Control design and genetic algorithm optimization for electrostatic MEMS

This dissertation discusses structural-electrostatic modeling techniques, genetic algorithm based optimization and control design for electrostatic micro devices. First, an alternative modeling technique, the interpolated force model, for electrostatic micro devices is discussed. The method provides improved computational efficiency relative to a benchmark model, as well as improved accuracy for irregular electrode configurations relative to a common approximate model, the parallel plate approximation model. For the configuration most similar to two parallel plates, expected to be the best case scenario for the approximate model, both the parallel plate approximation model and the interpolated force model maintained less than 2.2% error in static deflection compared to the benchmark model. For the configuration expected to be the worst case scenario for the parallel plate approximation model, the interpolated force model maintained less than 2.9% error in static deflection while the parallel plate approximation model is incapable of handling the configuration. Second, genetic algorithm based optimization is shown to improve the design of an electrostatic micro sensor. The design space is enlarged from published design spaces to include the configuration of both sensing and actuation electrodes, material distribution, actuation voltage and other geometric dimensions. For a small population, the design was improved by approximately a factor of 6 over 15 generations to a fitness value of 3.2 fF. For a larger population seeded with the best configurations of the previous optimization, the design was improved by another 7% in 5 generations to a fitness value of 3.0 fF. Third, a learning control algorithm is presented that reduces the closing time of a radiofrequency microelectromechanical systems switch by minimizing bounce while maintaining robustness to fabrication variability. Electrostatic actuation of the plate causes pull-in with high impact velocities, which are difficult to control due to parameter variations from part to part. A single degree-of-freedom model was utilized to design a learning control algorithm that shapes the actuation voltage based on the open/closed state of the switch. Experiments on 3 test switches show that after 5-10 iterations, the learning algorithm lands the switch with an impact velocity not exceeding 0.2 m/s, eliminating bounce.

MILITARY VEHICLE OPTIMIZATION AND CONTROL

It is remarkable that there are no deployed military hybrid vehicles since battlefield fuel is approximately 100 times the cost of civilian fuel. In the commercial marketplace, where fuel prices are much lower, electric hybrid vehicles have become increasingly common due to their increased fuel efficiency and the associated operating cost benefit. An absence of military hybrid vehicles is not due to a lack of investment in research and development, but rather because applying hybrid vehicle architectures to a military application has unique challenges. These challenges include inconsistent duty cycles for propulsion requirements and the absence of methods to look at vehicle energy in a holistic sense. This dissertation provides a remedy to these challenges by presenting a method to quantify the benefits of a military hybrid vehicle by regarding that vehicle as a microgrid. This innovative concept allowed for the creation of an expandable multiple input numerical optimization method that was implemented for both real-time control and system design optimization. An example of each of these implementations was presented. Optimization in the loop using this new method was compared to a traditional closed loop control system and proved to be more fuel efficient. System design optimization using this method successfully illustrated battery size optimization by iterating through various electric duty cycles. By utilizing this new multiple input numerical optimization method, a holistic view of duty cycle synthesis, vehicle energy use, and vehicle design optimization can be achieved.