity measured for fluorescein in buffer solution is 0.51 a.u./pH compared to sensitivity of ~ 0.2 a.u./pH in the case of fluorescein in porous silica template. Porous silica membranes are efficient templates for immobilization of optical dyes and represent a promising method to increase sensitivity for small variations in chemical properties. The FTSD represents a device topology suitable for application to long term monitoring of lakes and reservoirs. Unique and important contributions from this work include fabrication of a through-wafer mesoporous silica membrane that has been thoroughly characterized optically using ellipsometry. Mesoporous silica membranes are tested as a porous media in an electro-osmotic pump for generating high pressure capacities due to the nanometer pore sizes of the porous media. Further, dye immobilized mesoporous silica membranes along with macroporous silicon substrates are implemented for continuous pH measurements using fluorescence changes in a flow-through sensing device configuration. This novel integration and demonstration is completely based on silicon and implemented for the first time and can lead to miniaturized flow-through sensing systems based on MEMS technologies.

Accelerometer based measurements of combustion in an automotive turbocharged diesel engine

The capability to detect combustion in a diesel engine has the potential of being an important control feature to meet increasingly stringent emission regulations, develop alternative combustion strategies, and use of biofuels. In this dissertation, block mounted accelerometers were investigated as potential feedback sensors for detecting combustion characteristics in a high-speed, high pressure common rail (HPCR), 1.9L diesel engine. Accelerometers were positioned in multiple placements and orientations on the engine, and engine testing was conducted under motored, single and pilot-main injection conditions. Engine tests were conducted at varying injection timings, engine loads, and engine speeds to observe the resulting time and frequency domain changes of the cylinder pressure and accelerometer signals. The frequency content of the cylinder pressure based signals and the accelerometer signals between 0.5 kHz and 6 kHz indicated a strong correlation with coherence values of nearly 1. The accelerometers were used to produce estimated combustion signals using the Frequency Response Functions (FRF) measured from the frequency domain characteristics of the cylinder pressure signals and the response of the accelerometers attached to the engine block. When compared to the actual combustion signals, the estimated combustion signals produced from the accelerometer response had Root Mean Square Errors (RMSE) between 7% and 25% of the actual signals peak value. Weighting the FRF’s from multiple test conditions along their frequency axis with the coherent output power reduced the median RMSE of the estimated combustion signals and the 95th percentile of RMSE produced from each test condition. The RMSE’s of the magnitude based combustion metrics including peak cylinder pressure, MPG, peak ROHR, and work estimated from the combustion signals produced by the accelerometer responses were between 15% and 50% of their actual value. The MPG measured from the estimated pressure gradient shared a direct relationship to the actual MPG. The location based combustion metrics such as the location of peak values and burn durations were capable of RMSE measurements as low as 0.9°. Overall, accelerometer based combustion sensing system was capable of detecting combustion and providing feedback regarding the in cylinder combustion process