Localized annealing of polysilicon microstructures by inductively heated ferromagnetic films

The monolithic integration of dissimilar microsystems is often limited by conflicts in thermal budget. One of the most prevalent examples is the fabrication of active micro-electromechanical systems (MEMS), as structural films utilized for surface micromachining such as polysilicon typically require processing at temperatures unsuitable for microelectronic circuitry. A localized annealing process could provide for the post-deposition heat treatment of integrated structures without compromising active devices. This dissertation presents a new microfabrication technology based on the inductive heating of ferromagnetic films patterned to define regions for heat treatment. Support is provided through theory, finite-element modeling, and experimentation, concluding with the demonstration of inductive annealing on polysilicon inertial sensing structures. Though still in its infancy, the results confirm the technology to be a viable option for integrated MEMS as well as any microsystem fabrication process requiring a thermal gradient.

EXTRACTION OF PICTORIAL ENERGY INFORMATION FROM CAMPUS UNMETERED BUILDINGS USING IMAGE PROCESSING TECHNIQUES

In recent years, advanced metering infrastructure (AMI) has been the main research focus due to the traditional power grid has been restricted to meet development requirements. There has been an ongoing effort to increase the number of AMI devices that provide real-time data readings to improve system observability. Deployed AMI across distribution secondary networks provides load and consumption information for individual households which can improve grid management. Significant upgrade costs associated with retrofitting existing meters with network-capable sensing can be made more economical by using image processing methods to extract usage information from images of the existing meters. This thesis presents a new solution that uses online data exchange of power consumption information to a cloud server without modifying the existing electromechanical analog meters. In this framework, application of a systematic approach to extract energy data from images replaces the manual reading process. One case study illustrates the digital imaging approach is compared to the averages determined by visual readings over a one-month period.