Localized annealing of polysilicon microstructures by inductively heated ferromagnetic films

The monolithic integration of dissimilar microsystems is often limited by conflicts in thermal budget. One of the most prevalent examples is the fabrication of active micro-electromechanical systems (MEMS), as structural films utilized for surface micromachining such as polysilicon typically require processing at temperatures unsuitable for microelectronic circuitry. A localized annealing process could provide for the post-deposition heat treatment of integrated structures without compromising active devices. This dissertation presents a new microfabrication technology based on the inductive heating of ferromagnetic films patterned to define regions for heat treatment. Support is provided through theory, finite-element modeling, and experimentation, concluding with the demonstration of inductive annealing on polysilicon inertial sensing structures. Though still in its infancy, the results confirm the technology to be a viable option for integrated MEMS as well as any microsystem fabrication process requiring a thermal gradient.

Performance-Based Engineering Framework for Earthquake and Fire Following Earthquake

The objective for this thesis is to outline a Performance-Based Engineering (PBE) framework to address the multiple hazards of Earthquake (EQ) and subsequent Fire Following Earthquake (FFE). Currently, fire codes for the United States are largely empirical and prescriptive in nature. The reliance on prescriptive requirements makes quantifying sustained damage due to fire difficult. Additionally, the empirical standards have resulted from individual member or individual assembly furnace testing, which have been shown to differ greatly from full structural system behavior. The very nature of fire behavior (ignition, growth, suppression, and spread) is fundamentally difficult to quantify due to the inherent randomness present in each stage of fire development. The study of interactions between earthquake damage and fire behavior is also in its infancy with essentially no available empirical testing results. This thesis will present a literature review, a discussion, and critique of the state-of-the-art, and a summary of software currently being used to estimate loss due to EQ and FFE. A generalized PBE framework for EQ and subsequent FFE is presented along with a combined hazard probability to performance objective matrix and a table of variables necessary to fully implement the proposed framework. Future research requirements and summary are also provided with discussions of the difficulties inherent in adequately describing the multiple hazards of EQ and FFE.