Localized annealing of polysilicon microstructures by inductively heated ferromagnetic films

The monolithic integration of dissimilar microsystems is often limited by conflicts in thermal budget. One of the most prevalent examples is the fabrication of active micro-electromechanical systems (MEMS), as structural films utilized for surface micromachining such as polysilicon typically require processing at temperatures unsuitable for microelectronic circuitry. A localized annealing process could provide for the post-deposition heat treatment of integrated structures without compromising active devices. This dissertation presents a new microfabrication technology based on the inductive heating of ferromagnetic films patterned to define regions for heat treatment. Support is provided through theory, finite-element modeling, and experimentation, concluding with the demonstration of inductive annealing on polysilicon inertial sensing structures. Though still in its infancy, the results confirm the technology to be a viable option for integrated MEMS as well as any microsystem fabrication process requiring a thermal gradient.

Open top chambers and infrared lamps : a comparison of heating efficacy and CO₂/CH₄ dynamics in a Lake Superior coastal peatland

Experimental warming provides a method to determine how an ecosystem will respond to increased temperatures. Northern peatland ecosystems, sensitive to changing climates, provide an excellent setting for experimental warming. Storing great quantities of carbon, northern peatlands play a critical role in regulating global temperatures. Two of the most common methods of experimental warming include open top chambers (OTCs) and infrared (IR) lamps. These warming systems have been used in many ecosystems throughout the world, yet their efficacy to create a warmer environment is variable and has not been widely studied. To date, there has not been a direct, experimentally controlled comparison of OTCs and IR lamps. As a result, a factorial study was implemented to compare the warming efficacy of OTCs and IR lamps and to examine the resulting carbon dioxide (CO2) and methane (CH4) flux rates in a Lake Superior peatland. IR lamps warmed the ecosystem on average by 1-2 #°C, with the majority of warming occurring during nighttime hours. OTC's did not provide any long-term warming above control plots, which is contrary to similar OTC studies at high latitudes. By investigating diurnal heating patterns and micrometeorological variables, we were able to conclude that OTCs were not achieving strong daytime heating peaks and were often cooler than control plots during nighttime hours. Temperate day-length, cloudy and humid conditions, and latent heat loss were factors that inhibited OTC warming. There were no changes in CO2 flux between warming treatments in lawn plots. Gross ecosystem production was significantly greater in IR lamp-hummock plots, while ecosystem respiration was not affected. CH4 flux was not significantly affected by warming treatment. Minimal daytime heating differences, high ambient temperatures, decay resistant substrate, as well as other factors suppressed significant gas flux responses from warming treatments.

Integrated solar energy and absorption cooling model for HVAC (heating, ventilating, and air conditioning) applications in buildings

The demands in production and associate costs at power generation through non renewable resources are increasing at an alarming rate. Solar energy is one of the renewable resource that has the potential to minimize this increase. Utilization of solar energy have been concentrated mainly on heating application. The use of solar energy in cooling systems in building would benefit greatly achieving the goal of non-renewable energy minimization. The approaches of solar energy heating system research done by initiation such as University of Wisconsin at Madison and building heat flow model research conducted by Oklahoma State University can be used to develop and optimize solar cooling building system. The research uses two approaches to develop a Graphical User Interface (GUI) software for an integrated solar absorption cooling building model, which is capable of simulating and optimizing the absorption cooling system using solar energy as the main energy source to drive the cycle. The software was then put through a number of litmus test to verify its integrity. The litmus test was conducted on various building cooling system data sets of similar applications around the world. The output obtained from the software developed were identical with established experimental results from the data sets used. Software developed by other research are catered for advanced users. The software developed by this research is not only reliable in its code integrity but also through its integrated approach which is catered for new entry users. Hence, this dissertation aims to correctly model a complete building with the absorption cooling system in appropriate climate as a cost effective alternative to conventional vapor compression system.

Heat transfer in microwave heating

Heat transfer is considered as one of the most critical issues for design and implement of large-scale microwave heating systems, in which improvement of the microwave absorption of materials and suppression of uneven temperature distribution are the two main objectives. The present work focuses on the analysis of heat transfer in microwave heating for achieving highly efficient microwave assisted steelmaking through the investigations on the following aspects: (1) characterization of microwave dissipation using the derived equations, (2) quantification of magnetic loss, (3) determination of microwave absorption properties of materials, (4) modeling of microwave propagation, (5) simulation of heat transfer, and (6) improvement of microwave absorption and heating uniformity. Microwave heating is attributed to the heat generation in materials, which depends on the microwave dissipation. To theoretically characterize microwave heating, simplified equations for determining the transverse electromagnetic mode (TEM) power penetration depth, microwave field attenuation length, and half-power depth of microwaves in materials having both magnetic and dielectric responses were derived. It was followed by developing a simplified equation for quantifying magnetic loss in materials under microwave irradiation to demonstrate the importance of magnetic loss in microwave heating. The permittivity and permeability measurements of various materials, namely, hematite, magnetite concentrate, wüstite, and coal were performed. Microwave loss calculations for these materials were carried out. It is suggested that magnetic loss can play a major role in the heating of magnetic dielectrics. Microwave propagation in various media was predicted using the finite-difference time-domain method. For lossy magnetic dielectrics, the dissipation of microwaves in the medium is ascribed to the decay of both electric and magnetic fields. The heat transfer process in microwave heating of magnetite, which is a typical magnetic dielectric, was simulated by using an explicit finite-difference approach. It is demonstrated that the heat generation due to microwave irradiation dominates the initial temperature rise in the heating and the heat radiation heavily affects the temperature distribution, giving rise to a hot spot in the predicted temperature profile. Microwave heating at 915 MHz exhibits better heating homogeneity than that at 2450 MHz due to larger microwave penetration depth. To minimize/avoid temperature nonuniformity during microwave heating the optimization of object dimension should be considered. The calculated reflection loss over the temperature range of heating is found to be useful for obtaining a rapid optimization of absorber dimension, which increases microwave absorption and achieves relatively uniform heating. To further improve the heating effectiveness, a function for evaluating absorber impedance matching in microwave heating was proposed. It is found that the maximum absorption is associated with perfect impedance matching, which can be achieved by either selecting a reasonable sample dimension or modifying the microwave parameters of the sample.

Inductive-Capacitive Resonant Circuit Sensors for Structural Health and Environmental Monitoring

Inductive-capacitive (LC) resonant circuit sensors are low-cost, wireless, durable, simple to fabricate and battery-less. Consequently, they are well suited to sensing applications in harsh environments or in situations where large numbers of sensors are needed. They are also advantageous in applications where access to the sensor is limited or impossible or when sensors are needed on a disposable basis. Due to their many advantages, LC sensors have been used for sensing a variety of parameters including humidity, temperature, chemical concentrations, pH, stress/pressure, strain, food quality and even biological growth. However, current versions of the LC sensor technology are limited to sensing only one parameter. The purpose of this work is to develop new types of LC sensor systems that are simpler to fabricate (hence lower cost) or capable of monitoring multiple parameters simultaneously. One design presented in this work, referred to as the multi-element LC sensor, is able to measure multiple parameters simultaneously using a second capacitive element. Compared to conventional LC sensors, this design can sense multiple parameters with a higher detection range than two independent sensors while maintaining the same overall sensor footprint. In addition, the two-element sensor does not suffer from interference issues normally encountered while implementing two LC sensors in close proximity. Another design, the single-spiral inductive-capacitive sensor, utilizes the parasitic capacitance of a coil or spring structure to form a single layer LC resonant circuit. Unlike conventional LC sensors, this design is truly planar, thus simplifying its fabrication process and reducing sensor cost. Due to the simplicity of this sensor layout it will be easier and more cost-effective for embedding in common building or packaging materials during manufacturing processes, thereby adding functionality to current products (such as drywall sheets) while having a minor impact on overall unit cost. These modifications to the LC sensor design significantly improve the functionality and commercial feasibility of this technology, especially for applications where a large array of sensors or multiple sensing parameters are required.

COMPARISON OF NON-HEATING PALEOINTENSITY TECHNIQUES USING BASALTS FROM LEMPTÉGY VOLCANO, FRANCE AND SYNTHETIC MAGNETITE-BEARING SAMPLES

Data of the strength of Earth’s magnetic field (paleointensity) in the geological past are crucial for understanding the geodynamo. Conventional paleointensity determination methods require heating a sample to a high temperature in one or more steps. Consequently, many rocks are unsuitable for these methods due to a heating-induced experimental alteration. Alternative non-heating paleointensity methods are investigated to assess their effectiveness and reliability using both natural samples from Lemptégy Volcano, France, and synthetic samples. Paleointensity was measured from the natural and synthetic samples using the Pseudo-Thellier, ARM, REM, REMc, REM’, and Preisach methods. For the natural samples, only the Pseudo-Thellier method was able to produce a reasonable paleointensity estimate consistent with previous paleointensity data. The synthetic samples yielded more successful estimates using all the methods, with the Pseudo-Thellier and ARM methods producing the most accurate results. The Pseudo-Thellier method appears to be the best alternative to the heating-based paleointensity methods.

WRITING A COMMUNITY GUIDEBOOK FOR EVALUATING LOW-GRADE GEOTHERMAL ENERGY FROM FLOODED UNDERGROUND MINES FOR HEATING AND COOLING BUILDINGS

When underground mines close they often fill with water from ground and surface sources; each mine can contain millions to billions of gallons of water. This water, heated by the Earth’s geothermal energy, reaches temperatures ideal for heat pumps. The sheer scale of these flooded underground mines presents a unique opportunity for large scale geothermal heat pump setups which would not be as economically, socially, and environmentally feasible anywhere else. A literature search revealed approximately 30 instances of flooded underground mines being used to heat and cool buildings worldwide. With thousands of closed/abandoned underground mines in the U.S. and a million estimated globally, why hasn’t this opportunity been more widely adopted? This project has found perception and lack of knowledge about the feasibility to be key barriers. To address these issues, this project drafted a guidebook for former mining communities titled A Community Guide to Mine Water Geothermal Heating and Cooling.